Waveguide device

Abstract

The utility model is suitable for the plasma field, and discloses a waveguide device, which comprises a first waveguide and a second waveguide, one end of the first waveguide close to the second waveguide is provided with a first installation part, the peripheral side of the first installation part is provided with at least two bolt clamping pieces at intervals, and one end of the second waveguide close to the first waveguide is provided with a second installation part. The second installation part and the first installation part are arranged in an attached mode, at least two pressing type plug pin assemblies are arranged on the second installation part at intervals, and the pressing type plug pin assemblies are matched with the plug pin clamping pieces to loosen the first waveguide and the second waveguide or press the first waveguide and the second waveguide. According to the waveguide device, efficient fixing of the waveguide device is achieved, a traditional fixing mode is simplified, in the assembling process, only the pressing type plug pin assembly needs to be switched from the retraction state to the stretching state, fixing of the waveguide can be easily completed, the operation mode is simple and rapid, and the assembling efficiency is greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of plasma, and in particular to a waveguide device. Background Technology

[0002] With the continuous advancement of science and technology, plasma technology has been widely applied in fields such as semiconductor manufacturing, material surface treatment, and environmental remediation. Among them, remote plasma technology, due to its unique advantages, has gradually become a research and application hotspot.

[0003] The core of remote plasma technology lies in its ability to generate plasma outside the processing cavity and introduce it into the processing area. This method effectively reduces the direct bombardment of material surfaces by high-energy ions and electrons, thereby reducing physical damage to sensitive materials. The waveguide channel, as a crucial bridge connecting the plasma generation and processing areas, directly impacts the plasma transmission efficiency and stability through its design and installation. To ensure stable and efficient plasma transmission to the processing area, the waveguide channel needs excellent sealing and precise guidance. However, disassembling and reinstalling the waveguide channel during routine maintenance or when replacing the cavity presents a significant challenge. Since waveguide channels typically consist of multiple components, numerous screws are required for fixation, which is not only time-consuming and labor-intensive but can also lead to a decrease in sealing performance due to improper operation, thus affecting plasma transmission. Utility Model Content

[0004] The purpose of this invention is to provide a waveguide device that solves the technical problem of the time and manpower required for the disassembly and assembly of existing waveguide channels.

[0005] To achieve the above objectives, the solution provided by this utility model is as follows:

[0006] A waveguide device includes a first waveguide and a second waveguide. A first mounting portion is provided at one end of the first waveguide near the second waveguide. At least two pin-type connectors are spaced apart around the periphery of the first mounting portion. A second mounting portion is provided at one end of the second waveguide near the first waveguide. The second mounting portion is fitted to the first mounting portion. At least two press-type pin assemblies are spaced apart on the second mounting portion. The press-type pin assemblies cooperate with the pin-type connectors to release or press the first waveguide and the second waveguide together.

[0007] Preferably, four of each of the latching pins and the push-button pin assemblies are provided, with the four latching pins evenly distributed around the periphery of the first mounting portion and the four push-button pin assemblies evenly distributed around the periphery of the second mounting portion.

[0008] Preferably, the latching member has a insertion hole, and the side wall of the second mounting part is radially provided with a mounting groove adapted to the press-type latch assembly. A guide rail is provided on the groove wall of the mounting groove, and the bottom of the guide rail has an inclined surface. An annular partition is provided near the groove opening of the mounting groove. The latch assembly includes a pressing member, a locking member, and an elastic member. The pressing member includes a first cylinder and a second cylinder coaxially arranged. The outer diameter of the second cylinder is larger than the outer diameter of the first cylinder and the inner diameter of the annular partition. The second cylinder is located within the mounting groove, and the first cylinder passes through the annular partition. The partition has a first sliding groove on the outer wall of the second cylinder that matches the guide rail, and a first meshing tooth formed on the bottom surface of the second cylinder. The locking member includes a third cylinder and a fourth cylinder arranged coaxially. The outer diameter of the fourth cylinder is larger than the outer diameter of the third cylinder. The third cylinder is movably disposed in the inner cavity of the second cylinder. The outer wall of the fourth cylinder has a second sliding groove that matches the guide rail, and the top surface of the fourth cylinder has a second meshing tooth that matches the first meshing tooth. The elastic member is elastically compressed between the fourth cylinder and the bottom of the mounting groove.

[0009] Preferably, the elastic element is a compression spring.

[0010] Preferably, three guide rails are evenly arranged on the wall of the mounting groove, three first sliding grooves are evenly arranged on the outer wall of the second cylinder, and three second sliding grooves are evenly arranged on the outer wall of the locking member.

