Switching mechanism and substrate hanging device in evaporation cavity

Abstract

The utility model discloses a switching mechanism and a device for hanging a substrate in an evaporation cavity, and relates to the field of vacuum evaporation equipment, the switching mechanism comprises an evaporation machine shell and a sealing cover which is hinged and assembled on the side surface of the evaporation machine shell and plays a role in sealing, a hanging disc is concentrically assembled in the evaporation machine shell, and the hanging disc is positioned at the upper part in the evaporation machine shell. According to the utility model, through the cooperation of the first adsorption suspension part, the second adsorption suspension part and the switching unit, the substrate can be fixed below the first adsorption suspension part for single-side evaporation treatment, and then the substrate is transferred below the second adsorption suspension part under the control of the switching unit; and in the transferring process, the base plate can be turned over, that is, double-sided evaporation treatment can be carried out under the condition that the evaporation machine is not stopped.

Description

Technical Field

[0001] This utility model relates to the field of vacuum evaporation equipment, specifically a switching mechanism and a substrate hanging device inside the evaporation chamber. Background Technology

[0002] The top of the vapor deposition chamber of a vacuum vapor deposition machine is equipped with a substrate limiting structure, which allows the substrate to be suspended from the top of the vapor deposition chamber. The substrates to be vapor deposited generally include lenses, wafers, metal plates, plastic plates, etc.

[0003] Chinese publicly available document CN117230412B (A Dual-Source Co-evaporation Vacuum Deposition Machine) describes a method where two wafers are pressed onto the upper and lower surfaces of a support block, respectively, ensuring their contact with the support block's surfaces. The sides of the wafers are pressed between the side support blocks on the left and right sides, squeezing the limiting block. At this time, the return springs on the sides of the limiting block are compressed, and the elastic deformation of the return springs limits and fixes the wafers, ensuring their stability. After the wafer coating on the lower surface of the support block is completed, rotating the connecting screw in the middle of the fixing column allows the pressing block to be positioned within the storage area. The internal movement of the gas chamber, through the movement of the pressure block, forces the airflow inside the gas storage chamber through the connecting pipe and corresponding branch pipe into the driving cavity inside the corresponding receiving column. The air filling inside the driving cavity can drive the stop block and the transmission rod to rotate inside the receiving column. The rotation of the transmission rod causes the fixedly connected support block to rotate the wafers on the upper and lower surfaces, so that the wafers on the upper surface of the support block rotate to the bottom, while the wafers on the lower surface of the support block after coating rotate to the top. Thus, after coating one wafer, it can be rotated to perform coating on another wafer, improving the overall evaporation processing efficiency.

[0004] The substrate limiting structure described in the aforementioned public documents enables two substrates to be assembled on the same support block in a back-to-back manner. After the end face of one substrate is vapor-deposited, the positions of the two substrates can be directly swapped through the support block to perform vapor deposition on the other substrate. However, this substrate limiting structure is only suitable for single-sided vapor deposition. If the substrate needs to be vapor-deposited on both sides, the above limiting structure is not convenient to use. It is necessary to disassemble the two back-to-back substrates at the same time and then flip them over for installation. Utility Model Content

[0005] The purpose of this invention is to provide a switching mechanism and a substrate hanging device in the vapor deposition chamber to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the first aspect of this utility model provides the following technical solution: a substrate hanging device inside a vapor deposition chamber, comprising: a vapor deposition machine housing and a cover hinged to the side of the vapor deposition machine housing for sealing purposes; a suspension plate concentrically mounted inside the vapor deposition machine housing; the suspension plate being located above the interior of the vapor deposition machine housing; a plurality of dumbbell-shaped grooves being formed inside the vapor deposition machine housing; each dumbbell-shaped groove including a first receiving portion, a second receiving portion, and a connecting portion; the first receiving portion being located on the side of the second receiving portion away from the center of the suspension plate; and the connecting portion being located between the first receiving portion and the second receiving portion; a first adsorption suspension component being provided inside the first receiving portion; and a second adsorption suspension component being provided inside the second receiving portion.

[0007] It also includes a switching unit for flipping the vapor-deposited substrate to switch the vapor deposition process, the switching unit being disposed between the dumbbell-shaped groove and the suspension plate.

