Capacitance film vacuum gauge for high-temperature gas

Abstract

The utility model relates to the technical field of capacitance film vacuum gauges, and discloses a capacitance film vacuum gauge for high-temperature gas, which comprises a capacitance film vacuum gauge, the bottom surface of the capacitance film vacuum gauge is fixedly communicated with a gas inlet pipe, and a cooling mechanism is arranged outside the capacitance film vacuum gauge; the cooling mechanism comprises a heat preservation cylinder, the inner wall of the heat preservation cylinder is fixedly connected with the outer surface of the capacitance film vacuum gauge, the outer surface of the heat preservation cylinder is fixedly connected with a fixing cover, the outer surface of the heat preservation cylinder is sleeved with a heat dissipation copper pipe, and the air inlet end of the heat dissipation copper pipe fixedly communicates with an air supply pipe. The end, away from the heat dissipation copper pipe, of the air feeding pipe penetrates through the fixing cover and fixedly communicates with the outer surface of the air inlet pipe, and the air outlet end of the heat dissipation copper pipe fixedly communicates with a backflow pipe. According to the capacitance film vacuum gauge for the high-temperature gas, when the capacitance film vacuum gauge is used for carrying out vacuum pressure detection on the high-temperature gas, the temperature of the high-temperature gas can be well balanced, and the pressure detection precision of the capacitance film vacuum gauge is ensured.

Description

Technical Field

[0001] This utility model relates to the field of capacitive thin-film vacuum gauge technology, specifically a capacitive thin-film vacuum gauge for high-temperature gases. Background Technology

[0002] Capacitive thin-film vacuum gauges utilize the principle that a metal diaphragm deforms at different scales under varying pressures, causing a change in capacitance between the diaphragm and the electrodes. By measuring the change in capacitance, the change in air pressure on the metal diaphragm can be determined, thus enabling the detection of vacuum pressure.

[0003] A utility model patent with authorization announcement number CN209470807U discloses a capacitive thin-film vacuum gauge, including a housing, a detection diaphragm, a fixed substrate, and fixed electrodes. The housing has an accommodating space, and the detection diaphragm is fixed within the accommodating space, dividing the accommodating space into a detection chamber and a vacuum chamber. The fixed substrate is fixed within the vacuum chamber, and two fixed electrodes are fixedly disposed on the side of the fixed substrate facing the detection diaphragm.

[0004] The above technical solution arranges two fixed plates in a symmetrical and spaced manner, ensuring that a portion of each plate's area falls within the region of maximum deformation at the center of the detection diaphragm. This maximizes the two ΔC values, thereby increasing measurement accuracy and stability, improving the vacuum gauge's measurement precision and range, and enhancing its sensitivity and resolution. However, this technical solution cannot effectively balance the temperature of high-temperature gases during vacuum pressure detection. Since the capacitive thin-film vacuum gauge requires preheating and operation at a constant temperature above ambient to eliminate the impact of temperature differences on the diaphragm's mechanical properties, excessively hot gases can directly enter the gauge for detection, affecting its pressure detection accuracy.

[0005] Therefore, those skilled in the art have provided a capacitive thin-film vacuum gauge for high-temperature gases to solve the problems mentioned in the background art. Utility Model Content

[0006] The purpose of this invention is to provide a capacitive thin-film vacuum gauge for high-temperature gases, so as to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, this utility model provides the following technical solution:

[0008] A capacitive thin-film vacuum gauge for high-temperature gases includes a capacitive thin-film vacuum gauge, wherein an air inlet pipe is fixedly connected to the bottom surface of the capacitive thin-film vacuum gauge, and a cooling mechanism is provided on the outside of the capacitive thin-film vacuum gauge.