[0011] Preferably, the latching member includes a vertical portion and a horizontal portion connected to the vertical portion. The vertical portion is fixed to the side wall of the first mounting portion and has the insertion hole. The horizontal portion is located above the first mounting portion and has a clamping member threadedly connected to it. The first mounting portion has a blind hole adapted to the clamping member.

[0012] Preferably, the clamping member includes a screw threadedly connected to the horizontal portion and a crossbar disposed on the top of the screw.

[0013] Preferably, the sidewall of the first mounting part is provided with an extension, the vertical part passes through the extension and is fixed in the extension.

[0014] The waveguide device provided by this utility model achieves efficient fixation of the waveguide device through the cooperation of the press-type pin assembly and the pin clip, simplifying the traditional fixing method (such as screw locking). During the assembly process, the waveguide can be easily fixed by simply switching the press-type pin assembly from the retracted state to the extended state. This operation method is simple and quick, greatly improving the assembly efficiency. When it is necessary to disassemble the waveguide device, the first waveguide and the second waveguide can be easily separated by simply switching the press-type pin assembly from the extended state back to the retracted state. The disassembly and assembly process is very convenient and will not cause any damage or impact to the waveguide device. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the waveguide device provided in an embodiment of the present invention;

[0017] Figure 2 This is a cross-sectional view of the waveguide device provided in this embodiment of the utility model;

[0018] Figure 3 yes Figure 2 Enlarged view of A in the middle;

[0019] Figure 4 This is a schematic diagram of the combination of the pressing member and the locking member provided in this embodiment of the utility model. Figure 1 ;

[0020] Figure 5 This is a schematic diagram of the combination of the pressing member and the locking member provided in this embodiment of the utility model. Figure 2 ;

[0021] Figure 6 This is a schematic diagram of the combination of the pressing member and the locking member provided in this embodiment of the utility model. Figure 3 .

[0022] Explanation of icon numbers:

[0023] 10. First waveguide; 11. First mounting part; 111. Blind hole; 112. Extension part; 20. Second waveguide; 21. Second mounting part; 211. Mounting groove; 212. Guide rail; 213. Annular partition; 30. Pin connector; 31. Vertical part; 311. Insertion hole; 32. Horizontal part; 40. Press-type pin assembly; 41. Pressing element; 411. First cylinder; 412. Second cylinder; 4121. First groove; 4122. First meshing tooth; 42. Locking element; 421. Third cylinder; 422. Fourth cylinder; 4221. Second groove; 4222. Second meshing tooth; 43. Elastic element; 50. Clamping element; 51. Screw; 52. Crossbar. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in the embodiments of this utility model are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0026] It should also be noted that when a component is described as "fixed to" or "set on" another component, it can be directly on the other component or there may be an intervening component present. When a component is described as "connected to" another component, it can be directly connected to the other component or there may be an intervening component present.

[0027] Furthermore, the use of terms such as "first" and "second" in this utility model is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.

[0028] like Figures 1 to 5 As shown, it is a waveguide device according to one embodiment of the present invention.

[0029] Please see Figures 1-5 The waveguide device of this utility model embodiment includes a first waveguide 10 and a second waveguide 20. A first mounting portion 11 is provided at one end of the first waveguide 10 near the second waveguide 20. At least two pin-type connectors 30 are provided at intervals around the periphery of the first mounting portion 11. A second mounting portion 21 is provided at one end of the second waveguide 20 near the first waveguide 10. The second mounting portion 21 is fitted to the first mounting portion 11. At least two press-type pin assemblies 40 are provided at intervals on the second mounting portion 21. The press-type pin assemblies 40 cooperate with the pin-type connectors 30 to release the first waveguide 10 and the second waveguide 20 or to press the first waveguide 10 and the second waveguide 20 together.

[0030] In this embodiment, four of the latch connector 30 and the press-type latch assembly 40 are provided, that is, four sets of modules are provided, which are evenly distributed around the first mounting part 11 and the second mounting part 21.

[0031] In use, first, the press-type latch assembly 40 is in the retracted state. Then, the first mounting part 11 and the second mounting part 21 are attached. Then, the press-type latch assembly 40 is switched from the retracted state to the extended state, that is, the press-type latch assembly 40 passes through the latch connector 30 and limits the latch connector 30, thus completing the assembly of the first waveguide 10 and the second waveguide 20. When it is necessary to disassemble the first waveguide 10 and the second waveguide 20, the press-type latch assembly 40 is switched from the extended state to the retracted state, and then the second waveguide 20 can be removed.

