Composite pressure head mechanism for seed crystal bonding

Abstract

The utility model relates to a composite pressure head mechanism for seed crystal bonding, which comprises a pressure rod, a connecting seat, a pressure head and an inflating and deflating assembly, the pressure head comprises a flexible part, a pressure plate and an elastic part, the flexible part is arranged at the bottom of the connecting seat, a containing cavity is formed between the flexible part and the connecting seat, the pressure plate is rotatably arranged in the containing cavity, and the elastic part is arranged between the pressure plate and the connecting seat. The lower end face of the pressing disc is parallel to the horizontal plane under the control of the elastic piece. The composite pressure head is provided with the flexible part and the pressure plate at the same time, exhaust of the flexible part and force application and compaction of the pressure plate can be achieved through one-time installation of the seed crystal, the operation is very convenient, the pressure plate can be kept in a horizontal state through the arrangement of the elastic part, and the pressure plate can rotate through the arrangement of the pressure plate. Therefore, the pressure plate can apply pressure to the seed crystal in parallel and uniformly in a self-adaptive manner on the basis of applying pressure by the flexible part, so that stress concentration is effectively reduced, and the bonding quality is improved.

Description

Technical Field

[0001] This utility model relates to the field of artificial crystal growth technology, specifically to a composite pressure head mechanism for seed crystal bonding. Background Technology

[0002] During silicon carbide crystal growth, a seed crystal is first attached to the seed crystal holder on the crucible lid. Then, carbon powder and silicon powder are placed into the crucible. After the crucible is heated, the carbon powder and silicon powder vaporize and solidify at the seed crystal to form a silicon carbide crystal. In this process, bonding the seed crystal to the seed crystal holder on the crucible lid is a crucial step. The bonding quality between the silicon carbide seed crystal and the seed crystal holder directly affects the growth quality of the silicon carbide single crystal, and the uniformity and density of the bonding are key to the bonding quality.

[0003] By coating the upper surface of the seed crystal holder with an adhesive, placing the seed crystal on top of the adhesive, and then applying pressure to the seed crystal using a flexible, air-filled indenter, the gas between the seed crystal and the seed crystal holder can be expelled from the inside out. However, the flexible indenter has the problem of incomplete compression. Therefore, after applying pressure with the flexible indenter, it is often necessary to transfer the seed crystal holder with the seed crystal bonded to another device and apply pressure to the seed crystal again using a rigid metal indenter. This requires two vacuuming and two pressing operations, which is very inconvenient. Furthermore, before the second application of pressure with the rigid indenter, there is a risk that air may enter the seed crystal bonding surface, causing air bubbles to be unable to be completely expelled, ultimately leading to problems such as poor bonding uniformity and weak bonding.

[0004] Integrating flexible and rigid pressure heads into the same device can prevent air from entering the seed crystal bonding surface during the transfer process. However, the fitting precision between the two is difficult to control, which can easily lead to stress concentration and affect the bonding quality. Utility Model Content

[0005] The purpose of this invention is to provide a composite pressure head mechanism for seed crystal bonding.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0007] A composite pressure head mechanism for seed crystal bonding includes:

[0008] Compression bar;

[0009] A connecting seat, which is connected to the bottom of the pressure rod;

[0010] The pressure head includes a flexible element, a pressure plate, and an elastic element. The flexible element is disposed at the bottom of the connecting seat and forms a cavity with the connecting seat. The flexible element has a downwardly protruding pressure state. The pressure plate is rotatably disposed in the cavity. The elastic element is connected between the pressure plate and the connecting seat and has multiple elastic elements distributed around the pressure plate. The elastic element controls the pressure plate. The lower end face of the pressure plate is parallel to the horizontal plane.

[0011] A gas filling / defilling assembly is provided on the connecting seat or the pressure rod and is used to introduce gas into or release gas from the cavity.

[0012] The composite pressure head of this invention combines a flexible component and a rigid pressure plate. The seed crystal can be installed once to achieve air release from the flexible component and pressure compaction by the pressure plate, which is very convenient. Furthermore, the invention also uses an elastic component to keep the pressure plate in a horizontal state. By rotating the pressure plate, it can adaptively apply parallel and uniform pressure to the seed crystal based on the pressure applied by the flexible component, thereby effectively reducing stress concentration and improving bonding quality.

