External light source mechanism for vacuum coating equipment

Abstract

The utility model discloses an external light source mechanism for vacuum coating equipment, which comprises a horizontally arranged first mounting plate fixedly connected with the top of the vacuum coating equipment; a first through hole is formed in the first mounting plate; the bottom end of the second mounting plate is fixedly connected to the upper surface of the first mounting plate; the halogen lamp is mounted on the second mounting plate, and the angle between the halogen lamp and the second mounting plate is adjustable; the third mounting plate is horizontally arranged, the third mounting plate is fixedly connected to the upper surface of the first mounting plate, a lens cone is fixedly arranged on the third mounting plate, and an opening of the lens cone faces the halogen lamp; a second through hole is formed in the third mounting plate; the halogen lamp, the lens, the second through hole and the first through hole are sequentially arranged in the first direction; and the first direction is perpendicular to a coating sample on the coating frame. According to the external light source mechanism for the vacuum coating equipment, the full-spectrum light source is used, the monitoring wavelength can be selected at will, and the film thickness measurement precision can be improved.

Description

Technical Field

[0001] This specification relates to the field of vacuum coating technology, and in particular to an external light source mechanism for vacuum coating equipment. Background Technology

[0002] Evaporation deposition, often called vacuum deposition, is a method of physical vapor deposition. Its characteristic is that under vacuum conditions, the material evaporates and condenses on a glass surface to form a film. The principle involves sublimating or sputtering the film material through thermal evaporation or ion beam bombardment, which then strikes the substrate in a vacuum environment, ultimately depositing a solid thin film on the substrate surface. The spectral characteristics of the thin film are determined by its thickness and refractive index. There are two main methods for controlling the film thickness: quartz crystal monitoring and optical monitoring. Quartz crystal monitoring involves detecting the vibration frequency of the crystal oscillator and calculating the current thickness based on the relationship between thickness and frequency. Optical monitoring directly measures the optical properties of the film system, and is further divided into direct optical control and indirect optical control based on the measurement method, and white light optical control and laser optical control based on the test wavelength.

[0003] Currently, optical monitoring methods offer higher control precision compared to other methods. Because it directly monitors the product, direct optical control is more direct than indirect optical control. Existing direct optical control systems generally only offer white light control or only laser control. During the manufacturing process, the monitoring wavelength is relatively limited. Under certain special light intensity conditions, the thickness accuracy achieved using existing optical control algorithms is relatively low, leading to the continuous accumulation of processing errors and making it impossible to achieve high-precision film thickness control. Utility Model Content

[0004] In view of the shortcomings of the prior art, one object of this specification is to provide an external light source mechanism for a vacuum coating equipment, which uses a full-spectrum light source, and the monitoring wavelength can be arbitrarily selected, thereby improving the accuracy of film thickness measurement.

[0005] To achieve the above objectives, this specification provides an external light source mechanism for a vacuum coating equipment, which is installed on the top of the vacuum coating equipment. The vacuum coating equipment includes a vacuum coating chamber and a coating rack disposed within the vacuum coating chamber, the coating rack being used to support the coating sample. The external light source mechanism for the vacuum coating equipment includes:

[0006] A horizontally positioned first mounting plate is used to be fixedly connected to the top of the vacuum coating equipment; the first mounting plate is provided with a first through hole.

[0007] A vertically arranged second mounting plate, the bottom end of which is fixedly connected to the upper surface of the first mounting plate;

[0008] A halogen lamp is mounted on the second mounting plate, and the angle between the halogen lamp and the second mounting plate is adjustable;

[0009] A horizontally arranged third mounting plate is fixedly connected to the upper surface of the first mounting plate. A lens barrel is fixedly mounted on the third mounting plate, and the opening of the lens barrel faces the halogen lamp. The third mounting plate is provided with a second through hole.

[0010] A lens is fixedly installed inside the lens barrel, and the halogen lamp, the lens, the second through hole, and the first through hole are arranged sequentially in a first direction; the first direction is perpendicular to the coating sample on the coating frame.

