CVD (Chemical Vapor Deposition) pretreatment seed crystal device

By adopting a symmetrical nozzle and rotating cutter head design in the CVD pretreatment seeding device, the problems of unstable seeding and impurities affecting the coating were solved, achieving uniform seeding and impurity removal, and improving the stability and adhesion of the coating.

CN223496608UActive Publication Date: 2025-10-31SUBOCK (NINGBO) TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202422958786.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-02
Publication Date
2025-10-31
Estimated Expiration
2034-12-02

AI Technical Summary

Technical Problem

Existing CVD pretreatment seeding devices suffer from problems such as unstable seeding and impurities on the tool surface affecting coating adhesion.

Method used

A CVD pretreatment seeding device was designed, which has a cabinet with a sealed working space, equipped with two nozzles, a suspension pressure storage tank and an air compressor. The suspension and gas are sprayed through symmetrically arranged nozzles, and combined with the control of a rotating cutter head and a telescopic cylinder, uniform seeding and impurity removal are achieved.

Benefits of technology

It improves the stability of the implanted crystals and the adhesion of the coating, ensures the uniformity and stability of the diamond coating, and reduces the waste of suspension.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The utility model relates to a CVD (Chemical Vapor Deposition) pretreatment seed crystal device, which is characterized in that a closed working space is formed in a cabinet body which is used for planting crystal for a CVD cutter, a spray head is arranged in the cabinet body, a cutter head for inserting the CVD cutter is also arranged in the cabinet body, and a suspension liquid pressure storage barrel capable of supplying suspension liquid to the spray head is also arranged outside the cabinet body. An air compressor capable of supplying compressed air to the spray head is further arranged outside the cabinet body, and the suspension liquid pressure storage barrel and the air compressor are connected with the spray head through connecting pipes respectively. The spraying head and the cutter head are arranged in the cabinet body, the CVD cutter is inserted in the cutter head, the air compressor for supplying compressed gas to the spraying head and the suspension liquid pressure storage barrel for supplying suspension liquid are arranged outside the cabinet body, and under the action of air pressure, the cutter can complete planting of diamond crystal grains and can also complete planting of the diamond crystal grains. And meanwhile, unstable impurities on the surface of the cutter can be cleaned by the sprayed gas, so that the stability and the adhesive force of the coating are ensured.
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Description

Technical Field

[0001] This utility model relates to the technical field of chemical vapor deposition pretreatment equipment, specifically to a CVD pretreatment seeding device. Background Technology

[0002] During the pretreatment process of CVD tools, the presence of cobalt in the cemented carbide tool hinders the growth of the diamond coating. Therefore, the tool substrate must undergo acid-base pretreatment to achieve cobalt removal, decarburization, and roughening. After acid-base pretreatment, some damaged carbide particles remain on the cemented carbide surface, so the tool surface needs to be roughened by sandblasting to remove the loose layer before seeding treatment.

[0003] The existing Chinese invention patent with patent number ZL202010566135.X (publication number CN111910168B), entitled "A CVD Diamond Thick Film-Ceramic Composite Sheet Brazing Tool and Its Preparation Method," discloses a preparation method in which a silicon nitride substrate is sandblasted for 10 seconds in a sandblasting machine, and the sandblasted silicon nitride substrate is immersed in a container containing a micro-powder suspension. The container is then placed in an ultrasonic bath and vibrated for 30 minutes, allowing the diamond micro-powder to be implanted into the substrate surface. However, ultrasonic implantation has problems such as unstable implantation and uneven distribution. Impurities remain on the surface of the tool after implantation, which affect the adhesion of the coating and thus lead to film instability.

[0004] Therefore, further improvements are needed to the structure of the CVD pretreatment seeding device. Utility Model Content

[0005] The technical problem to be solved by this utility model is to provide a CVD pretreatment seeding device that provides stable seeding and can clean impurities on the surface of cutting tools, in light of the above-mentioned existing technology.

[0006] The technical solution adopted by this utility model to solve the above-mentioned technical problems is as follows: The CVD pretreatment seeding device is characterized in that: a cabinet with a sealed working space inside for seeding CVD tools is provided inside the cabinet, a nozzle is provided inside the cabinet, a cutter head for inserting CVD tools is also provided inside the cabinet, a suspension pressure storage tank that can supply suspension to the aforementioned nozzle is also provided outside the cabinet, and an air compressor that can supply compressed gas to the aforementioned nozzle is also provided outside the cabinet, and the suspension pressure storage tank and the air compressor are respectively connected to the nozzle through connecting pipes.

