Capacitance film vacuum gauge with air inlet dust cover

Abstract

The utility model relates to the technical field of capacitive film vacuum gauges, and discloses a capacitive film vacuum gauge with an air inlet dust cover, which comprises a vacuum gauge main body, the bottom surface of the vacuum gauge main body is fixedly communicated with an air inlet pipe, and a protection mechanism is arranged in the air inlet pipe; the protection mechanism comprises a fixing plate, the outer surface of the fixing plate is fixedly connected with the inner wall of the air inlet pipe, the bottom face of the fixing plate is fixedly connected with an electromagnet, the inner wall of the air inlet pipe is fixedly connected with a fixing ring and a connecting ring, air inlets arranged at equal intervals are formed in the outer surface of the connecting ring, and an annular filter screen is fixedly connected to the upper surface of the fixing ring. The capacitive film vacuum gauge with the air inlet dust cover can protect the air inlet of the capacitive film vacuum gauge when the capacitive film vacuum gauge is not used, so that pollutants are not easy to enter the air inlet of the capacitive film vacuum gauge when the capacitive film vacuum gauge is not used, the capacitive film vacuum gauge is not easy to pollute and erode, and the service life of the capacitive film vacuum gauge is prolonged.

Description

Technical Field

[0001] This utility model relates to the field of capacitive thin-film vacuum gauge technology, specifically a capacitive thin-film vacuum gauge with an air inlet dust cover. Background Technology

[0002] Capacitive thin-film vacuum gauges are based on the principle that the elastic sensing diaphragm strains under pressure difference, causing a change in capacitance. They mainly consist of two parts: a capacitive thin-film gauge and a measuring instrument. Compared with other low-vacuum measuring instruments, capacitive thin-film vacuum gauges have the following characteristics: they measure total pressure regardless of the type of gas being measured; their sensitivity is the same for various gases and vapors; they have a fast dynamic response time; they have a wide measurement range; they can achieve long-distance pressure measurement and control; and their output electrical signal can be connected to a cable of hundreds of meters to achieve long-distance measurement of vacuum systems.

[0003] The existing utility model with authorization announcement number CN220853990U discloses a novel capacitive thin film vacuum gauge, including a vacuum gauge body. A protective frame one and a protective frame two are provided on one side of the vacuum gauge body. A heat-conducting plate is provided on the protective frame one. A storage frame is fixedly installed on the outer wall of one side of the protective frame one. A heat-conducting coil is provided inside the protective frame one. Both ends of the heat-conducting coil extend into the storage frame.

[0004] The above technical solution, through the arrangement of the storage frame, heat-conducting plate, heat-conducting coil, and heating rod, allows heat to be transferred through the water flow when water is stored in the storage frame, thus keeping the vacuum gauge body in a suitable temperature environment and ensuring the measurement accuracy of the vacuum gauge body. However, with the above technical solution, the air inlet of the capacitive thin-film vacuum gauge is in a state of long-term exposure during use. The gas to be measured directly enters the interior of the capacitive thin-film vacuum gauge through the air inlet, causing dust and other impurities to contaminate the internal membrane of the capacitive thin-film vacuum gauge, affecting the measurement accuracy of the capacitive thin-film vacuum gauge. Furthermore, because the air inlet of the capacitive thin-film vacuum gauge is exposed for a long time, it cannot be protected when not in use, resulting in contaminants entering the air inlet of the capacitive thin-film vacuum gauge during periods of non-use, causing contamination and corrosion to the capacitive thin-film vacuum gauge, and affecting the service life of the capacitive thin-film vacuum gauge.

[0005] Therefore, those skilled in the art have provided a capacitive thin-film vacuum gauge with an air inlet dust cover to solve the problems mentioned in the background art. Utility Model Content

[0006] The purpose of this invention is to provide a capacitive thin-film vacuum gauge with an air inlet dust cover to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, this utility model provides the following technical solution:

[0008] A capacitive thin-film vacuum gauge with an air inlet dust cover includes a vacuum gauge body, an air inlet pipe fixedly connected to the bottom surface of the vacuum gauge body, and a protective mechanism provided inside the air inlet pipe.

