Elemental analysis device based on multiple dispersion

By adopting multiple dispersion light path folding and light transmission unit switching in the ICP-OES spectrometer, the problems of large spectrometer size and poor imaging quality are solved, and miniaturization and high-sensitivity detection effects are achieved.

CN223485843UActive Publication Date: 2025-10-28SHANDONG NON METALLIC MATERIAL RESEARCH INSTITUTE
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Patent Information

Application Number
CN202422878819.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-11-25
Publication Date
2025-10-28
Estimated Expiration
2034-11-25

AI Technical Summary

Technical Problem

Existing ICP-OES spectrometers are large in size and have limited usage scenarios. In addition, the prism double-dispersion cross-dispersion optical system leads to poor imaging quality and reduced light energy.

Method used

An element analysis device based on multiple dispersion is adopted, and the medium-step grating and reflective prism are used to fold the light path. Combined with the optical transmission unit and the optical attenuation module, rapid switching of radial and axial light and improved sensitivity are achieved.

Benefits of technology

It achieves the miniaturization of the spectrometer, improves the imaging quality and light energy utilization, enhances the detection sensitivity and adaptability, and is suitable for the analysis of a variety of complex samples.

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Abstract

The utility model relates to an ICP (Inductively Coupled Plasma) technology, in particular to an element analysis device based on multiple dispersion. The multi-dispersion-based elemental analysis device comprises a torch tube and a spectrograph. The torch tube is used for generating flame, namely generating measuring light. The spectrograph comprises an entrance slit, a first light dispersion device and a detector, and the measuring light generated by the torch tube is dispersed on the first light dispersion device. The second light dispersion device is provided with an incident plane and a reflecting plane, and dispersion light of the measuring light on the first light dispersion device enters through the incident plane, penetrates through the second light dispersion device, is reflected by the reflecting plane and penetrates through the second light dispersion device again; the dispersion light is dispersed when passing through the second light dispersion device, and the included angle between the dispersion direction and the dispersion direction on the first light dispersion device is an acute angle or a right angle. The utility model has the advantages of small volume and the like.
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Description

Technical Field

[0001] This utility model relates to ICP technology, and in particular to an elemental analysis device based on multiple dispersion. Background Technology

[0002] ICP-OES (Inductively Coupled Plasma Optical Emission Spectrometry) is a fundamental technology suitable for the quantitative analysis of metallic and some non-metallic elements in various conventional samples. ICP-OES employs a stable and classic echelle grating two-dimensional spectroscopic system, overcoming the drawbacks of traditional scanning grating spectrometers, such as cumbersome image acquisition and long testing time, achieving advantages such as no adjustment required, compact structure, and full-spectrum acquisition.

[0003] While research on echelle grating spectrometers has focused primarily on their high resolution, it has also led to drawbacks such as large instrument size and limited application scenarios. Therefore, the development of smaller echelle grating spectrometers has become a key research direction.

[0004] The currently used prism-based double-dispersion cross-dispersion optical system works as follows: the incident light first undergoes a first dispersion by the prism, then is split by an echelle grating, and finally undergoes a second dispersion by the prism. This structure can achieve significant order separation, but it also introduces other problems, such as:

[0005] 1. The angle at which light is incident on the echelle grating is a function of wavelength, which is not conducive to controlling the imaging quality across the entire spectrum. The deflection angle of the echelle grating is different for each wavelength, which brings great inconvenience to the subsequent spectral reconstruction work. Moreover, the system has many reflective surfaces, which will reduce the light energy.

[0006] 2. Due to the limitations of the dispersive element position, although the system can be easily assembled and adjusted, the size of the spectrometer is not fully utilized, resulting in wasted space. Summary of the Invention

[0007] To address the problems of existing technologies, this utility model provides an elemental analysis device based on multiple dispersion.

[0008] The objective of this utility model is achieved through the following technical solution:

[0009] The elemental analysis apparatus based on multiple dispersion includes a torch and a spectrometer. The torch is used to generate a flame, i.e., to generate the measurement light.

[0010] The spectrometer includes:

[0011] An entrance slit, a first optical dispersive device, and a detector, wherein the measurement light generated by the torch is dispersed on the first optical dispersive device.