[0007] To improve crystal implantation efficiency, preferably, the cabinet contains two nozzles, designated as a first nozzle and a second nozzle, with their ejection surfaces facing each other. The CVD cutter is inserted into a cutter head, and the nozzles are positioned on either side of the cutter head. Gas and suspension are supplied to the first and second nozzles and sprayed onto the surface of the CVD cutter. By arranging the nozzles' ejection surfaces facing each other, each nozzle can cover a specific area on the cutter head, thereby improving the crystal implantation efficiency of the CVD cutter.

[0008] To facilitate the supply of gas and suspension, preferably, the suspension pressure storage tank is connected to the first nozzle and the second nozzle respectively via two first connecting pipes, and the air compressor is connected to the first nozzle and the second nozzle respectively via two second connecting pipes. The suspension pressure storage tank stores the suspension and delivers it to each nozzle by internal pressurization. The suspension pressure storage tank is equipped with two first connecting pipes, one connected to the first nozzle and the other to the second nozzle. The air compressor supplies gas to the nozzles and is connected to two second connecting pipes, one connected to the first nozzle and the other to the second nozzle.

[0009] To facilitate control of the nozzle position, preferably, the cabinet also includes a first telescopic cylinder and a second telescopic cylinder, respectively connected to the first and second nozzles. Outside the cabinet, a cylinder controller is installed to control the raising and lowering of the telescopic rods of the first and second telescopic cylinders. The cylinder controller is connected to the first and second telescopic cylinders via two third connecting pipes. Two cylinder controllers are provided, each connected to a telescopic cylinder by a connecting pipe. One cylinder controller controls the raising and lowering of the piston rod in the first telescopic cylinder, thus controlling the position of the first nozzle. The other cylinder controller controls the raising and lowering of the piston rod in the second telescopic cylinder, thus controlling the position of the second nozzle. The cylinder controllers can adjust the first and second nozzles to the optimal positions according to the seed crystal's requirements.

[0010] To facilitate component installation, preferably, the top of the cabinet has an installation gap for the first, second, and third connecting pipes to pass through. The first and second telescopic cylinders are fixedly connected to the top side wall of the cabinet. The installation gap at the top of the cabinet serves two purposes: First, since the first and second nozzles are located inside the cabinet, the first connecting pipe for supplying the suspension, the second connecting pipe for supplying gas, and the third connecting pipe for controlling the telescopic cylinders can extend into the cabinet through the installation gap and be installed on the corresponding nozzles or telescopic cylinders. Second, the fixing of the first and second telescopic cylinders to the installation gap prevents the nozzles and telescopic cylinders from shaking due to the reaction force of the gas and suspension jets, thus improving stability.

[0011] To improve the seeding effect, preferably, the cabinet body also includes a motor and a motor controller. The motor is connected to the cutter head drive and drives the cutter head to rotate. The motor controller is electrically connected to the motor and controls the motor's operating state. The cutter head has multiple mounting holes for inserting CVD cutters, which are radially distributed. The cutter head is disc-shaped. When the motor controller starts the motor, it drives the cutter head to rotate along its own axis. The rotation direction and speed of the cutter head can be adjusted by the motor, ensuring uniform force on the CVD cutters during the seeding process, thereby optimizing the adhesion of the diamond seed crystals.

[0012] Furthermore, the bottom wall of the cabinet is inclined, and the motor is fixed to the bottom outer wall of the cabinet. The cutter head is positioned above the bottom wall of the cabinet, and the motor's fixation to the bottom outer wall facilitates the provision of driving force to the cutter head, thereby enabling its rotation.

[0013] To avoid wasting the suspension, preferably, a tank for recycling the suspension is provided below the cabinet. The tank is located below the cabinet, and a drain hole is provided at the lowest point of the cabinet's bottom wall. The drain hole is connected to the tank via a fourth connecting pipe. During spraying from the first and second nozzles, excess suspension drips onto the bottom of the cabinet. The suspension flows downwards along the inclined surface of the bottom wall, enters the fourth connecting pipe through the drain hole, and finally flows into the tank for recycling.

