Aperture detection jig of spray plate for vapor deposition

Abstract

The utility model relates to the technical field of detection jigs, in particular to an aperture detection jig of a spray plate for vapor deposition, which comprises a shaft seat, the inner side of the shaft seat is fixedly connected with a rotating shaft, the outer wall of the rotating shaft is rotatably connected with a plurality of uniformly distributed rotating cylinders, the outer walls of the plurality of rotating cylinders are fixedly connected with connecting rods, and the connecting rods are fixedly connected with the rotating shafts. The other end of the connecting rod is provided with a mounting hole, the other end of the rotating rod extends to the outside of the connecting rod and is fixedly connected with a fixing block, and the inner diameters of the plurality of fixing rings are different, so that the fixing rings are firstly selected according to the specification and the size of the spraying plate to be detected, and the aperture of the spraying plates with different specifications can be freely switched and detected; the detection time is shortened, the angle of the spraying plate can be adjusted by rotating the rotating rod to drive the fixing block and the fixing ring to rotate, so that the spraying plate can be better detected, the device can be conveniently moved through the rollers at the bottom of the bottom plate, the position and orientation of the spraying plate can be adjusted by rotating the whole supporting column, and the device is convenient to use.

Description

Technical Field

[0001] This utility model relates to the field of testing fixture technology, specifically a pore size testing fixture for a spray plate used in vapor deposition. Background Technology

[0002] In semiconductor vapor deposition (CVD) process chambers, the spray plate is a core component. The spray plate has uniformly distributed small holes to allow for the even passage of process gases. After a period of use, gas reaction products will accumulate inside the holes, clogging them. Therefore, the spray plate needs to be cleaned periodically. During cleaning, it is crucial to prevent clogging and ensure the hole diameter does not increase. Therefore, the hole diameter must be checked after each cleaning of the spray plate.

[0003] The current testing fixtures are of a single specification. When testing the aperture of spray plates of different specifications, different testing fixtures need to be changed. The replacement operation is cumbersome, prolongs the testing time, and it is not convenient to adjust the angle and direction of the fixture, which reduces the testing efficiency. Utility Model Content

[0004] The purpose of this utility model is to provide a pore size detection fixture for spray plates used in vapor deposition, which has the characteristics of being able to freely switch between detecting the pore size of spray plates of different specifications, shortening the detection time, facilitating the adjustment of the angle, position and orientation of the spray plate, and being easy to use.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a fixture for detecting the aperture of a spray plate for vapor deposition, comprising a bearing seat, a rotating shaft fixedly connected to the inner side of the bearing seat, a plurality of evenly distributed rotating cylinders rotatably connected to the outer wall of the rotating shaft, a connecting rod fixedly connected to the outer wall of each of the plurality of rotating cylinders, a mounting hole provided at the other end of the connecting rod, a rotating rod rotatably connected to the inside of the mounting hole via a bearing, the other end of the rotating rod extending to the outside of the connecting rod and fixedly connected to a fixing block, and a fixing ring fixedly connected to the other end of the fixing block.

[0006] To facilitate the installation and fixing of the spray plate, as a preferred fixture for detecting the aperture of a spray plate for vapor deposition according to this utility model, the inner side of the fixing ring has two symmetrically arranged positioning grooves, the outer wall of the fixing ring has two symmetrically arranged fixing holes, and the outer periphery of the fixing ring is fixedly connected with a protruding ring.

[0007] In order to accommodate spray plates of different specifications and sizes, the preferred fixture for detecting the aperture of a spray plate for vapor deposition according to this utility model has multiple fixing rings with different inner diameters.

[0008] To facilitate equipment movement, in a preferred embodiment of the aperture detection fixture for a spray plate used in vapor deposition according to this utility model, a support column is fixedly connected to the bottom end of the bearing seat, a base plate is fixedly connected to the bottom end of the support column, and multiple rollers are installed on the bottom of the base plate.

[0009] In order to fix the rotating rod, as a preferred fixture for detecting the aperture of a spray plate for vapor deposition according to this utility model, the outer wall of the connecting rod is threaded with a fixing bolt extending into the mounting hole.

