Precise displacement platform

Abstract

According to the precise displacement platform, due to the fact that the objective table is placed on the wedge-shaped table, and the length direction of the hinge shaft is in the second horizontal direction, the objective table slides on the wedge-shaped table when the linear driving mechanism drives the adjusting assembly to horizontally move in the first horizontal direction, and therefore the lifting function is achieved, due to the fact that the wedge-shaped table is hinged to the adjusting assembly through the hinge shaft, the inclination of the wedge-shaped table relative to the adjusting assembly can be changed, switching between a high transmission speed mode and a high precision mode can be achieved according to the inclination, and the high transmission speed mode and the high precision mode can be achieved through the device. The precise displacement platform is simpler in structure and convenient to operate.

Description

Technical Field

[0001] This utility model relates to the field of workpiece carrier technology, and more specifically, to a precision displacement platform. Background Technology

[0002] A precision displacement stage (PDS) is a mechanical device used to achieve high-precision, repeatable position control. It is widely used in fields that require extremely high positioning accuracy and stability, such as semiconductor manufacturing, photolithography, microscope operation, laser processing, metrology, and materials science experiments.

[0003] Modern precision displacement platforms are primarily developing towards higher resolution and higher speed. To accomplish more complex and intensive machining tasks, motion systems often require long-stroke, high-precision positioning. However, many of the high requirements of displacement platforms are mutually restrictive. For example, high speed and high precision are mutually exclusive; achieving high precision requires a lower platform resolution, which reduces the platform's transmission speed; conversely, achieving high transmission speed makes it difficult to guarantee the resolution of the transmission system.

[0004] In existing Z-axis displacement platforms, if a Z-axis motor screw mechanism is used, the feed speed is generally faster but the accuracy is lower. The screw is prone to wear due to the large force in the vertical direction, which further reduces the accuracy. In addition, the space occupied in the Z-axis is too large. If piezoelectric drive is used, nanometer-level positioning accuracy can be achieved, but the motion stroke is small. Macro / micro coupling drive can theoretically combine the advantages of motor screw drive and piezoelectric drive, but the structure and control are more complex. Utility Model Content

[0005] The purpose of this invention is to provide a precision displacement platform with a simpler structure, easier operation, and the ability to achieve both high transmission speed and high precision modes through a single device.

[0006] The embodiments of this utility model can be implemented as follows:

[0007] In a first aspect, this utility model provides a precision displacement platform, comprising:

[0008] Base;

[0009] A linear drive mechanism is mounted on the base.

[0010] The adjusting mechanism comprises an adjusting assembly, a hinge shaft and a wedge-shaped table, the wedge-shaped table is hinged to the adjusting assembly through the hinge shaft to change the slope relative to the adjusting assembly; the adjusting assembly is connected with the linear driving mechanism and can be translated in the first horizontal direction relative to the base under the driving of the linear driving mechanism, wherein the length direction of the hinge shaft is along the second horizontal direction, and the first horizontal direction and the second horizontal direction are perpendicular.

[0011] The object table is arranged on the base in a lifting manner, and the object table is placed on the wedge-shaped table.

[0012] In an optional embodiment, the adjusting assembly comprises a support and a lifting driving element, the support is arranged on the linear driving mechanism and can be translated in the first horizontal direction under the driving of the linear driving mechanism, and the lifting driving element and the hinge shaft are both arranged on the support, and the lifting driving element can drive the wedge-shaped table to swing around the central axis of the hinge shaft.

[0013] In an optional embodiment, the lifting driving element comprises a telescopic driving source, one end of the telescopic driving source is fixed to the support, and the other end is in sliding contact with the side of the wedge-shaped table away from the object table, and the contact position of the lifting driving element and the wedge-shaped table is away from the hinge shaft in the first horizontal direction.

[0014] In an optional embodiment, the part of the lifting driving element used to contact the object table is arranged as an arc surface, and the generatrix of the arc surface is along the second horizontal direction.

[0015] In an optional embodiment, the side of the support facing the object table is provided with a receiving cavity, the receiving cavity is away from the hinge shaft in the first horizontal direction, and the lifting driving element is located in the receiving cavity.

[0016] In an optional embodiment, the side of the object table facing the wedge-shaped table is provided with a rotatable roller, the length direction of the roller is along the second horizontal direction, and the roller is in contact with the wedge-shaped table.