[0013] Preferably, the elastic element has 3 to 6 elements evenly arranged around the center line of the pressure plate, and the center line of the pressure plate is a line perpendicular to the pressure plate and passes through the center of the pressure plate.

[0014] In some embodiments, the elastic element is a spring.

[0015] Preferably, the composite pressure head mechanism further includes a vibrator disposed on the connecting seat.

[0016] In some embodiments, the vibrator is a frequency converter or an ultrasonic generator.

[0017] Preferably, the pressure head further includes a connector, one end of which is connected to the connecting seat, and the other end is spherically hinged to the lower end face of the pressure plate.

[0018] Preferably, the connecting seat has a through hole, the pressure rod has an inflation / deflation channel communicating with the through hole, the inflation / deflation assembly is disposed on the pressure rod, and the inflation / deflation assembly includes an air pipe communicating with the inflation / deflation channel of the pressure rod, a safety valve disposed on the air pipe, and an inflation device for inflating the air pipe.

[0019] In some embodiments, the inflation device is a vacuum pump, with the inlet end of the vacuum pump connected to an air compressor or an air storage tank, and the outlet end connected to the air pipe.

[0020] Preferably, when the flexible element is under pressure, the flexible element is spherical.

[0021] In some implementations, the flexible component is made of rubber.

[0022] Preferably, the center lines of the pressure rod, connecting seat, and pressure plate are collinear and pass through the lowest point of the downward protrusion of the flexible member.

[0023] Preferably, the connecting seat has a hollow cavity with an opening at the bottom.

[0024] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art:

[0025] This invention uses an elastic element to keep the pressure plate horizontal, allowing it to adaptively apply parallel and uniform pressure to the seed crystal based on the pressure from the flexible element. This effectively reduces stress concentration and improves bonding quality.

[0026] The composite pressure head mechanism of this utility model has a simple structure. The flexible part can be vented and the pressure plate can be pressed and compacted with force in one installation of the seed crystal. It is very convenient and can be widely used in the bonding process of silicon carbide seed crystals. Attached Figure Description

[0027] Figure 1 This is a simplified structural diagram of the composite pressure head mechanism in Example 1;

[0028] The components include: 1. Pressure rod; 11. First inflation / deflation channel; 2. Connecting seat; 21. Hollow chamber; 3. Pressure head; 31. Flexible component; 32. Pressure plate; 33. Connecting component; 331. Second inflation / deflation channel; 332. Air outlet; 34. Elastic component; 4. Inflation / deflation assembly; 41. Air pipe; 42. Safety valve; 43. Inflation device; 5. Vibrator; 6. Mounting component.

[0029] a. Centerline. Detailed Implementation

[0030] The present invention will be further described below with reference to the embodiments shown in the accompanying drawings.

[0031] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0032] In the description of the embodiments of this utility model, it should be understood that the terms "upper" and "lower," etc., indicate the orientation or positional relationship as described above. Figure 1The orientations shown are defined as follows: the orientation of the pressure rod 1 is upward and the orientation of the flexible member 31 is downward. This is only for the purpose of describing the embodiments of this utility model and simplifying the description, and is not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation on the embodiments of this utility model.

[0033] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0034] In this embodiment of the invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0035] The following disclosure provides many different implementations or examples for different structures of the embodiments of the present invention. To simplify the disclosure of the embodiments of the present invention, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the embodiments of the present invention. Furthermore, reference numerals and / or reference letters may be repeated in different examples of the embodiments of the present invention; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various implementations and / or arrangements discussed.

[0036] Example 1

[0037] A composite pressure head mechanism for seed crystal bonding, such as Figure 1 As shown, it includes a pressure rod 1, a connecting seat 2 connected to the bottom of the pressure rod 1, a pressure head 3 disposed on the connecting seat 2, and an inflation / deflation assembly 4.

[0038] The pressure head 3 includes a flexible component 31, a pressure plate 32, a connecting component 33, and an elastic component 34.