[0032] The waveguide device of this utility model embodiment achieves efficient fixation of the waveguide device through the cooperation of the press-type pin assembly 40 and the pin-lock connector 30, simplifying the traditional fixation method (such as screw locking). During the assembly process, the waveguide can be easily fixed by simply switching the press-type pin assembly 40 from the retracted state to the extended state. This operation method is simple and quick, greatly improving the assembly efficiency. When it is necessary to disassemble the waveguide device, the first waveguide 10 and the second waveguide 20 can be easily separated by simply switching the press-type pin assembly 40 from the extended state back to the retracted state. The disassembly and assembly process is very convenient and will not cause any damage or impact to the waveguide device.

[0033] Please see Figure 2As shown, exemplarily, the latch connector 30 is provided with a socket 311, and the side wall of the second mounting part 21 is radially provided with a mounting groove 211 adapted to the push-type latch assembly 40. A guide rail 212 is provided on the groove wall of the mounting groove 211, and the bottom of the guide rail 212 is formed with an inclined surface. An annular partition 213 is provided near the groove opening of the mounting groove 211. The latch assembly includes a pressing member 41, a locking member 42, and an elastic member 43. The pressing member 41 includes a first cylinder 411 and a second cylinder 412 coaxially arranged. The outer diameter of the second cylinder 412 is larger than the outer diameter of the first cylinder 411 and the inner diameter of the annular partition 213. The second cylinder 412 is located in the mounting groove 211, and the first cylinder 411 passes through the annular partition 213. 3. The outer wall of the second cylinder 412 is provided with a first sliding groove 4121 that is adapted to the guide rail 212. The bottom surface of the second cylinder 412 is formed with a first meshing tooth 4122. The locking member 42 includes a third cylinder 421 and a fourth cylinder 422 arranged coaxially. The outer diameter of the fourth cylinder 422 is larger than the outer diameter of the third cylinder 421. The third cylinder 421 is movably disposed in the inner cavity of the second cylinder 412. The outer wall of the fourth cylinder 422 is provided with a second sliding groove 4221 that is adapted to the guide rail 212. The top surface of the fourth cylinder 422 is provided with a second meshing tooth 4222 that is adapted to the first meshing tooth 4122. The elastic member 43 is elastically compressed between the fourth cylinder 422 and the bottom of the mounting groove 211.

[0034] In this embodiment, the elastic element 43 is a compression spring.

[0035] In this embodiment, three guide rails 212 are evenly arranged on the wall of the mounting groove 211. Correspondingly, three first sliding grooves 4121 are evenly arranged on the outer wall of the second cylinder 412, and three second sliding grooves 4221 are evenly arranged on the outer wall of the locking member 42.

[0036] like Figure 4 As shown, when the push-button assembly 40 is in the retracted state, the guide rail 212 is simultaneously located in the first slide groove 4121 and the second slide groove 4221. Pressing the first cylinder 411 causes the first cylinder 411 and the second cylinder 412 to move along the guide rail 212, pushing the locking member 42 to compress the elastic member 43 and move inward until the inclined surface at the bottom of the guide rail 212 coincides with the first engaging tooth 4122. At this point, the guide rail 212 exits the second slide groove 4221, and the push-button assembly 40 continues to press the first cylinder 4121. A cylinder 411, the locking member 42 continues to move inward. At the same time, since the guide rail 212 no longer limits the locking member 42, the locking member 42 rotates clockwise along the inclined surface at the bottom of the guide rail 212 until the inclined surface at the bottom of the guide rail 212 is aligned with the second meshing tooth 4222. Under the action of the elastic member 43, the locking member 42 moves outward, so that the inclined surface at the bottom of the guide rail 212 and the second meshing tooth 4222 are engaged, thereby putting the push-type pin assembly 40 in the retracted state.

[0037] like Figure 5 As shown, when the push-button assembly 40 needs to switch from the retracted state to the extended state, the first cylinder 411 is pressed again. The first cylinder 411 pushes the locking member 42 to compress the elastic member 43 and moves inward. At the same time, the locking member 42 rotates clockwise, and the second meshing tooth 4222 rotates clockwise along the inclined surface at the bottom of the guide rail 212 until the guide rail 212 is aligned with the second slide groove 4221. The locking member 42 moves outward under the action of the elastic member 43 and pushes the second cylinder 412 and the first cylinder 411 outward. The guide rail 212 enters the second slide groove 4221 and gets stuck, thereby putting the push-button assembly 40 in the extended state.

