Crown block guide rail for semiconductor transportation

Abstract

The utility model discloses a crown block guide rail for semiconductor transportation, which comprises section bar main bodies, and when the crown block guide rail is used, a crown block is limited through two symmetrical section bar main bodies which are arranged at an interval; observed from the cross section angle, the profile body comprises a first horizontal plate, a first vertical plate, a second horizontal plate and a second vertical plate, and the first horizontal plate, the first vertical plate, the second horizontal plate and the second vertical plate are sequentially connected end to end and define a closed structure with a cavity inside; different from the technical scheme that in the prior art, at least one T-shaped groove is formed in a sectional material and used for guiding and limiting the crown block, the crown block is borne and limited through the bearing face and the limiting face which are perpendicularly arranged, the stability of the crown block is high, and it can be guaranteed that the crown block is not prone to inclining in the running process due to the existence of the limiting face.

Description

Technical Field

[0001] This utility model relates to the field of guide rail technology, specifically to a crane guide rail for semiconductor transportation. Background Technology

[0002] Overhead crane transportation system: refers to an intelligent logistics system in semiconductor manufacturing plants that uses suspended tracks and overhead cranes to automatically transport various carriers carrying wafers through system software.

[0003] The overhead crane, also known as a semiconductor overhead crane, is a high-precision suspended track transport system used in cleanrooms for chip manufacturing. Through a fully enclosed dust-free design and anti-static treatment, it automatically transports sensitive materials such as wafer pods (FOUP) and photomask pods in ISO Class 1-5 environments. Its micro-vibration control (amplitude <2μm), micron-level repeatability (±0.1mm), and AMHS intelligent scheduling system can ensure the stability of nanoscale processes and link with MES to realize unmanned material flow in wafer fabs. It is a core logistics equipment for semiconductor front-end processes.

[0004] Compared to traditional handling methods, it reduces ground requirements and significantly improves space utilization. It also reduces reliance on manual labor, lowering long-term manpower costs. Furthermore, it can operate stably for extended periods.

[0005] Inside the factory, all the machines and buffer zones are interconnected by tracks suspended from the ceiling, and overhead cranes continuously transport wafer carriers to perform transfer tasks between the machines and buffer zones.

[0006] Currently, most suspension profiles used to form the track (which suspend the overhead crane in the air) are equipped with at least one T-shaped groove to guide and limit the overhead crane.

[0007] However, this design has limitations in practical applications:

[0008] Due to the large number of wafer batches and frequent reciprocating motion of the overhead crane, and to improve transport efficiency, the crane operates at a high speed. During prolonged high-speed reciprocating operation, the edges of the T-shaped grooves are easily bent by the crane pulleys, especially at turning points. Under the action of centrifugal force, the pulleys on the inside of the turn exert force on the edge of the groove, causing the edge to gradually twist and deform, which can easily cause the crane to bounce during subsequent passage.

[0009] Therefore, how to overcome the shortcomings of the existing technology mentioned above has become the subject of this utility model. Utility Model Content

[0010] This invention provides a crane guide rail for semiconductor transportation, aiming to solve the technical problems mentioned in the background art.

[0011] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a gantry rail for semiconductor transportation, comprising a profile body, wherein in use, the gantry is limited by two symmetrically arranged and spaced apart profile bodies; viewed from a cross-sectional perspective, the profile body comprises a first horizontal plate, a first vertical plate, a second horizontal plate, and a second vertical plate, wherein the first horizontal plate, the first vertical plate, the second horizontal plate, and the second vertical plate are connected end to end and enclose a closed structure with an internal cavity; with the cavity as a reference, the outer surface of the first horizontal plate is perpendicular to the outer surface of the first vertical plate. The first horizontal plate has an outer surface that serves as the bearing surface for the pulleys on the overhead crane, and the first vertical plate has an outer surface that serves as a limiting surface for restricting the tilt of the overhead crane. The outer surface of the first vertical plate is perpendicular to the horizontal plane, and the outer surface of the first horizontal plate is parallel to the horizontal plane, so that the overhead crane remains vertical. The profile body also includes a thickened plate, which is connected to the outer surface below the second horizontal plate. The lower surface of the thickened plate is provided with an L-shaped groove with an opening. The opening is located on the lower surface of the thickened plate, and the length of the opening is less than the length of any side of the L-shape of the L-shaped groove, so as to limit the movement of the overhead crane.