[0017] In an optional embodiment, the base comprises a base plate and a guide column vertically arranged on the base plate, the linear driving mechanism is arranged on the base plate, the guide column is arranged through the object table, and the object table can slide relative to the guide column.

[0018] In an optional embodiment, the precision displacement platform further comprises a displacement sensor, the displacement sensor is used to detect the lifting height of the object table, and the adjusting assembly can adjust the slope of the wedge-shaped table according to the detection result of the displacement sensor.

[0019] In an optional embodiment, the linear driving mechanism comprises a driving element and a sliding pair, the driving element is arranged on the base and is in transmission connection with the adjusting assembly, the adjusting assembly is fixedly connected with the sliding block of the sliding pair, and the sliding rail of the sliding pair is arranged on the base, wherein the length direction of the sliding rail is along the first horizontal direction.

[0020] In an alternative embodiment, the driving member comprises a driving motor, and the driving member mechanism further comprises a screw-nut pair, a screw of the screw-nut pair is rotatably arranged on the base through two bearing seats, the length direction of the screw is along the first horizontal direction, a stator of the driving motor is fixed on one bearing seat, a rotor of the driving motor is coaxially connected with the screw, and a nut of the screw-nut pair is fixedly connected with the adjusting assembly.

[0021] The precise displacement platform provided by the embodiment of the present application has the following advantages:

[0022] Since the object table is placed on the wedge-shaped table and the length direction of the hinged shaft is along the second horizontal direction, the object table slides on the wedge-shaped table when the linear driving mechanism drives the adjusting assembly to translate in the first horizontal direction, so as to realize the lifting function. Since the wedge-shaped table is hinged to the adjusting assembly through the hinged shaft, the slope of the wedge-shaped table relative to the adjusting assembly can be changed. In this way, according to the size of the slope, the conversion between the high transmission speed mode and the high precision mode can be realized. When it is necessary to realize the rapid feeding of the workpiece on the object table, the slope of the wedge-shaped table can be adjusted to be larger. In this way, the unit horizontal displacement of the adjusting assembly will result in larger vertical displacement of the object table, so as to realize the high transmission speed. When the workpiece is close to the target position height, the slope of the wedge-shaped table can be adjusted to be smaller. In this way, the unit horizontal displacement of the adjusting assembly will result in smaller vertical displacement of the object table, so as to realize the high precision transmission. In summary, the precise displacement platform has simpler structure, is convenient to operate, and can realize the high transmission speed mode and the high precision mode through one device. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical scheme of the embodiment of the present application, the following will briefly introduce the drawings needed to be used in the embodiment. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0024] Figure 1 The structure schematic diagram of the precise displacement platform provided by the embodiment under a first visual angle;

[0025] Figure 2 The structure schematic diagram of the precise displacement platform provided by the embodiment under a second visual angle;

[0026] Figure 3 The structure schematic diagram of the precise displacement platform provided by the embodiment under a first visual angle after hiding the adjusting mechanism;

[0027] Figure 4 The structure schematic diagram of the precise displacement platform provided by the embodiment under a second visual angle after hiding the adjusting mechanism;

[0028] Figure 5 for Figure 1 and Figure 2 schematic diagram of the adjusting mechanism;

[0029] Figure 6 for Figure 5 explosion schematic diagram.

[0030] Figure: 100 - base; 110 - base plate; 120 - guide column; 200 - linear drive mechanism; 210 - driving piece; 220 - sliding pair; 221 - sliding rail; 222 - sliding block; 230 - screw pair; 231 - screw; 232 - nut; 233 - bearing seat; 300 - adjusting mechanism; 310 - adjusting assembly; 311 - support; 312 - lifting driving piece; 313 - camber; 314 - accommodating cavity; 320 - wedge-shaped table; 330 - hinged shaft; 400 - object table; 410 - roller; 500 - displacement sensor. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0032] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0033] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0034] In the description of the present application, it should be noted that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present application is usually placed, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation on the present application.

[0035] In addition, if the terms "first", "second" and the like are used herein, they are merely used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0036] It should be noted that the features in the embodiments of the present application can be combined with each other without conflict.

[0037] The embodiments of the present application disclose a precision displacement platform, which can be applied to any equipment requiring lifting workpieces, such as a photolithography machine, a semiconductor processing equipment and the like.