[0039] The flexible element 31 is disposed at the bottom of the connecting seat 2 and is tightly connected to the connecting seat 2 on its periphery, forming a cavity between the two. In this embodiment, the flexible element 31 is tightly connected to the connecting seat 2 via a mounting member 6. The mounting member 6 includes a pressure ring abutting against the periphery of the flexible element 31 and bolts connecting the pressure ring to the connecting seat 2. The bolts have multiple bolts arranged circumferentially along the flexible element 31. The flexible element 31 has a downwardly convex pressure state. Preferably, air is injected into the cavity through the inflation / deflation assembly 4 to switch the flexible element 31 to the downwardly convex pressure state. Further, the flexible element 31 is spherical in shape when in the pressure state. During pressing, the central convex point of the flexible element 31 first contacts the central part of the seed crystal and gradually applies pressure to the seed crystal from the inside out, expelling the gas between the seed crystal and the seed crystal seat from the inside out. This can fully remove the gas between the seed crystal and the seed crystal seat. Preferably, the flexible element 31 is made of rubber.

[0040] The pressure plate 32, connector 33, and elastic element 34 are disposed within the cavity. The upper end of connector 33 is connected to connector 2, and the lower end is a ball head that is spherically hinged to the upper surface of pressure plate 32. Multiple elastic elements 34 are located between pressure plate 32 and connector 2, distributed around the periphery of pressure plate 32. Controlled by elastic elements 34, the lower end face of pressure plate 32 is parallel to the horizontal plane. Before pressure is applied, the lower end face of pressure plate 32 remains horizontal under the action of elastic elements 34, preventing uneven pressure and stress concentration caused by tilting. During pressure application, pressure plate 32 can rotate adaptively and, under the action of elastic elements 34, consistently applies parallel pressure to the seed crystal, ensuring uniform pressure on the seed crystal, compacting it, and improving the bonding quality between the seed crystal and the seed crystal seat.

[0041] Furthermore, the elastic element 34 has 3 to 6 members evenly arranged around the center line a of the pressure plate 32, and the elastic element 34 is preferably a spring. The center line a of the pressure plate 32 is a line perpendicular to the pressure plate 32 and passes through the center of the pressure plate 32. The center lines a of the pressure rod 1, the connecting seat 2, and the pressure plate 32 are collinear and pass through the lowest point of the downward protrusion of the flexible element 31.

[0042] To better accommodate the pressure plate 32, the connector 33, and the elastic element 34, the connecting seat 2 has a hollow cavity 21 with an opening at the bottom.

[0043] The inflation / deflation assembly 4 is mounted on the connecting seat 2 or the pressure rod 1 and is used to introduce or release gas into the cavity. The inflation / deflation assembly 4 can control the degree of convexity and pressure of the flexible member 31. In this embodiment, the inflation / deflation assembly 4 is mounted on the pressure rod 1 and includes an air pipe 41, a safety valve 42 mounted on the air pipe 41, and an inflation device 43 for inflating the air pipe 41. The inflation device 43 is a vacuum pump, with the inlet end of the vacuum pump connected to an air compressor or an air tank and the outlet end connected to the air pipe 41.

[0044] The pressure rod 1 has a charging / discharging channel (first charging / discharging channel 11) connected to the air pipe 41. The connecting seat 2 has a through hole. The connecting member 33 is disposed in the through hole of the connecting seat 2 and has a second charging / discharging channel 331 connected to the first charging / discharging channel 11. The side wall of the connecting member 33 has an air outlet 332. Air is introduced into the air pipe 41 by a vacuum pump. The gas can pass through the air pipe 41, the first charging / discharging channel 11, and the second charging / discharging channel 331, and is discharged into the cavity through the air outlet 332, thereby causing the flexible member 31 to bulge downward.

[0045] In this embodiment, the composite pressing head mechanism also includes a vibrator 5 disposed on the connecting seat 2. The vibrator 5 can be a frequency converter or an ultrasonic generator. When the pressing plate 32 presses the seed crystal, the vibration of the vibrator 5 can better homogenize the adhesive and expel the adhesive layer gas, making the seed crystal and the seed crystal seat more tightly and uniformly bonded, achieving bubble-free, uniform and tight bonding of the silicon carbide seed crystal, and improving the bonding quality.

[0046] Working principle:

[0047] Before applying pressure, air is injected into the cavity through the air inflation device 43, causing the flexible member 31 to bulge downwards, and controlling the center position of the flexible member 31 to be directly above the center position of the seed crystal.