[0012] A further technical solution includes a first vertical plate comprising a vertical portion and an inclined portion integrally connected from top to bottom. The inclined portion is formed by bending the lower end of the first vertical plate towards the cavity side at a set angle. The bearing surface is the outer surface of the vertical portion. The upper end of the vertical portion is integrally connected to the end of the first horizontal plate, and the lower end of the vertical portion is integrally connected to the upper end of the inclined portion. The length of the second horizontal plate is less than the length of the first horizontal plate, and the lower end of the inclined portion is integrally connected to the end of the second horizontal plate. The upper surface edge of the thickened plate is integrally connected to the connection between the lower end of the inclined portion and the end of the second horizontal plate.

[0013] In a further technical solution, the thickness of the vertical part is greater than the thickness of the first horizontal plate.

[0014] A further technical solution is that the upper surface of the first horizontal plate is recessed at one end near the second vertical plate to form a first T-shaped groove.

[0015] In a further technical solution, a third T-shaped groove is formed inward on the outer surface of the second horizontal plate.

[0016] In a further technical solution, a second T-shaped groove is formed inwardly on the outer surface of the second vertical plate.

[0017] A further technical solution involves limiting the crane position of two symmetrical and spaced profile bodies, with a fourth T-shaped groove formed on the opposite side surface of each of the two thickened plates; the fourth T-shaped groove is configured to cooperate with the second T-shaped groove to fix the profile body.

[0018] A further technical solution is that when two symmetrical and spaced-apart profile bodies limit the crane, the two thickened plates have a fifth T-shaped groove formed on their opposite sides.

[0019] A further technical solution involves having the surface of the thickened plate with the fifth T-groove flush with the outer surface of the corresponding vertical part on the same profile body.

[0020] A further technical solution is that when two symmetrical and spaced-apart profile bodies limit the movement of the overhead crane, a boss protrudes from the lower surface of one side of the two thickened plates, and the surface of the boss in the length direction is parallel to the lower surface of the thickened plates.

[0021] In the above scheme, the overhead crane is limited by two symmetrical and spaced-apart profile bodies, so that both sides of the overhead crane can be restricted during operation, and the overhead crane will not sway.

[0022] In the above solution, the presence of the cavity can reduce the weight of the main body of the profile while meeting the load-bearing requirements of the bearing surface, thus achieving both lightweight design and cost reduction.

[0023] In the above scheme, the bearing surface is parallel to the horizontal plane to support a set of pulleys on the overhead crane, and the stability of the overhead crane can be ensured during the bearing process; at the same time, the plane gap between the overhead crane pulleys and the bearing surface is ≤0.1mm, which is conducive to smooth sliding of the pulleys, high stroke accuracy, and low noise.

[0024] Meanwhile, the wall thickness can be set to a certain thickness, for example, it can be designed to be 8mm. This can meet the load-bearing requirements of the overhead crane and the design operating speed, without increasing material and installation costs due to excessive thickness.

[0025] The limiting surface is perpendicular to the horizontal plane, so as to keep the crane vertical during operation by limiting the position of the second set of pulleys on the crane.

[0026] In the above design, the opening in the L-shaped groove is located on the lower surface of the thickened plate, and the length of the opening is less than the length of any side of the L-shape in the groove. This ensures greater stability when fixing the pulleys on the overhead crane. In other words, the L-shaped groove is designed to act as a limiter during overhead crane installation, improving the efficiency and accuracy of the installation and commissioning process.

[0027] In the above solution, the overhead crane can be simultaneously supported and limited by vertically arranged bearing and limiting surfaces. Specifically, since the bearing surface is parallel to the horizontal plane and the limiting surface is perpendicular to the horizontal plane, when the overhead crane is fixed between two profile bodies, it can not only prevent detachment and tilting during high-speed operation and turning, but also ensure the stability of the overhead crane during high-speed operation and turning. Furthermore, the multi-directional limiting also ensures high stroke accuracy and low noise during crane operation.

[0028] Unlike existing technologies that use at least one T-shaped groove on the profile to guide and limit the crane, this application uses vertically set bearing surfaces and limiting surfaces to support and limit the crane, resulting in high crane stability. The presence of the limiting surface also ensures that the crane will not easily tilt during operation.

[0029] Through the above design, a recess can be formed between the first vertical plate and the thickened plate using the inclined section, which not only meets the design requirements for material load-bearing capacity but also achieves weight reduction of the product. This not only achieves lightweighting to a certain extent but also helps to reduce the cost of the entire project.

