High-voltage electricity introduction structure for electron gun

Abstract

The utility model relates to the technical field of electric vacuum, and aims to solve the technical problems of difficulty in maintenance and poor sealing effect. In order to solve the technical problem, the utility model provides the high-voltage electricity introduction structure for the electron gun. According to the utility model, two sealing connection assemblies are respectively provided with a copper rod in a penetrating manner; a first through hole coaxial with the insulating protective sleeve is formed in the insulating protective sleeve of the sealing connecting assembly; the insulating protective sleeve comprises a first connecting end, a second connecting end and a middle connecting part; the first connecting end and the second connecting end are arranged at the two ends of the middle connecting part respectively, and the outer diameter of the middle connecting part is larger than the outer diameter of the first connecting end and the outer diameter of the second connecting end. The first connecting end is detachably connected with the flange; the outer end surface of the flange is hermetically connected with the end surface of the middle connecting part; the second connecting end is detachably connected in the mounting groove, and the end face of the second connecting end, the inner end face of the mounting groove and the copper rod are in sealed connection. The sealing device is easy to maintain and good in sealing effect.

Description

Technical Field

[0001] This utility model relates to the field of vacuum electrotechnology, and in particular to a high-voltage electrical introduction structure for an electron gun. Background Technology

[0002] In the fabrication of equipment for superconducting strip evaporation silver plating, electric heating often requires a large current. While high-voltage hot cathode electronic heating eliminates the need for a large current, the induction of negative high voltage and filament current from the high voltage entering the cavity from outside necessitates a high-voltage-resistant hot cathode. Commercially available ceramic-sealed electrodes (vacuum-sealed, overcurrent resistant) tend to suffer damage to the surface high-voltage insulation material over time. Furthermore, the existing technology's structure is difficult to disassemble and maintain, requiring replacement and incurring high costs; the sealing effect is also poor. Utility Model Content

[0003] Therefore, the technical problem to be solved by this utility model is to overcome the above-mentioned problems existing in the prior art.

[0004] To solve the above-mentioned technical problems, this utility model provides a high-voltage electricity introduction structure for an electron gun, comprising:

[0005] Flange;

[0006] Two sealing connection assemblies are arranged side by side and connected to flanges respectively. A copper rod passes through each of the two sealing connection assemblies, and the two copper rods have a voltage difference. The sealing connection assembly includes an insulating protective sleeve and a sealing connection part.

[0007] The insulating protective sleeve has a first through hole coaxial with it for inserting a copper rod; the insulating protective sleeve includes a first connecting end, a second connecting end and an intermediate connecting part; the first connecting end and the second connecting end are respectively located at both ends of the intermediate connecting part, and the outer diameter of the intermediate connecting part is larger than the outer diameter of the first connecting end and the outer diameter of the second connecting end; the first connecting end is detachably connected to the flange, and the outer end face of the flange is sealed to the end face of the intermediate connecting part.

[0008] The sealing connection part is provided with a second through hole coaxial with it for inserting a copper rod; the front end of the sealing connection part is provided with a mounting groove, and the second connecting end is detachably connected to the mounting groove, and the end face of the second connecting end, the inner end face of the mounting groove, and the copper rod are sealed together.

[0009] In one embodiment of this utility model, the front end of the first connecting end has a portion extending into the inside of the flange, and its length is 20~30mm.

[0010] In one embodiment of this utility model, the tail end of the sealing connection part is provided with a mating end, and the outer diameter of the mating end is smaller than the outer diameter of the sealing connection part.

[0011] In one embodiment of this utility model, the length of the mating end is greater than 20mm.

[0012] In one embodiment of this utility model, at least one of the insulating protective sleeve and the sealing connection is made of polytetrafluoroethylene.

[0013] In one embodiment of this utility model, the outer end face of the flange and the end face of the intermediate connection part are sealed and connected by a first O-ring.

[0014] In one embodiment of this utility model, the end face of the second connecting end, the inner end face of the mounting groove, and the copper rod sealing connection are sealed by a second O-ring.