[0009] The protective mechanism includes a fixed plate, the outer surface of which is fixedly connected to the inner wall of the air intake pipe. An electromagnet is fixedly connected to the bottom surface of the fixed plate. A fixed ring and a connecting ring are fixedly connected to the inner wall of the air intake pipe. An air intake port with equal spacing is opened on the outer surface of the connecting ring. An annular filter is fixedly connected to the upper surface of the fixed ring. The outer surface of the annular filter is fixedly connected to the inner wall of the connecting ring. A sealing plug is slidably connected inside the annular filter. An iron plate is fixedly embedded on the upper surface of the sealing plug. Two positioning plates are fixedly connected to the inner wall of the air intake pipe. A compression spring is fixedly connected to the bottom surface of each of the two positioning plates. A support plate is fixedly connected to the bottom end of each of the two compression springs. The inner walls of the two support plates are fixedly connected to the outer surface of the sealing plug. The bottom surfaces of the two support plates are in contact with the upper surface of the connecting ring.

[0010] As a further improvement of this utility model: the outer surface of the air intake pipe is fixedly connected to a mounting flange, and the upper surface of the mounting flange is provided with a plurality of mounting through holes.

[0011] As a further improvement of this utility model: a rubber sealing ring is fixedly connected to the inner wall of the mounting flange, and the upper surface of the rubber sealing ring is fixedly connected to the bottom surface of the air inlet pipe.

[0012] As a further improvement of this utility model: two stabilizing blocks are fixedly connected to the upper surface of the fixing plate, and the two stabilizing blocks are fixedly connected to the inner wall of the air intake pipe on opposite sides.

[0013] As a further embodiment of this utility model: an annular scraper is fixedly connected to the bottom surface of the sealing plug, and the outer surface of the annular scraper is in contact with the inner wall of the annular filter screen.

[0014] As a further embodiment of this utility model: a first rubber pad is fixedly connected to the upper surface of the iron plate, and a second rubber pad is fixedly connected to the bottom surface of the electromagnet.

[0015] As a further improvement of this utility model: each of the two compression springs is provided with a telescopic rod inside, the telescopic ends of the two telescopic rods are respectively fixedly connected to the upper surfaces of the two support plates, and the top ends of the two telescopic rods are respectively fixedly connected to the bottom surfaces of the two positioning plates.

[0016] Compared with the prior art, the beneficial effects of this utility model are:

[0017] This invention incorporates a protective mechanism that uses a fixed ring, an annular filter, and a connecting ring to filter the air entering the intake pipe. This provides a degree of dust protection to the intake port of the capacitive film vacuum gauge, ensuring its measurement accuracy. Furthermore, the magnetic force provided by an energized electromagnet, combined with an iron plate, allows the sealing plug to open smoothly, enabling air to enter the intake pipe through the annular filter. Simultaneously, the de-energization of the electromagnet and the spring force push the sealing plug to seal the annular filter, preventing prolonged exposure of the intake port. This protects the intake port when not in use, preventing contaminants from entering and causing pollution and corrosion, thus extending the lifespan of the capacitive film vacuum gauge. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of a capacitive thin-film vacuum gauge with an air inlet dust cover;

[0019] Figure 2 This is a three-dimensional cross-sectional view of the mounting flange in a capacitive thin-film vacuum gauge with an air inlet dust cover.

[0020] Figure 3 A cross-sectional three-dimensional structural diagram of the air inlet pipe in a capacitive thin-film vacuum gauge with an air inlet dust cover;

[0021] Figure 4 This is a cross-sectional three-dimensional structural diagram of a capacitive thin-film vacuum gauge with an air inlet dust cover after the sealing plug is opened.

[0022] In the diagram: 1. Vacuum gauge body; 2. Inlet pipe; 3. Protection mechanism; 301. Fixing plate; 302. Electromagnet; 303. Fixing ring; 304. Connecting ring; 305. Inlet; 306. Annular filter; 307. Sealing plug; 308. Iron plate; 309. Positioning plate; 310. Compression spring; 311. Support plate; 4. Mounting flange; 5. Mounting through hole; 6. Rubber sealing ring; 7. Stabilizing block; 8. Annular scraper; 9. First rubber pad; 10. Second rubber pad; 11. Telescopic rod. Detailed Implementation

[0023] Please see Figure 1-4 A capacitive thin-film vacuum gauge with an air inlet dust cover includes a vacuum gauge body 1. An air inlet pipe 2 is fixedly connected to the bottom surface of the vacuum gauge body 1. A protective mechanism 3 is provided inside the air inlet pipe 2. A mounting flange 4 is fixedly connected to the outer surface of the air inlet pipe 2. Several mounting through holes 5 are opened on the upper surface of the mounting flange 4. The mounting flange 4, together with the mounting through holes 5 and bolts and other fasteners, allows the vacuum gauge body 1 to be installed in the working position through the air inlet pipe 2, ensuring the normal operation of the vacuum pressure detection work of the vacuum gauge body 1.