[0030] The bearing surface and the limiting surface are designed at a 90-degree angle. The design requirements are as follows:

[0031] 1. The tight tolerance of ±0.3° for the 90° angle facilitates smooth sliding and precise guidance of the pulley, ensuring stroke accuracy. It effectively prevents derailment during high-speed crane operation and turning.

[0032] 2. Since the limiting surface has the function of preventing detachment and tilting when the crane is running at high speed and turning, the wall thickness is designed to be thicker than that of the bearing surface. For example, the bearing surface can be 8mm and the limiting surface can be 10mm, in order to meet the accuracy and material rigidity requirements of the crane during long-term repeated high-intensity operation.

[0033] The above design improves the strength of the area where the vertical section is located.

[0034] The first T-slot is used to install the electromagnet slide rail. Generally, the profile body is suspended and fixed by applying a suspension force from above through the first T-slot.

[0035] The third T-slot can be used to install auxiliary support components (such as hydraulic jacks) to enhance overall stability.

[0036] When a single profile body is fixed, the second and fourth T-slots can cooperate to fix the profile body from the side. Specifically, bolts and clamps are used to fix the profile body in place. At the same time, after the two profile bodies are fixed, the overhead crane's running guide surface can be formed.

[0037] The fifth T-slot is used to install the crane sensing system module (which uses existing technology). It can be used to determine the position of the crane in real time, and can also be used for other purposes, which will not be elaborated on here.

[0038] The above-mentioned technical design ensures that the thickened plate will not protrude and easily affect the movement of the overhead crane.

[0039] The above-mentioned technical design enables the boss to form a stable support between the two profile bodies, enhances the limiting effect, ensures smooth operation of the crane, avoids swaying of the crane when turning at high speed, improves the safety and reliability of the overall structure, extends service life, and reduces maintenance costs.

[0040] The terms "first," "second," etc., used in this article do not specifically refer to order or sequence, nor are they intended to limit this case; they are merely used to distinguish components or operations described using the same technical terms.

[0041] The terms "connection" or "positioning" as used in this article can refer to two or more components or devices making direct physical contact with each other, or making indirect physical contact with each other, or to two or more components or devices operating or moving with each other.

[0042] The terms “include,” “including,” and “have” used in this article are all open-ended, meaning they include but are not limited to.

[0043] Unless otherwise specified, the terms used herein generally have their ordinary meaning in the context of the art, the subject matter, and the specific context. Certain terms used to describe this case will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the case.

[0044] The terms “front,” “back,” “up,” “down,” “left,” and “right” used in this article are directional terms. In this case, they are only used to describe the positional relationship between the structures and are not intended to limit the specific direction of the protection scheme or its actual implementation.

[0045] The working principle and advantages of this utility model are as follows:

[0046] In this invention, the overhead crane can be simultaneously supported and limited by a vertically arranged bearing surface and a limiting surface. Specifically, since the bearing surface is parallel to the horizontal plane and the limiting surface is perpendicular to the horizontal plane, when the overhead crane is fixed between two profile bodies, it can not only prevent detachment and tilting during high-speed operation and turning, but also ensure the stability of the overhead crane during high-speed operation and turning. Furthermore, the multi-directional limiting also ensures high stroke accuracy and low noise during crane operation.

[0047] Unlike existing technologies that use at least one T-shaped groove on the profile to guide and limit the crane, this application uses vertically set bearing surfaces and limiting surfaces to support and limit the crane, resulting in high crane stability. The presence of the limiting surface also ensures that the crane will not easily tilt during operation. Attached Figure Description

[0048] Appendix Fig. 1 This is a schematic diagram of the main structure of the profile in an embodiment of this utility model;

[0049] Appendix Fig. 2 This is a schematic diagram of the structure of two profile bodies that are symmetrical and spaced apart in an embodiment of this utility model;

[0050] Appendix Fig. 3 This is a schematic diagram of the structure when the overhead crane is fixed on two profile bodies in an embodiment of this utility model.

[0051] In the above attached figures: 1. Profile body; 2. First horizontal plate; 3. First vertical plate; 4. Second horizontal plate; 5. Second vertical plate; 6. Cavity; 7. Bearing surface; 8. Restricting surface; 9. Thickened plate; 10. L-shaped groove; 11. Vertical part; 12. Inclined part; 13. First T-shaped groove; 14. Second T-shaped groove; 15. Third T-shaped groove; 16. Fourth T-shaped groove; 17. Fifth T-shaped groove; 18. Boss. Detailed Implementation

[0052] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0053] Example: The present invention will be clearly described below with illustrations and detailed description. Any person skilled in the art who understands the examples of the present invention can make changes and modifications based on the technology taught in the present invention without departing from the spirit and scope of the present invention.