[0009] The cooling mechanism includes a heat-insulating cylinder. The inner wall of the heat-insulating cylinder is fixedly connected to the outer surface of a capacitive thin-film vacuum gauge. A fixing cover is fixedly connected to the outer surface of the heat-insulating cylinder. A heat-dissipating copper tube is sleeved on the outer surface of the heat-insulating cylinder. An air supply pipe is fixedly connected to the air inlet end of the heat-dissipating copper tube. The end of the air supply pipe away from the heat-dissipating copper tube passes through the fixing cover and is fixedly connected to the outer surface of the air inlet pipe. A return pipe is fixedly connected to the air outlet end of the heat-dissipating copper tube. The end of the return pipe away from the heat-dissipating copper tube passes through the fixing cover and the air inlet pipe in sequence and extends into the interior of the air inlet pipe. The outer surface of the heat-dissipating copper tube is fixedly connected to the heat-dissipating copper tube. A plurality of heat dissipation copper fins are connected, and the inner wall of each heat dissipation copper fin is fixedly connected to the outer surface of the heat insulation cylinder. A plurality of fixed cylinders are fixedly connected to the upper surface of the fixed cover, and a cooling fan is fixedly connected to the inner wall of each fixed cylinder. A coil is sleeved on the outer surface of the capacitive thin film vacuum gauge. A solenoid valve and a one-way valve are fixedly connected to the right side of the air supply pipe, respectively. The air outlet of the solenoid valve passes through the heat insulation cylinder and is fixedly connected to the air inlet of the coil. The air inlet of the one-way valve is fixedly connected to a connecting pipe, and the top end of the connecting pipe passes through the heat insulation cylinder and is fixedly connected to the air outlet of the coil.

[0010] As a further improvement of this utility model: the outer surface of the air intake pipe is fixedly connected to a mounting flange, and the upper surface of the mounting flange is provided with a plurality of mounting through holes.

[0011] As a further improvement of this utility model: the bottom surface of the fixed cover is provided with a plurality of exhaust ports, and the upper surface of the capacitor film vacuum gauge is fixedly connected with a connector.

[0012] As a further improvement of this utility model: a heat-conducting plate is fixedly connected to the outer surface of each of the heat dissipation copper plates, and the side of each heat-conducting plate away from the heat dissipation copper plate extends to the outside of the fixing cover.

[0013] As a further improvement of this utility model: each of the fixed cylinders has a baffle fixedly connected to its inner wall, each baffle is located above the cooling fan, and each baffle has an air inlet groove arranged at equal intervals on its upper surface.

[0014] As a further improvement of this utility model: a reinforcing ring is fixedly connected to the outer surface of the capacitor film vacuum gauge, and the outer surface of the reinforcing ring is fixedly connected to the inner wall of the heat preservation cylinder.

[0015] As a further improvement of this utility model: a number of reinforcing strips are fixedly connected to the outer surface of the coil, and the outer surface of each reinforcing strip is fixedly connected to the inner wall of the insulation cylinder.

[0016] Compared with the prior art, the beneficial effects of this utility model are:

[0017] This invention incorporates a cooling mechanism that utilizes the airflow from a cooling fan, along with heat dissipation copper fins and tubes, to rapidly reduce the temperature of the measured high-temperature gas. This prevents excessively hot gas from directly entering the capacitive thin-film vacuum gauge and causing excessive damage to its metal diaphragm. This ensures that the vacuum gauge can effectively balance the temperature of the high-temperature gas during vacuum pressure testing, guaranteeing the accuracy of the pressure measurement. Furthermore, a solenoid valve, in conjunction with a coil, allows some of the uncooled high-temperature gas to be introduced outside the vacuum gauge, using its external temperature to preheat the gauge. The gas is then reintroduced into the inlet pipe via a one-way valve for further cooling. This system balances the high-temperature gas temperature while reducing the preheating time of the vacuum gauge, enabling rapid vacuum pressure testing. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of a capacitive thin-film vacuum gauge for high-temperature gases;

[0019] Figure 2 This is a cross-sectional three-dimensional structural diagram of a fixed cover in a capacitive thin-film vacuum gauge used for high-temperature gases.

[0020] Figure 3 This is a cross-sectional three-dimensional structural diagram of a fixed cylinder in a capacitive thin-film vacuum gauge used for high-temperature gases.

