Filter and filtering system

Abstract

The utility model discloses a filter and a filtering system, and belongs to the technical field of waste gas treatment equipment. The utility model provides a filter which comprises a main body provided with a filtering cavity used for containing filtering liquid; the gas dispersion structure is arranged in the filtering cavity and comprises at least one layer of gas dispersion plate, and a plurality of through gas holes are formed in the gas dispersion plate; the input pipe is arranged in the filtering cavity and penetrates through the gas dispersion structure, and an outlet of the input pipe is located in the side, close to the cavity bottom of the filtering cavity, of the gas dispersion structure; the output pipe is arranged in the filtering cavity, and an inlet of the output pipe is located on the side, away from the cavity bottom of the filtering cavity, of the gas dispersion structure. According to the filter, after gas is discharged from the outlet of the input pipe, bubbles are generated on the side, close to the cavity bottom of the filter cavity, of the gas dispersion structure, the multiple through gas holes in the gas dispersion plate cut the bubbles, the bubbles are dispersed into multiple small bubbles, the contact area of the gas and filtrate is increased, the gas and the filtrate react more completely, and the filter efficiency is improved. The filtering efficiency is improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of waste gas treatment equipment, and particularly relates to a filter and a filtering system. BACKGROUND

[0002] The liquid absorption method is a commonly used waste gas filtering method at present, which mainly dissolves and absorbs waste gas through water liquid in a filter, so as to reduce harmful gas emission into the air. Generally, the dissolution rate of waste gas in water liquid has a great relationship with the contact area of gas and water. In a conventional cooling liquid accumulation bottle and a fiber filter, the contact area of tail gas and water liquid is small, which causes low waste gas dissolution rate and poor tail gas absorption effect. CONTENT OF THE INVENTION

[0003] The application aims to at least solve one of the technical problems existing in the prior art. To this end, the application provides a filter and a filtering system, which disperses gas bubbles into multiple small gas bubbles, increases the contact area of gas and filtering liquid, makes the reaction of gas and filtering liquid more complete, and improves the filtering efficiency.

[0004] In a first aspect, the application provides a filter, comprising:

[0005] a main body, provided with a filtering cavity, the filtering cavity being used for containing filtering liquid;

[0006] a gas dispersion structure, provided in the filtering cavity, the gas dispersion structure comprising at least one gas dispersion plate, the gas dispersion plate being provided with multiple gas holes penetrating through the gas dispersion plate;

[0007] an input pipe, provided in the filtering cavity and arranged through the gas dispersion structure, an outlet of the input pipe being located on a side of the gas dispersion structure close to a cavity bottom of the filtering cavity;

[0008] an output pipe, provided in the filtering cavity, an inlet of the output pipe being located on a side of the gas dispersion structure away from the cavity bottom of the filtering cavity.

[0009] According to the filter of the application, after the gas to be filtered is discharged from the outlet of the input pipe, gas bubbles are generated on the side of the gas dispersion structure close to the cavity bottom of the filtering cavity, the multiple gas holes penetrating through the gas dispersion plate cut the gas bubbles, the gas bubbles are dispersed into multiple small gas bubbles, the contact area of gas and filtering liquid is increased, the reaction of gas and filtering liquid is more complete, and the filtering efficiency is improved.

[0010] According to an embodiment of the application, the gas dispersion plate is in contact with the cavity wall of the filtering cavity, so as to define two isolated sub-cavities on both sides of the gas dispersion plate.

[0011] According to an embodiment of the application, the gas dispersion plate is integrally connected with the cavity wall of the filtering cavity.

[0012] According to one embodiment of the present application, the gas dispersion structure comprises a plurality of gas dispersion plates, each of which is arranged in a spaced-apart manner along the gas input direction.

[0013] According to one embodiment of the present application, the plurality of gas holes on the gas dispersion plate have at least one aperture, and the plurality of gas holes are discretely distributed on the entire surface of the gas dispersion plate.

[0014] According to one embodiment of the present application, each of the gas dispersion plates is arranged in parallel, and the spacing between each of the gas dispersion plates is equal.

[0015] According to one embodiment of the present application, the bottom of the filter cavity is provided with an openable and closable liquid return port, which is connected to the filter cavity and the outside.

[0016] In a second aspect, the present application provides a filter system, which comprises the filter as described above, the input pipe of the filter is connected to a gas generating unit for inputting the gas to be filtered, and the output pipe of the filter is connected to an exhaust unit for discharging the filtered gas.