[0008] Preferably, the first adsorption suspension component includes an air cylinder concentrically slidably inserted into the first receiving part, and a first suspension plate is fixedly mounted on the end of the air cylinder away from the top of the vapor deposition machine housing, and a first spring is fixedly mounted between the upper end face of the first suspension plate and the first receiving part. An irregularly shaped column is fixedly provided at the top center of the suspension plate, and a first air plate is fixedly fitted on the outer surface of the irregularly shaped column. The first air plate is hollow, and a first flexible hose is fixedly connected between the end of each air cylinder near the top of the vapor deposition machine housing and the first air plate. The center of the first suspension plate is provided with an air hole, which is connected to the air cylinder.

[0009] Preferably, the second adsorption suspension component includes a second suspension plate concentrically placed inside the second receiving part. A second air plate is also fixedly fitted on the outer surface of the irregular column. The second air plate is also hollow. A second flexible hose is fixedly connected between the end of each second suspension plate near the top of the vapor deposition machine housing and the second air plate. Silicone rubber suction cups are fixedly installed on the end faces of the first suspension plate and the second suspension plate near the bottom of the vapor deposition machine housing. The silicone rubber suction cups are respectively connected to the air cylinder and the second flexible hose. Two air pipes are fixedly installed inside the irregular column. The two air pipes are fixedly connected to the first air plate and the second air plate respectively. A negative pressure suction component is also provided at the top of the two irregular columns. The second suspension plate can swing towards the direction of the first suspension plate.

[0010] Preferably, the negative pressure suction component includes a rotating sealing column concentrically mounted on the top of the vapor deposition machine housing, and the irregularly shaped column slides through the rotating sealing column. The top of the rotating sealing column is fitted with two rigid tubes equidistantly distributed circumferentially. The rigid tubes are right-angle bends, with the bends facing the irregularly shaped column. Both vent pipes are slidably inserted into the bends of the rigid tubes. A second sealing gasket is fixedly provided at the upper end of each vent pipe, and the second sealing gasket abuts against the interior of the rigid tube. The top of the vapor deposition machine housing also has two negative pressure suction pumps equidistantly distributed circumferentially. The end of each rigid tube away from the rotating sealing column is connected to the suction end of each of the two negative pressure suction pumps. Each rigid tube is also equipped with an electromagnetic control valve. The air pressure in the two vent pipes is controlled by the action of the two negative pressure suction pumps and the electromagnetic control valve.

[0011] Preferably, the lower ends of the first suspension plate and the second suspension plate are on the same horizontal plane, and the lower ends of both are lower than the lower end of the suspension plate, so as to ensure that the outer edge of the substrate being adsorbed and suspended is not blocked.

[0012] Preferably, the switching unit includes a rotating shaft rotatably mounted on the top of the vapor deposition machine housing, and a transmission gear is fixedly fitted on the outer surface of the rotating shaft. A plurality of teeth are fixedly arranged circumferentially on the upper outer surface of the rotating sealing column, and a transmission belt is connected between the teeth and the transmission gear. A positioning pin is also fixedly mounted on the inner top of the vapor deposition machine housing. A plurality of circumferentially equidistant limiting frames are mounted on the upper end of the suspension plate, and a helical toothed ring is slidably mounted inside the limiting frames. A positioning recess is fixedly provided on the upper end face of the helical toothed ring, and the bottom of the positioning pin is slidably embedded in the groove of the positioning recess. A flipping component is provided between the helical toothed ring and the plurality of second suspension plates. By limiting the positioning recess with the positioning pin, the state of the helical toothed ring remains unchanged when the suspension plate is rotated. The rotating shaft can be driven by a stepper motor or turned by a wrench.

[0013] Preferably, the flipping component includes a positioning shaft rotatably disposed within the connecting portion, with both ends of the positioning shaft facing the first receiving portion and the second receiving portion, respectively. A worm gear is fixedly fitted onto the outer surface of the positioning shaft. A worm wheel is fixedly mounted on one end of the second suspension plate near the first receiving portion, and the worm wheel is driven and assembled with the worm gear. A retainer is fixedly mounted on the upper end face of the suspension plate, and the number of retainers is consistent with the number of dumbbell-shaped slots. A first drive shaft and a second drive shaft are rotatably disposed inside each retainer. A second helical gear and a first helical gear are fixedly fitted onto the outer surfaces of the first drive shaft and the second drive shaft, respectively. The first helical gear is driven and meshed between the second helical gear and the helical gear ring. A synchronous toothed belt is mounted between the second drive shaft and the positioning shaft through a synchronous gear drive. A light shaft is fixedly disposed at the axis of the worm wheel, and the light shaft is rotatably embedded inside the suspension plate. The size of the first helical gear is larger than that of the second helical gear to avoid both of them contacting the helical gear ring simultaneously, thereby preventing jamming.

