Robot track precision measuring device

Abstract

The utility model relates to the technical field of robot track precision measuring devices, and discloses a robot track precision measuring device which comprises a flange cover plate connected with a robot, a sleeve is fixedly connected to the bottom of the flange cover plate, and a steel needle is slidably connected into the side face of the bottom of the sleeve. A black acceptor is arranged in the sleeve, a base is fixedly connected to the bottom of the black acceptor, the flange cover plate, the sleeve and the steel needle form a moving end connected with a robot, the black acceptor and the base form a fixed end, the steel needle is rotated to control the extending distance of the steel needle, and under the condition that a certain rotating speed is kept, the steel needle is fixed to the base. The steel needle is infinitely close to the black receptor, no scratch is left on the black receptor, and a feeler gauge is used for measuring the distance between the steel needle and the black receptor so as to measure the track precision. The measuring method is low in cost, simple to operate and high in accuracy.

Description

Technical Field

[0001] This utility model relates to the technical field of robot trajectory accuracy measurement devices, specifically a robot trajectory accuracy measurement device. Background Technology

[0002] When inserting wafers, the wafer insertion robot needs to autonomously complete the actions of picking up and placing wafers, which requires high trajectory accuracy. Robot trajectory accuracy has become an important indicator for measuring robot performance.

[0003] According to Chinese patent CN221583657U, a robot repeatability positioning accuracy measurement device is proposed. In this device, the robot moves back and forth between the test point and the target point multiple times according to the motion profile. The main body of the accuracy measurement device automatically transmits the test data of each test to the computer for processing and outputting the repeatability positioning accuracy result. This improves the convenience and safety of the robot repeatability positioning accuracy measurement operation and reduces the measurement cost.

[0004] Existing robot trajectory accuracy measurement devices have some shortcomings. Current methods mainly rely on laser trackers or 3D vision equipment for 3D measurement of robots. However, these measurement methods are expensive and not convenient for low-cost, fast, and accurate measurement. Therefore, we propose a robot trajectory accuracy measurement device. Utility Model Content

[0005] The purpose of this invention is to provide a robot trajectory accuracy measurement device, which solves the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a robot trajectory accuracy measuring device, including a flange cover plate connected to a robot, a sleeve fixedly connected to the bottom of the flange cover plate, a steel needle slidably connected inside the bottom side of the sleeve, a black acceptor provided inside the sleeve, and a base fixedly connected to the bottom of the black acceptor.

[0007] Preferably, the flange cover, sleeve, and steel needles form a mobile end connected to the robot, while the black receptor and base form a fixed end. The robot controls the movement of the mobile end to align the sleeve and the black receptor concentrically. Then, the four steel needles are rotated until their end faces are equidistant from the outer wall of the black receptor. A point 'a' is defined on the upper outer side of the black receptor. After point 'a' is moved vertically downwards a certain distance, it is defined as point 'b'. At a certain speed, the robot controls the movement of the mobile end to make one end of the steel needles move vertically between points 'a' and 'b'. Continuously adjust the distance between one end of the steel needle and the black receptor, bringing the needle infinitely close to the receptor without leaving scratches on its surface. Repeat this process, measuring the distance from one end of the steel needle to the inner wall of the black receptor with a feeler gauge to determine its absolute positioning accuracy. Then, concentrically position the sleeve directly above the black receptor and define a point as x. After moving it laterally a certain distance, define a point as y. Return the sleeve to point x and continue the vertical movement between points a and b. Repeat this process, measuring the repeatability accuracy with a feeler gauge to facilitate rapid and accurate measurement by the robot.

[0008] Preferably, there are four steel needles of equal size, which are arranged in a circumferential array along the central axis of the sleeve on the inner side wall of the sleeve. The absolute positioning accuracy is measured by making the steel needles infinitely close to the black receptor without leaving any scratches on the black receptor, and by measuring the distance between the steel needles and the black receptor with a feeler gauge.

[0009] Preferably, the top of the sleeve is fixedly connected to the bottom of the flange cover plate, and the sleeve is located outside the black receptor, allowing the sleeve to move up and down along the outer wall of the black receptor.

