High-flux semiconductor pneumatic diaphragm pump device

Abstract

The utility model discloses a high-flux semiconductor pneumatic diaphragm pump device which comprises a pump body assembly, a flow guide assembly and a connecting assembly. A fluid chamber and a ball valve element are arranged in the connecting assembly, a pneumatic element is arranged in the pump body assembly, and the pneumatic element drives the ball valve element to move by compressing air in the fluid chamber. The pneumatic element comprises a first diaphragm layer and a second diaphragm layer; a diaphragm cavity is formed between the first diaphragm layer and the second diaphragm pump and is a closed cavity. By arranging the first diaphragm layer, the second diaphragm layer and the double-layer diaphragm of the diaphragm cavity, the transmission shaft can push the first diaphragm layer to further act on the diaphragm cavity and drive the second diaphragm layer to move towards the fluid chamber, and the second diaphragm layer can extrude the fluid chamber and act on the ball valve element; therefore, the second diaphragm layer can generate great pressure on the liquid in the moving process, and the high circulation amount in the liquid transportation process can be effectively improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor pneumatic diaphragm pump technology, and in particular to a high-throughput semiconductor pneumatic diaphragm pump device. Background Technology

[0002] A pneumatic diaphragm pump is a new type of fluid machinery that uses the reciprocating motion of a diaphragm to achieve the purpose of liquid transportation. It mainly uses compressed air as its main power source and has a strong self-priming ability. It can transport various corrosive, highly toxic, flammable, volatile liquids, as well as liquids containing small particles and high viscosity. It can support forward and reverse rotation and has good leak-proof, corrosion-resistant, and easy-to-maintain characteristics.

[0003] Pneumatic diaphragm pumps are also widely used in the semiconductor field, typically for conveying various chemical liquids, etching solutions, cleaning solutions, waste liquids, etc. In actual use, the diaphragm structure plays a major role in liquid conveying as an important conveying component.

[0004] In the existing technology, Chinese patent CN208252320U has disclosed a shock-absorbing pneumatic double diaphragm pump with adjustable flow rate. This solution only uses a flow meter at the top to detect the flow rate, and then uses a controller to control the solenoid valve to realize the flow rate during the liquid transfer process. Since it is a single-layer diaphragm, the diaphragm structure design is relatively simple, making it difficult to achieve a high liquid flow rate. Furthermore, when the diaphragm pushes the ball valves on both sides to move in opposite directions, the sealing of the ball valves is insufficient. In particular, frequent impacts cause damage to the surface of the ball, which seriously affects the sealing of the closed ball valve, resulting in a decrease in the overall pressure of the diaphragm pump and further reducing the liquid flow rate. Utility Model Content

[0005] To address the aforementioned issues, this application proposes a high-throughput semiconductor pneumatic diaphragm pump device, which solves the technical problem in the prior art where the diaphragm structure is simple, the sealing between the ball and the ball valve is reduced during use, resulting in weakened liquid flow and reduced liquid transport volume.

[0006] To achieve the above technical objectives, this utility model provides the following solution:

[0007] A high-throughput semiconductor pneumatic diaphragm pump device includes a pump body assembly, a flow guiding assembly, and a connecting assembly;

[0008] The pump body assembly is connected to the flow guide assembly via a connecting assembly. The pump body assembly acts as a pressure transmission device, enabling the liquid to be transported between the connecting assembly and the flow guide assembly. The connecting assembly contains a fluid chamber and a ball valve element, while the pump body assembly contains a pneumatic element. The pneumatic element compresses the air in the fluid chamber, thereby driving the ball valve element to move.

[0009] The pneumatic component includes a first diaphragm layer, a second diaphragm layer, a diaphragm cavity, a drive shaft, and a power unit; one end of the drive shaft is connected to the center of the first diaphragm layer, and the other end of the drive shaft is connected to the power unit; a diaphragm cavity is provided between the first diaphragm layer and the second diaphragm pump, and the diaphragm cavity is a closed cavity.