[0014] The first aspect of this utility model provides the following technical solution: a substrate hanging device in a vapor deposition cavity, including the switching mechanism described in any one of the above solutions.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] This invention, through the cooperation of the first adsorption suspension component, the second adsorption suspension component, and the switching unit, can fix the substrate below the first adsorption suspension component for single-sided vapor deposition. Then, under the control of the switching unit, the substrate is transferred to the second adsorption suspension component, and the substrate can be flipped during the transfer process, that is, double-sided vapor deposition can be performed without stopping the vapor deposition machine. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the dumbbell-shaped groove position distribution structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the upper structure of the suspension plate of this utility model;

[0020] Figure 4 This is a schematic diagram of the position distribution structure of the rotary sealing column of this utility model;

[0021] Figure 5 This utility model Figure 4 Enlarged view of point A in the middle.

[0022] In the diagram: 1. Vapor deposition machine housing; 2. Cover; 3. Suspension plate; 4. Dumbbell-shaped groove; 5. First suspension plate; 6. Second suspension plate; 7. Silicone rubber suction cup; 8. Air cylinder; 9. Irregular column; 10. Vent pipe; 11. Second air plate; 12. First air plate; 13. First hose; 14. Second hose; 15. Helical toothed ring; 16. Limiting frame; 17. Positioning recess; 18. Positioning pin; 19. Rotary sealing column; 20. Transmission gear; 21. Transmission toothed belt; 22. Rigid pipe; 23. Electromagnetic control valve; 24. Negative pressure suction pump; 25. Worm gear; 26. Worm; 27. Cage; 28. First helical gear; 29. ​​Second helical gear; 30. First spring. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Please see Figures 1-5 The first aspect of this utility model provides a switching mechanism, including: a vapor deposition machine housing 1 and a cover 2 hinged to the side of the vapor deposition machine housing 1 for sealing; a suspension plate 3 is concentrically mounted inside the vapor deposition machine housing 1, the suspension plate 3 is located inside the upper part of the vapor deposition machine housing 1; a plurality of dumbbell-shaped grooves 4 are opened inside the vapor deposition machine housing 1, the dumbbell-shaped grooves 4 include a first receiving part, a second receiving part and a connecting part; the first receiving part is located on the side of the second receiving part away from the center of the suspension plate 3, and the connecting part is located between the first receiving part and the second receiving part; a first adsorption suspension component is provided inside the first receiving part, and a second adsorption suspension component is provided inside the second receiving part;

[0025] It also includes: a switching unit for flipping the vapor-deposited substrate to switch the vapor deposition process, the switching unit being disposed between the dumbbell-shaped groove 4 and the suspension plate 3;

[0026] The first adsorption suspension component includes an air cylinder 8 concentrically slidably inserted into the first receiving part, and a first suspension plate 5 is fixedly mounted on the end of the air cylinder 8 away from the top of the vapor deposition machine housing 1. A first spring 30 is fixedly mounted between the upper end face of the first suspension plate 5 and the first receiving part. An irregularly shaped column 9 is fixedly set at the top center of the suspension plate 3, and a first air plate 12 is fixedly fitted on the outer surface of the irregularly shaped column 9. The first air plate 12 is hollow, and a first flexible hose 13 is fixedly connected between the end of each air cylinder 8 near the top of the vapor deposition machine housing 1 and the first air plate 12. The center of the first suspension plate 5 is provided with an air hole, which is connected to the air cylinder 8.

[0027] The second adsorption suspension component includes a second suspension plate 6 concentrically placed inside the second receiving part. A second air plate 11 is also fixedly fitted on the outer surface of the irregular column 9. The second air plate 11 is also hollow. A second hose 14 is fixedly connected between the end of each second suspension plate 6 near the top of the vapor deposition machine housing 1 and the second air plate 11. Silicone rubber suction cups 7 are fixedly installed on the end faces of the first suspension plate 5 and the second suspension plate 6 near the bottom of the vapor deposition machine housing 1. The silicone rubber suction cups 7 are respectively connected to the air cylinder 8 and the second hose 14. Two air pipes 10 are fixedly installed inside the irregular column 9. The two air pipes 10 are fixedly connected to the first air plate 12 and the second air plate 11 respectively. A negative pressure suction component is also provided at the top of the two irregular columns 9. The second suspension plate 6 can swing towards the first suspension plate 5.