[0011] In a preferred embodiment, the external light source mechanism for the vacuum coating equipment further includes a vertically arranged fourth mounting plate, which is connected to the second mounting plate. The halogen lamp is connected to the side of the fourth mounting plate facing away from the second mounting plate. The position of the fourth mounting plate relative to the second mounting plate in the first direction is adjustable.

[0012] In a preferred embodiment, the halogen lamp is fixedly connected to the mounting bracket, and the mounting bracket is connected to the fourth mounting plate by a plurality of fasteners; the plurality of fasteners are spaced apart along the first direction; the length of the part of the fastener used for fixing is adjustable.

[0013] In a preferred embodiment, the fastener has external threads, and the fourth mounting plate has threaded holes for the fastener to mate with; the threaded holes are spaced apart in the first direction, and the number of threaded holes is equal to the number of fasteners.

[0014] In a preferred embodiment, the angle adjustment range between the halogen lamp and the second mounting plate is 10°.

[0015] In a preferred embodiment, the number of fasteners is two, and the two fasteners may extend into the threaded hole by the same or different lengths.

[0016] In a preferred embodiment, the position of the second mounting plate relative to the first mounting plate is adjustable in a second direction, which is parallel to the horizontal plane.

[0017] In a preferred embodiment, the position of the third mounting plate relative to the first mounting plate in the second direction is adjustable.

[0018] In a preferred embodiment, the lens barrel is provided with a plurality of adjusting members spaced apart in the circumferential direction. The adjusting members fix the lens inside the lens barrel, and the position of the adjusting members relative to the lens barrel in the first direction is adjustable.

[0019] In a preferred embodiment, the size of the first through hole is larger than the size of the second through hole. Beneficial effects

[0020] The external light source mechanism for the vacuum coating equipment provided in this embodiment, through the setting of a first mounting plate, a second mounting plate, and a third mounting plate, provides a mounting position for the light source, ensuring that the external light source mechanism is stably and reliably installed on the top of the vacuum coating equipment. Using a halogen lamp as the light source allows for a full-spectrum light source, enabling arbitrary selection of the monitoring wavelength. Different wavelengths can be selected for monitoring different materials or film layers of different thicknesses, improving thickness measurement accuracy and achieving high-precision film thickness control. Furthermore, the adjustable angle between the halogen lamp and the second mounting plate ensures that the light emitted by the halogen lamp, after being focused into parallel light by the lens, passes perpendicularly through the surface of the coated sample, further improving thickness measurement accuracy.

[0021] Specific embodiments of the present invention are disclosed in detail with reference to the following description and accompanying drawings, indicating how the principles of the present invention can be adopted. It should be understood that the scope of the embodiments of the present invention is not limited thereto.

[0022] Features described and / or illustrated for one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.

[0023] It should be emphasized that the term "including / comprises" as used herein refers to the presence of a feature, whole, step, or component, but does not exclude the presence or addition of one or more other features, wholes, steps, or components. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a three-dimensional structural diagram of an external light source mechanism for a vacuum coating equipment provided in this embodiment;

[0026] Figure 2 for Figure 1 A three-dimensional structural diagram from another perspective;

[0027] Figure 3 for Figure 1 A three-dimensional structural diagram from another perspective.

[0028] Explanation of reference numerals in the attached figures:

[0029] 1. First mounting plate; 11. First through hole; 2. Second mounting plate; 3. Third mounting plate; 31. Second through hole; 4. Lens barrel; 5. Fourth mounting plate; 51. Threaded hole; 6. Mounting bracket; 7. Fastener; 8. Adjusting component; 9. Halogen lamp; X, First direction; Y, Second direction. Detailed Implementation

[0030] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0031] It should be noted that when an element is referred to as being "set on" another element, it can be directly on the other element or may be interposed with another element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or may be interposed with another element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementations.

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0033] Please see Figures 1 to 3 This application provides an external light source mechanism for a vacuum coating equipment, which is installed on the top of the vacuum coating equipment. The vacuum coating equipment includes a vacuum coating chamber and a coating rack disposed within the vacuum coating chamber, the coating rack being used to hold the coating sample. The external light source mechanism for the vacuum coating equipment includes: a first mounting plate 1, a second mounting plate 2, a halogen lamp 9, a third mounting plate 3, and a lens.