[0012] The second optical dispersion device has an incident surface and a reflecting surface. The dispersed light of the measuring light on the first optical dispersion device enters through the incident surface and passes through the second optical dispersion device, where it is reflected by the reflecting surface and then passes through the second optical dispersion device again. The dispersed light is dispersed when passing through the second optical dispersion device, and the angle between the dispersion direction and the dispersion direction on the first optical dispersion device is an acute angle or a right angle.

[0013] To further reduce structural complexity and cost, the second optical dispersion device is a prism, the reflecting surface of which has a reflective film layer.

[0014] Furthermore, the first optical dispersion device is an echelle grating.

[0015] To further fold the optical path to reduce the size of the spectrometer, the spectrometer further includes a first reflecting mirror and a second reflecting mirror, wherein: the first reflecting mirror is used to make the measurement light incident from the entrance slit parallel after passing through the first reflecting mirror, and the parallel light is incident on the first optical dispersive device; the second reflecting mirror is used to converge the dispersive light emitted from the second optical dispersive device onto the detector.

[0016] To achieve bidirectional (i.e., radial and axial partial light of the flame) observation, the elemental analysis device based on multiple dispersion further includes a light transmission unit, which includes: a first optical channel in which a third mirror is disposed; a second optical channel in which a fourth mirror is disposed; and the second optical channel intersecting with the first optical channel.

[0017] The optical transmission unit further includes a fifth reflecting mirror and a first driving module. Driven by the first driving module, the fifth reflecting mirror, in a first state, utilizes the sequential reflections of the fourth reflecting mirror and the fifth reflecting mirror within the second optical channel. The radial portion of the flame's light then passes through the second and first optical channels before entering the optical transmission module, enabling radial observation. In a second state, utilizing the reflection of the third reflecting mirror, the axial portion of the flame's light passes through the first optical channel before entering the optical transmission module, enabling axial observation. Driven by the first driving module, the fifth reflecting mirror enables switching between radial and axial observation.

[0018] The optical transmission module has an outlet, from which light emitted passes through an entrance slit and enters the spectrometer.

[0019] To improve detection sensitivity, the optical transmission unit further includes an optical attenuation module and a second driving module. The optical attenuation module is driven by the second driving module and is positioned in the second optical channel as needed. The optical attenuation module includes multiple optical attenuators with different attenuation rates.

[0020] To enable rapid switching between radial and axial observation, further, in the first state, the fifth reflector is located at the intersection of the first and second optical channels, blocking the passage of the axial portion of the light; in the second state, the fifth reflector is removed from the second optical channel.

[0021] To further enhance the received light intensity, the optical transmission module includes multiple concave mirrors, and the light in the first optical channel passes through the outlet after being reflected by the multiple concave mirrors.

[0022] In addition to the above, the elemental analysis device based on multiple dispersion described in this utility model can also be configured with other structures that can be achieved by existing technology, as needed. Any structures or devices not detailed in the description of the torch, spectrometer, and optical transmission unit will be implemented using existing technological structures or devices.

[0023] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0024] Small size: By using optical components such as the first optical dispersion device (such as the echelle grating) and the second optical dispersion device (such as the reflective prism) to achieve multiple reflections in the main optical path direction, the internal space of the spectrometer is fully utilized, and the size of the spectrometer is reduced without reducing the imaging quality and spectral resolution, thus achieving miniaturization of the entire device.

[0025] Simple structure and good performance: By using the fifth reflector and the first driving module, the fifth reflector is positioned in the first optical channel as needed, thereby realizing the switching between the radial and axial light of the flame. The fifth reflector and its driving module have a simple structure and good reliability.