[0015] In one embodiment of this utility model, the outer end face of the flange and the end face of the intermediate connecting part are sealed and connected by a first O-ring; the end face of the second connecting end, the inner end face of the mounting groove, and the copper rod are sealed and connected by a second O-ring.

[0016] In one embodiment of this utility model, the first through hole at the end face of the second connecting end is provided with an inner chamfer.

[0017] In one embodiment of this utility model, the first connecting end is threadedly connected to the flange.

[0018] In one embodiment of this utility model, the second connecting end is threadedly connected to the mounting groove.

[0019] In one embodiment of this utility model, the first connecting end is threadedly connected to the flange; the second connecting end is threadedly connected to the mounting groove.

[0020] In one embodiment of this utility model, the diameter of the copper rod is greater than 3mm.

[0021] In one embodiment of this utility model, the flange and the vacuum chamber are connected by bolts, and the two are sealed by copper gaskets.

[0022] The above-mentioned technical solution of this utility model has the following advantages compared with the prior art:

[0023] The high-voltage electrical introduction structure for an electron gun described in this utility model features a detachable connection between the flange and the insulating protective sleeve, and a detachable connection between the insulating protective sleeve and the sealing connection. These detachable connection structures facilitate maintenance and reduce component costs. In this embodiment, the flange is pressed tightly against the insulating protective sleeve on the outside, and the end face of the second connection end, the inner end face of the mounting groove, and the copper rod are sealed on the outside of the vacuum chamber. Therefore, this embodiment achieves sealing on the outside of the vacuum chamber, where the pressure is greater than the pressure inside, further improving the sealing effect. Thus, this application offers better sealing performance, ease of maintenance, convenient and timely replacement of damaged components, and reduced costs. Attached Figure Description

[0024] To make the content of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings, wherein:

[0025] Figure 1 This is a schematic diagram of a high-voltage electric introduction structure for an electron gun in a preferred embodiment of the present invention;

[0026] Figure 2 yes Figure 1 The cross-sectional view shown is of the high-voltage electrical introduction structure for the electron gun.

[0027] Figure 3 yes Figure 2 A partial schematic diagram;

[0028] Figure 4 yes Figure 1 The diagram shows the structure of the insulating protective sleeve in the high-voltage electrical introduction structure for the electron gun.

[0029] Figure 5 yes Figure 1 The diagram shows a structural schematic of the sealed connection in the high-voltage electrical introduction structure for the electron gun.

[0030] Instruction manual drawing reference numerals: 100, flange;

[0031] 200. Copper rod;

[0032] 300. Insulating protective sleeve; 310. First through hole; 320. First connecting end; 330. Second connecting end; 331. Inner chamfer; 340. Intermediate connecting part;

[0033] 400, Sealing connection; 410, Second through hole; 420, Mounting groove; 430, Butt joint;

[0034] 500. Vacuum cavity;

[0035] 600, First O-ring;

[0036] 700, Second O-ring;

[0037] 800, filament;

[0038] 900, copper conductor high-voltage wire;

[0039] 1000, Insulating sleeve. Detailed Implementation

[0040] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0041] In some comparative embodiments, the ceramic-sealed electrode is a single, integrated structure, which is difficult to maintain and can only be replaced by specialized manufacturers if damaged. Furthermore, since the sealing structure is inside the vacuum chamber, the sealing effect is relatively poor.

[0042] To solve this problem, refer to Figures 1-5 As shown, this embodiment of the present invention provides a high-voltage electrical introduction structure for an electron gun, comprising:

[0043] Flange 100; Flange 100 is bolted to the vacuum chamber 500, and the two are sealed by a copper gasket. Installation and disassembly are convenient and quick.

[0044] Two sealing connection assemblies are arranged side by side and connected to flanges 100 respectively. Each sealing connection assembly has a copper rod 200 passing through it, and the two copper rods 200 have a voltage difference. One end of each copper rod 200 inside the vacuum chamber 500 is connected by a filament 800. The other end of the copper rod 200 is connected to a copper high-voltage conductor 900. The copper high-voltage conductor 900 is covered with an insulating sleeve 1000.