[0028] The negative pressure suction component includes a rotating sealing column 19 concentrically mounted on the top of the vapor deposition machine housing 1, with an irregularly shaped column 9 slidingly penetrating the rotating sealing column 19. The top fixed frame of the rotating sealing column 19 is equipped with two rigid tubes 22 circumferentially distributed. The rigid tubes 22 are in the shape of right-angle bends, and the bent ends of the rigid tubes 22 face the irregularly shaped column 9. Two vent pipes 10 are slidably inserted into the bent ends of the rigid tubes 22. A sealing gasket is fixedly installed at the upper end of the vent pipe 10, and the sealing gasket abuts against the inside of the rigid tube 22. The top of the vapor deposition machine housing 1 is also fixedly equipped with two negative pressure suction pumps 24 circumferentially distributed. The end of each rigid tube 22 away from the rotating sealing column 19 is respectively connected to the suction end of the two negative pressure suction pumps 24. Each rigid tube 22 is also equipped with an electromagnetic control valve 23. Through the action of the two negative pressure suction pumps 24 and the electromagnetic control valve 23, the air pressure state in the two vent pipes 10 is controlled respectively.

[0029] The lower surfaces of the first suspension plate 5 and the second suspension plate 6 are on the same horizontal plane, and the lower surfaces of both are lower than the lower surface of the suspension plate 3, which ensures that the outer edge of the substrate being adsorbed and suspended will not be blocked.

[0030] The switching unit includes a rotating shaft mounted on the top of the vapor deposition machine housing 1, with a transmission gear 20 fixedly fitted on the outer surface of the rotating shaft. Several teeth are fixedly arranged in a circumferentially equidistant manner on the upper outer surface of the rotating sealing column 19, and a transmission belt 21 is connected between the teeth and the transmission gear 20. A positioning pin 18 is also fixedly mounted on the inner top of the vapor deposition machine housing 1. Several circumferentially equidistant limiting frames 16 are mounted on the upper end fixed frame of the suspension plate 3, and a helical toothed ring 15 is slidably assembled inside the several limiting frames 16. A positioning recess 17 is fixedly provided on the upper end face of the helical toothed ring 15, and the bottom of the positioning pin 18 is slidably embedded in the groove of the positioning recess 17. A flipping component is provided between the helical toothed ring 15 and several second suspension plates 6. By limiting the positioning recess 17 with the positioning pin 18, the state of the helical toothed ring 15 can remain unchanged when the suspension plate 3 is rotated. The rotating shaft can be driven by a stepper motor or turned by a wrench.

[0031] The flipping component includes a positioning shaft rotatably disposed within the connecting part, with both ends of the positioning shaft facing the first receiving part and the second receiving part, respectively. A worm gear 26 is fixedly mounted on the outer surface of the positioning shaft. A worm wheel 25 is fixedly mounted on one end of the second suspension plate 6 near the first receiving part, and the worm wheel 25 is driven and assembled with the worm gear 26. A retainer 27 is fixedly mounted on the upper end face of the suspension plate 3, and the number of retainers 27 is the same as the number of dumbbell-shaped slots 4. A first drive shaft and a second drive shaft are rotatably disposed inside each retainer 27. A second helical gear 29 and a first helical gear 28 are fixedly mounted on the outer surfaces of the first drive shaft and the second drive shaft, respectively. The first helical gear 28 is driven and meshed between the second helical gear 29 and the helical gear ring 15. A synchronous toothed belt is mounted between the second drive shaft and the positioning shaft through a synchronous gear transmission. A light shaft is fixedly disposed at the axis of the worm wheel 25, and the light shaft is rotatably embedded inside the suspension plate 3. The size of the first helical gear 28 is larger than that of the second helical gear 29 to avoid both of them contacting the helical gear ring 15 at the same time, thereby preventing jamming.

