Adjustable PN junction depth measuring plate

Abstract

The utility model relates to the technical field of PN junction depth measurement, and discloses an adjustable PN junction depth measuring plate, which comprises a stainless steel grinding plate, an adjusting notch is arranged on the stainless steel grinding plate in a penetrating manner, the adjusting notch is positioned at the position of a central line, a stainless steel cone is arranged below the adjusting notch, a stud is mounted on the top surface of the stainless steel cone, and the top surface of the stainless steel cone is provided with a groove. The stud penetrates through the adjusting notch and extends upwards, and the stud is in external threaded connection with a nut. The angle and the position of the measuring plate can be conveniently adjusted through the cooperative use of the adjusting notch and the stud, so that the measuring device is suitable for samples of different sizes and shapes, and the application range and the flexibility of measurement are improved. The adjustable design allows a user to accurately adjust the measuring plate as required to obtain the optimal measuring condition, thereby improving the accuracy and repeatability of the measuring result. Due to the adjustability of the measuring plate, the measuring plate can be quickly adjusted to a proper measuring position, so that the preparation time before measurement is reduced, and the overall measuring speed is improved.

Description

Technical Field

[0001] This utility model relates to the field of PN junction depth measurement technology, specifically an adjustable PN junction depth measurement board. Background Technology

[0002] In the manufacturing process of semiconductor devices, the junction depth of the PN junction has a crucial impact on device performance. Measuring the junction depth is of great significance for ensuring device quality and optimizing the process flow. Traditional methods for measuring PN junction depth include chemical etching, scanning electron microscopy, and secondary ion mass spectrometry. Each of these methods has its advantages and disadvantages, but they all have certain limitations, such as complex operation, high cost, and slow measurement speed.

[0003] Existing PN junction depth measurement plates typically include a base for supporting the sample and a probe for applying the measurement signal. However, the base of these plates is mostly a fixed design, and its position and angle cannot be adjusted, which limits the applicability and flexibility of the measurement plate. When measuring samples of different sizes or shapes, the fixed base of the measurement plate often fails to provide optimal measurement conditions, affecting the accuracy and repeatability of the measurement results.

[0004] Therefore, based on the above-mentioned technical problems, it is necessary for those skilled in the art to develop an adjustable PN junction depth measurement board. Utility Model Content

[0005] The purpose of this invention is to provide an adjustable PN junction depth measurement board to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] An adjustable PN junction depth measuring plate technical solution includes a stainless steel grinding plate, an adjustment slot is provided through the stainless steel grinding plate and the adjustment slot is located at the center line position, a stainless steel cone is provided below the adjustment slot, a stud is installed on the top surface of the stainless steel cone, the stud passes through the adjustment slot and extends upward, and a nut is connected to the external thread of the stud.

[0008] As a preferred technical solution, a washer is fitted around the stud below the nut, and the washer and the opposing surfaces of the stainless steel cone abut against the stainless steel grinding plate.

[0009] As a preferred technical solution, a conical rubber pad is installed on the top surface of the stainless steel cone, and a gasket rubber pad is installed on the bottom surface of the gasket.

[0010] As a preferred technical solution, the stud is slidably connected to the adjusting slot for sliding guidance.

[0011] As a preferred technical solution, both the conical rubber pad and the gasket pad are made of silicone rubber to ensure good insulation performance and high temperature resistance during the measurement process.

[0012] As a preferred technical solution, the surface of the stainless steel grinding plate is a smooth surface to ensure the flatness and smoothness of the measuring plate, thereby improving the measurement accuracy.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] This invention relates to an adjustable PN junction depth measuring plate. By adjusting the slot and stud, the angle and position of the measuring plate can be easily adjusted to accommodate samples of different sizes and shapes, thereby improving the applicability and flexibility of the measurement.

[0015] The adjustable design allows users to precisely adjust the measuring plate as needed to obtain optimal measurement conditions, thereby improving the accuracy and repeatability of measurement results. Due to the adjustability of the measuring plate, it can be quickly adjusted to a suitable measurement position, reducing preparation time and thus increasing overall measurement speed. Even after long-term use, the measurement angle can be kept stable by adjusting the position of the cone, ensuring consistent measurement results.

[0016] Compared with traditional measurement methods, this invention simplifies the operation process, reduces operational complexity, and decreases the skill requirements for operators. Because this invention improves measurement efficiency and accuracy, it reduces material waste and repetitive work caused by inaccurate measurements, thereby lowering the overall measurement cost. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of an adjustable PN junction depth measurement plate;

[0018] Figure 2 This is a schematic diagram of a stainless steel conical structure for an adjustable PN junction depth measuring plate.