[0034] The first mounting plate 1 is horizontally positioned and fixedly connected to the top of the vacuum coating equipment. The first mounting plate 1 has a first through hole 11 for light to pass through. The second mounting plate 2 is vertically positioned, with its bottom end fixedly connected to the upper surface of the first mounting plate 1. A halogen lamp 9 is mounted on the second mounting plate 2, and the angle between the halogen lamp 9 and the second mounting plate 2 is adjustable. The third mounting plate 3 is horizontally positioned and fixedly connected to the upper surface of the first mounting plate 1. A lens barrel 4 is fixedly mounted on the third mounting plate 3, with its opening facing the halogen lamp 9. The third mounting plate 3 has a second through hole 31 for light to pass through. A lens is fixedly mounted inside the lens barrel 4. The halogen lamp 9, lens, second through hole 31, and first through hole 11 are arranged sequentially in a first direction X. The first direction X is perpendicular to the coating sample on the coating rack. In this embodiment, the coating rack is umbrella-shaped, therefore the first direction X is not perpendicular to the horizontal plane.

[0035] The external light source mechanism for the vacuum coating equipment provided in this embodiment, through the setting of a first mounting plate 1, a second mounting plate 2, and a third mounting plate 3, provides a mounting position for the light source, ensuring that the external light source mechanism is stably and reliably installed on the top of the vacuum coating equipment. Using a halogen lamp 9 as the light source allows for a full-spectrum light source, enabling arbitrary selection of the monitoring wavelength. Different wavelengths can be selected for monitoring different materials or film layers of different thicknesses, improving thickness measurement accuracy and achieving high-precision film thickness control. Furthermore, the angle between the halogen lamp 9 and the second mounting plate 2 is adjustable, ensuring that the light emitted by the halogen lamp 9, after being focused into parallel light by a lens, passes perpendicularly through the surface of the coated sample, further improving thickness measurement accuracy.

[0036] In this embodiment, the external light source mechanism further includes a vertically arranged fourth mounting plate 5, which is connected to the second mounting plate 2. The halogen lamp 9 is connected to the side of the fourth mounting plate 5 facing away from the second mounting plate 2. The position of the fourth mounting plate 5 relative to the second mounting plate 2 in the first direction X is adjustable. The second mounting plate 2 may have multiple mounting positions for mounting the fourth mounting plate 5 at intervals in the first direction X, so that the fourth mounting plate 5 can be installed in different mounting positions, realizing position adjustment in the first direction X, and allowing the position of the halogen lamp 9 in the first direction X (i.e., the distance between the halogen lamp 9 and the coating sample) to be adjusted as needed.

[0037] like Figure 2 and Figure 3As shown, the halogen lamp 9 is fixedly connected to the mounting bracket 6, and the mounting bracket 6 is connected to the fourth mounting plate 5 by a plurality of fasteners 7. The plurality of fasteners 7 are spaced apart along the first direction X. The length of the fixing portion of the fasteners 7 is adjustable, thereby facilitating the adjustment of the angle between the halogen lamp 9 and the second mounting plate 2.

[0038] Preferably, the fastener 7 has external threads, and the fourth mounting plate 5 has threaded holes 51 for the fastener 7 to mate with. The threaded holes 51 are spaced apart in the first direction X, and the number of threaded holes 51 is equal to the number of fasteners 7, which facilitates quick installation and avoids waste.

[0039] In this embodiment, the angle adjustment range between the halogen lamp 9 and the second mounting plate 2 is 10°. This avoids the waste of debugging time caused by an excessively large adjustment range, and also avoids the inability of the light emitted by the halogen lamp 9 to be focused into parallel light by the lens and pass perpendicularly through the surface of the coated sample if the adjustment range is too small.

[0040] In a preferred embodiment, the number of fasteners 7 is two, and the two fasteners 7 extend into the threaded hole 51 by the same or different lengths, so that the angle between the halogen lamp 9 and the second mounting plate 2 can be adjusted to the desired value.