[0032] How this solution works:

[0033] Before the vapor deposition machine is running, both electromagnetic control valves 23 are closed, meaning that the air inside the air cylinder 8 and the silicone rubber suction cup 7 cannot circulate. At this time, the substrate to be vapor deposited is assembled under the first suspension plate 5. During the assembly process, the operator only needs to press the substrate against the bottom of the silicone rubber suction cup 7 under the first suspension plate 5. During the pressing process, the substrate can seal the lower port of the silicone rubber suction cup 7 and squeeze out some of the air inside the silicone rubber suction cup 7. At this time, a negative pressure is formed between the silicone rubber suction cup 7, the air cylinder 8, and the first hose 13, which can adsorb and suspend the substrate under the first suspension plate 5. After the substrate is assembled, the operator can start the negative pressure suction pump 24 connected to the first hose 13 in advance and control the air pressure in the space between the negative pressure suction pump 24 and the electromagnetic control valve 23 to be lower than the air pressure inside the silicone rubber suction cup 7. Then, the electromagnetic control valve 23 is opened to allow the negative pressure suction pump 24 to be directly connected to the first hose 13. At this time, the substrate under the first suspension plate 5 can be adsorbed more firmly.

[0034] At this point, vapor deposition can be performed. After vapor deposition is completed at the lower end of the substrate, the operator can use the rotating shaft and transmission gear 20 to deflect the rotating sealing column 19 by an angle. Because the positioning pin 18 restricts the positioning recess 17, when the rotating sealing column 19 deflects the suspension plate 3 via the irregular column 9, it can drive the first helical gear 28 and the second helical gear 29 to rotate, causing the worm 26 to deflect the worm wheel 25. The second suspension plate 6 can then swing towards the first suspension plate 5 to cover it, allowing the second suspension plate 6 and the first suspension plate 5 to clamp the substrate. Due to the silicone rubber suction below the second suspension plate 6... When the plate 7 is in close contact with the substrate after vapor deposition, another negative pressure suction pump 24 and electromagnetic control valve 23 are controlled to work, so that the silicone rubber suction cup 7 under the second suspension plate 6 can be used to limit the negative pressure adsorption of the substrate. Then, the air pressure inside the air cylinder 8 is gradually restored to the same level as the air pressure inside the vapor deposition machine housing 1, so that the silicone rubber suction cup 7 under the first suspension plate 5 can no longer limit the adsorption of the substrate. At this time, the rotating shaft can be triggered to perform a reset operation, and the second suspension plate 6 with the substrate adsorbed can be reset at the same time. After the reset is completed, the undeposited end of the substrate can be turned downwards, thus achieving the effect of changing the vapor deposition side.

[0035] It is worth noting that the method of suspending the substrate in this solution is not the clamping limitation commonly used in the prior art. Since most clamping devices are made of metal, in order to ensure the stability of the substrate clamping, the clamping device usually extends beyond the vapor deposition surface of the substrate, which can easily obstruct vapor particles and cause uneven coating of the substrate. Moreover, during the preheating process, the metal clamping device is in direct contact with the substrate, which can easily cause the contact point between the substrate and the metal clamping device to be too cold or too hot. Uneven heating of the substrate as a whole can also affect the uniformity of the coating.

[0036] The second aspect of this utility model provides a substrate hanging device in a vapor deposition cavity, including the switching mechanism described in the above solution.

[0037] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0038] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A switching mechanism, characterized in that, include: The vapor deposition machine housing (1) and the cover (2) hinged to the side of the vapor deposition machine housing (1) to close the machine. The suspension plate (3) is concentrically mounted inside the vapor deposition machine housing (1). The suspension plate (3) is located above the inside of the vapor deposition machine housing (1). The vapor deposition machine housing (1) has several dumbbell-shaped grooves (4) inside. The dumbbell-shaped grooves (4) include a first receiving part, a second receiving part and a connecting part. The first receiving part is located on the side of the second receiving part away from the center of the suspension plate (3), and the connecting part is located between the first receiving part and the second receiving part. The first receiving part is provided with a first adsorption suspension component inside, and the second receiving part is provided with a second adsorption suspension component inside. Also includes: A switching unit is used to flip the vapor-deposited substrate and switch the vapor deposition process. The switching unit is located between the dumbbell-shaped groove (4) and the suspension plate (3).

2. The switching mechanism according to claim 1, characterized in that: The first adsorption suspension component includes an air cylinder (8) that is concentrically slidably inserted into the first receiving part. A first suspension plate (5) is fixedly mounted on one end of the air cylinder (8) away from the top of the vapor deposition machine housing (1). A first spring (30) is fixedly mounted between the upper end face of the first suspension plate (5) and the first receiving part. A shaped column (9) is fixedly provided at the top center of the suspension plate (3). A first air plate (12) is fixedly fitted on the outer surface of the shaped column (9). The first air plate (12) is hollow. A first hose (13) is fixedly connected between the end of each air cylinder (8) near the top of the vapor deposition machine housing (1) and the first air plate (12).