[0038] Reference Figure 1 and Figure 2 The precision displacement platform comprises a base 100, a linear driving mechanism 200, an adjusting mechanism 300 and a carrier 400.

[0039] The base 100 mainly serves as a bearing support component of the whole precision displacement platform, for setting the linear driving mechanism 200, the adjusting mechanism 300 and the carrier 400. The linear driving mechanism 200 is arranged on the base 100. The adjusting mechanism 300 comprises an adjusting assembly 310, a hinged shaft 330 and a wedge-shaped table 320. The wedge-shaped table 320 is hinged to the adjusting assembly 310 through the hinged shaft 330, so as to change the slope relative to the adjusting assembly 310. The adjusting assembly 310 is connected with the linear driving mechanism 200, and can be translated in a first horizontal direction relative to the base 100 under the driving of the linear driving mechanism 200. The length direction of the hinged shaft 330 is along a second horizontal direction, and the first horizontal direction and the second horizontal direction are perpendicular. The carrier 400 is arranged on the base 100 in a lifting manner, and the carrier 400 is placed on the wedge-shaped table 320.

[0040] Thus, since the length direction of the hinge shaft 330 is along the second horizontal direction due to the fact that the object table 400 is placed on the wedge-shaped table 320, the object table 400 slides on the wedge-shaped table 320 when the linear driving mechanism 200 drives the adjusting assembly 310 to translate in the first horizontal direction, so as to realize the lifting function. Since the wedge-shaped table 320 is hinged to the adjusting assembly 310 through the hinge shaft 330, the slope of the wedge-shaped table 320 relative to the adjusting assembly 310 can be changed, so that the conversion between the high transmission speed mode and the high precision mode can be realized according to the size of the slope. When it is needed to realize the rapid feeding of the workpiece on the object table 400, the slope of the wedge-shaped table 320 can be increased a little, so that the vertical displacement of the object table 400 caused by the unit horizontal displacement of the adjusting assembly 310 is larger, so as to realize the high transmission speed. When the workpiece is close to the target position height, the slope of the wedge-shaped table 320 can be decreased a little, so that the vertical displacement of the object table 400 caused by the unit horizontal displacement of the adjusting assembly 310 is smaller, so as to realize the high precision transmission. In summary, the precise displacement platform structure is simpler and more convenient to operate, and the high transmission speed mode and the high precision mode can be realized through the one device.

[0041] With reference to Figure 3 and Figure 4 The base 100 includes a bottom plate 110 and guide columns 120 vertically arranged on the bottom plate 110. The bottom plate 110 can be provided in different shapes according to needs. In the embodiment, the bottom plate 110 is substantially rectangular. In other embodiments, the bottom plate 110 can also be polygonal, circular or other regular or irregular shapes, as long as it can be installed with the linear driving mechanism 200. The linear driving mechanism 200 is arranged on the bottom plate 110, the guide columns 120 are arranged through the object table 400, and the object table 400 can slide relative to the guide columns 120. Thus, the adjusting mechanism 300 is located between the linear driving mechanism and the object table 400, and the guide columns 120 can guide the vertical movement direction of the object table 400, so as to ensure that the object table 400 can slide relative to the wedge-shaped table 320.

[0042] It can be understood that, in some embodiments, the base 100 can also be configured in an L-shaped side, and the object table 400 can also be slidably connected to the side wall of the base 100 through the sliding pair 220.

[0043] The first horizontal direction can be the X direction shown in the figure, the second horizontal direction can be the Y direction shown in the figure, and the vertical direction is the Z direction shown in the figure.

[0044] In the embodiment, the linear driving mechanism 200 comprises a driving member 210 and a sliding pair 220, the driving member 210 is arranged on the bottom plate 110 of the base 100 and is in transmission connection with the adjusting assembly 310, the adjusting assembly 310 is fixedly connected with a sliding block 222 of the sliding pair 220, a sliding rail 221 of the sliding pair 220 is arranged on the base 100, wherein the length direction of the sliding rail 221 is along the first horizontal direction, so that the adjusting assembly 310 is driven to translate in the first horizontal direction by the driving member 210, the sliding pair 220 plays a guiding and friction-reducing role, so that the translation of the adjusting assembly 310 on the bottom plate 110 is smoother.