[0010] In order to limit the swing range of the connecting rod, as a preferred fixture for detecting the aperture of a spray plate for vapor deposition according to this utility model, the outer wall of the fixing block is fixedly connected to a handle, and the left and right sides of the bearing are fixedly connected to support plates.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0012] The inner diameters of the multiple retaining rings are different. Therefore, the retaining rings can be selected according to the specifications and size of the spray plate to be tested, which enables free switching of the aperture of different specifications of spray plates and shortens the testing time.

[0013] Rotating the rotating rod can drive the fixed block and fixed ring to rotate, thereby adjusting the angle of the spray plate for better inspection of the spray plate. The rollers at the bottom of the base plate facilitate the movement of the equipment, and the entire support column can be rotated to adjust the position and orientation of the spray plate, making it easy to use. Attached Figure Description

[0014] Figure 1 This is a structural diagram of the present utility model;

[0015] Figure 2 This is a top view of part of the structure of this utility model;

[0016] Figure 3 This utility model Figure 1 Enlarged structural diagram of part a in the middle.

[0017] In the diagram: 1. Shaft seat; 2. Shaft; 3. Rotary cylinder; 4. Connecting rod; 5. Mounting hole; 6. Bearing; 7. Rotary rod; 8. Fixing block; 9. Fixing ring; 10. Positioning groove; 11. Protruding ring; 12. Fixing hole; 13. Support column; 14. Base plate; 15. Roller; 16. Fixing bolt; 17. Handle; 18. Support plate. Detailed Implementation

[0018] Please see Figures 1 to 3A fixture for detecting the aperture of a spray plate for vapor deposition includes a bearing 1. A rotating shaft 2 is fixedly connected to the inner side of the bearing 1. Multiple evenly distributed rotating cylinders 3 are rotatably connected to the outer wall of the rotating shaft 2. A connecting rod 4 is fixedly connected to the outer wall of each of the multiple rotating cylinders 3. A mounting hole 5 is opened at the other end of the connecting rod 4. A rotating rod 7 is rotatably connected to the inside of the mounting hole 5 through a bearing 6. The other end of the rotating rod 7 extends to the outside of the connecting rod 4 and is fixedly connected to a fixing block 8. A fixing ring 9 is fixedly connected to the other end of the fixing block 8.

[0019] In this embodiment: In the initial state, multiple connecting rods 4 swing to the same side and are all perpendicular to the support column 13. The inner diameters of multiple fixing rings 9 are different. Therefore, the fixing ring 9 is selected according to the specifications and size of the spray plate to be tested, realizing the free switching of the aperture of different specifications of spray plates to be tested, shortening the testing time. Then, the connecting rod 4 of the fixing ring 9 swings to another side to a wider space to facilitate subsequent testing. Then, the spray plate is placed inside the fixing ring 9, and the convex ring 11 on the periphery limits the spray plate. It is quickly positioned by two positioning grooves 10, and then the spray plate is fixed to the outer wall of the fixing ring 9 by bolts and fixing holes 12, which avoids relative movement between the spray plate and the testing fixture, thereby improving the testing efficiency. By rotating the rotating rod 7, the fixing block 8 and the fixing ring 9 can be rotated, thereby adjusting the angle of the spray plate for better testing. The rollers 15 at the bottom of the base plate 14 facilitate the movement of the equipment, and the entire support column 13 can be rotated to adjust the position and orientation of the spray plate, making it convenient to use.

[0020] As a technical optimization of this utility model, two symmetrically arranged positioning grooves 10 are opened on the inner side of the fixing ring 9, two symmetrically arranged fixing holes 12 are opened through the outer wall of the fixing ring 9, and a protruding ring 11 is fixedly connected to the periphery of the outer wall of the fixing ring 9.

[0021] In this embodiment, the spray plate is quickly positioned by two positioning slots 10, and then fixed to the outer wall of the fixing ring 9 by bolts and fixing holes 12, which avoids relative movement between the spray plate and the testing fixture, thereby improving the efficiency of the testing work.

[0022] As a technical optimization of this utility model, the inner diameters of the multiple fixing rings 9 are all different.

[0023] In this embodiment, the inner diameters of the multiple fixing rings 9 are all different. The fixing rings 9 are selected according to the specifications and size of the spray plate to be tested.

[0024] As a technical optimization of this utility model, the bottom end of the bearing seat 1 is fixedly connected to a support column 13, the bottom end of the support column 13 is fixedly connected to a base plate 14, and a plurality of rollers 15 are installed on the bottom of the base plate 14.