[0010] Furthermore, the ball valve element includes a ball valve cavity, which includes a first groove, a second groove, and a ball, wherein the ball is located between the first groove and the second groove.

[0011] Furthermore, a first sealing gasket is provided at the end of the first groove near the sphere; a second sealing gasket is provided at the end of the second groove near the sphere.

[0012] Furthermore, a protective layer is provided on the surface of the sphere.

[0013] Preferably, the first sealing gasket layer and the second sealing gasket layer are made of rubber material, and the sphere protective layer is also made of rubber material.

[0014] Furthermore, the flow guiding component includes a first flow guiding component and a second flow guiding component, and the connecting component includes a first connecting component and a second connecting component; one end of the pump body component is connected to the first connecting component, and the other end of the pump body component is connected to the second connecting component; the top and bottom ends of the first connecting component are respectively connected to the first flow guiding component and the second flow guiding component; the top and bottom ends of the second connecting component are respectively connected to the first flow guiding component and the second flow guiding component.

[0015] Furthermore, the pump body assembly also includes a pump body housing, which is connected to the first diaphragm layer and the second diaphragm layer respectively, and forms a diaphragm cavity with the first diaphragm layer and the second diaphragm layer.

[0016] Furthermore, the connecting assembly is also provided with a connecting housing, and the pump body outer shell, the connecting housing, and the second diaphragm layer form a fluid chamber.

[0017] Furthermore, a sound-absorbing layer is provided at the end of the first diaphragm layer near the second diaphragm layer, an anti-corrosion layer is provided at the end of the second diaphragm layer near the fluid chamber, and a reinforcing layer is provided at the layer near the diaphragm cavity.

[0018] Furthermore, the flow guiding component is also equipped with a flow guiding pipe, and the pump body shell, connecting shell, and flow guiding pipe are integrated into one design.

[0019] Furthermore, a bracket is also fixedly installed at the bottom of the second flow guide component.

[0020] The beneficial effects of this application include, but are not limited to:

[0021] (1) By setting up a pump body assembly, a flow guiding assembly, and a connecting assembly, this application can effectively realize the pump body assembly, the connecting assembly, and the flow guiding assembly to transport fluid. By setting up a double-layer diaphragm with a first diaphragm layer, a second diaphragm layer, and a diaphragm cavity, the drive shaft can be driven by the power device to push the first diaphragm layer, which in turn acts on the diaphragm cavity, driving the second diaphragm layer to move towards the fluid chamber. The second diaphragm layer will squeeze the fluid chamber and act on the ball valve element, so that the second diaphragm layer can generate great pressure on the liquid during its movement, which can effectively improve the high flow rate during liquid transport.

[0022] (2) By setting a first sealing gasket layer and a second sealing gasket layer on the first and second slots in the ball valve cavity, and setting a ball protective layer on the ball surface, this application can effectively provide elastic protection for the ball, avoid damage to the ball surface caused by contact with the first and second slots, thereby improving the ball life, maintaining the stability of the pump body assembly suction, and reducing the maintenance cost of the pneumatic diaphragm pump device.

[0023] (3) By setting a sound-absorbing layer at the first diaphragm layer and a corrosion-resistant layer and a reinforcing layer at the second diaphragm layer, this application can further reduce the noise of the pneumatic diaphragm pump device during reciprocating motion, and provide better stability for the second diaphragm layer during fluid transport, thereby improving the durability of the pneumatic diaphragm pump device. Attached Figure Description

[0024] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0025] Figure 1 This is a schematic diagram of the structure of the pneumatic diaphragm pump device provided by this utility model;

[0026] Figure 2 This is a schematic diagram of the structure of the pneumatic diaphragm pump device provided by this utility model;

[0027] Figure 3 This is a schematic diagram of the structure at point A of the pneumatic diaphragm pump device provided by this utility model;

[0028] List of components and reference numerals:

