Signal generation circuit and controller

Abstract

The utility model relates to the field of vacuum pump control, in particular to a signal generation circuit and a controller, the signal generation circuit is applied to a vacuum pump, and the signal generation circuit comprises a signal generation module configured to respond to a control signal to generate an initial signal; and the hysteresis comparison module is connected with the signal generation module and is configured to generate an emergency stop signal based on a voltage comparison result of the voltage hysteresis interval and the initial signal. The voltage hysteresis interval set by the hysteresis comparison module covers the voltage of the initial signal generated when the signal generation module works normally, and avoids the voltage of the initial signal generated when the signal generation module works abnormally, so that the abnormal working state of the signal generation module is shielded through the hysteresis comparison module; and the anti-interference capability of the signal generation circuit is improved, so that the stability of the vacuum pump sudden stop control system is improved.

Description

Technical Field

[0001] This application relates to the field of vacuum pump control, and in particular to a signal generation circuit and controller. Background Technology

[0002] Vacuum has the characteristics of being devoid of matter, having low pressure, high conductivity, and stability, and is widely used in aerospace, electronics industry, scientific research, and vacuum metallurgy.

[0003] Vacuum pumps, as key equipment for achieving and maintaining specific vacuum environments, are widely used in the industrial production of photovoltaics, semiconductors, panels, and lithium batteries. To cope with unexpected and unforeseen situations during industrial production and ensure the emergency shutdown of vacuum pumps, an emergency shutdown control circuit is needed.

[0004] Emergency shutdown of the vacuum pump is achieved through an Emergency Stop Signal (EMS), which is obtained via a normally open contact switch of a relay. For example, when the emergency stop signal is triggered, the normally open contact of the relay opens; when the emergency stop signal is not triggered, the normally open contact of the relay closes. While this method ensures that the vacuum pump can be stopped when an emergency shutdown is required, the normally open contact of the relay is easily affected and may close incorrectly, causing erroneous shutdowns and impacting production schedules. Utility Model Content

[0005] The main objective of this application is to provide a signal generation circuit and controller, which at least improves the anti-interference capability of a vacuum pump emergency stop system, thereby enhancing the system's stability.

[0006] To achieve the above objectives, the first aspect of this application proposes a signal generation circuit for use in a vacuum pump, comprising: a signal generation module configured to generate an initial signal in response to a control signal; and a hysteresis comparison module connected to the signal generation module configured to generate an emergency stop signal based on a voltage comparison result between a voltage hysteresis interval and the initial signal.

[0007] In some embodiments, the initial signal includes a first level or a second level with different voltage values, and the signal generation module includes: a first power supply; a switching device, wherein a first terminal of the switching device is connected to the first power supply, and a second terminal of the switching device is connected to the hysteresis comparison module; wherein, when the switching device is closed, the hysteresis comparison module acquires the first level, and when the switching device is open, the hysteresis comparison module acquires the second level; and a response device, connected to the control terminal of the switching device, configured to control the switching device to close or open in response to the control signal.

[0008] In some embodiments, the hysteresis comparison module includes: a comparator, the first input of which is connected to the signal generation module, and the output of which is used to output the emergency stop signal; a second power supply; and a hysteresis unit, the first end of which is connected to the second power supply, and the second end of which is connected to the second input of the comparator, configured to provide the voltage hysteresis range based on the second power supply.

[0009] In some embodiments, the hysteresis unit includes: a first resistor, a first end of which is connected to the second power supply, and a second end of which is connected to the output of the comparator; a second resistor, a first end of which is connected to the second power supply; a third resistor, a first end of which is connected to the second end of the second resistor, and the second end of which is grounded; and a fourth resistor, a first end of which is connected to the second end of the second resistor and is connected to the second input of the comparator, and the second end of which is connected to the second end of the first resistor.