[0048] During pressure application, the composite pressure head mechanism moves downward, and the center point of the flexible element 31 contacts the center point of the seed crystal first. As the composite pressure head mechanism continues to move downward, the flexible element 31 gradually applies pressure to the seed crystal from the inside out, expelling the gas between the seed crystal and the seed crystal seat. Continuing to move the composite pressure head mechanism downward, the pressure plate 32, under the action of the elastic element 34, becomes parallel to the horizontal plane at its lower end, thus pressing horizontally onto the flexible element 31 and applying pressure to the seed crystal. During the pressure application process, the pressure plate 32 can adaptively rotate and, under the action of the elastic element 34, maintains planar pressure on the seed crystal. Simultaneously, the vibrator 5 is activated to vibrate the seed crystal, which better homogenizes the adhesive and expels gas from the adhesive layer, resulting in a tight bond of the silicon carbide seed crystal, achieving a bubble-free, uniform, and tight bond. During pressure application, the safety valve 42 provides automatic overpressure relief protection within the cavity, thereby improving the service life of the flexible element 31 and the overall safety of the device.

[0049] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A composite pressure head mechanism for seed crystal bonding, characterized in that, include: Compression bar (1); Connecting seat (2), the connecting seat (2) is connected to the bottom of the pressure rod (1); The pressure head (3) includes a flexible element (31), a pressure plate (32), and an elastic element (34). The flexible element (31) is disposed at the bottom of the connecting seat (2) and forms a cavity with the connecting seat (2). The flexible element (31) has a downward protruding pressure state. The pressure plate (32) is rotatably disposed in the cavity. The elastic element (34) is connected between the pressure plate (32) and the connecting seat (2) and has multiple elastic elements disposed around the pressure plate (32). The lower end face of the pressure plate (32) is parallel to the horizontal plane. A gas filling / draining assembly (4) is provided on the connecting seat (2) or the pressure rod (1) for introducing or releasing gas into the cavity.

2. The composite pressure head mechanism for seed crystal bonding according to claim 1, characterized in that, The elastic element (34) has 3 to 6 evenly arranged around the center line (a) of the pressure plate (32), wherein the center line (a) of the pressure plate (32) is a line perpendicular to the pressure plate (32) and passes through the center of the pressure plate (32); and / or, The elastic element (34) is a spring.

3. The composite pressure head mechanism for seed crystal bonding according to claim 1, characterized in that, The composite pressure head mechanism also includes a vibrator (5) disposed on the connecting seat (2).

4. The composite pressure head mechanism for seed crystal bonding according to claim 3, characterized in that, The vibrator (5) is a frequency converter or an ultrasonic generator.

5. The composite pressure head mechanism for seed crystal bonding according to claim 1, characterized in that, The pressure head (3) also includes a connector (33), one end of which is connected to the connecting seat (2), and the other end is spherically hinged to the upper surface of the pressure plate (32).

6. The composite pressure head mechanism for seed crystal bonding according to claim 1, characterized in that, The connecting seat (2) has a through hole, the pressure rod (1) has an inflation / deflation channel connected to the through hole, the inflation / deflation assembly (4) is disposed on the pressure rod (1), the inflation / deflation assembly (4) includes an air pipe (41) connected to the inflation / deflation channel of the pressure rod (1), a safety valve (42) disposed on the air pipe (41), and an inflation device (43) for inflating the air pipe (41).

7. The composite pressure head mechanism for seed crystal bonding according to claim 6, characterized in that, The inflation device (43) is a vacuum pump. The air inlet of the vacuum pump is connected to an air compressor or an air storage tank, and the air outlet is connected to the air pipe (41).

8. The composite pressure head mechanism for seed crystal bonding according to claim 1, characterized in that, When the flexible element (31) is under pressure, the flexible element (31) takes on a spherical shape; and / or, The flexible component (31) is made of rubber.

9. The composite pressure head mechanism for seed crystal bonding according to claim 1, characterized in that, The center lines (a) of the pressure rod (1), the connecting seat (2), and the pressure plate (32) are collinear and pass through the lowest point of the downward protrusion of the flexible member (31).

10. The composite pressure head mechanism for seed crystal bonding according to claim 1, characterized in that, The connecting seat (2) has a hollow cavity (21) with an opening at the bottom.

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