Nitrogen control system of vacuum furnace

Abstract

The utility model relates to the technical field of vacuum furnaces. A vacuum furnace nitrogen control system comprises a vacuum furnace, a compressed nitrogen tank, a temperature processing mechanism, a first nitrogen tank and a second nitrogen tank, a compressed nitrogen inlet end of the temperature processing mechanism is connected with the compressed nitrogen tank, a first temperature outlet end of the temperature processing mechanism is connected with a first nitrogen inlet pipe of the first nitrogen tank, and a second temperature outlet end of the temperature processing mechanism is connected with a second nitrogen inlet pipe of the second nitrogen tank. A first nitrogen outlet pipe of the first nitrogen tank is connected with the vacuum furnace, and a second nitrogen outlet pipe of the second nitrogen tank is connected with the vacuum furnace. The device has the advantages of being simple in structure, high in reliability, low in maintenance cost, high in energy utilization efficiency and capable of achieving effective utilization of energy and reducing energy cost.

Description

Technical Field

[0001] This utility model relates to the field of vacuum furnace technology, and in particular to a nitrogen control system for a vacuum furnace. Background Technology

[0002] A vacuum gate valve is a valve used to isolate vacuum pipelines and block airflow; it is an important vacuum component. Semiconductor chip packaging requires a vacuum environment, typically achieved using a vacuum reflow oven. Existing vacuum reflow ovens have multiple temperature zones: a preheating zone, a soldering zone, and a cooling zone. The preheating zone uses nitrogen protection, but is not a completely oxygen-free environment; the soldering zone is a vacuum environment. After chip soldering, the door connecting the soldering zone and the cooling zone opens, allowing the chip to move from the soldering zone to the cooling zone. Simultaneously, the door connecting the soldering zone and the preheating zone opens, sending the preheated chip into the soldering zone for soldering. Thus, during the transition from one soldering process to the next, the front and rear doors of the soldering zone must open simultaneously, disrupting the vacuum environment of the soldering zone.

[0003] Existing vacuum furnaces have complex structures, low reliability, high maintenance costs, and low nitrogen energy utilization efficiency, thus failing to achieve effective energy utilization. Summary of the Invention

[0004] This invention provides a nitrogen control system for a vacuum furnace, which solves the problems of complex structure, low reliability, high maintenance cost, and low nitrogen energy utilization efficiency in the prior art, thus failing to achieve effective energy utilization.

[0005] A nitrogen control system for a vacuum furnace includes a vacuum furnace, a compressed nitrogen tank, a temperature processing mechanism, a first nitrogen tank, and a second nitrogen tank. The compressed nitrogen inlet of the temperature processing mechanism is connected to the compressed nitrogen tank, the first temperature outlet of the temperature processing mechanism is connected to the first nitrogen inlet pipe of the first nitrogen tank, the second temperature outlet of the temperature processing mechanism is connected to the second nitrogen inlet pipe of the second nitrogen tank, the first nitrogen outlet pipe of the first nitrogen tank is connected to the vacuum furnace, and the second nitrogen outlet pipe of the second nitrogen tank is connected to the vacuum furnace.

[0006] According to the nitrogen control system of the vacuum furnace of this utility model, the temperature at the first temperature outlet is lower than the temperature at the second temperature outlet.

[0007] According to the nitrogen control system for a vacuum furnace of this utility model, the temperature handling mechanism includes a vortex tube.

[0008] The nitrogen control system for the vacuum furnace according to this utility model further includes a cooling mechanism and a heating mechanism, wherein a cooling mechanism is provided at the first temperature outlet end and a heating mechanism is provided at the second temperature outlet end.

[0009] According to the nitrogen control system for a vacuum furnace of this utility model, the second nitrogen tank includes an inner cylinder, an outer cylinder, a temperature sensor, a ceramic heater, a heating layer, and an insulation layer; the temperature sensor is disposed inside the inner cylinder, the heating layer is disposed on the outer layer of the inner cylinder, the insulation layer is disposed on the outer layer of the heating layer, the ceramic heater heats the heating layer, and the outer cylinder is disposed outside the insulation layer.

[0010] The nitrogen control system for the vacuum furnace according to this utility model further includes a second pressure sensor and a second safety valve; the second pressure sensor and the second safety valve are disposed on the top of the inner cylinder of the second nitrogen tank.