[0010] In some embodiments, the minimum voltage value of the voltage hysteresis interval is 30% of the voltage value of the second power supply, and the maximum voltage value of the voltage hysteresis interval is 70% of the voltage value of the second power supply.

[0011] In some embodiments, the signal generation circuit further includes: a signal adjustment module, a first end of which is connected to the signal generation module, and a second end of which is connected to the hysteresis comparison module; the signal adjustment module is configured to adjust the current value in the connection line between the signal generation module and the hysteresis comparison module.

[0012] In some embodiments, the signal adjustment module is configured to adjust the current value to a preset value.

[0013] In some embodiments, the signal adjustment module includes: a fifth resistor, the first end of which is connected to the signal generation module, and the second end of which is connected to the hysteresis comparison module; and a sixth resistor, the first end of which is connected to the second end of the fifth resistor, and the second end of which is grounded.

[0014] In some embodiments, the signal adjustment module further includes a filter capacitor; the first end of the filter capacitor is connected to the second end of the fifth resistor, and the second end of the filter capacitor is grounded.

[0015] Secondly, this application also proposes a controller for vacuum pump control, the controller including the signal generation circuit provided in the first aspect above, the signal generation circuit being used to provide an emergency stop signal for emergency shutdown of the vacuum pump.

[0016] The signal generation circuit provided in this application covers the voltage value of the initial signal generated when the signal generation module is working normally by setting the voltage hysteresis interval of the hysteresis comparison module, and avoids the voltage value of the initial signal generated when the signal generation module is working abnormally. In this way, the hysteresis comparison module shields the abnormal working state of the signal generation module, improves the anti-interference capability of the signal generation circuit, and thus provides stability for the vacuum pump emergency stop control system.

[0017] In some embodiments, the current value between the signal generation module and the hysteresis comparison module is set to a small current value by the signal adjustment module to avoid current changes caused by system interference, and the smaller current value can reduce the ohmic loss of the signal generation circuit. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A simplified structural diagram of the signal generation circuit provided in an embodiment of this application;

[0020] Figure 2 This is a schematic diagram of the specific structure of the signal generation circuit provided in the embodiments of this application;

[0021] Figure 3 This is a schematic diagram of the specific structure of a signal generation circuit including a signal adjustment module, provided in an embodiment of this application. Detailed Implementation

[0022] As is known from the background technology, the emergency stop of a vacuum pump is achieved through an emergency stop signal, which is obtained through a normally open contact switch of a relay.

[0023] While this method can ensure that the vacuum pump stops when an emergency shutdown is required, the normally open contacts of the relay are easily affected and may close erroneously, causing incorrect shutdowns and affecting production progress.

[0024] Considering the importance of emergency stop signals, the emergency stop control circuit needs to be highly robust, ensuring both emergency shutdown and preventing accidental shutdown due to external interference signals.

[0025] In addition, in scenarios where multiple vacuum pumps are connected in parallel, the start-up and shutdown of adjacent vacuum pumps can have a significant impact on the power supply voltage, which may also cause voltage fluctuations in the emergency stop signal, resulting in erroneous shutdowns.

[0026] One embodiment of this application provides a signal generation circuit applied to a vacuum pump. The signal generation circuit includes: a signal generation module configured to generate an initial signal in response to a control signal; and a hysteresis comparison module connected to the signal generation module, configured to generate an emergency stop signal based on a voltage comparison result between the voltage hysteresis interval and the voltage of the initial signal.

[0027] The signal generation circuit provided in this embodiment is at least used to improve the anti-interference capability of the vacuum pump emergency stop system, so as to improve the stability of the system.

[0028] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0029] Furthermore, the use of terms such as "first" and "second" in this application is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. If the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed in this application.

[0030] refer to Figure 1 , Figure 1 This is a simplified structural diagram of the signal generation circuit provided in this embodiment. The signal generation circuit 100 provided in this embodiment is applied to vacuum pump control, and the signal generation circuit 100 includes a signal generation module 101 and a hysteresis comparison module 102.