[0017] According to the filter system of the present application, after the gas to be filtered is discharged from the outlet of the input pipe, bubbles are generated on the side of the gas dispersion structure close to the bottom of the filter cavity, the plurality of gas holes on the gas dispersion plate cut the bubbles to disperse them into a plurality of small bubbles, thereby increasing the contact area between the gas to be filtered and the filtering liquid, making the reaction between the gas to be filtered and the filtering liquid more complete, and improving the filtering efficiency.

[0018] In a third aspect, the present application provides a filter system, which comprises a furnace body, a condenser bottle, a filter unit, a vacuum pump and a main exhaust pipe connected in sequence, the filter unit comprises a liquid supply device, a liquid return device and a plurality of filters connected in sequence, the first-stage filter is connected to the condenser bottle, the last-stage filter is connected to the vacuum pump, the liquid supply device is connected to the input pipe of the filter, the bottom of the filter cavity of the filter is provided with a liquid return port, and the liquid return port is connected to the liquid return device.

[0019] According to the filter system of the present application, after the gas to be filtered is discharged from the outlet of the input pipe, bubbles are generated on the side of the gas dispersion structure close to the bottom of the filter cavity, the plurality of gas holes on the gas dispersion plate cut the bubbles to disperse them into a plurality of small bubbles, thereby increasing the contact area between the gas to be filtered and the filtering liquid, making the reaction between the gas to be filtered and the filtering liquid more complete, and improving the filtering efficiency.

[0020] Additional aspects and advantages of the present application will be in part apparent and in part pointed out hereinafter. BRIEF DESCRIPTION OF DRAWINGS

[0021] The above and / or additional aspects and advantages of the present application will become apparent and more readily appreciated from the following description, taken in conjunction with the following drawings in which:

[0022] Figure 1 is a structural schematic diagram of a filter provided by an embodiment of the present application;

[0023] Figure 2 is a sectional view of the filter along the A-A direction provided by an embodiment of the present application;

[0024] Figure 3 is a sectional view of the filter along the B-B direction provided by an embodiment of the present application;

[0025] Figure 4 is a structural schematic diagram of a filtration system provided by an embodiment of the present application.

[0026] Reference Signs:

[0027] Filter 1, filtration cavity 11, gas dispersion structure 12, first gas dispersion plate 121, second gas dispersion plate 122, third gas dispersion plate 123, input pipe 13, output pipe 14, furnace body 2, condenser bottle 3, liquid supply device 4, liquid return device 5, vacuum pump 6, main exhaust pipe 7. DETAILED DESCRIPTION

[0028] Embodiments of the present application are described in detail below with reference to the attached drawing figures, wherein the same or like reference numerals and characters are used throughout the drawing figures to designate the same or like components. The embodiments described below are exemplary, and are merely intended to explain the present application, and are not intended to limit the present application.

[0029] The following description relates to elements or components that are "connected" or "coupled" together. As used herein, the term "connected" can mean elements or components that are either directly connected to (or in direct communication with) each other, or connected to (or in communication with) each other by way of one or more elements or components. Similarly, the term "coupled" can mean elements or components that are either directly connected to (or in direct communication with) each other, or connected to (or in communication with) each other by way of one or more elements or components. However, it should be understood that, although the elements or components are described and shown as being "connected" or "coupled" in the exemplary embodiments, the same can be "coupled" in alternative embodiments, and vice versa. Therefore, although the exemplary embodiments are described and shown in one manner, additional intervening elements, devices, components or means can be present in alternative embodiments.

[0030] The new boron tail gas exhaust system is to dissolve and absorb the tail gas containing boron oxide and chlorine through the water in the filter 1, thereby reducing the accumulation of white boron oxide powder to block the exhaust pipeline, and preventing the leakage of chlorine and boron oxide in the air to release micro-boric acid and hydrogen chloride gas, causing the metal parts of the tail gas exhaust system to rust and corrode easily, and the electrical aging speed to increase.

[0031] The solubility of boron oxide in water is greatly related to the contact area of gas and water. In the conventional cooling liquid accumulation bottle and fiber filter 1, the contact area of the tail gas and the water is small, resulting in low solubility and poor absorption effect of the tail gas.