[0021] Figure 4 This is a cross-sectional three-dimensional structural diagram of the insulation cylinder in a capacitive thin-film vacuum gauge used for high-temperature gases.

[0022] Figure 5 This is a cross-sectional three-dimensional structural diagram of the inlet pipe in a capacitive thin-film vacuum gauge used for high-temperature gases.

[0023] In the diagram: 1. Capacitive thin-film vacuum gauge; 2. Inlet pipe; 3. Cooling mechanism; 301. Insulation cylinder; 302. Fixing cover; 303. Heat dissipation copper pipe; 304. Air supply pipe; 305. Return pipe; 306. Fixing cylinder; 307. Cooling fan; 308. Coil; 309. Solenoid valve; 310. Connecting pipe; 311. Check valve; 312. Heat dissipation copper fin; 4. Mounting flange; 5. Mounting through hole; 6. Exhaust port; 7. Connector; 8. Heat-conducting plate; 9. Baffle; 10. Inlet slot; 11. Reinforcing ring; 12. Reinforcing strip. Detailed Implementation

[0024] Please see Figure 1-5A capacitive thin-film vacuum gauge for high-temperature gases includes a capacitive thin-film vacuum gauge 1. An inlet pipe 2 is fixedly connected to the bottom surface of the capacitive thin-film vacuum gauge 1. A cooling mechanism 3 is provided on the outside of the capacitive thin-film vacuum gauge 1. A mounting flange 4 is fixedly connected to the outer surface of the inlet pipe 2. Several mounting through holes 5 are opened on the upper surface of the mounting flange 4. The mounting flange 4, together with the mounting through holes 5 and bolts and other fasteners, can connect the inlet pipe 2 to the device under test, ensuring that the gas can smoothly enter the inside of the capacitive thin-film vacuum gauge 1 through the inlet pipe 2 for pressure detection.

[0025] The cooling mechanism 3 includes a heat preservation cylinder 301. The inner wall of the heat preservation cylinder 301 is fixedly connected to the outer surface of the capacitor film vacuum gauge 1. A fixing cover 302 is fixedly connected to the outer surface of the heat preservation cylinder 301. A heat dissipation copper pipe 303 is sleeved on the outer surface of the heat preservation cylinder 301. Several exhaust ports 6 are opened on the bottom surface of the fixing cover 302. A connector 7 is fixedly connected to the upper surface of the capacitor film vacuum gauge 1. The exhaust ports 6 can ensure the air circulation inside the fixing cover 302. The connector 7 can easily connect the capacitor film vacuum gauge 1 to the control system so that the capacitor film vacuum gauge 1 can be used normally.

[0026] The inlet end of the heat dissipation copper pipe 303 is fixedly connected to the air supply pipe 304. The end of the air supply pipe 304 away from the heat dissipation copper pipe 303 passes through the fixed cover 302 and is fixedly connected to the outer surface of the inlet pipe 2. The outlet end of the heat dissipation copper pipe 303 is fixedly connected to the return pipe 305. The outer surface of the capacitor film vacuum gauge 1 is fixedly connected to the reinforcing ring 11. The outer surface of the reinforcing ring 11 is fixedly connected to the inner wall of the heat insulation cylinder 301. The reinforcing ring 11 can increase the connection tightness between the capacitor film vacuum gauge 1 and the heat insulation cylinder 301, and ensure the fit strength between the capacitor film vacuum gauge 1 and the heat insulation cylinder 301.

[0027] The end of the return pipe 305 away from the heat dissipation copper pipe 303 passes through the fixed cover 302 and the air inlet pipe 2 in sequence and extends into the interior of the air inlet pipe 2. Several heat dissipation copper fins 312 are fixedly connected to the outer surface of the heat dissipation copper pipe 303. The inner wall of each heat dissipation copper fin 312 is fixedly connected to the outer surface of the heat insulation cylinder 301. A heat-conducting plate 8 is fixedly connected to the outer surface of each heat dissipation copper fin 312. The side of each heat-conducting plate 8 away from the heat dissipation copper fin 312 extends to the outside of the fixed cover 302. The heat-conducting plate 8 can assist the heat dissipation copper fin 312 in better heat dissipation and further improve the heat exchange efficiency of the heat dissipation copper fin 312.

