Abrasion-proof fixing support for motor cable of exposure table of photoetching machine
By designing an anti-wear fixing bracket, the problem of wear and tear on the motor cable of the lithography machine exposure stage due to high-speed movement was solved, thus protecting the cable and improving the stability and service life of the equipment.
Patent Information
- Application Number
- CN202421440180.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-21
- Publication Date
- 2025-11-04
- Estimated Expiration
- 2034-06-21
AI Technical Summary
During high-speed operation, the motor cables of the lithography machine exposure stage suffer wear due to the sharp, un-chamfered edges of the metal fixing components, resulting in exposed and damaged cables, which affects the stability of the equipment.
Design an anti-wear fixing bracket, which consists of a back plate and a V-shaped smooth structure. The V-shaped structure covers the edge of the metal platform, and the cable is fixed to the back plate by a strip. The corners are smooth rounded to avoid friction.
It effectively prevents the cable from being worn by the fixed bracket and metal stage during high-speed movement, thus improving the operational stability and lifespan of the lithography machine.
Smart Images
Figure CN223514526U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor technology, specifically to an anti-wear fixing bracket for motor cables of a lithography machine exposure stage. Background Technology
[0002] To ensure high production efficiency, the lithography machine is designed with components that move at high speeds. The wafer stage has a speed of 4 m / s and an acceleration of 70 m / s². Under these conditions, the related cables of the wafer stage move at high speeds in sync. In actual use, it was found that the signal cables of the drive motor often wear out, causing the cables to be exposed or even broken, resulting in long-term malfunctions of the lithography machine (each malfunction requires about 24 hours to troubleshoot and resolve). The root cause of the problem is: (1) The component that fixes the cable is made of metal with sharp edges and no chamfers. It is squeezed against the cable for a long time and there is relative movement, which eventually causes the cable to break; (2) The cable is in direct contact with the edge of the metal stage (the wafer stage is located in the central area), which causes wear during movement. Utility Model Content
[0003] In view of the shortcomings of the prior art described above, the purpose of this application is to provide an anti-wear fixing bracket for the motor cable of a lithography machine exposure stage, so as to solve the problem of cable wear caused by high-speed movement in the prior art.
[0004] To achieve the above and other related objectives, this application provides an anti-wear fixing bracket for the motor cable of a lithography machine exposure stage. The anti-wear fixing bracket consists of a back plate and a V-shaped smooth structure connected to the lower end of the back plate. The lower part of the V-shaped smooth structure is parallel to the back plate.
[0005] Preferably, the vertical distance between the lower part of the V-shaped smooth structure and the back plate is 0.5cm-0.7cm, and the vertical distance between the plane perpendicular to the back plate where the lower and upper parts of the V-shaped smooth structure are connected and the lower end of the back plate is 0.7cm-1.0cm.
[0006] Preferably, the corners at the junction of the lower and upper parts of the V-shaped smooth structure are smooth rounded corners.
[0007] Preferably, the corner at the junction of the V-shaped smooth structure and the lower end of the back plate is a smooth rounded corner.
[0008] Preferably, the corners of the anti-wear fixing bracket are all smooth rounded corners, and the surface and edges of the anti-wear fixing bracket are polished to avoid friction on the cable.
[0009] Preferably, the cable is secured to the back plate by a strip.
[0010] Preferably, the height of the back panel is 4.0cm-4.3cm.
[0011] Preferably, the upper part of the back plate is provided with two circular mounting holes, and the line connecting the two circular mounting holes is parallel to the junction of the lower and upper parts of the V-shaped smooth structure.
[0012] Preferably, the lower part of the back plate is provided with a square hole, and the line connecting the midpoint of the line connecting the square hole and the two circular mounting holes is perpendicular to the line connecting the two circular mounting holes.
[0013] As described above, the anti-wear fixing bracket for the motor cable of the lithography machine exposure stage provided in this application has the following beneficial effects: the corners of the anti-wear fixing bracket are all smooth rounded corners, and the surface and edges of the anti-wear fixing bracket are smooth, avoiding wear on the cable during high-speed movement. The V-shaped smooth structure shields the metal stage, avoiding wear on the cable caused by the metal stage during high-speed movement. Attached Figure Description
[0014] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0015] Figure 1 The image shown is a front view of the anti-wear fixing bracket for the motor cable of the lithography machine exposure stage provided in an embodiment of this application;
[0016] Figure 2 The image shown is a side view of an anti-wear fixing bracket for a lithography machine exposure stage motor cable provided in an embodiment of this application. Detailed Implementation
[0017] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. This application can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this invention.
[0018] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0019] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," indicating orientation or positional relationships, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0020] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components; and they can refer to a wireless connection or a wired connection. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0021] Furthermore, the technical features involved in the different embodiments of this application described below can be combined with each other as long as they do not conflict with each other.