[0011] According to the nitrogen control system of the vacuum furnace of this utility model, when the vacuum furnace is an online vacuum furnace, the first nitrogen outlet pipe of the first nitrogen tank is connected to the cooling zone of the vacuum furnace, and the second nitrogen outlet pipe of the second nitrogen tank is connected to the preheating zone and the welding zone of the vacuum furnace.

[0012] The nitrogen control system for the vacuum furnace according to this utility model further includes a first pressure sensor and a first safety valve; the first pressure sensor and the first safety valve are disposed on the top of the first nitrogen tank.

[0013] The vacuum furnace nitrogen control system according to this utility model also includes a first nitrogen tank insulation layer, wherein the first nitrogen tank is provided with the first nitrogen tank insulation layer.

[0014] The nitrogen control system for a vacuum furnace according to this utility model further includes a first switching valve and a second switching valve; the first switching valve is provided at the first nitrogen outlet pipe, and the second switching valve is provided at the second nitrogen outlet pipe.

[0015] The temperature handling mechanism of this invention preferably uses a vortex tube, which has a simple structure, high reliability, and low maintenance cost. It also boasts high energy efficiency, achieving effective energy utilization and reducing energy costs. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a three-dimensional structural diagram of the nitrogen control system for a vacuum furnace.

[0018] Figure 2 This is a schematic diagram of the main view structure of the second nitrogen tank.

[0019] Figure 3 This is a three-dimensional structural diagram of the second nitrogen tank;

[0020] Figure 4 This is a cross-sectional view of the second nitrogen tank.

[0021] Reference numerals: 1. First nitrogen tank; 2. Temperature handling mechanism; 3. Second nitrogen tank; 11. First nitrogen outlet pipe; 12. First pressure sensor; 13. First nitrogen inlet pipe; 14. First safety valve; 21. First temperature outlet end; 22. Compressed nitrogen inlet end; 23. Second temperature outlet end; 31. Second nitrogen outlet pipe; 32. Second nitrogen inlet pipe; 33. Second safety valve; 34. Second pressure sensor; 35. Ceramic heater; 36. Temperature sensor; 37. Heating layer; 38. Insulation layer; 391. Inner cylinder of the second nitrogen tank; 392. Outer cylinder of the second nitrogen tank. Detailed Implementation

[0022] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0023] In the description of the embodiments of this utility model, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this utility model. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0024] In the description of the embodiments of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this utility model based on the specific circumstances.

[0025] In this embodiment of the utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0026] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0027] The following is combined Figure 1-4 This invention describes a nitrogen control system for a vacuum furnace, comprising a vacuum furnace, a compressed nitrogen tank, a temperature processing mechanism 2, a first nitrogen tank 1, and a second nitrogen tank 3. The compressed nitrogen inlet 22 of the temperature processing mechanism 2 is connected to the compressed nitrogen tank, the first temperature outlet 21 of the temperature processing mechanism 2 is connected to the first nitrogen inlet pipe 13 of the first nitrogen tank 1, the second temperature outlet 23 of the temperature processing mechanism 2 is connected to the second nitrogen inlet pipe 32 of the second nitrogen tank 3, the first nitrogen outlet pipe 11 of the first nitrogen tank 1 is connected to the vacuum furnace, and the second nitrogen outlet pipe 31 of the second nitrogen tank 3 is connected to the vacuum furnace.

[0028] Temperature processing unit 2 processes compressed nitrogen into high-temperature nitrogen and low-temperature nitrogen.

[0029] In some embodiments, the temperature of the first temperature outlet 21 is lower than the temperature of the second temperature outlet 23. That is, the first temperature outlet 21 is for cooling nitrogen.

[0030] In some embodiments, the temperature processing mechanism 2 includes a vortex tube. Compressed nitrogen gas is separated into hot nitrogen gas and cold nitrogen gas through the vortex tube.

[0031] In some embodiments, a cooling mechanism and a heating mechanism are also included, with a cooling mechanism provided at the first temperature outlet end 21 and a heating mechanism provided at the second temperature outlet end 23.

[0032] In some embodiments, the second nitrogen tank 3 includes an inner tank 391, an outer tank 392, a temperature sensor 36, a ceramic heater 35, a heating layer 37, and an insulation layer 38. The temperature sensor 36, preferably a thermocouple, is disposed inside the inner tank 391. The heating layer 37 is disposed outside the inner tank 391, and the insulation layer 38 is disposed outside the heating layer 37. The ceramic heater 35 heats the heating layer 37, and the outer tank 392 is disposed outside the insulation layer 38. The second nitrogen tank 3 can also be filled with formic acid, and a mixture of formic acid and nitrogen is filled into a vacuum furnace.