[0028] The upper surface of the fixed cover 302 is fixedly connected to several fixed cylinders 306. A cooling fan 307 is fixedly connected to the inner wall of each fixed cylinder 306. A baffle 9 is fixedly connected to the inner wall of each fixed cylinder 306. Each baffle 9 is located above the cooling fan 307. The upper surface of each baffle 9 is provided with air inlet slots 10 arranged at equal intervals. The baffle 9, together with the air inlet slots 10, can prevent large impurities from entering the interior of the fixed cylinder 306 while ensuring that gas is smoothly drawn into the fixed cylinder 306, thus reducing the impact of impurities on the cooling fan 307.

[0029] A coil 308 is fitted onto the outer surface of the capacitive thin-film vacuum gauge 1. A solenoid valve 309 and a one-way valve 311 are fixedly connected to the right side of the air supply pipe 304. The outlet end of the solenoid valve 309 passes through the insulation cylinder 301 and is fixedly connected to the inlet end of the coil 308. The inlet end of the one-way valve 311 is fixedly connected to a connecting pipe 310. The top end of the connecting pipe 310 passes through the insulation cylinder 301 and is fixedly connected to the outlet end of the coil 308. Several reinforcing strips 12 are fixedly connected to the outer surface of the coil 308. The outer surface of each reinforcing strip 12 is fixedly connected to the inner wall of the insulation cylinder 301. The reinforcing strips 12 can fix the position of the coil 308, making the coil 308 more stable and reliable during use.

[0030] The working principle of this utility model is as follows: In use, first connect the capacitive thin-film vacuum gauge 1, cooling fan 307, and solenoid valve 309 to an external power supply and controller. Then, using the mounting flange 4, mounting through-hole 5, and bolts, connect the air inlet pipe 2 to the device under test. When the high-temperature gas to be measured enters the air inlet pipe 2, it first enters the heat dissipation copper pipe 303 through the air supply pipe 304, instead of directly entering the capacitive thin-film vacuum gauge 1. Utilizing the principle of heat exchange, the high-temperature gas entering the heat dissipation copper pipe 303 dissipates heat outward through the heat dissipation copper pipe 303, heat dissipation copper fins 312, and heat-conducting fins 8. Then, the airflow provided by the cooling fan 307, combined with the fixed cylinder 306, increases the airflow speed inside the fixed cover 302 via the exhaust port 6, further reducing the temperature of the high-temperature gas inside the heat dissipation copper pipe 303, allowing the high-temperature gas to pass through the heat dissipation copper pipe 303... When the gas re-enters the inlet pipe 2 through the return pipe 305, the temperature is significantly reduced. At this time, when it enters the capacitive thin-film vacuum gauge 1 for pressure detection, it can effectively prevent excessive influence on the metal diaphragm of the capacitive thin-film vacuum gauge 1. This allows the capacitive thin-film vacuum gauge 1 to effectively balance the temperature of the high-temperature gas when performing vacuum pressure detection, ensuring the pressure detection accuracy of the capacitive thin-film vacuum gauge 1. Furthermore, the solenoid valve 309 can be used to send a portion of the uncooled high-temperature gas from the gas supply pipe 304 into the coil 308, using the temperature of the high-temperature gas to preheat the capacitive thin-film vacuum gauge 1 externally. Then, the high-temperature gas is sent back to the gas supply pipe 304 through the connecting pipe 310 and the one-way valve 311 for subsequent cooling. This achieves temperature balance of the high-temperature gas while reducing the preheating time of the capacitive thin-film vacuum gauge 1, enabling it to quickly perform vacuum pressure detection.