[0054] The terminology used herein is for the purpose of describing specific embodiments only and is not intended to limit the scope of this work. Singular forms such as “a,” “this,” “this,” “the,” and “the” as used herein also include plural forms.

[0055] See appendix Figs. 1-3As shown, a semiconductor transport overhead crane guide rail includes a profile body 1. In use, the overhead crane is limited by two symmetrically arranged and spaced apart profile bodies 1. Viewed from a cross-sectional perspective, the profile body 1 includes a first horizontal plate 2, a first vertical plate 3, a second horizontal plate 4, and a second vertical plate 5. The first horizontal plate 2, the first vertical plate 3, the second horizontal plate 4, and the second vertical plate 5 are connected end-to-end to form a closed structure with an internal cavity 6. With the cavity 6 as a reference, the outer surface of the first horizontal plate 2 is perpendicular to the outer surface of the first vertical plate 3. The outer surface of the first vertical plate 3 serves as the bearing surface 7 for the pulleys on the overhead crane, and the outer surface of the first vertical plate 3 serves as the limiting surface 8 for restricting the tilt of the overhead crane. The outer surface of the first vertical plate 3 is perpendicular to the horizontal plane, and the outer surface of the first horizontal plate 2 is parallel to the horizontal plane, so that the overhead crane remains vertical. The profile body 1 also includes a thickened plate 9, which is connected to the outer surface below the second horizontal plate 4. The lower surface of the thickened plate 9 is provided with an L-shaped groove 10 with an opening. The opening is located on the lower surface of the thickened plate 9, and the length of the opening is less than the length of any L-shaped side of the L-shaped groove 10, so as to limit the movement of the overhead crane.

[0056] In this embodiment, the overhead crane is limited by two symmetrical and spaced-apart profile bodies 1, so that both sides of the overhead crane can be restricted during operation, and the overhead crane will not sway.

[0057] In this embodiment, the presence of cavity 6 can reduce the weight of the profile body 1 while satisfying the load-bearing capacity of the bearing surface 7, thus achieving both lightweight design and cost reduction.

[0058] In this embodiment, the bearing surface 7 is parallel to the horizontal plane to support a set of pulleys on the overhead crane, and can ensure the stability of the overhead crane during the bearing process; at the same time, the plane gap between the overhead crane pulleys and the bearing surface 7 is ≤0.1mm, which is conducive to smooth sliding of the pulleys, high stroke accuracy, and low noise.

[0059] Meanwhile, the wall thickness can be set to a certain thickness, for example, it can be designed to be 8mm. Such a design can meet the load-bearing requirements of the overhead crane and its designed operating speed, and will not increase the material and installation costs due to excessive thickness.

[0060] The limiting surface 8 is perpendicular to the horizontal plane, so as to keep the crane vertical during operation by limiting the position of the second set of pulleys on the crane.

[0061] In this embodiment, the opening of the L-shaped groove 10 is located on the lower surface of the thickened plate 9, and the length of the opening is less than the length of any side of the L-shape of the L-shaped groove 10. This ensures greater stability when fixing the pulleys on the overhead crane. In other words, the L-shaped groove is designed to act as a limiter during overhead crane installation, improving the efficiency and accuracy of overhead crane installation and commissioning.

[0062] This invention utilizes the vertically arranged bearing surface 7 and limiting surface 8 to simultaneously support and limit the overhead crane. Specifically, since the bearing surface 7 is parallel to the horizontal plane and the limiting surface 8 is perpendicular to the horizontal plane, when the overhead crane is fixed between the two profile bodies 1, it not only prevents detachment and tilting during high-speed operation and turning, but also ensures the stability of the overhead crane during high-speed operation and turning. Furthermore, the multi-directional limiting also ensures high stroke accuracy and low noise during crane operation.

[0063] Unlike existing technologies that use at least one T-shaped groove on the profile to guide and limit the crane, this application uses a vertically arranged bearing surface 7 and a limiting surface 8 to support and limit the crane, resulting in high crane stability. The presence of the limiting surface 8 also ensures that the crane will not easily tilt during operation.