[0026] By setting up an optical attenuation module on the first optical channel, high sensitivity, low limit of failure, and reduced matrix effect are achieved based on bidirectional observation, making it suitable for a variety of complex samples of arbitrary concentration. Attached Figure Description

[0027] Figure 1. Schematic diagram of the spectrometer in the elemental analysis device based on multiple dispersion of this invention;

[0028] Figure 2. Schematic diagram of the structure of the second optical dispersion device in the elemental analysis device based on multiple dispersion of this invention;

[0029] Figure 3. Schematic diagram of the optical transmission unit in the elemental analysis device based on multiple dispersion of this invention;

[0030] Among them, 11 is the torch tube, 21 is the third reflector, 22 is the fourth reflector, 23 is the fifth reflector, 31 is the first driving module, 32 is the second driving module, 41 is the optical attenuation module, 51 is the optical transmission module, 61 is the detector, 71 is the entrance slit, 72 is the first reflector, 73 is the first optical dispersion device, 74 is the second optical dispersion device, 75 is the second reflector, 741 is the entrance surface, and 742 is the reflecting surface. Detailed Implementation

[0031] Figure 1-3 The following description illustrates optional embodiments of the present invention to teach those skilled in the art how to implement and reproduce it. Some conventional aspects have been simplified or omitted to explain the technical solution of the present invention. Those skilled in the art should understand that variations or substitutions derived from these embodiments will be within the scope of the present invention. Those skilled in the art should understand that the following features can be combined in various ways to form multiple variations of the present invention. Therefore, the present invention is not limited to the following optional embodiments, but is defined only by the claims and their equivalents.

[0032] In this invention, the optical channel is a channel for beam transmission, and this channel may not necessarily be formed inside a pipe.

[0033] Example 1

[0034] The elemental analysis device based on multiple dispersion according to this embodiment of the present invention includes a torch tube 11 and a spectrometer:

[0035] The torch tube 11 is used to generate a flame, that is, to generate measuring light;

[0036] The spectrometer, as shown in Figure 1, includes:

[0037] The incident slit 71, the first optical dispersive device 73, and the detector 61, wherein the measurement light generated by the torch 11 is dispersed on the first optical dispersive device 73;

[0038] As shown in Figure 2, the second optical dispersive device 74 has an incident surface 741 and a reflecting surface 742. The dispersive light of the measuring light on the first optical dispersive device 73 enters and passes through the second optical dispersive device 74 after passing through the incident surface 741, and is reflected by the reflecting surface 742, and then passes through the second optical dispersive device 74 again. The dispersive light is dispersed when passing through the second optical dispersive device 74, and the angle between the dispersion direction and the dispersion direction on the first optical dispersive device 73 is an acute angle or a right angle.

[0039] To reduce structural complexity and cost, the second optical dispersion device 74 is further defined as a prism, the reflecting surface 742 of which has a reflective film layer.

[0040] The first optical dispersion device 73 may be an echelle grating.

[0041] To further fold the optical path and reduce the size of the spectrometer, the spectrometer further includes a first reflecting mirror 72 and a second reflecting mirror 75, wherein:

[0042] The first reflector 72, the measurement light incident from the entrance slit 71 becomes parallel light after passing through the first reflector 72, and the parallel light is incident on the first light dispersive device 73;

[0043] The second reflector 75 focuses the dispersed light emitted from the second optical dispersive device 74 onto the detector 61.

[0044] To achieve bidirectional (i.e., radial and axial partial light from the flame) observation, the elemental analysis device based on multiple dispersion further includes a light transmission unit, as shown in Figure 3. The light transmission unit includes:

[0045] A first optical channel, wherein a third reflecting mirror 21 is disposed in the first optical channel;

[0046] A second optical channel, wherein a fourth reflecting mirror 22 is provided;

[0047] The second optical channel intersects with the first optical channel;

[0048] The optical transmission unit further includes a fifth reflector 23 and a first driving module 31. Driven by the first driving module 31, the fifth reflector 23, in its first state, utilizes the sequential reflections of the fourth reflector 22 and the fifth reflector 23 within the second optical channel. The radial portion of the flame's light then passes through the second and first optical channels before entering the optical transmission module 51, enabling radial observation. In its second state, the axial portion of the flame's light, reflected by the third reflector 21, passes through the first optical channel before entering the optical transmission module 51, enabling axial observation. Driven by the first driving module 31, the fifth reflector 23 achieves the switching between radial and axial observation.

[0049] The optical transmission module 51 has an outlet, from which light emitted passes through the entrance slit 71 and enters the spectrometer.