[0032] Reference Figures 1 to 3 One embodiment of the present application proposes a filter 1, comprising: a main body, a gas dispersion structure 12, an input pipe 13 and an output pipe 14. The main body is provided with a filter cavity 11 for containing filter liquid; the gas dispersion structure 12 is arranged in the filter cavity 11, and the gas dispersion structure 12 comprises at least one layer of gas dispersion plate provided with a plurality of gas holes; the input pipe 13 is arranged in the filter cavity 11 and passes through the gas dispersion structure 12, and the outlet of the input pipe 13 is located on the side of the gas dispersion structure 12 close to the bottom of the filter cavity 11; the output pipe 14 is arranged in the filter cavity 11, and the inlet of the output pipe 14 is located on the side of the gas dispersion structure 12 away from the bottom of the filter cavity 11.

[0033] The main body of the filter 1 is provided with a filter cavity 11, which is mainly used for containing filter liquid. The filter cavity 11 is made of corrosion-resistant and pressure-resistant material to ensure the stability and safety of the filtering process. The specific material of the filter cavity 11 can be selected according to the actual application scene, which is not limited here. As an example, the filter cavity 11 can be made of stainless steel.

[0034] The gas dispersion structure 12 is arranged in the filter cavity 11, and the filter liquid is over the gas dispersion structure 12. The gas dispersion structure 12 comprises at least one layer of gas dispersion plate provided with a plurality of gas holes, and the bubbles generated on the side of the gas dispersion structure 12 close to the bottom of the filter cavity 11 will pass through the gas dispersion plate in the process of floating out of the filter liquid. The gas holes of the gas dispersion plate can cut the bubbles generated on the side of the gas dispersion structure 12 close to the bottom of the filter cavity 11 into a plurality of small bubbles, thereby increasing the contact area of the gas to be filtered and the filter liquid.

[0035] The number and specific material of the gas dispersion plate can be selected according to the actual application scene, which is not limited here. As an example, the gas dispersion structure 12 can include three layers of gas dispersion plates, and the gas dispersion plates can be made of stainless steel.

[0036] The shape, size and number of the gas holes of the gas dispersion plate can also be selected according to the actual application scenario, which is not limited here. The shape and size of the gas holes on the same gas dispersion plate can be the same or different, and the number of the gas holes on different gas dispersion plates can also be different when the gas dispersion structure 12 includes a plurality of stacked gas dispersion plates. Generally, the size of the gas holes on the gas dispersion plate located at the upper layer is smaller than that of the gas holes on the gas dispersion plate located at the lower layer.

[0037] As an example, the gas dispersion structure 12 can include 2 stacked gas dispersion plates, and the dispersion plate close to the bottom of the filter cavity 11 has 10 circular gas holes with a diameter of 2 mm, and the dispersion plate away from the bottom of the filter cavity 11 has 10 circular gas holes with a diameter of 2 mm.

[0038] The outlet of the input pipe 13 is located on the side of the gas dispersion structure 12 close to the bottom of the filter cavity 11, which is mainly used to introduce the gas to be filtered into the filter cavity 11 on the side of the gas dispersion structure 12 close to the bottom of the filter cavity 11. The gas to be filtered forms bubbles in the filter liquid, and the bubbles can pass through the gas dispersion plate during floating out of the filter liquid.

[0039] The inlet of the output pipe 14 is located on the side of the gas dispersion structure 12 away from the bottom of the filter cavity 11, which is mainly used to discharge the gas treated by the gas dispersion structure 12 and the filter liquid.

[0040] The input pipe 13 and the output pipe 14 are made of corrosion-resistant materials, and the materials of the input pipe 13 and the output pipe 14 can be the same or different. The specific material of the input pipe 13 and the output pipe 14 can be selected according to the actual application scenario, which is not limited here. For example, the input pipe 13 and the output pipe 14 can be made of stainless steel, plastic or titanium alloy, etc.

[0041] According to the filter 1 of the present application, the gas to be filtered is discharged from the outlet of the input pipe 13 to generate bubbles on the side of the gas dispersion structure 12 close to the bottom of the filter cavity 11. The plurality of through gas holes on the gas dispersion plate cut the bubbles to disperse them into a plurality of small bubbles, increase the contact area between the gas to be filtered and the filter liquid, make the reaction between the gas to be filtered and the filter liquid more complete, and improve the filtering efficiency.