[0033] In some embodiments, a second pressure sensor 34 and a second safety valve 33 are also included; the second pressure sensor 34 and the second safety valve 33 are disposed on the top of the inner cylinder 392 of the second nitrogen tank.

[0034] In some embodiments, when the vacuum furnace is an online vacuum furnace, the first nitrogen outlet pipe 11 of the first nitrogen tank 1 is connected to the cooling zone of the vacuum furnace, and the second nitrogen outlet pipe 31 of the second nitrogen tank 3 is connected to the preheating zone and the welding zone of the vacuum furnace.

[0035] In some embodiments, a first pressure sensor 12 and a first safety valve 14 are also included; the first pressure sensor 12 and the first safety valve 14 are disposed on the top of the first nitrogen tank 1. When the pressure inside the first nitrogen tank 1 is greater than a preset value, the first pressure sensor 12 indicates that the first safety valve 14 is depressurizing.

[0036] In some embodiments, a first nitrogen tank insulation layer is also included, wherein the first nitrogen tank 1 is provided with the first nitrogen tank insulation layer. Cooling nitrogen is maintained at a low temperature through the first nitrogen tank insulation layer.

[0037] In some embodiments, a first switching valve and a second switching valve are also included; the first switching valve is provided at the first nitrogen outlet pipe 11, and the second switching valve is provided at the second nitrogen outlet pipe 31.

[0038] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A nitrogen control system for a vacuum furnace, characterized in that, The system includes a vacuum furnace, a compressed nitrogen tank, a temperature treatment mechanism, a first nitrogen tank, and a second nitrogen tank. The compressed nitrogen inlet of the temperature treatment mechanism is connected to the compressed nitrogen tank, the first temperature outlet of the temperature treatment mechanism is connected to the first nitrogen inlet pipe of the first nitrogen tank, the second temperature outlet of the temperature treatment mechanism is connected to the second nitrogen inlet pipe of the second nitrogen tank, the first nitrogen outlet pipe of the first nitrogen tank is connected to the vacuum furnace, and the second nitrogen outlet pipe of the second nitrogen tank is connected to the vacuum furnace.

2. The vacuum furnace nitrogen control system according to claim 1, characterized in that, The temperature at the first temperature outlet is lower than the temperature at the second temperature outlet.

3. The vacuum furnace nitrogen control system according to claim 1, characterized in that, The temperature processing mechanism includes a vortex tube.

4. The vacuum furnace nitrogen control system according to claim 1, characterized in that, It also includes a cooling mechanism and a heating mechanism, with a cooling mechanism provided at the first temperature outlet end and a heating mechanism provided at the second temperature outlet end.

5. The vacuum furnace nitrogen control system according to claim 1, characterized in that, The second nitrogen tank includes a second nitrogen tank inner container, a second nitrogen tank outer container, a temperature sensor, a ceramic heater, a heating layer, and an insulation layer; the temperature sensor is installed inside the second nitrogen tank inner container, the heating layer is installed on the outer layer of the second nitrogen tank inner container, the insulation layer is installed on the outer layer of the heating layer, the ceramic heater heats the heating layer, and the second nitrogen tank outer container is installed on the outer side of the insulation layer.

6. The vacuum furnace nitrogen control system according to claim 5, characterized in that, It also includes a second pressure sensor and a second safety valve; the second pressure sensor and the second safety valve are installed at the top of the inner cylinder of the second nitrogen tank.

7. The vacuum furnace nitrogen control system according to claim 1, characterized in that, When the vacuum furnace is an online vacuum furnace, the first nitrogen outlet pipe of the first nitrogen tank is connected to the cooling zone of the vacuum furnace, and the second nitrogen outlet pipe of the second nitrogen tank is connected to the preheating zone and welding zone of the vacuum furnace.

8. The vacuum furnace nitrogen control system according to claim 1, characterized in that, It also includes a first pressure sensor and a first safety valve; the first pressure sensor and the first safety valve are disposed on the top of the first nitrogen tank.

9. The vacuum furnace nitrogen control system according to claim 1, characterized in that, It also includes a first nitrogen tank insulation layer, wherein the first nitrogen tank is provided with the first nitrogen tank insulation layer.

10. The nitrogen control system for a vacuum furnace according to claim 1, characterized in that, It also includes a first switching valve and a second switching valve; the first switching valve is installed at the first nitrogen outlet pipe, and the second switching valve is installed at the second nitrogen outlet pipe.

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