3. A switching mechanism according to claim 2, characterized in that: The second adsorption suspension component includes a second suspension plate (6) concentrically placed inside the second accommodating part. The outer surface of the irregular column (9) is also fixedly fitted with a second air plate (11). The second air plate (11) is also hollow. Each second suspension plate (6) is fixedly connected to the second air plate (11) at one end near the top of the vapor deposition machine housing (1). The first suspension plate (5) and the second suspension plate (6) are fixedly provided with a silicone rubber suction cup (7) at one end near the bottom of the vapor deposition machine housing (1). The silicone rubber suction cup (7) is connected to the air cylinder (8) and the second air plate (14) respectively. The irregular column (9) is fixedly fitted with two air pipes (10). The two air pipes (10) are fixedly connected to the first air plate (12) and the second air plate (11) respectively. The top of the two irregular columns (9) is also provided with a negative pressure suction component.

4. A switching mechanism according to claim 3, characterized in that: The negative pressure suction component includes a rotating sealing column (19) concentrically mounted on the top of the vapor deposition machine housing (1), and the irregular column (9) slides through the rotating sealing column (19). The top fixing frame of the rotating sealing column (19) is equipped with two rigid tubes (22) distributed circumferentially. The rigid tubes (22) are in the shape of right-angle bends, and the bent ends of the rigid tubes (22) face the irregular column (9). Both ventilation pipes (10) are slidably inserted into the bent ends of the rigid tubes (22). The upper end of the vent pipe (10) is fixedly provided with a second sealing gasket (40), and the second sealing gasket (40) abuts against the inside of the hard pipe (22). The top of the vapor deposition machine housing (1) is also fixedly provided with two negative pressure suction pumps (24) that are circumferentially distributed. The end of each hard pipe (22) away from the rotating sealing column (19) is respectively connected to the suction end of the two negative pressure suction pumps (24). Each hard pipe (22) is also equipped with an electromagnetic control valve (23).

5. A switching mechanism according to claim 3, characterized in that: The lower ends of the first suspension plate (5) and the second suspension plate (6) are on the same horizontal plane, and the lower ends of both are lower than the lower end of the suspension plate (3).

6. A switching mechanism according to claim 4, characterized in that: The switching unit includes a rotating shaft mounted on the top of the vapor deposition machine housing (1), and a transmission gear (20) is fixedly fitted on the outer surface of the rotating shaft. A number of teeth are fixedly arranged in a circumferentially equidistant manner on the upper outer surface of the rotating sealing column (19), and a transmission belt (21) is connected between the teeth and the transmission gear (20). A positioning pin (18) is also fixedly suspended on the inner top of the vapor deposition machine housing (1). A number of circumferentially equidistant limiting frames (16) are mounted on the upper end of the suspension plate (3). A helical toothed ring (15) is slidably fitted inside the helical toothed ring (15). A positioning recess (17) is fixedly provided on the upper end face of the helical toothed ring (15), and the bottom of the positioning pin (18) is slidably embedded in the groove of the positioning recess (17). A flipping component is provided between the helical toothed ring (15) and the number of second suspension plates (6).

7. A switching mechanism according to claim 6, characterized in that: The flipping component includes a positioning shaft rotatably disposed within the connecting portion, with both ends of the positioning shaft facing the first receiving portion and the second receiving portion, respectively. A worm gear (26) is fixedly fitted onto the outer surface of the positioning shaft. A worm wheel (25) is fixedly mounted on one end of the second suspension plate (6) near the first receiving portion, and the worm wheel (25) is driven by the worm gear (26). A retainer (27) is fixedly mounted on the upper end face of the suspension disc (3), and the number of retainers (27) is the same as the number of dumbbell-shaped grooves (4). The cage (27) is internally rotatably provided with a first drive shaft and a second drive shaft. The outer surfaces of the first drive shaft and the second drive shaft are respectively fixedly fitted with a second helical gear (29) and a first helical gear (28). The first helical gear (28) is driven to mesh between the second helical gear (29) and the helical gear ring (15). The second drive shaft and the positioning shaft are connected by a synchronous gear transmission and equipped with a synchronous toothed belt. The worm gear (25) is fixedly provided with an optical shaft at its axis, and the optical shaft is rotatably embedded inside the suspension plate (3).

8. A substrate hanging device in a vapor deposition chamber, characterized in that: Includes the switching mechanism according to any one of claims 1-7.

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