[0025] In this embodiment: the support column 13 facilitates the support and fixation of the bearing seat 1, and the rollers 15 at the bottom of the base plate 14 facilitate the movement of the equipment. The entire support column 13 can be rotated to adjust the position and orientation of the spray plate.

[0026] As a technical optimization of this utility model, the outer wall of the connecting rod 4 is threaded with a fixing bolt 16 extending into the mounting hole 5.

[0027] In this embodiment, the outer wall of the connecting rod 4 is threaded with a fixing bolt 16 extending into the mounting hole 5. After the rotating rod 7 is rotated and adjusted, it is locked and fixed by the fixing bolt 16.

[0028] As a technical optimization of this utility model, a handle 17 is fixedly connected to the outer wall of the fixing block 8, and support plates 18 are fixedly connected to both the left and right sides of the bearing seat 1.

[0029] In this embodiment: a handle 17 is fixedly connected to the outer wall of the fixed block 8. The handle 17 facilitates the rotation of the rotating rod 7. The support plate 18 restricts the range of motion of the connecting rod 4 on the left and right sides, so that the connecting rod 4 can move to the maximum range to keep the connecting rod 4 horizontal.

[0030] Working principle: In the initial state, multiple connecting rods 4 swing to the same side and are all perpendicular to the support column 13. The inner diameters of multiple fixing rings 9 are different. Therefore, the fixing ring 9 is selected first according to the specifications and size of the spray plate to be tested, which realizes the free switching of the aperture of different specifications of spray plates and shortens the testing time. Then, the connecting rod 4 of the fixing ring 9 swings to the other side to a wider space to facilitate subsequent testing. Then, the spray plate is placed inside the fixing ring 9. The convex ring 11 on the periphery limits the spray plate. It is quickly positioned by two positioning grooves 10. Then, the spray plate is fixed to the outer wall of the fixing ring 9 by bolts and fixing holes 12, which prevents the spray plate from moving relative to the testing fixture, thereby improving the testing efficiency. By rotating the rotating rod 7, the fixing block 8 and the fixing ring 9 can be rotated to adjust the angle of the spray plate for better testing. The rollers 15 at the bottom of the base plate 14 facilitate the movement of the equipment and can rotate the entire support column 13 to adjust the position and orientation of the spray plate, making it easy to use.

[0031] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A fixture for detecting the aperture of a spray plate used in vapor deposition, comprising a bearing (1), characterized in that: A rotating shaft (2) is fixedly connected to the inner side of the bearing seat (1). Multiple evenly distributed rotating cylinders (3) are rotatably connected to the outer wall of the rotating shaft (2). A connecting rod (4) is fixedly connected to the outer wall of each of the multiple rotating cylinders (3). An installation hole (5) is opened at the other end of the connecting rod (4). A rotating rod (7) is rotatably connected to the inside of the installation hole (5) through a bearing (6). The other end of the rotating rod (7) extends to the outside of the connecting rod (4) and is fixedly connected to a fixing block (8). A fixing ring (9) is fixedly connected to the other end of the fixing block (8).

2. The aperture detection fixture for a spray plate used in vapor deposition according to claim 1, characterized in that: The inner side of the fixing ring (9) has two symmetrically arranged positioning grooves (10), the outer wall of the fixing ring (9) has two symmetrically arranged fixing holes (12), and the periphery of the outer wall of the fixing ring (9) is fixedly connected with a protruding ring (11).

3. The aperture detection fixture for a spray plate used in vapor deposition according to claim 1, characterized in that: The inner diameters of the various fixed rings (9) are all different.

4. The aperture detection fixture for a spray plate used in vapor deposition according to claim 1, characterized in that: The bottom end of the bearing seat (1) is fixedly connected to a support column (13), the bottom end of the support column (13) is fixedly connected to a base plate (14), and a plurality of rollers (15) are installed on the bottom of the base plate (14).

5. The aperture detection fixture for a spray plate used in vapor deposition according to claim 1, characterized in that: The outer wall of the connecting rod (4) is threaded with a fixing bolt (16) that extends into the mounting hole (5).

6. The aperture detection fixture for a spray plate used in vapor deposition according to claim 1, characterized in that: A handle (17) is fixedly connected to the outer wall of the fixing block (8), and support plates (18) are fixedly connected to both the left and right sides of the bearing seat (1).

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