[0014] To improve the integration of the device, it is preferable to also include a frame on which the cabinet is mounted, and the suspension pressure storage tank and air compressor are both mounted on the frame. One area within the frame is used for mounting the cabinet, which serves as the working area for seeding crystals. The remaining areas can be equipped with multiple partitions to facilitate the placement of the suspension pressure storage tank, air compressor, and cylinder controller, thereby making the overall layout of the seeding device more compact.

[0015] Compared with the prior art, the advantages of this utility model are as follows: the cabinet is equipped with a nozzle and a cutter head, and a CVD cutter head is inserted on the cutter head. The cabinet is equipped with an air compressor that supplies gas to the nozzle and a suspension pressure storage tank that supplies suspension liquid. Under the action of air pressure, the cutter can not only complete the planting of diamond grains, but the sprayed gas can also clean the unstable impurities on the surface of the cutter, thereby ensuring the stability and adhesion of the coating. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of an embodiment of the present utility model;

[0017] Figure 2 This is a front view of an embodiment of the present utility model;

[0018] Figure 3 This is a three-dimensional structural diagram of the nozzle in an embodiment of the present utility model;

[0019] Figure 4 This is a three-dimensional structural diagram of the cutter head in an embodiment of the present utility model;

[0020] Figure 5 for Figure 2 A schematic diagram of the longitudinal section.

[0021] In the diagram: 1. Frame; 11. Cabinet; 111. Installation gap; 112. Drain hole; 21. First nozzle; 22. Second nozzle; 23. First telescopic cylinder; 24. Second telescopic cylinder; 3. Cutter disc; 31. Mounting hole; 4. Suspension pressure storage tank; 5. Air compressor; 61. First connecting pipe; 62. Second connecting pipe; 63. Third connecting pipe; 64. Fourth connecting pipe; 7. Cylinder controller; 8. Motor; 9. Motor controller; 10. Tank body; Detailed Implementation

[0022] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

[0023] like Figures 1 to 5 The diagram shows the preferred embodiment of this utility model. The CVD pretreatment seeding device has an enclosed working space within a cabinet 11 for seeding CVD cutters. The cabinet 11 contains a nozzle and a cutter head 3 for inserting CVD cutters. Outside the cabinet 11 is a suspension pressure storage tank 4 that supplies suspension to the nozzle, and an air compressor 5 that supplies compressed gas to the nozzle. The suspension pressure storage tank 4 and the air compressor 5 are connected to the nozzle via connecting pipes.

[0024] refer to Figure 2 and Figure 5The cabinet 11 contains two nozzles, designated as a first nozzle 21 and a second nozzle 22, with their spray surfaces facing each other. A CVD cutter is inserted onto a cutter head 3, with the nozzles positioned on either side of the cutter head 3. Compressed gas and a suspension are supplied to the first nozzle 21 and the second nozzle 22 and sprayed onto the surface of the CVD cutter. Each nozzle is responsible for a specific area on the cutter head 3, thereby improving the crystal implantation efficiency of the CVD cutter. A suspension pressure storage tank 4 is connected to the first nozzle 21 and the second nozzle 22 via two first connecting pipes 61, and an air compressor 5 is connected to the first nozzle 21 and the second nozzle 22 via two second connecting pipes 62. The function of the suspension pressure storage tank 4 is to store the suspension and deliver it to each nozzle by internal pressurization. The suspension pressure storage tank 4 is equipped with two first connecting pipes 61, one of which is connected to the first nozzle 21 and the other is connected to the second nozzle 22. The function of the air compressor 5 is to supply compressed gas to the nozzles. The air compressor 5 is connected with two second connecting pipes 62, one of which is connected to the first nozzle 21 and the other is connected to the second nozzle 22.

[0025] Furthermore, the nozzle has both a working state and a non-working state. In the non-working state, the nozzle is located above the cutter head 3. In the working state, the nozzle moves downwards to both sides of the cutter head 3 according to the position of the CVD cutter. (Reference) Figure 2 and Figure 3 In this embodiment, the cabinet 11 is further equipped with a first telescopic cylinder 23 and a second telescopic cylinder 24, which are respectively connected to the first nozzle 21 and the second nozzle 22. Outside the cabinet 11, a cylinder controller 7 is provided to control the raising and lowering of the telescopic rods of the first telescopic cylinder 23 and the second telescopic cylinder 24. The cylinder controller 7 is connected to the first telescopic cylinder 23 and the second telescopic cylinder 24 via two third connecting pipes 63. Two cylinder controllers 7 are provided, each with a connecting pipe between it and the telescopic cylinder. One cylinder controller 7 controls the raising and lowering of the piston rod in the first telescopic cylinder 23, thereby controlling the position of the first nozzle 21. The other cylinder controller 7 controls the raising and lowering of the piston rod in the second telescopic cylinder 24, thereby controlling the position of the second nozzle 22. The cylinder controller 7 can adjust the first nozzle 21 and the second nozzle 22 to the optimal position according to the seeding requirements. After seeding, the first telescopic cylinder 23 and the second telescopic cylinder 24 can drive the first nozzle 21 and the second nozzle 22 to return to their original positions.