[0022] The existing photolithography machine exposure stage motor cable clips are U-shaped with sharp edges. The U-shaped sides of the clips squeeze the cable. When the cable moves at high speed synchronously with the wafer carrier stage located in the central area of the metal stage, the clips cause wear to the cable. The clips are located above the metal stage, and the cable extends from the lower end of the clips to contact the edge of the metal stage. When the cable moves at high speed synchronously with the wafer carrier stage, the metal stage causes wear to the cable.
[0023] To address this issue, this application provides an anti-wear fixing bracket for the motor cable of a lithography machine exposure stage.
[0024] Please see Figure 1 and Figure 2 The anti-wear fixing bracket consists of a back plate and a V-shaped smooth structure connected to the lower end of the back plate. The lower part of the V-shaped smooth structure is parallel to the back plate.
[0025] The upper part of the back plate is provided with two circular mounting holes. The line connecting the two circular mounting holes is parallel to the junction of the lower and upper parts of the V-shaped smooth structure. The anti-wear fixing bracket is fixed to the outer shell of the drive motor housing by screws or the like. The lower part of the back plate is provided with a square hole. The line connecting the midpoint of the square hole and the line connecting the two circular mounting holes is perpendicular to the line connecting the two circular mounting holes.
[0026] As an example, the height of the back panel is 4.0cm-4.3cm.
[0027] To prevent relative movement between the cables, a strip is used to secure the cables to the backplate. See example. Figure 1 The strip passes through a square hole located at the bottom of the back plate and then bundles the cables together.
[0028] As an example, the vertical distance between the lower part of the V-shaped smooth structure and the back plate is 0.5cm-0.7cm, and the vertical distance between the plane perpendicular to the back plate where the lower and upper parts of the V-shaped smooth structure connect is located and the lower end of the back plate is 0.7cm-1.0cm. The V-shaped smooth structure spans the edge of a metal block (the thickness of the metal block does not exceed 0.5cm) and the metal platform. The lower part of the V-shaped smooth structure covers the side of the metal platform to prevent the edge of the metal platform from rubbing against the cable. The corners at the connection between the lower and upper parts of the V-shaped smooth structure are smooth rounded corners, and the corners at the connection between the V-shaped smooth structure and the lower end of the back plate are smooth rounded corners to prevent friction against the cable.
[0029] All corners of the anti-wear mounting bracket are smooth rounded corners, and the surface and edges of the anti-wear mounting bracket are polished to avoid friction on the cables.
[0030] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this application. Therefore, the drawings only show the components related to this invention and are not drawn according to the actual number, shape and size of the components. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.
[0031] In summary, the anti-wear fixing bracket for the motor cable of the lithography machine exposure stage provided in this application can effectively prevent wear and tear on the cable caused by the fixing bracket and the metal stage when the cable moves at high speed with the wafer carrier stage. Therefore, this application effectively overcomes the various shortcomings of the prior art and has high industrial application value.
[0032] The above embodiments are merely illustrative of the principles and effects of this application and are not intended to limit this application. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this application. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this invention should still be covered by the claims of this application.
Claims
1. A wear-resistant fixing bracket for the motor cable of a lithography machine exposure stage, characterized in that, The anti-wear fixing bracket consists of a back plate and a V-shaped smooth structure connected to the lower end of the back plate. The lower part of the V-shaped smooth structure is parallel to the back plate. The lower part of the V-shaped smooth structure covers the side of the metal platform to prevent the edge of the metal platform from rubbing against the cable. The corner at the junction of the lower and upper parts of the V-shaped smooth structure is a smooth rounded corner, and the corner at the junction of the V-shaped smooth structure and the lower end of the back plate is a smooth rounded corner to prevent friction against the cable.
2. The anti-wear fixing bracket according to claim 1, characterized in that, The vertical distance between the lower part of the V-shaped smooth structure and the back plate is 0.5cm-0.7cm, and the vertical distance between the plane perpendicular to the back plate where the lower and upper parts of the V-shaped smooth structure are connected and the lower end of the back plate is 0.7cm-1.0cm.
3. The anti-wear fixing bracket according to claim 1, characterized in that, All corners of the anti-wear fixing bracket are smooth rounded corners, and the surface and edges of the anti-wear fixing bracket are polished to avoid friction on the cable.
4. The anti-wear fixing bracket according to claim 1, characterized in that, The cable is secured to the back plate by a strip.
5. The anti-wear fixing bracket according to claim 1, characterized in that, The height of the back panel is 4.0cm-4.3cm.
6. The anti-wear fixing bracket according to claim 1, characterized in that, The upper part of the back plate is provided with two circular mounting holes, and the line connecting the two circular mounting holes is parallel to the junction of the lower and upper parts of the V-shaped smooth structure.
7. The anti-wear fixing bracket according to claim 6, characterized in that, The lower part of the back plate is provided with a square hole, and the line connecting the midpoint of the line connecting the square hole and the two circular mounting holes is perpendicular to the line connecting the two circular mounting holes.