[0010] Preferably, the inner wall of the bottom side of the sleeve is slidably connected to the outer wall of the steel needle. By sliding the outer wall of the steel needle to the inner wall of the bottom side of the sleeve, the lateral movement distance of the steel needle can be easily adjusted, thereby achieving accurate measurement of the inner wall of the black receiver.

[0011] Preferably, the bottom of the flange cover is fixedly connected to the top of the sleeve, and the flange cover is located above the black receptor.

[0012] This invention provides a robot trajectory accuracy measurement device. This robot trajectory accuracy measurement device has the following advantages:

[0013] This robot trajectory accuracy measurement device involves a robot-controlled mobile end moving to align the sleeve with the black receptor. Four steel needles are then rotated until their ends are equidistant from the outer wall of the black receptor. A point 'a' is defined on the upper outer side of the black receptor. After moving vertically downwards from point 'a' a certain distance, it is defined as point 'b'. At a certain speed, the robot controls the mobile end to move vertically between points 'a' and 'b', continuously adjusting the distance between the needle and the black receptor until the needle approaches the receptor without leaving scratches. This process is repeated, and a feeler gauge is used to measure the distance from the needle to the inner wall of the black receptor, thus facilitating the measurement of absolute positioning accuracy. The sleeve is then concentrically positioned directly above the black receptor, and a point 'x' is defined. After moving laterally a certain distance, a point 'y' is defined. The sleeve is then returned to point 'x', and the vertical movement between points 'a' and 'b' is repeated. This process is repeated, and a feeler gauge is used to measure the repeatability accuracy, enabling rapid and accurate robot-based measurements. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0015] Figure 2 This is a schematic diagram of the structure of the measurement points of this utility model;

[0016] Figure 3 This is an exploded view of the measurement points of this utility model.

[0017] In the diagram: 1. Flange cover; 2. Sleeve; 3. Steel needle; 4. Black receptor; 5. Base. Detailed Implementation

[0018] To provide a clearer understanding of the technical features, objectives, and effects of this utility model, the specific embodiments of this utility model are now described with reference to the accompanying drawings.

[0019] A preferred embodiment of the robot trajectory accuracy measuring device provided by this utility model is, for example... Figures 1 to 3As shown: A robot trajectory accuracy measuring device includes a flange cover plate 1 connected to a robot. A sleeve 2 is fixedly connected to the bottom of the flange cover plate 1. Steel needles 3 are slidably connected to the inside of the bottom side of the sleeve 2. A black receptor 4 is disposed inside the sleeve 2. A base 5 is fixedly connected to the bottom of the black receptor 4. The robot controls the moving end to move so that the sleeve 2 and the black receptor 4 are in a concentric position. Then, the four steel needles 3 are rotated respectively so that the distance between the end face of the four steel needles and the outer wall of the black receptor is equal. A point a is defined on the upper outer side of the black receptor 4. After point a moves vertically downward a certain distance, it is defined as point b. At a certain speed, the robot controls the moving end to move... The movement is repeated so that one end of the steel needle 3 moves in a straight line between points a and b, continuously adjusting the distance between one end of the steel needle 3 and the black receptor 4, bringing the steel needle 3 infinitely close to the receptor without leaving scratches on the surface of the black receptor. This process is repeated, and the distance from one end of the steel needle 3 to the inner wall of the black receptor 4 is measured with a feeler gauge to facilitate the measurement of its absolute positioning accuracy. Then, the sleeve 2 is concentrically positioned directly above the black receptor 4, and a point is defined as point x. After moving laterally a certain distance, a point is defined as point y. The sleeve 2 is then returned to point x, and the vertical movement between points a and b is continued. This process is repeated, and the repeatability positioning accuracy is measured with a feeler gauge, thus facilitating the robot's rapid and accurate measurement.

[0020] Furthermore, the flange cover 1, sleeve 2, and steel needle 3 form the mobile end connected to the robot, while the black receptor 4 and base 5 form the fixed end.