[0019] In the attached diagram, the following are the reference numerals: 1. Stainless steel grinding plate; 11. Adjustment groove; 2. Stainless steel cone; 21. Conical rubber pad; 3. Stud; 4. Washer; 41. Washer rubber pad; 5. Nut. Detailed Implementation

[0020] The features and exemplary embodiments of various aspects of this utility model will now be described in detail. To make the objectives, technical solutions, and advantages of this utility model clearer, the following description, in conjunction with the accompanying drawings and specific embodiments, will provide a further detailed description. For those skilled in the art, this utility model can be implemented without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of this utility model by illustrating examples.

[0021] like Figure 1 , Figure 2 As shown, this utility model provides a technical solution for an adjustable PN junction depth measuring plate: it includes a stainless steel grinding plate 1, on which an adjustment slot 11 is provided through, and the adjustment slot 11 is located at the center line. A stainless steel cone 2 is provided below the adjustment slot 11, and a stud 3 is installed on the top surface of the stainless steel cone 2. The stud 3 passes through the adjustment slot 11 and extends upward, and a nut 5 is connected to the external thread of the stud 3.

[0022] The stud 3 below the nut 5 is fitted with a washer 4, and the opposing surfaces of the washer 4 and the stainless steel cone 2 abut against the stainless steel grinding plate 1. A gasket 41 is installed on the bottom surface of the washer 4 to ensure good insulation performance during the measurement process.

[0023] The top surface of the stainless steel cone 2 is equipped with a conical rubber pad 21 to reduce damage to the sample during measurement and ensure the accuracy of the measurement.

[0024] To ensure the stability and repeatability of the measuring plate, the stud 3 is slidably connected to the adjustment slot 11 for sliding guidance, facilitating the adjustment of the measuring plate's position.

[0025] Both the conical rubber pad 21 and the gasket rubber pad 41 are made of silicone rubber. This material has good insulation properties and high temperature resistance, ensuring stable performance even in high temperature measurement environments.

[0026] The stainless steel grinding plate 1 has a smooth surface to ensure the flatness and smoothness of the measuring plate, thereby improving the measurement accuracy.

[0027] In practical applications, a stainless steel grinding plate 1 is attached, a stainless steel cone 2 is used to fix its position, and the stainless steel grinding plate 1 is swung to rub against diamond abrasive to grind its left and right angles. Then, it is stained with copper sulfate solution and observed under a microscope. The depth of the knot is determined based on the proportional relationship.

[0028] The working principle and usage process of this utility model: After assembling each component of this solution in sequence, work according to the above implementation methods according to actual needs to complete all working steps.

[0029] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

[0030] In the description of this utility model, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "side", "top", "inner", "front", "center", "both ends", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0031] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "setting", "connection", "fixing", "screw connection", etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0032] The embodiments described above are not exhaustive, nor do they limit the invention to specific implementations. Clearly, many modifications and variations can be made based on the above description. These embodiments are selected and specifically described in this specification to better explain the principles and practical applications of the invention, enabling those skilled in the art to effectively utilize the invention and its modifications. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the invention should be included within the protection scope of the invention.

Claims

1. An adjustable PN junction depth measuring plate, characterized in that, The device includes a stainless steel grinding plate (1), on which an adjustment slot (11) is provided, and the adjustment slot (11) is located at the center line. A stainless steel cone (2) is provided below the adjustment slot (11), and a stud (3) is installed on the top surface of the stainless steel cone (2). The stud (3) passes through the adjustment slot (11) and extends upward. A nut (5) is connected to the external thread of the stud (3).

2. The adjustable PN junction depth measuring plate according to claim 1, characterized in that: The stud (3) below the nut (5) is fitted with a washer (4), and the opposite surfaces of the washer (4) and the stainless steel cone (2) abut against the stainless steel grinding plate (1).

3. The adjustable PN junction depth measuring plate according to claim 2, characterized in that: The top surface of the stainless steel cone (2) is fitted with a cone rubber pad (21), and the bottom surface of the gasket (4) is fitted with a gasket rubber pad (41).

4. The adjustable PN junction depth measuring plate according to claim 1, characterized in that: The stud (3) is slidably connected to the adjusting slot (11) for sliding guidance.

5. An adjustable PN junction depth measuring plate according to claim 3, characterized in that: Both the conical rubber pad (21) and the gasket rubber pad (41) are made of silicone rubber.

6. An adjustable PN junction depth measuring plate according to claim 1, characterized in that: The surface of the stainless steel grinding plate (1) is a smooth surface.

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