[0038] Please see Figure 2 As shown, exemplarily, the latch connector 30 includes a vertical portion 31 and a horizontal portion 32 connected to the vertical portion 31. The vertical portion 31 is fixed to the side wall of the first mounting portion 11, and the vertical portion 31 is provided with the insertion hole 311. The horizontal portion 32 is disposed above the first mounting portion 11, and a clamping member 50 is threadedly connected to the horizontal portion 32. The first mounting portion 11 is provided with a blind hole 111 adapted to the clamping member 50. By providing the clamping member 50, the first waveguide 10 and the second waveguide 20 can be assembled more tightly.

[0039] After assembling the first waveguide 10 and the second waveguide 20, rotate the clamping member 50 to move it toward the first mounting part 11 until it abuts into the blind hole 111. The clamping member 50 drives the first mounting part 11 and the second mounting part 21 to fit tightly together.

[0040] Furthermore, the clamping member 50 includes a screw 51 threadedly connected to the horizontal part 32 and a crossbar 52 disposed on the top of the screw 51, which facilitates the operation of the clamping member 50.

[0041] Furthermore, the side wall of the first mounting part 11 is provided with an extension part 112, and the vertical part 31 passes through the extension part 112 and is fixed in the extension part 112. This design makes the cooperation between the latch connector 30 and the push-type latch assembly 40 more convenient.

[0042] Furthermore, a sealing ring (not shown) can be provided between the first mounting part 11 and the second mounting part 21 to improve the sealing performance of the waveguide device.

[0043] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A waveguide device, characterized in that, The device includes a first waveguide and a second waveguide. A first mounting portion is provided at one end of the first waveguide near the second waveguide. At least two pin-type connectors are provided at intervals around the periphery of the first mounting portion. A second mounting portion is provided at one end of the second waveguide near the first waveguide. The second mounting portion is fitted to the first mounting portion. At least two press-type pin assemblies are provided at intervals on the second mounting portion. The press-type pin assemblies cooperate with the pin-type connectors to release or press the first waveguide and the second waveguide.

2. The waveguide device as described in claim 1, characterized in that, There are four of each of the latching pins and the push-button pin assemblies. The four latching pins are evenly distributed around the periphery of the first mounting part, and the four push-button pin assemblies are evenly distributed around the periphery of the second mounting part.

3. The waveguide device as described in claim 1, characterized in that, The latching member has a insertion hole, and the side wall of the second mounting part has a radially arranged mounting groove adapted to the press-type latch assembly. A guide rail is provided on the groove wall, and the bottom of the guide rail has an inclined surface. An annular partition is provided near the groove opening of the mounting groove. The latch assembly includes a pressing member, a locking member, and an elastic member. The pressing member includes a first cylinder and a second cylinder coaxially arranged. The outer diameter of the second cylinder is larger than the outer diameter of the first cylinder and the inner diameter of the annular partition. The second cylinder is located within the mounting groove, and the first cylinder passes through the annular partition. The second cylinder has a first groove on its outer wall that matches the guide rail, and a first meshing tooth on its bottom surface. The locking member includes a third cylinder and a fourth cylinder arranged coaxially. The outer diameter of the fourth cylinder is larger than the outer diameter of the third cylinder. The third cylinder is movably disposed in the inner cavity of the second cylinder. The outer wall of the fourth cylinder has a second groove that matches the guide rail, and the top surface of the fourth cylinder has a second meshing tooth that matches the first meshing tooth. The elastic member is elastically compressed between the fourth cylinder and the bottom of the mounting groove.

4. The waveguide device as described in claim 3, characterized in that, The elastic element is a compression spring.

5. The waveguide device as described in claim 3, characterized in that, The mounting groove has three guide rails evenly arranged on its wall, the second cylinder has three first sliding grooves evenly arranged on its outer wall, and the locking member has three second sliding grooves evenly arranged on its outer wall.

6. The waveguide device as described in claim 3, characterized in that, The latching component includes a vertical portion and a horizontal portion connected to the vertical portion. The vertical portion is fixed to the side wall of the first mounting portion and has the insertion hole. The horizontal portion is located above the first mounting portion and has a clamping member threadedly connected to it. The first mounting portion has a blind hole adapted to the clamping member.

7. The waveguide device as described in claim 6, characterized in that, The clamping component includes a screw threadedly connected to the horizontal portion and a crossbar disposed on the top of the screw.

8. The waveguide device as described in claim 6, characterized in that, The side wall of the first mounting part is provided with an extension, and the vertical part passes through the extension and is fixed in the extension.

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