[0031] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A capacitive thin-film vacuum gauge for high-temperature gases, comprising a capacitive thin-film vacuum gauge (1), characterized in that: The bottom surface of the capacitor film vacuum gauge (1) is fixedly connected to an air inlet pipe (2), and a cooling mechanism (3) is provided on the outside of the capacitor film vacuum gauge (1). The cooling mechanism (3) includes a heat-insulating cylinder (301). The inner wall of the heat-insulating cylinder (301) is fixedly connected to the outer surface of the capacitive thin-film vacuum gauge (1). A fixing cover (302) is fixedly connected to the outer surface of the heat-insulating cylinder (301). A heat-dissipating copper tube (303) is sleeved on the outer surface of the heat-insulating cylinder (301). An air supply pipe (304) is fixedly connected to the air inlet end of the heat-dissipating copper tube (303). The end of the air supply pipe (304) away from the heat-dissipating copper tube (303) passes through the fixing cover (302) and is fixedly connected to the outer surface of the air inlet pipe (2). A return pipe (305) is fixedly connected to the air outlet end of the heat-dissipating copper tube (303). The end of the return pipe (305) away from the heat-dissipating copper tube (303) passes through the fixing cover (302) and the air inlet pipe (2) in sequence and extends into the interior of the air inlet pipe (2). The outer surface of the heat-dissipating copper tube (303) is fixedly connected to the outer surface of the heat-dissipating copper tube (303). A number of heat dissipation copper fins (312) are fixedly connected, and the inner wall of each heat dissipation copper fin (312) is fixedly connected to the outer surface of the heat insulation cylinder (301). A number of fixed cylinders (306) are fixedly connected to the upper surface of the fixed cover (302), and a cooling fan (307) is fixedly connected to the inner wall of each fixed cylinder (306). A coil (308) is sleeved on the outer surface of the capacitor film vacuum gauge (1). A solenoid valve (309) and a one-way valve (311) are fixedly connected to the right side of the air supply pipe (304). The outlet end of the solenoid valve (309) passes through the heat insulation cylinder (301) and is fixedly connected to the inlet end of the coil (308). The inlet end of the one-way valve (311) is fixedly connected to a connecting pipe (310). The top end of the connecting pipe (310) passes through the heat insulation cylinder (301) and is fixedly connected to the outlet end of the coil (308).

2. A capacitive thin-film vacuum gauge for high-temperature gases according to claim 1, characterized in that: The outer surface of the air intake pipe (2) is fixedly connected to a mounting flange (4), and the upper surface of the mounting flange (4) is provided with several mounting through holes (5).

3. A capacitive thin-film vacuum gauge for high-temperature gases according to claim 1, characterized in that: The bottom surface of the fixed cover (302) is provided with several exhaust ports (6), and the upper surface of the capacitor film vacuum gauge (1) is fixedly connected with a connector (7).

4. A capacitive thin-film vacuum gauge for high-temperature gases according to claim 1, characterized in that: Each of the heat dissipation copper fins (312) has a heat-conducting plate (8) fixedly connected to its outer surface, and the side of each heat-conducting plate (8) away from the heat dissipation copper fin (312) extends to the outside of the fixing cover (302).

5. A capacitive thin-film vacuum gauge for high-temperature gases according to claim 1, characterized in that: Each of the fixed cylinders (306) has a baffle (9) fixedly connected to its inner wall. Each baffle (9) is located above the cooling fan (307). Each baffle (9) has an air inlet groove (10) arranged at equal intervals on its upper surface.

6. A capacitive thin-film vacuum gauge for high-temperature gases according to claim 1, characterized in that: A reinforcing ring (11) is fixedly connected to the outer surface of the capacitor film vacuum gauge (1), and the outer surface of the reinforcing ring (11) is fixedly connected to the inner wall of the heat preservation cylinder (301).

7. A capacitive thin-film vacuum gauge for high-temperature gases according to claim 1, characterized in that: The outer surface of the coil (308) is fixedly connected with several reinforcing strips (12), and the outer surface of each reinforcing strip (12) is fixedly connected to the inner wall of the insulation cylinder (301).

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