[0021] Furthermore, there are four steel needles 3, all of equal size, arranged in a circular array along the central axis of the sleeve 2 on the inner side wall of the sleeve 2. The steel needles 3 are used to approach the black receptor 4 infinitely without leaving scratches on the black receptor 4, and the distance between the steel needles 3 and the black receptor 4 is measured with a feeler gauge to measure the absolute positioning accuracy.

[0022] Furthermore, the top of the sleeve 2 is fixedly connected to the bottom of the flange cover plate 1, and the sleeve 2 is located outside the black receptor 4.

[0023] Furthermore, the inner wall of the bottom side of the sleeve 2 is slidably connected to the outer wall of the steel needle 3. By slidably connecting the outer wall of the steel needle 3 to the inner wall of the bottom side of the sleeve 2, it is easy to adjust the lateral movement distance of the steel needle 3, thereby achieving accurate measurement of the inner wall of the black receptor 4.

[0024] In addition, the bottom of the flange cover 1 is fixedly connected to the top of the sleeve 2, and the flange cover 1 is located above the black receptor 4.

[0025] Working principle: During trajectory measurement, the robot first controls the moving end to move, aligning the sleeve 2 and the black receptor 4 concentrically. Then, it rotates the four steel needles 3 until their ends are equidistant from the outer wall of the black receptor. A point 'a' is defined on the upper outer side of the black receptor 4. After moving point 'a' vertically downwards a certain distance, it is defined as point 'b'. At a certain speed, the robot controls the moving end to move, causing one end of the steel needles 3 to move linearly between points 'a' and 'b', continuously adjusting the alignment of one end of the steel needles 3 with the black receptor 4. The distance between them is such that the steel needle 3 is infinitely close to the recipient without leaving scratches on the surface of the black recipient. This process is repeated, and the distance from one end of the steel needle 3 to the inner wall of the black recipient 4 is measured with a feeler gauge to facilitate the measurement of its absolute positioning accuracy. Then, the sleeve 2 is concentrically positioned directly above the black recipient 4, and a point is defined as point x. After moving it laterally a certain distance, a point is defined as point y. Then, the sleeve 2 is returned to point x, and the vertical movement between points a and b is continued. This process is repeated, and the repeatability positioning accuracy is measured with a feeler gauge to facilitate the robot's fast and accurate measurement.

[0026] The above description is merely an illustrative embodiment of this utility model and is not intended to limit the scope of this utility model. Any equivalent changes and modifications made by those skilled in the art without departing from the concept and principles of this utility model should fall within the protection scope of this utility model. Furthermore, it should be noted that the components of this utility model are not limited to the overall application described above. Each technical feature described in the specification of this utility model can be used individually or in combination as needed. Therefore, this utility model naturally covers other combinations and specific applications related to this utility model.

Claims

1. A robot trajectory accuracy measuring device, comprising a flange cover plate (1) connected to a robot, characterized in that: A sleeve (2) is fixedly connected to the bottom of the flange cover plate (1), a steel needle (3) is slidably connected to the inside of the bottom side of the sleeve (2), a black receptor (4) is provided inside the sleeve (2), and a base (5) is fixedly connected to the bottom of the black receptor (4).

2. The robot trajectory accuracy measuring device according to claim 1, characterized in that: The flange cover (1), sleeve (2) and steel needle (3) form a mobile end connected to the robot, and the black receptor (4) and base (5) form a fixed end.

3. The robot trajectory accuracy measuring device according to claim 1, characterized in that: There are four steel needles (3), all of the same size, and the four steel needles (3) are arranged in a circumferential array along the central axis of the sleeve (2) on the inner side wall of the sleeve (2).

4. The robot trajectory accuracy measuring device according to claim 1, characterized in that: The top of the sleeve (2) is fixedly connected to the bottom of the flange cover (1), and the sleeve (2) is located outside the black receptor (4).

5. The robot trajectory accuracy measuring device according to claim 1, characterized in that: The inner wall of the bottom side of the sleeve (2) is slidably connected to the outer wall of the steel needle (3).

6. The robot trajectory accuracy measuring device according to claim 1, characterized in that: The bottom of the flange cover (1) is fixedly connected to the top of the sleeve (2), and the flange cover (1) is located above the black receptor (4).

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