[0031] The signal generation module 101 is configured to generate an initial signal in response to a control signal.

[0032] In one example, the signal generation module 101 includes the emergency stop switch and relay described above, and the generated initial signal is the emergency stop signal. Specifically, the emergency stop switch changes state in response to a control signal; for example, when the control signal is high, the emergency stop switch is activated, at which time the normally open contact of the relay is open, and the generated emergency stop signal is low, meaning that the signal generation module 101 does not generate an initial signal; when the control signal is low, the emergency stop switch is not activated, at which time the normally open contact of the relay is closed, and the generated emergency stop signal is high, meaning that the signal generation module 101 generates an initial signal.

[0033] Hysteresis comparison module 102 is connected to signal generation module 101. Hysteresis comparison module 102 is configured to generate an emergency stop signal based on the voltage comparison result between the voltage hysteresis interval and the initial signal.

[0034] In one example, if the signal generation module 101 includes the emergency stop switch and relay described above, assuming that the voltage of the initial signal generated when the emergency stop switch and relay are working normally is A, and the voltage of the initial signal generated when the emergency stop switch or relay is affected and closes, causing an erroneous shutdown, is B. By setting the voltage hysteresis interval of the hysteresis comparison module 102 to cover A but not B, the initial signal generated when the signal generation module 101 is working normally can generate an emergency stop signal through the hysteresis comparison module 102, while the initial signal generated when the signal generation module 101 is malfunctioning cannot generate an emergency stop signal through the hysteresis comparison module 102; that is, the hysteresis comparison module 102 shields the abnormal working state of the signal generation module 101, improving the anti-interference capability of the signal generation circuit 100.

[0035] Based on the above discussion, the signal generation circuit 100 provided in this embodiment covers the voltage value of the initial signal generated by the signal generation module 101 when it is working normally through the voltage hysteresis interval set by the hysteresis comparison module 102, and avoids the voltage value of the initial signal generated when the signal generation module 101 is working abnormally. Thus, the hysteresis comparison module 102 shields the abnormal working state of the signal generation module 101, improves the anti-interference capability of the signal generation circuit 100, and provides stability for the vacuum pump emergency stop control system.

[0036] refer to Figure 2 , Figure 2 This is a schematic diagram of the specific structure of the signal generation circuit provided in this embodiment.

[0037] In some embodiments, the initial signal includes a first level or a second level with different voltage values. One of the first level and the second level is high, and the other is low. In the subsequent description of this embodiment, the first level will be high and the second level will be low. It should be noted that this embodiment, which uses the first level as high and the second level as low as an example, does not constitute a limitation on this embodiment.

[0038] In some embodiments, the signal generation module 101 includes a first power supply 201, a switching device 202, and a response device 203.

[0039] The first terminal of the switching device 202 is connected to the first power supply 201, and the second terminal of the switching device 202 is connected to the hysteresis comparator module 102. When the switching device 202 is closed, the hysteresis comparator module 102 acquires a first level (high level); when the switching device 202 is open, the hysteresis comparator module 102 acquires a second level (low level). The response device 203 is connected to the control terminal of the switching device 202 and is configured to control the switching device 202 to close or open in response to a control signal.

[0040] When the switch 202 is closed, the first terminal of the switch 202 is electrically connected to the second terminal of the switch 202, which is equivalent to the hysteresis comparator module 102 being connected to the first power supply 201. At this time, the first level is high. When the switch 202 is open, the first terminal of the switch 202 is disconnected from the second terminal of the switch 202, which is equivalent to the input of the hysteresis comparator module 102 being unavailable. At this time, the second level is low.

[0041] In some embodiments, the switching device 202 includes a relay, and the response device 203 is connected to the control terminal of the relay. The response device 203 responds to the control signal and controls the conduction and cutoff of the electromagnet in the relay to control the relay armature, thereby adjusting the state of the switching device 202.