[0041] In this embodiment, the position of the second mounting plate 2 relative to the first mounting plate 1 in the second direction Y is adjustable, and the second direction Y is parallel to the horizontal plane. Specifically, the first mounting plate 1 may have multiple mounting positions for mounting the second mounting plate 2 at intervals in the second direction Y, so that the second mounting plate 2 can be installed in different mounting positions, thereby realizing position adjustment in the second direction Y, and allowing the position of the halogen lamp 9 in the second direction Y to be adjusted as needed.

[0042] Furthermore, the position of the third mounting plate 3 relative to the first mounting plate 1 in the second direction Y is adjustable. Specifically, the first mounting plate 1 may have multiple mounting positions for mounting the third mounting plate 3 at intervals in the second direction Y, so that the third mounting plate 3 can be installed in different mounting positions to achieve position adjustment in the second direction Y, allowing the position of the lens in the second direction Y to be adjusted as needed.

[0043] like Figure 1 and Figure 2As shown, the lens barrel 4 is provided with multiple adjusting members 8 spaced apart circumferentially. These adjusting members 8 fix the lens within the lens barrel 4. The position of each adjusting member 8 relative to the lens barrel 4 in the first direction X is adjustable, allowing the position of the lens in the first direction X to be adjusted as needed. The lens barrel 4 may have multiple through holes in its axial direction for the adjusting members 8 to pass through. The positions of the multiple adjusting members 8 in the axial direction may be the same or different, thereby allowing adjustment of the lens angle. The axial direction of the lens barrel 4 is parallel to the first direction X.

[0044] like Figure 3 As shown, the second through hole 31 is only used for light transmission, while the first through hole 11 is not only used for light transmission, but also needs to ensure that the third mounting plate 3 does not obstruct the light transmission of the second through hole 31 when the position of the third mounting plate 3 is adjusted arbitrarily in the second direction Y. Therefore, the size of the first through hole 11 is set to be larger than the size of the second through hole 31.

[0045] It should be noted that in the description of this specification, the terms "first," "second," etc., are used only for descriptive purposes and to distinguish similar objects; there is no order between them, nor should they be construed as indicating or implying relative importance. Furthermore, in the description of this specification, unless otherwise stated, "a plurality of" means two or more.

[0046] Any numerical values ​​cited herein include all values ​​ranging from a lower limit to an upper limit, increasing by one unit, with at least two units between any lower and any higher value. For example, if the quantity of a component or the value of a process variable (e.g., temperature, pressure, time, etc.) is described as being from 1 to 90, preferably from 20 to 80, more preferably from 30 to 70, the purpose is to illustrate that values ​​such as 15 to 85, 22 to 68, 43 to 51, 30 to 32 are also explicitly listed in this specification. For values ​​less than 1, a unit is appropriately considered to be 0.0001, 0.001, 0.01, 0.1, etc. These are merely examples intended for explicit expression, and it can be assumed that all possible combinations of values ​​listed between the minimum and maximum values ​​are explicitly described in this specification in a similar manner.

[0047] Unless otherwise stated, all ranges include the endpoints and all numbers between them. The terms "approximately" or "about" used with ranges apply to both endpoints of the range. Thus, "approximately 20 to 30" is intended to cover "approximately 20 to approximately 30," including at least the specified endpoints.

[0048] All articles and references disclosed herein, including patent applications and publications, are incorporated herein by reference for various purposes. The term “substantially constitutes…” used to describe a combination should include the identified elements, components, parts, or steps, as well as other elements, components, parts, or steps that do not substantially affect the essential novelty of the combination. The use of the terms “comprising” or “including” to describe combinations of elements, components, parts, or steps herein also contemplates embodiments substantially constituted by such elements, components, parts, or steps. The use of the term “may” herein is intended to indicate that any described attribute included by “may” is optional.