[0050] To further improve detection sensitivity, the optical transmission unit also includes:

[0051] The optical attenuation module 41 and the second driving module 32 are provided. The optical attenuation module 41 is located in the second optical channel as needed under the drive of the second driving module 32. The optical attenuation module 41 includes multiple optical attenuators with different attenuation rates.

[0052] To enable rapid switching between radial and axial observation, further, in the first state, the fifth reflector 23 is located at the intersection of the first and second optical channels, blocking the passage of the axial portion of the light; in the second state, the fifth reflector 23 is removed from the second optical channel.

[0053] To further enhance the received light intensity, the optical transmission module 51 includes multiple concave mirrors, and the light in the first optical channel passes through the outlet after being reflected by the multiple concave mirrors.

[0054] Example 2:

[0055] Application examples of the elemental analysis device based on multiple dispersion according to embodiments of the present invention.

[0056] In this application example, as shown in Figure 1, in the spectrometer, the measuring light passes sequentially through the entrance slit 71, the first reflecting mirror 72, the first optical dispersive device 73 (using an echelle grating), the second optical dispersive device 74 (a prism), and the second reflecting mirror 75 before converging on the detector 61.

[0057] As shown in Figure 2, the second optical dispersive device 74 has an incident surface 741 and a reflecting surface 742. The dispersed light of the measuring light on the first optical dispersive device 73 enters through the incident surface 741 and passes through the second optical dispersive device 74, and is reflected by the reflecting surface 742, and then passes through the second optical dispersive device 74 again. The dispersed light is dispersed when passing through the second optical dispersive device 74, and the angle between the dispersion direction and the dispersion direction on the first optical dispersive device 73 is an acute angle or a right angle.

[0058] As shown in Figure 3, in the optical transmission unit, a third reflector 21 is set in the first optical channel to deflect the axial portion of the flame light by 90 degrees, and a fourth reflector 22 is set in the second optical channel to deflect the radial portion of the flame light by 90 degrees. The fifth reflector 23 rotates under the drive of the first drive module 31 (using the first motor) and is positioned at the intersection of the first and second optical channels as needed, so that the radial portion of the light in the second optical channel is deflected by 90 degrees and enters the first optical channel. At the same time, the fifth reflector 23 blocks the passage of the axial portion of the light. Two optical attenuators are set on the rotating shaft of the second drive module 32 (using the second motor), so that attenuators with different light attenuation rates (ten times attenuation and one hundred times attenuation) are positioned in the first optical channel as needed and downstream of the fifth reflector 23.

[0059] Inside the optical transmission module 51, two concave mirrors are arranged opposite each other, and an entrance slit 71 is provided at the exit. This allows the axial or radial portion of the light entering the optical transmission module 51 to pass through the entrance slit 71 after being reflected and converged by the two concave mirrors.

[0060] The operation mode of the elemental analysis device based on multiple dispersion in this embodiment is as follows:

[0061] When radial observation is required, as shown in Figure 3, the fifth reflector 23 enters the first optical channel under the drive of the first drive module 31; the radial portion of the flame light enters the light transmission module 51 after being reflected by the fourth reflector 22 and the fifth reflector 23 in sequence, that is, it passes through the second optical channel and the first optical channel in sequence.

[0062] Within the optical transmission module 51, the radial portion of the light is reflected sequentially by two concave mirrors, passes through the entrance slit 71, and enters the spectrometer.

[0063] When axial observation is required, the fifth reflector 23 leaves the first optical channel under the drive of the second drive module 32; the radial portion of the flame light passes through the fourth reflector 22 in sequence and does not enter the light transmission module 51, while the axial portion of the light enters the light transmission module 51 after being reflected by the third reflector 21.

[0064] Within the optical transmission module 51, the radial portion of the light is reflected sequentially by two concave mirrors, passes through the entrance slit 71, and enters the spectrometer.

