Co-evaporation device for depositing multi-element film material

Abstract

The utility model discloses a co-evaporation device for depositing a multi-element membrane material, which relates to the technical field of co-evaporation equipment and comprises a mixing bin, a device shell arranged at the top of the mixing bin, a flow guide mechanism arranged in the device shell, a membrane material box arranged at the top of the flow guide mechanism and an evaporation bin connected with the top of the membrane material box. The bottom of the evaporation bin is fixedly connected with the device shell; a driving motor is arranged at the rear end of the device shell, a heating box is arranged on the outer side of the mixing bin, a gas conveying mechanism is arranged at the bottom of the heating box, the heating box is connected with the mixing bin through the gas conveying mechanism, and the driving motor is connected with the flow guide mechanism and the gas conveying mechanism. The flow guide mechanism is driven by the driving motor to operate, steam can be conveyed into the mixing bin through the flow guide mechanism after a membrane material is evaporated by the steam, meanwhile, the driving motor can also drive the gas conveying mechanism to convey hot gas into the mixing bin, and the equipment can be more convenient to carry out co-evaporation work.

Description

TECHNICAL FIELD

[0001] The utility model relates to co -evaporation equipment technical field, concretely is a kind of co -evaporation device of deposition multivariate membrane material. BACKGROUND

[0002] Co -evaporation equipment is also called co -evaporator, it is the equipment that through heating makes solution concentration or from solution grain or through vapor evaporates membrane material, but the co -evaporation device of multivariate membrane material of prior art has some shortcomings, for example:

[0003] Application No. CN201420596130.1 a kind of co -evaporation system of deposition multivariate membrane material, the equipment can prepare the multivariate compound thin film of thickness and component uniformity on large area substrate, but in actual use process, the equipment is difficult to transmit the vapor after evaporating membrane material to the inside of mixing mechanism, so that the vapor may appear random and thus affect co -evaporation work, reduce the co -evaporation efficiency of equipment;

[0004] Therefore, we propose a kind of co -evaporation device of deposition multivariate membrane material to solve the problems raised in the above. INVENTION CONTENTS

[0005] The utility model aims at providing a kind of co -evaporation device of deposition multivariate membrane material, to solve the problems that the co -evaporation device of deposition multivariate membrane material of most of current market is difficult to transmit the vapor after evaporating membrane material to the inside of mixing mechanism, so that the vapor may appear random and thus affect co -evaporation work, reduce the co -evaporation efficiency of equipment raised in the above background art.

[0006] To achieve the above object, the utility model provides the following technical scheme: a kind of co -evaporation device of deposition multivariate membrane material, including mixing bin, with the device shell of the top of mixing bin, device shell inside is equipped with flow guide mechanism, and the top of flow guide mechanism is equipped with membrane material box, and the top of membrane material box is connected with evaporation bin, the bottom of evaporation bin is fixedly connected with device shell;

[0007] The rear end of device shell is equipped with drive motor, and the outside of mixing bin is equipped with heating box, and the bottom of heating box is equipped with gas conveying mechanism, the heating box is connected with mixing bin by gas conveying mechanism, and drive motor is connected with flow guide mechanism and gas conveying mechanism.

[0008] Through drive motor drives flow guide mechanism to operate, can make the vapor after evaporating membrane material, by flow guide mechanism, vapor is transmitted to the inside of mixing bin, while drive motor also drives gas conveying mechanism to transmit hot gas to the inside of mixing bin, so that the equipment can be more convenient when carrying out co -evaporation work.

[0009] As the preferred technical scheme of the utility model, the first sprocket is arranged at the front end of the driving motor, the chain is engaged with the outside of the first sprocket, the second sprocket is engaged with the bottom of the chain, the first sprocket is connected with the flow guide mechanism, and the second sprocket is connected with the gas conveying mechanism.

[0010] The above technical scheme can make the driving motor more convenient when driving the flow guide mechanism or the gas conveying mechanism to run, thereby increasing the controllability of the equipment.

[0011] As the preferred technical scheme of the utility model, the first sprocket is arranged at the front end of the driving motor, the chain is engaged with the outside of the first sprocket, the second sprocket is engaged with the bottom of the chain, the first sprocket is connected with the flow guide mechanism, and the second sprocket is connected with the gas conveying mechanism.