[0049] Multiple elements, components, parts, or steps can be provided by a single integrated element, component, part, or step. Alternatively, a single integrated element, component, part, or step can be divided into multiple separate elements, components, parts, or steps. The use of the word "a" or "an" to describe an element, component, part, or step does not imply the exclusion of other elements, components, parts, or steps.

[0050] It should be understood that the above description is for illustrative purposes and not for limitation. Many embodiments and applications beyond the provided examples will be apparent to those skilled in the art upon reading the above description. Therefore, the scope of this teaching should not be determined by reference to the above description, but rather by reference to the appended claims and the full scope of their equivalents. For purposes of completeness, all articles and references, including patent applications and publications, are incorporated herein by reference. The omission of any aspect of the subject matter disclosed herein in the preceding claims is not intended as a waiver of that subject matter, nor should it be construed as an indication that the inventors have not considered that subject matter as part of the disclosed utility model subject matter.

Claims

1. An external light source mechanism for a vacuum coating equipment, for mounting on the top of the vacuum coating equipment, the vacuum coating equipment comprising a vacuum coating chamber and a coating rack disposed within the vacuum coating chamber, the coating rack being used to support a coating sample; characterized in that, The external light source mechanism for the vacuum coating equipment includes: A horizontally positioned first mounting plate is used to be fixedly connected to the top of the vacuum coating equipment; the first mounting plate is provided with a first through hole. A vertically arranged second mounting plate, the bottom end of which is fixedly connected to the upper surface of the first mounting plate; A halogen lamp is mounted on the second mounting plate, and the angle between the halogen lamp and the second mounting plate is adjustable; A horizontally arranged third mounting plate is fixedly connected to the upper surface of the first mounting plate. A lens barrel is fixedly mounted on the third mounting plate, and the opening of the lens barrel faces the halogen lamp. The third mounting plate is provided with a second through hole. A lens is fixedly installed inside the lens barrel, and the halogen lamp, the lens, the second through hole, and the first through hole are arranged sequentially in a first direction; the first direction is perpendicular to the coating sample on the coating frame.

2. The external light source mechanism for the vacuum coating equipment according to claim 1, characterized in that, It also includes a vertically arranged fourth mounting plate, which is connected to the second mounting plate, and the halogen lamp is connected to the side of the fourth mounting plate opposite to the second mounting plate; the position of the fourth mounting plate relative to the second mounting plate in the first direction is adjustable.

3. The external light source mechanism for the vacuum coating equipment according to claim 2, characterized in that, The halogen lamp is fixedly connected to the mounting bracket, and the mounting bracket is connected to the fourth mounting plate by a plurality of fasteners; the plurality of fasteners are spaced apart along the first direction; the length of the part of the fastener used for fixing is adjustable.

4. The external light source mechanism for the vacuum coating equipment according to claim 3, characterized in that, The fastener has external threads, and the fourth mounting plate has threaded holes for the fastener to mate with; the threaded holes are spaced apart in the first direction, and the number of threaded holes is equal to the number of fasteners.

5. The external light source mechanism for the vacuum coating equipment according to claim 4, characterized in that, The angle adjustment range between the halogen lamp and the second mounting plate is 10°.

6. The external light source mechanism for the vacuum coating equipment according to claim 4, characterized in that, The number of fasteners is two, and the two fasteners may extend into the threaded hole by the same or different lengths.

7. The external light source mechanism for the vacuum coating equipment according to claim 1, characterized in that, The position of the second mounting plate relative to the first mounting plate is adjustable in a second direction, which is parallel to the horizontal plane.

8. The external light source mechanism for the vacuum coating equipment according to claim 7, characterized in that, The position of the third mounting plate relative to the first mounting plate in the second direction is adjustable.

9. The external light source mechanism for the vacuum coating equipment according to claim 1, characterized in that, The lens barrel is provided with a plurality of adjusting members spaced apart in the circumferential direction. The adjusting members fix the lens inside the lens barrel, and the position of the adjusting members relative to the lens barrel in the first direction is adjustable.

10. The external light source mechanism for the vacuum coating equipment according to claim 1, characterized in that, The size of the first through hole is larger than the size of the second through hole.

Images