[0042] In some embodiments, the gas dispersion plate is in contact with the cavity wall of the filter cavity 11 to define two isolated sub-cavities on both sides of the gas dispersion plate.

[0043] The gas dispersion plate contacts the cavity wall of the filter chamber 11, defining a first sub-cavity on the side of the gas dispersion plate near the bottom of the filter chamber 11 and a second sub-cavity on the side of the gas dispersion plate away from the bottom of the filter chamber 11. The outlet of the input pipe 13 is located in the first sub-cavity. After the filtered gas is discharged from the outlet of the input pipe 13, bubbles are formed in the first sub-cavity. As the bubbles float out of the filtrate, they pass through the gas dispersion plate and are divided into multiple small bubbles before entering the second sub-cavity.

[0044] The gas dispersion plate separates the first sub-cavity and the second sub-cavity, allowing the gas to be filtered in the first sub-cavity to pass through the gas dispersion plate before entering the second sub-cavity.

[0045] In some embodiments, the gas dispersion plate is integrally connected to the cavity wall of the filter chamber 11.

[0046] The gas dispersion plate is integrally connected to the cavity wall of the filter chamber 11, which can further prevent the gas to be filtered from flowing out at the contact point between the gas dispersion plate and the cavity wall of the filter chamber 11, ensuring that the gas to be filtered in the first sub-cavity needs to pass through the gas dispersion plate before entering the second sub-cavity.

[0047] In some embodiments, the gas dispersion structure 12 includes multiple gas dispersion plates, which are arranged at intervals along the gas input direction.

[0048] The input pipe 13 passes through the gas dispersion structure 12, and its outlet is located on the side of the lowest gas dispersion plate near the bottom of the filter chamber 11. The gas input direction can be the vertical direction of the filter chamber 11. Figure 2 (The direction indicated by the middle arrow). After the gas to be filtered is discharged from the outlet of the inlet pipe 13, the bubbles formed pass through each gas dispersion plate in sequence from bottom to top. By setting up multiple layers of gas dispersion plates, the bubbles formed by the gas to be filtered can be divided multiple times, increasing the contact area between the gas to be filtered and the filtrate, and improving the filtration efficiency.

[0049] The specific number of layers in the gas dispersion plate can be selected based on the actual application scenario, and is not limited here. For example, the gas dispersion plate can have 3, 4, or 5 layers, etc.

[0050] In some embodiments, the plurality of pores on the gas dispersion plate have at least one pore size, and the plurality of pores are discretely distributed across the entire surface of the gas dispersion plate.

[0051] The pores on the gas dispersion plate can be the same or different sizes. The pores are discretely distributed across the entire surface of the gas dispersion plate, which can make the bubbles in contact with the gas dispersion plate more evenly divided into multiple small bubbles, thereby increasing the contact area between the gas to be filtered and the filtrate and improving the filtration efficiency.

[0052] In some embodiments, the minimum diameter of the gas holes on the lower gas dispersion plate is larger than the minimum diameter of the gas holes on the upper gas dispersion plate, so that the bubbles of the gas to be filtered are divided into more and smaller bubbles when passing through each layer of the gas dispersion plate, increasing the contact area between the gas to be filtered and the filtering liquid, and improving the filtering efficiency.

[0053] As an example, the gas dispersion structure 12 includes three layers of gas dispersion plates, from bottom to top, the first gas dispersion plate 121, the second gas dispersion plate 122 and the third gas dispersion plate 123. The first gas dispersion plate 121 has 10 circular gas holes with a diameter of 3 mm, the second gas dispersion plate 122 has 10 circular gas holes with a diameter of 2 mm, and the third gas dispersion plate 123 has 10 circular gas holes with a diameter of 1 mm. The bubbles of the gas to be filtered pass through the first gas dispersion plate 121, the second gas dispersion plate 122 and the third gas dispersion plate 123 in turn during the floating process. The bubbles of the gas to be filtered are divided into more and smaller bubbles when passing through each layer of the gas dispersion plate. The gas dispersion structure 12 provides multiple layers of gas dispersion plates to increase the contact area between the gas to be filtered and the filtering liquid, and improve the filtering efficiency.

[0054] In some embodiments, the gas dispersion plates are arranged in parallel, and the spacing between each gas dispersion plate is equal.

[0055] The gas dispersion plates are arranged in parallel, and the spacing between each gas dispersion plate is equal, which is relatively simple in manufacturing process and facilitates the installation of the gas dispersion structure 12.