[0026] refer to Figure 1The top of the cabinet 11 is provided with an installation gap 111 for the first connecting pipe 61, the second connecting pipe 62, and the third connecting pipe 63 to pass through. The first telescopic cylinder 23 and the second telescopic cylinder 24 are fixedly connected to the top side wall of the cabinet 11. The installation gap 111 on the top of the cabinet 11 has two functions: First, the first nozzle 21 and the second nozzle 22 are located inside the cabinet 11, and the first connecting pipe 61 for supplying gas, the second connecting pipe 62 for supplying suspension, and the third connecting pipe 63 for controlling the telescopic cylinder can extend into the interior of the cabinet 11 through the installation gap 111 and be installed on the nozzle or the telescopic cylinder respectively; Second, the first telescopic cylinder 23 and the second telescopic cylinder 24 are fixed on the installation gap 111, which can prevent the nozzle and the telescopic cylinder as a whole from shaking due to the reaction force of the gas and suspension spray, thus improving stability.

[0027] refer to Figure 1 and Figure 5 Outside the cabinet 11, there is also a motor 8 and a motor controller 9. The motor 8 is fixed on the bottom outer wall of the cabinet 11. The motor 8 is driven and connected to the cutter head 3 and is used to drive the cutter head 3 to rotate. The motor controller 9 is electrically connected to the motor 8 and is used to control the working state of the motor 8. The working state of the motor 8 includes four states: start rotation, rotation direction, rotation speed, and stop rotation. The cutter head 3 is provided with multiple mounting holes 31 for inserting CVD tools. The mounting holes 31 are radially distributed along the radial direction.

[0028] refer to Figure 5 The bottom wall of the cabinet 11 is inclined, and a tank 10 for recycling the suspension is located below the cabinet 11. A drain hole 112 is located at the lowest point of the bottom wall of the cabinet 11, and the drain hole 112 is connected to the tank 10 via a fourth connecting pipe 64. During spraying, excess suspension from the first nozzle 21 and the second nozzle 22 drips onto the bottom of the cabinet 11. The suspension flows downwards along the inclined surface of the bottom wall and enters the fourth connecting pipe 64 through the drain hole 112, ultimately flowing into the tank 10 for recycling.

[0029] Finally, the CVD pretreatment seeding device in this embodiment includes multiple components, such as a suspension pressure storage tank 4, an air compressor 5, a cylinder controller 7, and a motor controller 9. To improve the integration of the above components, in this embodiment, a cabinet 11 is installed on the frame 1. The remaining area of ​​the frame 1 is provided with multiple partitions to divide the frame 1 into multiple areas. A first partition is formed on the left side of the cabinet 11, and a second partition is provided below the first partition and the cabinet 11. The first partition is divided into upper and lower layers by the partitions. The cylinder controller 7 and the motor controller 9 are provided on the first layer, and the suspension pressure storage tank 4 is provided on the second layer. The air compressor 5, the motor 8, and the tank 10 are provided in the second partition.