[0042] In some embodiments, whether the response device 203 responds to a control signal can be based on manual triggering. Specifically, the response device is configured as a control switch. When an operator presses the control switch, i.e., the response device 203 receives a control signal, it controls the switch device 202 to close; when the operator does not press the control switch, i.e., the response device 203 does not receive a control signal, it controls the switch device 202 to open.

[0043] In some embodiments, the first power source 201 is the power grid, and the output voltage of the first power source is obtained based on the converted power grid voltage.

[0044] In some embodiments, the output voltage of the first power supply is 24V.

[0045] In some embodiments, the hysteresis comparison module 102 includes a comparator, a second power supply, and a hysteresis unit.

[0046] The hysteresis unit is used to connect to the second power supply V3D3 and is configured to provide a voltage hysteresis range based on the second power supply V3D3. The first input terminal of the comparator is connected to the signal generation module 101, and the second input terminal is connected to the hysteresis unit. The comparator is configured to generate an emergency stop signal based on the comparison result between the voltage value of the initial signal and the voltage hysteresis range.

[0047] In some embodiments, the first input terminal (port 1) of the comparator is connected to the signal generation module 101, and the output terminal (port 3) is used to output an emergency stop signal. The hysteresis unit includes a first resistor R1, a second resistor R2, a third resistor R3, and a fourth resistor R4. Specifically, the first end of the first resistor R1 is connected to the second power supply V3D3, and the second end of the first resistor R1 is connected to the output terminal of the comparator; the first end of the second resistor R2 is connected to the second power supply V3D3; the first end of the third resistor R3 is connected to the second end of the second resistor R2, and the second end of the third resistor R3 is grounded; the first end of the fourth resistor R4 is connected to the second end of the second resistor R2 and is also connected to the second input terminal (port 2) of the comparator, and the second end of the fourth resistor R4 is connected to the second end of the first resistor R1.

[0048] It should be noted that, Figure 2 The specific circuit setup of the hysteresis unit shown in the circuit is a voltage hysteresis range setting method, which adjusts the range of the voltage hysteresis range by dividing the voltage of the second power supply V3D3 through the first resistor R1, the second resistor R2, the third resistor R3 and the fourth resistor R4.

[0049] In some embodiments, the minimum voltage of the voltage hysteresis interval is 30% of the voltage value of the second power supply V3D3, and the maximum voltage of the voltage hysteresis interval is 70% of the voltage value of the second power supply V3D3.

[0050] In one example, if the voltage of the second power supply V3D3 is 24V, the voltage hysteresis range is [7.2V~16.8V].

[0051] In some embodiments, the second power supply includes a low dropout linear regulator (LDO). The low dropout linear regulator improves the stability of the voltage value of the second power supply V3D3, thereby improving the stability of the voltage hysteresis range and ensuring the accuracy of the emergency stop signal generated by the signal generation circuit 100.

[0052] for Figure 2 The signal generation circuit 100 shown works as follows: the hysteresis unit in the hysteresis comparator module 102 sets a voltage hysteresis interval; the signal generation module 101 generates an initial signal; the two ends of the comparator in the hysteresis comparator module 102 are used to receive the initial signal (input voltage VP2 at the first input terminal of the comparator) and the voltage hysteresis interval (input voltage VP3 at the second input terminal of the comparator), respectively. By adapting the voltage value of the initial signal to the voltage hysteresis interval, the anti-interference capability of the signal generation circuit 100 is improved.