[0064] Preferably, the first vertical plate 3 includes a vertical portion 11 and an inclined portion 12 integrally connected from top to bottom. The inclined portion 12 is formed by bending the lower end of the first vertical plate 3 towards the cavity 6 at a set angle. The bearing surface 7 is the outer surface of the vertical portion 11. The upper end of the vertical portion 11 is integrally connected to the end of the first horizontal plate 2, and the lower end of the vertical portion 11 is integrally connected to the upper end of the inclined portion 12. The length of the second horizontal plate 4 is less than the length of the first horizontal plate 2, and the lower end of the inclined portion 12 is integrally connected to the end of the second horizontal plate 4. The upper surface edge of the thickened plate 9 is integrally connected to the connection between the lower end of the inclined portion 12 and the end of the second horizontal plate 4.

[0065] With the above design, an indentation can be formed between the first vertical plate 3 and the thickened plate 9 by the inclined part 12, which can achieve the weight reduction effect of the product while meeting the material load-bearing design requirements. This not only achieves lightweighting to a certain extent, but also effectively reduces the cost of the entire project.

[0066] Preferably, the thickness of the vertical portion 11 is greater than the thickness of the first horizontal plate 2.

[0067] The bearing surface 7 and the limiting surface 8 are designed at a 90-degree angle. The design requirements are as follows:

[0068] 1. The tight tolerance of ±0.3° for the 90° angle facilitates smooth sliding and precise guidance of the pulley, ensuring stroke accuracy. It effectively prevents derailment during high-speed crane operation and turning.

[0069] 2. Because the limiting surface 8 has anti-detachment and anti-tilting functions when the crane is running at high speed and turning, its wall thickness is designed to be thicker than that of the bearing surface 7. For example, the thickness of the bearing surface 7 can be set to 8mm, while the thickness of the limiting surface 8 is increased to 10mm to ensure that the accuracy and material rigidity requirements of the crane are met during long-term repetitive high-intensity operation.

[0070] The above design improves the strength of the area where the vertical part 11 is located.

[0071] Preferably, the upper surface of the first horizontal plate 2 is recessed at one end near the second vertical plate 5 to form a first T-shaped groove 13.

[0072] The first T-slot 13 is used to install the electromagnet slide rail. Generally, a suspension force is applied from above through the first T-slot 13, thereby suspending and fixing the profile body 1.

[0073] In a further technical solution, a third T-shaped groove 15 is formed by recessing the outer surface of the second horizontal plate 4.

[0074] The third T-slot 15 can be used to secure connectors (such as bolts) to enhance the stability of the profile body 1. It can also be used to install auxiliary support components (such as hydraulic jacks) to further improve overall stability.

[0075] Preferably, a second T-shaped groove 14 is formed inward on the outer surface of the second vertical plate 5.

[0076] Preferably, when the two symmetrical and spaced profile bodies 1 limit the crane, the opposite surfaces of the two thickened plates 9 are both recessed to form a fourth T-shaped groove 16; the fourth T-shaped groove 16 is configured to cooperate with the second T-shaped groove 14 to fix the profile body 1.

[0077] When a single profile body 1 is fixed, the second T-slot 14 and the fourth T-slot 16 can cooperate with each other to fix the profile body 1 from the side. Specifically, the profile body 1 can be firmly fixed by bolts and pressure blocks. In addition, when both profile bodies 1 are fixed in place, the guide rail surface for the crane operation can be constructed.

[0078] Preferably, when two symmetrical and spaced profile bodies 1 limit the crane, the two thickened plates 9 each have a fifth T-shaped groove 17 formed on one side of their opposite surfaces.

[0079] The fifth T-slot 17 is used to install the crane sensing system module (which uses existing technology). It can be used to determine the position of the crane in real time, and can also be used for other purposes, which will not be elaborated here.

[0080] Preferably, on the same profile body 1, the surface of the thickened plate 9 with the fifth T-groove 17 is flush with the outer surface of the corresponding vertical part 11.

[0081] The above-mentioned technical design ensures that the thickened plate 9 will not protrude and easily affect the movement of the overhead crane.

[0082] Preferably, when two symmetrical and spaced profile bodies 1 limit the crane, a boss 18 is provided on the lower side of the opposite side surface of the two thickened plates 9, and the surface of the boss 18 in the length direction is parallel to the lower surface of the thickened plate 9.

[0083] With the help of the above-mentioned technical design, the boss 18 forms a stable support between the profile body 1, enhances the limiting effect, ensures the smooth operation of the crane, avoids the crane from shaking when turning at high speed, improves the safety and reliability of the overall structure, extends the service life, and reduces maintenance costs.