[0012] The above technical scheme can make the driving motor more convenient when driving the flow guide mechanism or the gas conveying mechanism to run, thereby increasing the controllability of the equipment.

[0013] As the preferred technical scheme of the utility model, the first sprocket is arranged at the front end of the driving motor, the chain is engaged with the outside of the first sprocket, the second sprocket is engaged with the bottom of the chain, the first sprocket is connected with the flow guide mechanism, and the second sprocket is connected with the gas conveying mechanism.

[0014] The above technical scheme can make the driving motor more convenient when driving the flow guide mechanism or the gas conveying mechanism to run, thereby increasing the controllability of the equipment.

[0015] As the preferred technical scheme of the utility model, the first sprocket is arranged at the front end of the driving motor, the chain is engaged with the outside of the first sprocket, the second sprocket is engaged with the bottom of the chain, the first sprocket is connected with the flow guide mechanism, and the second sprocket is connected with the gas conveying mechanism.

[0016] The above technical scheme can make the driving motor more convenient when driving the flow guide mechanism or the gas conveying mechanism to run, thereby increasing the controllability of the equipment.

[0017] As the preferred technical scheme of the utility model, the first sprocket is arranged at the front end of the driving motor, the chain is engaged with the outside of the first sprocket, the second sprocket is engaged with the bottom of the chain, the first sprocket is connected with the flow guide mechanism, and the second sprocket is connected with the gas conveying mechanism.

[0018] The above technical scheme can make the driving motor more convenient when driving the flow guide mechanism or the gas conveying mechanism to run, thereby increasing the controllability of the equipment.

[0019] As the preferred technical scheme of the utility model, the bottom of the mixing bin is fixed through the bottom foot, the gas conveying mechanism comprises a gas conveying pipe, the right end of the gas conveying pipe is fixedly connected with the heating box, the left end of the gas conveying pipe is connected with the inside of the mixing bin, the inside of the gas conveying pipe is provided with a fan blade, the rear end of the fan blade is fixedly connected with the second chain wheel, and when the steam of the mixing bin is received, the hole and the pipeline can be connected to discharge the steam through the bottom or the top of the mixing bin.

[0020] The above technical scheme can make the gas conveying mechanism more convenient when conveying hot gas, thereby increasing the efficiency of the equipment when conveying hot gas.

[0021] Compared with the prior art, the utility model has the advantages that the driving motor drives the flow guide mechanism to operate, the steam is transmitted to the inside of the mixing bin through the flow guide mechanism after the evaporation film material, the driving motor also drives the gas conveying mechanism to transmit the hot gas to the inside of the mixing bin, the equipment can be more convenient when performing the co-evaporation work.

[0022] Further, the steam in the mixing bin can be more convenient when mixing and evaporating, thereby increasing the efficiency of the equipment when performing the co-evaporation work.

[0023] Further, the steam in the mixing bin can be more convenient when mixing and evaporating, thereby increasing the efficiency of the equipment when performing the co-evaporation work. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is a front elevation structure schematic view of the utility model;

[0025] Figure 2 It is a side view sectional structure schematic view of the utility model;

[0026] Figure 3 It is a driving motor elevation structure schematic view of the utility model;

[0027] Figure 4 It is a peristaltic pump rod elevation structure schematic view of the utility model;

[0028] Figure 5 It is a fan blade elevation structure schematic view of the utility model.

[0029] In the figure: 1, mixing bin; 2, device shell; 3, evaporation bin; 4, heating box; 5, drive motor; 6, first sprocket; 7, chain; 8, second sprocket; 9, drive shaft; 10, first bevel gear; 11, second bevel gear; 12, rotating rod; 13, stirring blade; 14, peristaltic pump rod; 15, peristaltic pump shell; 16, flow guide pipe; 17, membrane material box; 18, membrane material layer; 19, transmission pipe; 20, fan blade; 21, gas conveying pipe; 22, filter screen. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments.