[0045] The sealing connection assembly includes an insulating protective sleeve 300 and a sealing connection portion 400. The insulating protective sleeve 300 has a first through hole 310 coaxial with it for inserting a copper rod 200. The insulating protective sleeve 300 includes a first connecting end 320, a second connecting end 330, and an intermediate connecting portion 340. The first connecting end 320 and the second connecting end 330 are respectively located at both ends of the intermediate connecting portion 340, and the outer diameter of the intermediate connecting portion 340 is larger than the outer diameter of the first connecting end 320 and the outer diameter of the second connecting end 330. The first connecting end 320 is detachably connected to the flange 100, and the outer end face of the flange 100 is sealed to the end face of the intermediate connecting portion 340. This application achieves high-voltage insulation between the copper rod 200 and the flange 100 through the insulating protective sleeve 300.

[0046] The sealing connection part 400 is provided with a second through hole 410 coaxial with it for passing through the copper rod 200; the front end of the sealing connection part 400 is provided with a mounting groove 420, and the second connecting end 330 is detachably connected in the mounting groove 420, and the end face of the second connecting end 330, the inner end face of the mounting groove 420 and the copper rod 200 are sealed together.

[0047] Specifically, in this embodiment, the flange 100 and the insulating protective sleeve 300 are detachably connected, and the insulating protective sleeve 300 and the sealing connection part 400 are detachably connected. These detachable connection structures facilitate maintenance and reduce component costs. This embodiment achieves a seal by compressing the flange 100 to the insulating protective sleeve 300 on the outside, and by sealing the end face of the second connecting end 330, the inner end face of the mounting groove 420, and the copper rod 200 on the outside of the vacuum chamber 500. Therefore, this embodiment achieves a seal on the outside of the vacuum chamber 500, where the pressure is greater than the pressure inside. This pressure difference further improves the sealing effect. Thus, this application offers better sealing performance, is easier to maintain, allows for easy replacement of damaged components, facilitates timely repairs, and reduces costs.

[0048] In some comparative embodiments, the first connecting end 320 does not extend beyond the inner side of the flange 100, resulting in a smaller electrical clearance and easier high-voltage discharge. Therefore, to prevent internal contamination from silver plating or other vapors, and to prevent internal discharge, the front end of the first connecting end 320 has a portion extending into the inner side of the flange 100, with a length of 20-30 mm. Specifically, this embodiment makes the interior of the vacuum chamber less prone to contamination and discharge.

[0049] Furthermore, the tail end of the sealing connection 400 is provided with a mating end 430, the outer diameter of which is smaller than the outer diameter of the sealing connection 400. Specifically, the outer diameter of the mating end 430 matches the inner diameter of the insulating sleeve 1000. The length of the mating end 430 is greater than 20mm. This embodiment provides the mating end 430, so that when installing the insulating sleeve 1000, it can be directly fitted onto the mating end 430, making the operation convenient and quick.

[0050] Furthermore, at least one of the insulating protective sleeve 300 and the sealing connection portion 400 is made of polytetrafluoroethylene (PTFE). Specifically, this embodiment has high strength and high pressure resistance.

[0051] Furthermore, the outer end face of flange 100 and the end face of intermediate connecting part 340 are sealed together by a first O-ring 600. Alternatively, the end face of second connecting end 330, the inner end face of mounting groove 420, and copper rod 200 are sealed together by a second O-ring 700. Or, the outer end face of flange 100 and the end face of intermediate connecting part 340 are sealed together by a first O-ring 600; the end face of second connecting end 330, the inner end face of mounting groove 420, and copper rod 200 are sealed together by a second O-ring 700. There must be pressure between copper rod 200 and second O-ring 700 to ensure a reliable seal. Specifically, this embodiment uses a first O-ring 600 and a second O-ring 700 for sealing, resulting in good sealing effect, stable structure, and low cost.

[0052] Because the filament 800 draws a relatively large current, approximately 20A, in some embodiments, the first O-ring 600 and the second O-ring 700 are also made of polytetrafluoroethylene (PTFE), which has good high-voltage resistance.