[0065] Inside the spectrometer, the measuring light (radial or axial portion) passes through the entrance slit 71, is reflected by the first reflecting mirror 72 to become parallel light, is then reflected by the first optical dispersive device 73 and dispersed in a first direction, then enters through the entrance surface 741 of the second optical dispersive device 74, is then reflected by the reflecting surface 742, and passes through the second optical dispersive device 74 again; the dispersed light undergoes dispersion in a second direction when passing through the second optical dispersive device 74, that is, the dispersion direction of the measuring light on the first optical dispersive device 73 and the second optical dispersive device 74 is perpendicular; the dispersed light emitted from the second optical dispersive device 74 is reflected by the second reflecting mirror 75 and converges on the detector 61.

[0066] In the aforementioned radial and axial observations, the output signal of the detector 61 drives the second driving module 32, which in turn drives attenuators with different light attenuation rates to be placed in the first optical channel, thus adapting to the detection of elements with different concentrations.

Claims

1. An elemental analysis apparatus based on multiple dispersion, comprising a torch (11) and a spectrometer, said spectrometer comprising an entrance slit (71), a first optical dispersive device (73), and a detector (61), wherein the measurement light generated by the torch (11) is dispersed on the first optical dispersive device (73), characterized in that, The spectrometer also includes: The second optical dispersion device (74) has an incident surface (741) and a reflecting surface (742). The dispersed light of the measuring light on the first optical dispersion device (73) enters through the incident surface (741) and passes through the second optical dispersion device (74), and is reflected by the reflecting surface (742) and passes through the second optical dispersion device (74) again. The dispersed light is dispersed when passing through the second optical dispersion device (74), and the angle between the dispersion direction and the dispersion direction on the first optical dispersion device (73) is an acute angle or a right angle.

2. The elemental analysis apparatus based on multiple dispersion according to claim 1, characterized in that, The second light dispersive device (74) is a prism, and the reflecting surface (742) of the prism has a reflective film layer.

3. The elemental analysis apparatus based on multiple dispersion according to claim 1, characterized in that, The first optical dispersion device (73) is an echelle grating.

4. The elemental analysis apparatus based on multiple dispersion according to claim 1, characterized in that, The spectrometer also includes a first reflecting mirror (72) and a second reflecting mirror (75), wherein: The first reflector (72) is used to make the measurement light incident from the entrance slit (71) parallel light after passing through the first reflector (72), and the parallel light is incident on the first light dispersive device (73). The second reflector (75) focuses the dispersed light emitted from the second light dispersive device (74) onto the detector (61).

5. The elemental analysis apparatus based on multiple dispersion according to claim 1, characterized in that, The elemental analysis device based on multiple dispersion further includes an optical transmission unit disposed upstream of the spectrometer, the optical transmission unit comprising: A first optical channel, in which a third reflecting mirror (21) is disposed; The second optical channel, in which a fourth reflecting mirror (22) is provided; The second optical channel intersects with the first optical channel; The optical transmission unit further includes a fifth reflector (23) and a first driving module (31). Under the drive of the first driving module (31), when the fifth reflector (23) is in the first state, it uses the sequential reflection of the fourth reflector (22) and the fifth reflector (23) in the second optical channel to make the radial portion of the measurement light pass through the second optical channel and the first optical channel in sequence before entering the optical transmission module (51). When it is in the second state, it uses the reflection of the third reflector (21) to make the axial portion of the measurement light pass through the first optical channel before entering the optical transmission module (51). The optical transmission module (51) has an outlet from which light emitted through the outlet passes through the entrance slit (71) and enters the spectrometer.

6. The elemental analysis apparatus based on multiple dispersion according to claim 5, characterized in that, The optical transmission unit further includes: The optical attenuation module (41) and the second driving module (32) are located in the second optical channel as needed, driven by the second driving module (32).

7. The elemental analysis apparatus based on multiple dispersion according to claim 5, characterized in that, In the first state, the fifth reflector (23) is located at the intersection of the first optical channel and the second optical channel, blocking the passage of the axial portion of the light; in the second state, the fifth reflector (23) is away from the second optical channel.

8. The elemental analysis apparatus based on multiple dispersion according to claim 5, characterized in that, The optical transmission module (51) includes multiple concave mirrors. Light in the first optical channel is reflected by the multiple concave mirrors and then passes through the outlet.