[0031] In order to solve the problem that it is difficult to guide steam in the prior art, the following scheme is disclosed. Please refer to Figures 1-5 The utility model provides a kind of technical solutions: a kind of co-evaporation device of deposition multivariate membrane material, including mixing bin 1, with the device shell 2 of mixing bin 1 top, device shell 2 inside is equipped with flow guide mechanism, and flow guide mechanism top is equipped with membrane material box 17, and membrane material box 17 top is connected with evaporation bin 3, the evaporation bin 3 bottom is fixedly connected with device shell 2;

[0032] Device shell 2 rear end is equipped with drive motor 5, and mixing bin 1 outer side is equipped with heating box 4, and heating box 4 bottom is equipped with gas conveying mechanism, the heating box 4 is connected with mixing bin 1 by gas conveying mechanism, and drive motor 5 is connected with flow guide mechanism and gas conveying mechanism;Drive motor 5 front end is equipped with first sprocket 6, and first sprocket 6 outer side is engaged with chain 7, and chain 7 bottom is engaged with second sprocket 8, the first sprocket 6 is connected with flow guide mechanism, and second sprocket 8 is connected with gas conveying mechanism;

[0033] First sprocket 6 front end is equipped with drive shaft 9, and drive shaft 9 is rotatably connected with the inside of device shell 2, and flow guide mechanism includes peristaltic pump rod 14, the peristaltic pump rod 14 is fixedly connected with drive shaft 9, and peristaltic pump rod 14 outer side is equipped with peristaltic pump shell 15, and peristaltic pump rod 14 and peristaltic pump shell 15 between are equipped with flow guide pipe 16, the flow guide pipe 16 top is connected with membrane material box 17;

[0034] Membrane material box 17 inside is equipped with membrane material layer 18, and membrane material box 17 top is connected with transmission pipe 19, and transmission pipe 19 top is fixedly connected with evaporation bin 3;Membrane material box 17 and peristaltic pump shell 15 are fixedly connected with the inside of device shell 2 by fixing frame, and drive shaft 9 outer side is equipped with first bevel gear 10, and first bevel gear 10 bottom is engaged with second bevel gear 11, the second bevel gear 11 bottom is connected with rotating rod 12, and rotating rod 12 bottom is connected with stirring blade 13, and stirring blade 13 is located in the inside of mixing bin 1.

[0035] The mixing bin 1 is internally provided with a filter screen 22, and the filter screen 22 is fixedly connected with the inside of the mixing bin 1, and the filter screen 22 is located at the bottom of the flow guide pipe 16; the bottom of the mixing bin 1 is fixed through a bottom foot, and the gas conveying mechanism comprises a gas conveying pipe 21, and the right end of the gas conveying pipe 21 is fixedly connected with the heating box 4, and the left end of the gas conveying pipe 21 is connected with the inside of the mixing bin 1, and the inside of the gas conveying pipe 21 is provided with a fan blade 20, and the rear end of the fan blade 20 is fixedly connected with the second sprocket 8.

[0036] Working principle: when using the co-evaporation device for depositing multi-element film material, first, the power supply and power grid are connected for power supply, then the driving motor 5 drives the flow guide mechanism to operate, so that the steam in the evaporation bin 3 enters the film material box 17 under the driving of the flow guide mechanism, so that the steam and the film material in the film material box 17 form new steam, and enter the inside of the mixing bin 1 under the driving of the flow guide mechanism, at the same time, the driving motor 5 also drives the gas conveying mechanism to operate, so that the heating box 4 transmits hot gas to the inside of the mixing bin 1 through the gas conveying mechanism, so that the inside of the mixing bin 1 is always in a heated state;

[0037] When the driving motor 5 drives the flow guide mechanism to operate, the driving shaft 9 drives the peristaltic pump rod 14 to rotate, so that the peristaltic pump rod 14 cooperates with the peristaltic pump shell 15 to extrude the flow guide pipe 16, so that the suction force generated by the flow guide pipe 16 sucks the steam in the evaporation bin 3 into the film material box 17 to evaporate the film material layer 18, and then enters the inside of the mixing bin 1 through the flow guide pipe 16, at the same time, the driving shaft 9 drives the first bevel gear 10 to rotate, so that the first bevel gear 10 drives the second bevel gear 11, the rotating rod 12 and the stirring blade 13 to rotate, so as to mix the steam in the inside of the mixing bin 1;

[0038] When the driving motor 5 drives the flow guide mechanism to operate, the fan blade 20 in the gas conveying pipe 21 also rotates through the second sprocket 8, so that the hot gas in the heating box 4 enters the inside of the mixing bin 1 through the gas conveying pipe 21 under the driving of the fan blade 20, so as to heat the inside of the mixing bin 1.