[0053] Specifically, when the response device 203 controls the switch device 202 to close in response to the control signal, the initial signal EMS_IN generated by the signal generation module 101 based on the first power supply 201 is at a high level. At this time, the voltage value of the initial signal EMS_IN is greater than the upper limit of the voltage hysteresis interval. Figure 2 The connection relationship between the positive and negative inputs of the comparator is reversed, and the emergency stop signal EMS_OUT output by the hysteresis comparator module 102 is low. In some embodiments, the connection relationship between the positive and negative inputs of the comparator can be swapped, and the emergency stop signal EMS_OUT output by the hysteresis comparator module 102 is high. When the response device 203 controls the switch device 202 to open in response to the control signal, the initial signal EMS_IN generated by the signal generation module 101 based on the first power supply 201 is low. At this time, the voltage value of the initial signal EMS_IN is less than the lower limit of the voltage hysteresis interval. Figure 2 The connection relationship between the positive and negative inputs of the comparator is fixed, and the emergency stop signal EMS_OUT output by the hysteresis comparator module 102 is high. In some embodiments, the connection relationship between the positive and negative inputs of the comparator can be swapped, and the emergency stop signal EMS_OUT output by the hysteresis comparator module 102 is low.

[0054] In some embodiments, the emergency stop signal EMS_OUT is input to the interrupt input pin of the microcontroller. The rising edge of EMS_OUT triggers an interrupt, and the interrupt application handles the related work of the emergency stop signal EMS_OUT.

[0055] refer to Figure 3 , Figure 3 This is a schematic diagram illustrating the specific structure of the signal generation circuit, including the signal adjustment module, provided in this embodiment. Compared to... Figure 2 The provided signal generation circuit, Figure 3 The circuit also involves protection for the signal generation circuit 100.

[0056] In some embodiments, the signal generation circuit 100 further includes a signal adjustment module 103, with a first end connected to the signal generation module 101 and a second end connected to the hysteresis comparison module 102; the signal adjustment module 103 is configured to adjust the current value in the connection line between the signal generation module 101 and the hysteresis comparison module 102.

[0057] In some embodiments, the signal adjustment module 103 is configured to adjust the current value to a preset value.

[0058] In some embodiments, the preset value can be any value from 0.5mA to 1.5mA. For example, 0.6mA, 0.7mA, 0.8mA, 0.9mA, 1.0mA, 1.1mA, 1.2mA, 1.3mA, or 1.4mA. By setting the current value between the signal generation module 101 and the hysteresis comparison module 102 to a small current value, current variations caused by system interference can be avoided, and a smaller current value can reduce the ohmic loss of the signal generation circuit 100.

[0059] In some embodiments, the signal adjustment module 103 includes a fifth resistor R5 and a sixth resistor R6. The first end of the fifth resistor R5 is connected to the signal generation module 101, and the second end of the fifth resistor R5 is connected to the hysteresis comparison module 102; the first end of the sixth resistor R6 is connected to the second end of the fifth resistor R5, and the second end of the sixth resistor R6 is grounded.

[0060] At this time, the port voltage (Voltage VP2 of Port 1) of the first input terminal of the comparator in the hysteresis comparator module 102 is the voltage divided by the initial signal EMS_IN based on the fifth resistor R5 and the sixth resistor R6.

[0061] In this scenario, the voltage at the first input terminal of the comparator (voltage VP2 at port 1) can be adjusted by the fifth resistor R5 and the sixth resistor R6, and the voltage at the second input terminal of the comparator (voltage VP3 at port 2) can be adjusted by the first resistor R1, the second resistor R2, the third resistor R3 and the fourth resistor R4.

[0062] In some embodiments, if the voltage value of the first power supply 201 and the voltage value of the second power supply V3D3 are 24V, the minimum value of the voltage hysteresis interval can be set to 10V, and the maximum value of the voltage hysteresis interval can be set to 19V.

[0063] In some embodiments, the signal adjustment module 103 further includes a filter capacitor C1. The first end of the filter capacitor C1 is connected to the second end of the fifth resistor R5, and the second end of the filter capacitor C1 is grounded. The filter capacitor C1 filters the port voltage (voltage VP2 at port 1) of the first input terminal of the comparator to improve the stability of the port voltage (voltage VP2 at port 1) of the first input terminal of the comparator, thereby preventing voltage fluctuation interference caused by fluctuations in the first power supply 201 or the accidental closing of the switching device 202.