[0056] In some embodiments, the filtering liquid includes water, and the input pipe 13 is used to connect a boron diffusion device, which delivers a mixed gas containing boron oxide and chlorine to the filter 1.

[0057] The mixed gas containing boron oxide and chlorine is discharged from the outlet of the input pipe 13, and the boron oxide contacts with the water in the filtering liquid, and the boron oxide can be dissolved in the water. The mixed gas forms bubbles in the filtering liquid, and the gas dispersion plate cuts the bubbles of the mixed gas into multiple small bubbles, increasing the contact area between the boron oxide and the water, thereby promoting the solubility of the boron oxide in the water and improving the filtering efficiency.

[0058] In some embodiments, the bottom of the filtering cavity 11 is provided with a switchable liquid return port, which is used to connect the filtering cavity 11 and the outside.

[0059] After the filtering liquid in the filtering cavity 11 reacts with the gas to be filtered and absorbs part of the exhaust gas, the liquid return port is opened, and the reacted filtering liquid can be discharged from the filtering cavity 11. After the filtering liquid is completely discharged from the filtering cavity 11, the liquid return port is closed, and the filtering liquid is injected into the filtering cavity 11 again.

[0060] The reacted filtrate is discharged through the liquid return port, so that the filtrate can be replaced, and the operation is convenient and the filtration efficiency is improved.

[0061] One embodiment of the present application provides a filtration system, which comprises the filter 1 described above, the input pipe 13 of the filter 1 is connected with a gas generating unit for inputting the gas to be filtered, and the output pipe 14 of the filter 1 is connected with an exhaust unit for discharging the filtered gas.

[0062] The inlet of the input pipe 13 is connected with the gas generating unit, the outlet of the input pipe 13 is located at the side of the gas dispersion structure 12 of the filter 1 close to the bottom of the filtering cavity 11, the output pipe 14 of the filter 1 is located at the side of the gas dispersion structure 12 of the filter 1 away from the bottom of the filtering cavity 11, the gas to be filtered reacts with the filtrate, is cut into a plurality of small bubbles by the gas dispersion structure 12, further reacts with the filtrate, and is discharged through the output pipe 14 of the filter 1.

[0063] The specific structure of the filter 1 can refer to the foregoing embodiments, and will not be described here again.

[0064] According to the filtration system of the present application, after the gas to be filtered is discharged from the outlet of the input pipe 13 of the filter 1, bubbles are generated at the side of the gas dispersion structure 12 close to the bottom of the filtering cavity 11, the plurality of through holes on the gas dispersion plate cut and break the bubbles, so that the bubbles are dispersed into a plurality of small bubbles, the contact area between the gas to be filtered and the filtrate is increased, the reaction between the gas to be filtered and the filtrate is more complete, and the filtration efficiency is improved.

[0065] With reference to Figure 4 One embodiment of the present application provides a filtration system, which is characterized by comprising a furnace body 2, a condenser bottle 3, a filtration unit, a vacuum pump 6 and a main exhaust pipeline 7 connected in sequence, the filtration unit comprises a liquid supply device 4, a liquid return device 5 and a plurality of filters 1 described above connected in sequence, the first-stage filter 1 is connected with the condenser bottle 3, the last-stage filter 1 is connected with the vacuum pump 6, the liquid supply device 4 is connected with the input pipe 13 of the filter 1, and the bottom of the filtering cavity 11 of the filter 1 is provided with a liquid return port connected with the liquid return device 5.

[0066] The gas to be filtered generated by the reaction in the furnace body 2 enters the first-stage filter 1 after being cooled by the condenser bottle 3. The specific structure of the filter 1 can refer to the foregoing embodiments, and will not be described here again.

[0067] The last-stage filter 1 is connected with the vacuum pump 6, after the gas to be filtered enters the last-stage filter 1, the vacuum pump 6 performs suction, so that the filtered gas is finally discharged from the filter 1, and then enters the main exhaust pipeline 7.

[0068] The liquid supply device 4 is connected with the input pipe 13 of the filter 1, and is mainly used to supply the filter liquid to the filter unit, and the filtered gas and the filter liquid enter the filter 1 through the input pipe 13 at the same time.

[0069] The liquid outlet is mainly used to discharge the filter liquid to the night device after the filter liquid reacts with the filtered gas, so as to facilitate the replacement of the filter liquid.