[0039] So a series of work is completed, and the contents not described in detail in the specification belong to the prior art known to those skilled in the art.

[0040] It is apparent for a person skilled in the art that the present application is not restricted to the details of the above exemplary embodiments, but that it can be implemented in other concrete forms without departing from the spirit or the essential characteristics of the present application. Therefore, the embodiments should be considered as exemplary only, and not limiting, the scope of the present application being defined by the appended claims rather than the above description, and all changes coming within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference signs in the claims should not be construed as limiting the claims concerned.

Claims

1. A co-evaporation device for depositing a multi-component film material, comprising a mixing chamber (1) and a device housing (2) arranged on top of the mixing chamber (1), characterized in that The device shell (2) is internally provided with a flow guide mechanism, and the top of the flow guide mechanism is provided with a film box (17), and the top of the film box (17) is connected with an evaporation bin (3), and the bottom of the evaporation bin (3) is fixedly connected with the device shell (2); The rear end of the device shell (2) is provided with a driving motor (5), and the outer side of the mixing bin (1) is provided with a heating box (4), and the bottom of the heating box (4) is provided with a gas conveying mechanism, the heating box (4) is connected with the mixing bin (1) through the gas conveying mechanism, and the driving motor (5) is connected with the flow guide mechanism and the gas conveying mechanism.

2. The co-evaporation apparatus for depositing a multi-component film material according to claim 1, wherein The front end of the driving motor (5) is provided with a first sprocket (6), the outer side of the first sprocket (6) is engaged with a chain (7), and the bottom of the chain (7) is engaged with a second sprocket (8), the first sprocket (6) is connected with the flow guide mechanism, and the second sprocket (8) is connected with the gas conveying mechanism.

3. The co-evaporation apparatus for depositing a multinary film material according to claim 2, wherein The front end of the first sprocket (6) is provided with a driving shaft (9), and the driving shaft (9) is rotatably connected with the inside of the device shell (2), and the flow guide mechanism comprises a peristaltic pump rod (14), the peristaltic pump rod (14) is fixedly connected with the driving shaft (9), and the outer side of the peristaltic pump rod (14) is provided with a peristaltic pump shell (15), and a flow guide pipe (16) is arranged between the peristaltic pump rod (14) and the peristaltic pump shell (15), and the top of the flow guide pipe (16) is connected with the film box (17).

4. The co-evaporation apparatus for depositing a multinary film material according to claim 3, wherein The inside of the film box (17) is provided with a film layer (18), and the top of the film box (17) is connected with a transmission pipe (19), and the top of the transmission pipe (19) is fixedly connected with the evaporation bin (3).

5. The co-evaporation apparatus for depositing a multinary film material according to claim 4, wherein The film box (17) and the peristaltic pump shell (15) are fixedly connected with the inside of the device shell (2) through a fixing frame, the outer side of the driving shaft (9) is provided with a first bevel gear (10), the bottom of the first bevel gear (10) is engaged with a second bevel gear (11), the bottom of the second bevel gear (11) is connected with a rotating rod (12), the bottom of the rotating rod (12) is connected with a stirring blade (13), and the stirring blade (13) is located in the inside of the mixing bin (1).

6. The co-evaporation apparatus for depositing a multinary film material according to claim 5, wherein The inside of the mixing bin (1) is provided with a filter screen (22), and the filter screen (22) is fixedly connected with the inside of the mixing bin (1), and the filter screen (22) is located at the bottom of the flow guide pipe (16).

7. The co-evaporation apparatus for depositing a multinary film material according to claim 6, wherein The bottom of the mixing bin (1) is fixed through a bottom foot, the gas conveying mechanism comprises a gas conveying pipe (21), the right end of the gas conveying pipe (21) is fixedly connected with the heating box (4), and the left end of the gas conveying pipe (21) is connected with the inside of the mixing bin (1), the inside of the gas conveying pipe (21) is provided with a fan blade (20), and the rear end of the fan blade (20) is fixedly connected with the second sprocket (8).

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