[0024] The protection mechanism 3 includes a fixing plate 301. The outer surface of the fixing plate 301 is fixedly connected to the inner wall of the air inlet pipe 2. A rubber sealing ring 6 is fixedly connected to the inner wall of the mounting flange 4. The upper surface of the rubber sealing ring 6 is fixedly connected to the bottom surface of the air inlet pipe 2. The rubber sealing ring 6 can increase the sealing between the mounting flange 4 and the equipment under test after installation, making it difficult for gas to leak out through gaps, thus increasing the sealing effect of the mounting flange 4.

[0025] An electromagnet 302 is fixedly connected to the bottom surface of the fixed plate 301. A fixed ring 303 and a connecting ring 304 are fixedly connected to the inner wall of the air intake pipe 2. An air intake port 305 arranged at equal intervals is opened on the outer surface of the connecting ring 304. Two stabilizing blocks 7 are fixedly connected to the upper surface of the fixed plate 301. The two stabilizing blocks 7 are fixedly connected to the inner wall of the air intake pipe 2 on the side that is far away from each other. The stabilizing blocks 7 can increase the stability of the fixed plate 301, make the connection between the fixed plate 301 and the air intake pipe 2 tighter, and increase the pressure resistance of the fixed plate 301.

[0026] An annular filter screen 306 is fixedly connected to the upper surface of the fixed ring 303. The outer surface of the annular filter screen 306 is fixedly connected to the inner wall of the connecting ring 304. A sealing plug 307 is slidably connected inside the annular filter screen 306. An annular scraper 8 is fixedly connected to the bottom surface of the sealing plug 307. The outer surface of the annular scraper 8 is in contact with the inner wall of the annular filter screen 306. The annular scraper 8, in conjunction with the up-and-down movement of the sealing plug 307, can scrape away impurities adhering to the inner wall of the annular filter screen 306, making the annular filter screen 306 less prone to clogging by impurities and ensuring the effectiveness of the annular filter screen 306.

[0027] An iron plate 308 is fixedly embedded on the upper surface of the sealing plug 307. Two positioning plates 309 are fixedly connected to the inner wall of the air intake pipe 2. Compression springs 310 are fixedly connected to the bottom surface of both positioning plates 309. A first rubber pad 9 is fixedly connected to the upper surface of the iron plate 308. A second rubber pad 10 is fixedly connected to the bottom surface of the electromagnet 302. The first rubber pad 9 and the second rubber pad 10 can buffer the impact force when the iron plate 308 and the electromagnet 302 come into contact, and prevent the electromagnet 302 and the iron plate 308 from being damaged due to excessive impact force.

[0028] The bottom ends of the two compression springs 310 are fixedly connected to support plates 311. The inner walls of the two support plates 311 are fixedly connected to the outer surface of the sealing plug 307. The bottom surfaces of the two support plates 311 are in contact with the upper surface of the connecting ring 304. The interior of the two compression springs 310 is provided with telescopic rods 11. The telescopic ends of the two telescopic rods 11 are fixedly connected to the upper surfaces of the two support plates 311, and the top ends of the two telescopic rods 11 are fixedly connected to the bottom surfaces of the two positioning plates 309. The telescopic rods 11 can restrict the extension and retraction direction of the compression springs 310, so that they can only extend and retract up and down without excessive deviation, thus ensuring the reliability of the compression springs 310.