[0030] In this embodiment, the crystal-seeding device operates as follows: The cylinder controller 7 is activated to drive the first telescopic cylinder 23 and the second telescopic cylinder 24 to move downwards, thereby adjusting the first nozzle 21 and the second nozzle 22 to both sides of the cutter head 3. At the same time, the air compressor 5 is activated. The operator needs to pour the suspension into the suspension pressure storage tank 4 through the funnel. At this time, the suspension is supplied to the first nozzle 21 and the second nozzle 22 through the first connecting pipe 61, and the compressed gas is supplied to the first nozzle 21 and the second nozzle 22 through the second connecting pipe 62. At the same time, the motor controller 9 needs to be activated. The motor controller 9 controls the motor 8 to start and drive the cutter head 3 to rotate. At this time, the suspension sprayed in the first nozzle 21 and the second nozzle 22 can seed the CVD cutter surface. At the same time, the sprayed gas can also clean the unstable impurities on the CVD cutter surface. During the crystal-seeding process, some suspension will drip onto the bottom of the cabinet 11 and flow along the inclined bottom wall to the drain hole 112, and enter the tank 10 through the fourth connecting pipe 64 for recycling. After the seeding is completed, the motor controller 9 is turned off, thereby stopping the motor 8 and the cutter head 3. At the same time, the air compressor 5 and the cylinder controller 7 are turned off, and the first telescopic cylinder 23 and the second telescopic cylinder 24 retract upwards, driving the first nozzle 21 and the second nozzle 22 to reset.

Claims

1. A CVD pretreatment seeding device, characterized in that: A cabinet (11) with a sealed working space for implanting crystals into CVD tools is provided inside the cabinet (11). A nozzle is provided inside the cabinet (11). A cutter head (3) for inserting CVD tools is also provided inside the cabinet (11). A suspension pressure storage tank (4) for supplying suspension to the nozzle is provided outside the cabinet (11). An air compressor (5) for supplying compressed gas to the nozzle is also provided outside the cabinet (11). The suspension pressure storage tank (4) and the air compressor (5) are respectively connected to the nozzle through connecting pipes.

2. The CVD pretreatment seeding device according to claim 1, characterized in that: The cabinet (11) contains two nozzles, namely a first nozzle (21) and a second nozzle (22), and the spray surfaces of the first nozzle (21) and the second nozzle (22) are arranged opposite to each other.

3. The CVD pretreatment seeding device according to claim 2, characterized in that: The suspension pressure storage tank (4) is connected to the first nozzle (21) and the second nozzle (22) respectively through two first connecting pipes (61), and the air compressor (5) is connected to the first nozzle (21) and the second nozzle (22) respectively through two second connecting pipes (62).

4. The CVD pretreatment seeding device according to claim 3, characterized in that: The cabinet (11) is also equipped with a first telescopic cylinder (23) and a second telescopic cylinder (24) that are respectively connected to the first nozzle (21) and the second nozzle (22). Outside the cabinet (11) is a cylinder controller (7) for controlling the raising and lowering of the telescopic rods of the first telescopic cylinder (23) and the second telescopic cylinder (24). The cylinder controller (7) is connected to the first telescopic cylinder (23) and the second telescopic cylinder (24) through two third connecting pipes (63).

5. The CVD pretreatment seeding apparatus according to claim 4, characterized in that: The top of the cabinet (11) is provided with an installation gap (111) for the first connecting pipe (61), the second connecting pipe (62) and the third connecting pipe (63) to pass through. The first telescopic cylinder (23) and the second telescopic cylinder (24) are fixedly connected to the top side wall of the cabinet (11).

6. The CVD pretreatment seeding apparatus according to claim 1, characterized in that: The cabinet (11) is also equipped with a motor (8) and a motor controller (9). The motor (8) is connected to the cutter head (3) and is used to drive the cutter head (3) to rotate. The motor controller (9) is electrically connected to the motor (8) and is used to control the working state of the motor (8). The cutter head (3) is provided with a plurality of mounting holes (31) for inserting CVD tools. The mounting holes (31) are radially distributed along the radial direction.

7. The CVD pretreatment seeding apparatus according to claim 6, characterized in that: The bottom wall of the cabinet (11) is inclined, and the motor (8) is fixed on the bottom outer wall of the cabinet (11).

8. The CVD pretreatment seeding apparatus according to claim 1, characterized in that: Below the cabinet (11) is a tank (10) for recycling the suspension. The tank (10) is located below the cabinet (11). A drain hole (112) is provided at the lowest point of the bottom wall of the cabinet (11). The drain hole (112) is connected to the tank (10) through a fourth connecting pipe (64).

9. The CVD pretreatment seeding apparatus according to claim 1, characterized in that: It also includes a frame (1), on which the cabinet (11) is installed, and the suspension pressure storage tank (4) and the air compressor (5) are both installed on the frame (1).

Citation Information

Patent Citations

  • CVD diamond thick film-ceramic composite sheet brazing tool and preparation method thereof

    CN111910168A

  • A CVD diamond thick film-ceramic composite brazing tool and its preparation method

    CN111910168B