[0053] Furthermore, an inner chamfer 331 is provided in the first through hole 310 at the end face of the second connecting end 330. Specifically, in this embodiment, an inner chamfer 331 is provided so that when the sealing connection part 400 presses the second O-ring 700 during installation, the second O-ring 700 is pressed into the inner chamfer 331, thereby further improving the sealing effect.

[0054] Furthermore, the first connecting end 320 is threadedly connected to the flange 100. Alternatively, the second connecting end 330 is threadedly connected to the mounting groove 420. Or, the first connecting end 320 is threadedly connected to the flange 100, and the second connecting end 330 is threadedly connected to the mounting groove 420. Specifically, the structure of this embodiment is stable and reliable.

[0055] Furthermore, the diameter of the copper rod 200 is greater than 3mm. Specifically, the copper rod 200 in this embodiment can achieve a balanced bending seal. The surface of the copper rod 200 is smooth and flat, resulting in a better sealing effect. The fit between the copper rod 200, the insulating protective sleeve 300, and the sealing connection part 400 should not be too loose, but slightly tight.

[0056] It should be noted that, in principle, without affecting the sealing of flange 100 and vacuum chamber 500, the center distance between the two copper rods 200 should be increased as much as possible, thus increasing the electrical distance.

[0057] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A high-voltage electrical introduction structure for an electron gun, characterized in that: include: Flange; Two sealing connection assemblies are arranged side by side and connected to the flange respectively. A copper rod passes through each of the two sealing connection assemblies, and the two copper rods have a voltage difference. Each sealing connection assembly includes an insulating protective sleeve and a sealing connection part. The insulating protective sleeve has a first through hole for inserting the copper rod; the insulating protective sleeve includes a first connecting end, a second connecting end, and an intermediate connecting part; the first connecting end and the second connecting end are respectively located at both ends of the intermediate connecting part, and the outer diameter of the intermediate connecting part is larger than the outer diameter of the first connecting end and the outer diameter of the second connecting end; the first connecting end is detachably connected to the flange, and the outer end face of the flange is sealed to the end face of the intermediate connecting part. The sealing connection part is provided with a second through hole for inserting the copper rod; the front end of the sealing connection part is provided with an installation groove, and the second connection end is detachably connected to the installation groove, and the end face of the second connection end, the inner end face of the installation groove, and the copper rod are sealed together.

2. The high-voltage electrical introduction structure for an electron gun according to claim 1, characterized in that: The front end of the first connecting end has a portion extending into the inside of the flange, with a length of 20~30mm.

3. The high-voltage electrical introduction structure for an electron gun according to claim 1, characterized in that: The tail end of the sealing connection is provided with a mating end, the outer diameter of which is smaller than the outer diameter of the sealing connection.

4. The high-voltage electrical introduction structure for an electron gun according to claim 3, characterized in that: The length of the docking end is greater than 20mm.

5. The high-voltage electrical introduction structure for an electron gun according to claim 1, characterized in that: At least one of the insulating protective sleeve and the sealing connection is made of polytetrafluoroethylene.

6. The high-voltage electrical introduction structure for an electron gun according to claim 1, characterized in that: The outer end face of the flange and the end face of the intermediate connection part are sealed together by a first O-ring. And / or, the end face of the second connection end, the inner end face of the mounting groove, and the copper rod sealing connection are sealed by a second O-ring.

7. The high-voltage electrical introduction structure for an electron gun according to claim 1, characterized in that: The first through hole at the end face of the second connection end has an inner chamfer.

8. The high-voltage electrical introduction structure for an electron gun according to claim 1, characterized in that: The first connecting end is threadedly connected to the flange; And / or, the second connection end is threadedly connected to the mounting groove.

9. The high-voltage electrical introduction structure for an electron gun according to claim 1, characterized in that: The diameter of the copper rod is greater than 3mm.

10. The high-voltage electrical introduction structure for an electron gun according to claim 1, characterized in that: The flange is bolted to the vacuum chamber, and the two are sealed with copper gaskets.

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