[0064] The signal generation circuit 100 provided in this embodiment has a relatively simple overall structure. It uses a simple comparator and a hysteresis comparator composed of electronic components to stabilize the initial signal after interference, and then outputs an emergency stop signal. At this time, the emergency stop signal avoids the influence of voltage fluctuations and accidental switch contact, thereby improving the stability of the vacuum pump emergency stop control system at a lower cost.

[0065] In addition, since the signal processing in this embodiment only adds a comparator comparison process, the response speed is fast and it does not affect the emergency stop control of the vacuum pump.

[0066] In summary, the signal generation circuit 100 provided in this embodiment covers the voltage value of the initial signal generated by the signal generation module 101 during normal operation by setting the voltage hysteresis interval of the hysteresis comparison module 102, and avoids the voltage value of the initial signal generated when the signal generation module 101 is malfunctioning. Thus, the hysteresis comparison module 102 shields the abnormal working state of the signal generation module 101, improves the anti-interference capability of the signal generation circuit 100, and provides stability for the vacuum pump emergency stop control system.

[0067] It should be noted that, without conflict, the features disclosed in the signal generation circuit 100 provided in the above embodiments can be randomly combined to obtain new embodiments of the signal generation circuit 100.

[0068] This embodiment also provides a controller for vacuum pump control, which is used to improve the anti-interference capability of the vacuum pump emergency stop system, thereby improving the system stability.

[0069] The controller includes the signal generation circuit 100 provided in the above embodiments. The signal generation circuit 100 is used to provide an emergency stop signal for emergency shutdown of the vacuum pump.

[0070] Specifically, refer to Figure 2 When the response device 203 controls the switch device 202 to close in response to the control signal, the initial signal EMS_IN generated by the signal generation module 101 based on the first power supply 201 is at a high level. At this time, the voltage value of the initial signal EMS_IN is greater than the upper limit of the voltage hysteresis interval. Figure 2 The connection relationship between the positive and negative inputs of the comparator is reversed, and the emergency stop signal EMS_OUT output by the hysteresis comparator module 102 is low. In some embodiments, the connection relationship between the positive and negative inputs of the comparator can be swapped, and the emergency stop signal EMS_OUT output by the hysteresis comparator module 102 is high. When the response device 203 controls the switch device 202 to open in response to the control signal, the initial signal EMS_IN generated by the signal generation module 101 based on the first power supply 201 is low. At this time, the voltage value of the initial signal EMS_IN is less than the lower limit of the voltage hysteresis interval. Figure 2 The connection relationship between the positive and negative inputs of the comparator is fixed, and the emergency stop signal EMS_OUT output by the hysteresis comparator module 102 is high. In some embodiments, the connection relationship between the positive and negative inputs of the comparator can be swapped, and the emergency stop signal EMS_OUT output by the hysteresis comparator module 102 is low.

[0071] The emergency stop signal EMS_OUT is input to the microcontroller's interrupt input pin. The rising edge of EMS_OUT triggers an interrupt, and the interrupt application program handles the related work of the emergency stop signal EMS_OUT.

[0072] The controller provided in this embodiment includes a signal generation circuit 100. The signal generation circuit 100 covers the voltage value of the initial signal generated by the signal generation module 101 when it is working normally through the voltage hysteresis interval set by the hysteresis comparison module 102, and avoids the voltage value of the initial signal generated when the signal generation module 101 is working abnormally. In this way, the hysteresis comparison module 102 shields the abnormal working state of the signal generation module 101, improves the anti-interference capability of the signal generation circuit 100, and thus provides stability for the vacuum pump emergency stop control system.