[0029] The working principle of this utility model is as follows: In use, the vacuum gauge body 1 and electromagnet 302 are first connected to an external power supply and controller. Then, using the mounting flange 4, mounting through-hole 5, and bolts, the vacuum gauge body 1 is installed in the working position through the air inlet pipe 2. When the vacuum gauge body 1 needs to detect the vacuum pressure of the device under test, the electromagnet 302 is energized and generates a suction force. This suction force allows the iron plate 308 to be attracted upwards onto the electromagnet 302. As the iron plate 308 moves upwards, the positioning plate 309 and support plate 311 force the compression spring 310 to accumulate elasticity, causing the sealing plug 307 to move upwards. At this time, the air from the device under test can be filtered through the annular filter 306 and enter the air inlet pipe 2 through the air inlet 305 on the connecting ring 304, ultimately entering the vacuum gauge body 1 for pressure detection. Because the annular filter 306 filters the air entering the air inlet pipe 2, the capacitive film... The vacuum gauge's air inlet has a certain dustproof function, ensuring the measurement accuracy of the capacitive film vacuum gauge. After the vacuum pressure detection is completed, the electromagnet 302 is disconnected from the power supply and loses its magnetic force. The iron plate 308 can then move downward under the elastic force of the compression spring 310 and separate from the electromagnet 302. At this time, the sealing plug 307 will also move downward until the support plate 311 contacts the upper surface of the connecting ring 304, and the sealing plug 307 is locked into the fixing ring 303, so that the sealing plug 307 completely seals the annular filter 306, preventing the air inlet of the capacitive film vacuum gauge from being exposed for a long time. This protects the air inlet of the capacitive film vacuum gauge when it is not in use, making it less likely for contaminants to enter the air inlet during non-use, thus increasing the service life of the capacitive film vacuum gauge. At the same time, when the sealing plug 307 moves downward, it will drive the annular scraper 8 to move downward, which can scrape off the impurities adhering to the inner wall of the annular filter 306, making the annular filter 306 less likely to be blocked by impurities.

[0030] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A capacitive thin-film vacuum gauge with an air inlet dust cover, comprising a vacuum gauge body (1), characterized in that: The bottom surface of the vacuum gauge body (1) is fixedly connected to an air inlet pipe (2), and a protective mechanism (3) is provided inside the air inlet pipe (2); The protection mechanism (3) includes a fixing plate (301), the outer surface of which is fixedly connected to the inner wall of the air intake pipe (2), an electromagnet (302) is fixedly connected to the bottom surface of the fixing plate (301), a fixing ring (303) and a connecting ring (304) are fixedly connected to the inner wall of the air intake pipe (2), the outer surface of the connecting ring (304) is provided with air inlets (305) arranged at equal intervals, the upper surface of the fixing ring (303) is fixedly connected to an annular filter (306), the outer surface of the annular filter (306) is fixedly connected to the inner wall of the connecting ring (304), and the annular filter (306) is fixedly connected to the inner wall of the connecting ring (304). A sealing plug (307) is slidably connected inside the filter screen (306). An iron plate (308) is fixedly embedded on the upper surface of the sealing plug (307). Two positioning plates (309) are fixedly connected to the inner wall of the air inlet pipe (2). A compression spring (310) is fixedly connected to the bottom surface of each of the two positioning plates (309). A support plate (311) is fixedly connected to the bottom end of each of the two compression springs (310). The inner walls of the two support plates (311) are fixedly connected to the outer surface of the sealing plug (307). The bottom surfaces of the two support plates (311) are in contact with the upper surface of the connecting ring (304).

2. A capacitive thin-film vacuum gauge with an air inlet dust cover according to claim 1, characterized in that: The outer surface of the air intake pipe (2) is fixedly connected to a mounting flange (4), and the upper surface of the mounting flange (4) is provided with several mounting through holes (5).

3. A capacitive thin-film vacuum gauge with an air inlet dust cover according to claim 2, characterized in that: A rubber sealing ring (6) is fixedly connected to the inner wall of the mounting flange (4), and the upper surface of the rubber sealing ring (6) is fixedly connected to the bottom surface of the air inlet pipe (2).

4. A capacitive thin-film vacuum gauge with an air inlet dust cover according to claim 1, characterized in that: Two stabilizing blocks (7) are fixedly connected to the upper surface of the fixing plate (301), and the two stabilizing blocks (7) are fixedly connected to the inner wall of the air intake pipe (2) on the side that is far away from each other.

5. A capacitive thin-film vacuum gauge with an air inlet dust cover according to claim 1, characterized in that: The bottom surface of the sealing plug (307) is fixedly connected to an annular scraper (8), and the outer surface of the annular scraper (8) is in contact with the inner wall of the annular filter screen (306).

6. A capacitive thin-film vacuum gauge with an air inlet dust cover according to claim 1, characterized in that: The upper surface of the iron plate (308) is fixedly connected to a first rubber pad (9), and the bottom surface of the electromagnet (302) is fixedly connected to a second rubber pad (10).

7. A capacitive thin-film vacuum gauge with an air inlet dust cover according to claim 1, characterized in that: Both compression springs (310) are equipped with telescopic rods (11) inside. The telescopic ends of the two telescopic rods (11) are fixedly connected to the upper surfaces of the two support plates (311), and the top ends of the two telescopic rods (11) are fixedly connected to the bottom surfaces of the two positioning plates (309).

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