[0084] Working principle:

[0085] The two profile bodies 1 are fixed in place on the second T-slot 14, the fourth T-slot 16, and the first T-slot 13 using bolts, pressure blocks, and electromagnet rails. At this point, the two profile bodies 1 are symmetrical and spaced apart. Simultaneously, according to... Fig. 3 Once the overhead crane is secured, both the bearing surface 7 and the limiting surface 8 are in contact with the guide rails on the crane. This enhances the stability of the overhead crane.

[0086] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A crane guide rail for semiconductor transportation, characterized in that: Includes a profile body (1). In use, the crane is limited by two symmetrical and spaced profile bodies (1). From a cross-sectional perspective, the profile body (1) includes a first horizontal plate (2), a first vertical plate (3), a second horizontal plate (4) and a second vertical plate (5). The first horizontal plate (2), the first vertical plate (3), the second horizontal plate (4) and the second vertical plate (5) are connected end to end and enclose a closed structure with an internal cavity (6). With the cavity (6) as a reference, the outer surface of the first horizontal plate (2) is set perpendicular to the outer surface of the first vertical plate (3). The outer surface of the first horizontal plate (2) serves as the bearing surface (7) of the pulley on the crane, and the outer surface of the first vertical plate (3) serves as the limiting surface (8) to restrict the tilt of the crane. The outer surface of the first vertical plate (3) is perpendicular to the horizontal plane, and the outer surface of the first horizontal plate (2) is parallel to the horizontal plane, so that the crane remains vertical. The profile body (1) also includes a thickened plate (9), which is connected to the outer surface below the second horizontal plate (4). The lower surface of the thickened plate (9) is provided with an L-shaped groove (10) with an opening. The opening is located on the lower surface of the thickened plate (9), and the length of the opening is less than the length of any side of the L-shape of the L-shaped groove (10) to limit the crane position.

2. The overhead crane guide rail for semiconductor transportation according to claim 1, characterized in that: The first vertical plate (3) includes a vertical part (11) and an inclined part (12) integrally connected from top to bottom. The inclined part (12) is formed by bending the lower end of the first vertical plate (3) towards the cavity (6) at a set angle. The bearing surface (7) is the outer surface of the vertical part (11). The upper end of the vertical part (11) is integrally connected to the end of the first horizontal plate (2), and the lower end of the vertical part (11) is integrally connected to the upper end of the inclined part (12). The length of the second horizontal plate (4) is less than the length of the first horizontal plate (2), and the lower end of the inclined part (12) is integrally connected to the end of the second horizontal plate (4); The upper surface edge of the thickened plate (9) is integrally connected to the connection between the lower end of the inclined part (12) and the end of the second horizontal plate (4).

3. The overhead crane guide rail for semiconductor transportation according to claim 2, characterized in that: The thickness of the vertical part (11) is greater than the thickness of the first horizontal plate (2).

4. The overhead crane guide rail for semiconductor transportation according to claim 1, characterized in that: The upper surface of the first horizontal plate (2) is recessed at one end near the second vertical plate (5) to form a first T-shaped groove (13).

5. The overhead crane guide rail for semiconductor transportation according to claim 1, characterized in that: The outer surface of the second vertical plate (5) is recessed to form a second T-shaped groove (14).

6. The overhead crane guide rail for semiconductor transportation according to claim 1, characterized in that: The outer surface of the second horizontal plate (4) is recessed to form a third T-shaped groove (15).

7. The overhead crane guide rail for semiconductor transportation according to claim 5, characterized in that: When the crane is limited by two symmetrical and spaced profile bodies (1), the two thickened plates (9) are recessed on opposite sides to form a fourth T-shaped groove (16). The fourth T-groove (16) is configured to cooperate with the second T-groove (14) to fix the profile body (1).

8. The overhead crane guide rail for semiconductor transportation according to claim 1, characterized in that: When the two symmetrical and spaced profile bodies (1) limit the crane, the two thickened plates (9) are recessed on opposite sides to form a fifth T-shaped groove (17).

9. The overhead crane guide rail for semiconductor transportation according to claim 8, characterized in that: On the same profile body (1), the surface of the thickened plate (9) with the fifth T-groove (17) is flush with the outer surface of the corresponding vertical part (11).

10. The overhead crane guide rail for semiconductor transportation according to claim 1, characterized in that: When two symmetrical and spaced profile bodies (1) limit the crane, a boss (18) is provided on the lower side of the opposite side surface of the two thickened plates (9), and the surface of the boss (18) in the length direction is parallel to the lower surface of the thickened plate (9).

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