[0029] 1. Flow guiding assembly; 2. Pump body assembly; 3. Connecting assembly; 101. First flow guiding assembly; 102. Second flow guiding assembly; 103. Flow guiding pipe; 104. Support; 201. First diaphragm layer; 202. Second diaphragm layer; 203. Diaphragm cavity; 204. Drive shaft; 205. Power unit; 206. Pump body shell; 207. Noise-absorbing layer; 208. Corrosion-resistant layer; 209. Reinforcing layer; 301. First connecting assembly; 302. Second connecting assembly; 303. Fluid chamber; 304. Ball valve element; 305. First slot; 306. Second slot; 307. Ball; 308. First sealing gasket layer; 309. Second sealing gasket layer; 310. Ball protective layer; 311. Connecting shell. Detailed Implementation

[0030] To more clearly illustrate the overall concept of this application, a detailed explanation is provided below with reference to the accompanying drawings.

[0031] To better understand the above-mentioned objectives, features, and advantages of this application, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0032] Many specific details are set forth in the following description in order to provide a full understanding of this application. However, this application may also be implemented in other ways different from those described herein. Therefore, the scope of protection of this application is not limited to the specific embodiments disclosed below.

[0033] Furthermore, it should be understood in the description of this application that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0034] A high-throughput semiconductor pneumatic diaphragm pump device, such as Figure 1-2As shown, the pump assembly includes a pump body assembly 2, a flow guide assembly 1, and a connecting assembly 3. The pump body assembly 2 is connected to the flow guide assembly 1 via the connecting assembly 3. The pump body assembly 2 serves as a pressure transmission device, enabling the transmission of liquid between the connecting assembly 3 and the flow guide assembly 1. The connecting assembly 3 contains a fluid chamber 303 and a ball valve element 304. The pump body assembly 2 contains a pneumatic element, which compresses the air in the fluid chamber 303 to drive the ball valve element 304. The pneumatic element includes a first diaphragm layer 201, a second diaphragm layer 202, a diaphragm cavity 203, a drive shaft 204, and a power unit 205. One end of the drive shaft 204 is connected to the center of the first diaphragm layer 201, and the other end of the drive shaft 204 is connected to the power unit 205. A diaphragm cavity 203 is provided between the first diaphragm layer 201 and the second diaphragm pump. The diaphragm cavity 203 is a closed cavity.

[0035] By setting up the pump body assembly 2, the flow guiding assembly 1, and the connecting assembly 3, the pump body assembly 2 can effectively cooperate with the connecting assembly 3 and the flow guiding assembly 1 to transport fluid. By setting up a double diaphragm of the first diaphragm layer 201, the second diaphragm layer 202, and the diaphragm cavity 203, the drive shaft 204 can be driven by the power device 205 to push the first diaphragm layer 201, which in turn acts on the diaphragm cavity 203, driving the second diaphragm layer 202 to move towards the fluid chamber 303. The second diaphragm layer 202 will squeeze the fluid chamber 303 and act on the ball valve element 304, so that the second diaphragm layer 202 can generate great pressure on the liquid during its movement, which can effectively improve the high flow rate during liquid transport.

[0036] In another embodiment, such as Figure 1 , Figure 3 As shown, the ball valve element 304 includes a ball valve cavity, which includes a first groove 305, a second groove 306, and a ball 307, wherein the ball 307 is located between the first groove 305 and the second groove 306. By designing the first groove 305 and the second groove 306, the frequent impacts that occur during the up-and-down movement of the ball 307 in traditional ball valves can be avoided, which would cause irregular pits on the surface of the ball valve and reduce the service life of the ball 307. At the same time, by adopting the arc-shaped design of the first groove 305 and the second groove 306, the damage to the surface of the ball 307 caused by contact impact during the up-and-down movement of the ball 307 can be reduced, thereby avoiding the weakening of the delivery pressure caused by damage to the ball 307 during continuous use.