[0073] Furthermore, the overall structure of the signal generation circuit 100 is relatively simple. It utilizes a simple comparator and a hysteresis comparator composed of electronic components to stabilize the initial signal before outputting an emergency stop signal, thus improving the stability of the vacuum pump emergency stop control system at a lower cost. Moreover, since the signal processing in this embodiment only adds a comparator comparison process, the response speed is fast and it does not affect the emergency stop control of the vacuum pump.

[0074] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the detailed descriptions of other embodiments above, which will not be repeated here.

[0075] The basic concepts have been described above. Obviously, for those skilled in the art, the detailed disclosure above is merely illustrative and does not constitute a limitation of this application. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this application. Such modifications, improvements, and corrections are suggested in this application, and therefore remain within the spirit and scope of the exemplary embodiments of this application.

[0076] The above provides a detailed description of a signal generation circuit and controller provided in the embodiments of this application. Specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A signal generation circuit, applied to a vacuum pump, characterized in that, include: The signal generation module is configured to generate an initial signal in response to a control signal; The hysteresis comparison module, connected to the signal generation module, is configured to generate an emergency stop signal based on the voltage comparison result between the voltage hysteresis interval and the initial signal.

2. The signal generation circuit as described in claim 1, characterized in that, The initial signal includes a first level or a second level with different voltage values, and the signal generation module includes: First power source; A switching device, wherein a first terminal of the switching device is connected to the first power supply, and a second terminal of the switching device is connected to the hysteresis comparison module; When the switching device is closed, the hysteresis comparison module acquires the first level; when the switching device is open, the hysteresis comparison module acquires the second level. A response device, connected to the control terminal of the switching device, is configured to control the switching device to close or open in response to the control signal.

3. The signal generation circuit as described in claim 1, characterized in that, The hysteresis comparison module includes: A comparator, the first input of which is connected to the signal generation module, and the output of which is used to output the emergency stop signal; Second power source; A hysteresis unit, wherein a first end of the hysteresis unit is connected to the second power supply and a second end of the hysteresis unit is connected to the second input of a comparator, is configured to provide the voltage hysteresis range based on the second power supply.

4. The signal generation circuit as described in claim 3, characterized in that, The hysteresis unit includes: A first resistor, the first end of which is connected to the second power supply, and the second end of which is connected to the output of the comparator; The second resistor has its first end connected to the second power supply. A third resistor, the first end of which is connected to the second end of the second resistor, and the second end of the third resistor is grounded; A fourth resistor, the first end of which is connected to the second end of the second resistor and to the second input terminal of the comparator, and the second end of the fourth resistor is connected to the second end of the first resistor.

5. The signal generation circuit as described in claim 4, characterized in that, The minimum voltage value of the voltage hysteresis interval is 30% of the voltage value of the second power supply, and the maximum voltage value of the voltage hysteresis interval is 70% of the voltage value of the second power supply.

6. The signal generation circuit as described in claim 1, characterized in that, Also includes: A signal adjustment module, wherein a first end of the signal adjustment module is connected to the signal generation module, and a second end of the signal adjustment module is connected to the hysteresis comparison module; The signal adjustment module is configured to adjust the current value in the connection line between the signal generation module and the hysteresis comparison module.

7. The signal generation circuit as described in claim 6, characterized in that, The signal adjustment module is configured to adjust the current value to a preset value.

8. The signal generation circuit as described in claim 6, characterized in that, The signal adjustment module includes: The fifth resistor has its first end connected to the signal generation module and its second end connected to the hysteresis comparison module. The sixth resistor has its first end connected to the second end of the fifth resistor, and its second end is grounded.

9. The signal generation circuit as described in claim 8, characterized in that, The signal adjustment module also includes a filter capacitor; The first end of the filter capacitor is connected to the second end of the fifth resistor, and the second end of the filter capacitor is grounded.

10. A controller for controlling a vacuum pump, characterized in that, The controller includes a signal generation circuit according to any one of claims 1 to 9, the signal generation circuit being used to provide an emergency stop signal for emergency shutdown of the vacuum pump.

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