[0070] The multi-stage filter 1 can make the filtered gas contact with the filter liquid more fully, and improve the filtering efficiency.

[0071] According to the filtering system, after the filtered gas is discharged from the outlet of the input pipe 13 of the filter 1, bubbles are generated on the side of the gas dispersion structure 12 close to the bottom of the filter cavity 11, the plurality of through gas holes on the gas dispersion plate cut and break the bubbles, the bubbles are dispersed into a plurality of small bubbles, the contact area between the filtered gas and the filter liquid is increased, the reaction between the filtered gas and the filter liquid is more complete, and the filtering efficiency is improved.

[0072] The terms "first", "second", and the like in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described herein, and the objects distinguished by "first", "second", etc. are usually a class, not limited to the number of objects, for example, the first object can be one or more. In addition, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / ", generally indicates that the front and rear associated objects are in an "or" relationship.

[0073] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0074] In the description of the present application, the first feature "above" or "below" the second feature can include that the first and second features are in direct contact, or can include that the first and second features are not in direct contact but are in contact through another feature between them.

[0075] In the description of the application, above, over and on are used to indicate that the first feature is above, over or on the second feature, either directly or obliquely above, or simply that the first feature is higher than the second feature.

[0076] In the description of the application, references to "one embodiment", "some embodiments", "an illustrative embodiment", "an example", "a specific example", or "some examples" means that a particular feature, structure, material, or characteristic being described is included in at least one embodiment or example of the application. The appearances of the phrases "in one embodiment", "in some embodiments", "in an illustrative embodiment", "an example", "a specific example", or "some examples" in various places in the specification are not necessarily all referring to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics can be combined in any suitable manner in one or more embodiments or examples.

[0077] Although embodiments of the application have been illustrated and described, it will be clear to those of ordinary skill in the art that various changes, modifications, substitutions, and alterations can be made therein without departing from the principles and the spirit of the application. The scope of the application is limited only by the claims and the equivalents thereof.

Claims

1. A filter, characterized by, The filter comprises: a main body provided with a filtering cavity for containing filtering liquid; a gas dispersion structure arranged in the filtering cavity, the gas dispersion structure comprising at least one gas dispersion plate provided with a plurality of gas holes; an input pipe arranged in the filtering cavity and passing through the gas dispersion structure, the outlet of the input pipe being located on the side of the gas dispersion structure close to the bottom of the filtering cavity; an output pipe arranged in the filtering cavity, the inlet of the output pipe being located on the side of the gas dispersion structure away from the bottom of the filtering cavity.

2. The filter of claim 1, wherein, The gas dispersion plate is in contact with the wall of the filtering cavity to define two isolated sub-cavities on both sides of the gas dispersion plate.

3. The filter of claim 2, wherein, The gas dispersion plate is integrally connected with the wall of the filtering cavity.

4. The filter according to any one of claims 1-3, characterized in that, The gas dispersion structure comprises a plurality of gas dispersion plates, each of which is arranged in a spaced manner along the gas input direction.

5. The filter of claim 4, wherein, The plurality of gas holes on the gas dispersion plate have at least one aperture, and the plurality of gas holes are dispersedly distributed on the entire surface of the gas dispersion plate.

6. The filter of claim 4, wherein, Each of the gas dispersion plates is arranged in parallel, and the spacing between each of the gas dispersion plates is equal.

7. The filter of any one of claims 1-3, wherein, The bottom of the filtering cavity is provided with an openable and closable liquid return port for connecting the filtering cavity and the outside.

8. A filtration system characterized by, The filter according to any one of claims 1-7, wherein the input pipe of the filter is connected with a gas generating unit for accessing the gas to be filtered, and the output pipe of the filter is connected with an exhaust unit for discharging the filtered gas.

9. A filtration system characterized by, The filter according to any one of claims 1-7, wherein the filter comprises a furnace body, a condenser bottle, a filtering unit, a vacuum pump and a main exhaust pipeline connected in sequence, the filtering unit comprises a liquid supply device, a liquid return device and a plurality of filters connected in sequence, the first-stage filter is connected with the condenser bottle, the last-stage filter is connected with the vacuum pump, the liquid supply device is connected with the input pipe of the filter, and the bottom of the filtering cavity of the filter is provided with a liquid return port connected with the liquid return device.

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