[0037] In another embodiment, such as Figure 3As shown, a first sealing gasket 308 is provided at the end of the first groove 305 near the ball 307; a second sealing gasket 309 is provided at the end of the second groove 306 near the ball 307. By designing the first sealing gasket 308 at the first groove 305 and the second sealing gasket 309 at the second groove 306, the contact impact damage that may occur to the ball 307 during movement can be effectively mitigated, and the service life of the ball 307 can be improved. Secondly, during the reciprocating motion of the ball 307, it can fully compress and contact the first sealing gasket and the second sealing gasket, which can not cause damage to the ball 307, but also further ensure that the pressure does not leak out, so that the ball valve element 304 has better sealing performance, thereby bringing more stable liquid transport pressure.

[0038] In another embodiment, such as Figure 3 As shown, a protective layer 310 is provided on the surface of the sphere 307. By providing a protective layer 310 on the surface of the sphere 307, damage to the surface of the sphere 307 can be reduced, and the sealing performance can be improved during the contact between the sphere 307 and the first groove 305 and the second groove 306, thus ensuring the stability of pressure during liquid transportation.

[0039] In another embodiment, such as Figure 1 As shown, the flow guiding component 1 includes a first flow guiding component 101 and a second flow guiding component 102, and the connecting component 3 includes a first connecting component 301 and a second connecting component 302. One end of the pump body component 2 is connected to the first connecting component 301, and the other end of the pump body component 2 is connected to the second connecting component 302. The top and bottom ends of the first connecting component 301 are respectively connected to the first flow guiding component 101 and the second flow guiding component 102. The top and bottom ends of the second connecting component 302 are respectively connected to the first flow guiding component 101 and the second flow guiding component 102. By setting up the pump body component 2, the flow guiding component 1, and the connecting component 3, the pump body component 2 can effectively cooperate with the connecting component 3 and the flow guiding component 1 to transport fluid, so that the fluid can maintain better sealing and stability during the transport process.

[0040] In another embodiment, such as Figure 2As shown, the pump body assembly 2 also includes a pump body housing 206, which is connected to the first diaphragm layer 201 and the second diaphragm layer 202, forming a diaphragm cavity 203 between the pump body housing 206 and the first diaphragm layer 201 and the second diaphragm layer 202. The connection between the pump body housing 206 and the first diaphragm layer 201 and the second diaphragm layer 202 effectively controls the movement amplitude of the first diaphragm layer 201 and the second diaphragm layer 202, improving transmission efficiency. Furthermore, the diaphragm cavity 203 formed between the pump body housing 206 and the first diaphragm layer 201 and the second diaphragm layer 202 is a sealed cavity, allowing the first diaphragm layer 201 to compress the diaphragm cavity 203 and transmit pressure to the second diaphragm layer 202, thereby achieving greater pressure transmission and increasing the liquid transmission pressure.

[0041] In another embodiment, such as Figure 2 As shown, the connecting assembly 3 is also provided with a connecting housing 311, and a fluid chamber 303 is formed between the pump body housing 206, the connecting housing 311, and the second diaphragm layer 202. By forming a fluid chamber 303 between the connecting housing 311, the pump body housing 206, and the second diaphragm layer 202, the reciprocating motion of the second diaphragm layer 202 can effectively transfer the liquid from the first flow guiding assembly 101 to the connecting assembly 3, and then to the second flow guiding assembly 102, thus achieving effective liquid transfer.

[0042] In another embodiment, such as Figure 2 As shown, a sound-absorbing layer 207 is provided at the end of the first diaphragm layer 201 near the second diaphragm layer 202, an anti-corrosion layer 208 is provided at the end of the second diaphragm layer 202 near the fluid chamber 303, and a reinforcing layer 209 is provided at the layer near the diaphragm cavity 203. By providing the sound-absorbing layer 207, internal noise present in the device during transmission can be effectively absorbed and reduced, so that the noise can be effectively absorbed and not transmitted. In addition, the membrane structure with anti-corrosion layer 208 and reinforcing layer 209 can effectively improve the stability of the transported liquid. At the same time, the surface of the second diaphragm layer 202 has no extra connecting components 3, and the surface is smoother, maintaining the stability of the transmission pressure during liquid transmission.

[0043] In another embodiment, such as Figure 1 As shown, the flow guiding component 1 is also equipped with a flow guiding pipe 103. The pump body shell 206, the connecting shell 311, and the flow guiding pipe 103 are integrated into one unit. Through the integrated structural design, the integrity and uniformity of the overall internal structure can be guaranteed, the strength of the device can be improved, and good sealing performance can be ensured during fluid transportation.

[0044] In another embodiment, such as Figure 1As shown, a bracket 104 is also fixedly installed at the bottom of the second flow guiding assembly 102. The bracket 104 provides more stable support for the diaphragm pump device.

[0045] The above description is merely an embodiment of this application and is not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. A high-throughput semiconductor pneumatic diaphragm pump device, characterized in that, Includes pump body assembly, flow guide assembly, and connecting assembly; The pump body assembly is connected to the flow guiding assembly via a connecting assembly, wherein the pump body assembly, as a pressure transmission device, is capable of conveying liquid between the connecting assembly and the flow guiding assembly; The connecting assembly is equipped with a fluid chamber and a ball valve element, and the pump body assembly is equipped with a pneumatic element. The pneumatic element provides power for liquid transport by transmitting pressure into the fluid chamber and drives the ball valve element to move. The pneumatic component includes a first diaphragm layer, a second diaphragm layer, a diaphragm cavity, a drive shaft, and a power unit. The end of the drive shaft near the fluid chamber is connected to the center of the first diaphragm layer, and the end of the drive shaft near the fluid chamber is connected to the power unit. The power unit acts on the first diaphragm layer through the drive shaft. A diaphragm cavity is provided between the first diaphragm layer and the second diaphragm pump. The diaphragm cavity is a closed cavity.

2. The pneumatic diaphragm pump device according to claim 1, characterized in that, The ball valve element includes a ball valve cavity, which includes a first groove, a second groove, and a ball, wherein the ball is located between the first groove and the second groove.

3. The pneumatic diaphragm pump device according to claim 2, characterized in that, A first sealing gasket is provided at the end of the first slot near the sphere; a second sealing gasket is provided at the end of the second slot near the sphere.

4. The pneumatic diaphragm pump device according to claim 2, characterized in that, The surface of the sphere is provided with a protective layer.

5. The pneumatic diaphragm pump device according to claim 1, characterized in that, The flow guiding component includes a first flow guiding component and a second flow guiding component; the connecting component includes a first connecting component and a second connecting component; one end of the pump body component is connected to the first connecting component, and the other end of the pump body component is connected to the second connecting component; the top and bottom ends of the first connecting component are respectively connected to the first flow guiding component and the second flow guiding component; the top and bottom ends of the second connecting component are respectively connected to the first flow guiding component and the second flow guiding component.

6. The pneumatic diaphragm pump device according to claim 1, characterized in that, The pump body assembly also includes a pump body shell, which is connected to the first diaphragm layer and the second diaphragm layer respectively, and forms a diaphragm cavity with the first diaphragm layer and the second diaphragm layer.

7. The pneumatic diaphragm pump device according to claim 6, characterized in that, The connecting assembly is further provided with a connecting housing, and the pump body outer shell, the connecting housing, and the second diaphragm layer form a fluid chamber.

8. The pneumatic diaphragm pump device according to claim 6, characterized in that, A sound-absorbing layer is provided at the end of the first diaphragm layer near the second diaphragm layer, an anti-corrosion layer is provided at the end of the second diaphragm layer near the fluid chamber, and a reinforcing layer is provided at the layer near the diaphragm cavity.

9. The pneumatic diaphragm pump device according to claim 7, characterized in that, The flow guiding component is also provided with a flow guiding pipe, and the pump body shell, connecting shell, and flow guiding pipe are integrated into one unit.

10. The pneumatic diaphragm pump device according to claim 5, characterized in that, A bracket is also fixedly installed at the bottom of the second flow guide component.

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