[0045] The driving member 210 comprises but is not limited to a driving motor, the driving member 210 further comprises a screw pair 230, a screw 231 of the screw pair 230 is rotatably arranged on the base 100 through two bearing seats 233, the length direction of the screw 231 is along the first horizontal direction, a stator of the driving motor is fixed to one bearing seat 233, a rotor of the driving motor is coaxially connected with the screw 231, a nut 232 of the screw pair 230 is fixedly connected with the adjusting assembly 310, so that the torque of the driving motor can be converted into a linear driving force capable of driving the adjusting assembly 310 to translate by the screw pair 230.

[0046] Of course, in some embodiments, a rack and pinion mechanism or a synchronous belt mechanism can also be used to convert the torque of the driving motor into a linear driving force.

[0047] In addition, the driving member can also be a component directly providing linear driving force, such as a hydraulic cylinder, an air cylinder, an electric cylinder, etc.

[0048] Reference Figure 5 and Figure 6 In the embodiment, the adjusting assembly comprises a support 311 and a lifting driving member 312, the support 311 is arranged on the linear driving mechanism, specifically, the bottom of the support 311 is fixedly connected with the sliding block of the sliding pair, so that the support 311 is slidably arranged on the bottom plate of the base, the support 311 can translate along the first horizontal direction under the driving of the linear driving mechanism, the lifting driving member 312 and the hinge shaft are arranged on the support 311, the lifting driving member 312 can drive the wedge-shaped table 320 to swing around the center axis of the hinge shaft, so as to adjust the slope of the wedge-shaped table 320 and switch between the high transmission mode and the high precision mode.

[0049] Specifically, the lifting drive 312 includes a telescopic drive source, which includes but is not limited to a pneumatic cylinder, a hydraulic cylinder, or an electric cylinder, etc. One end of the telescopic drive source is fixed to the support 311, and the other end is in sliding contact with the side of the wedge-shaped platform 320 facing away from the object table 400. The contact position of the lifting drive 312 with the wedge-shaped platform 320 is away from the hinge shaft in the first horizontal direction. Thus, by elongating the telescopic drive source, the telescopic drive source and the wedge-shaped platform 320 can slide relative to each other, and the slope of the wedge-shaped platform 320 increases accordingly. When the telescopic drive source is shortened, the slope of the wedge-shaped platform 320 naturally decreases due to its own gravity.

[0050] The part of the lifting drive 312 in contact with the object table 400 is provided with a curved surface 313, and the generatrix of the curved surface 313 is in the second horizontal direction. Thus, the contact between the lifting drive 312 and the object table 400 approaches linear contact, the contact area is reduced, the friction is reduced, and the wedge-shaped platform 320 is more likely to swing.

[0051] Of course, in order to improve the compactness of the structure, the side of the support 311 facing the object table 400 is provided with a receiving cavity 314, which is away from the hinge shaft in the first horizontal direction. The lifting drive 312 is located in the receiving cavity 314.

[0052] In order to reduce the friction between the object table 400 and the wedge-shaped platform 320, the side of the object table 400 facing the wedge-shaped platform 320 is provided with a rotatable roller 410, the length direction of the roller 410 is in the second horizontal direction, and the roller 410 is in contact with the wedge-shaped platform 320.

[0053] In addition, with reference to Figure 1 and Figure 2 , the precision displacement platform further includes a displacement sensor 500, which includes but is not limited to a laser displacement sensor, a grating ruler, or other sensors. The displacement sensor 500 is used to detect the lifting height of the object table 400. The adjustment assembly can adjust the slope of the wedge-shaped platform 320 according to the detection result of the displacement sensor 500. Thus, during the process of lifting the workpiece on the object table 400 to the target position height, the elongation power of the lifting drive 312 is reduced in advance when the workpiece is lifted to the target position height in the high transmission speed mode, the slope of the wedge-shaped platform 320 gradually decreases, the resolution gradually increases, and when the slope of the wedge-shaped platform 320 reaches the pre-set appropriate slope near the target position height, the high precision mode is switched to for fine adjustment, and high precision transmission is realized.

[0054] The above merely describes a specific implementation of the present application, but the protection scope of the present application is not limited thereto, any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.

Claims

1. A precision displacement platform, characterized by, The application relates to a linear motion stage, which comprises: a base (100); a linear driving mechanism (200) arranged on the base (100); an adjusting mechanism (300) comprising an adjusting assembly (310), a hinge shaft (330) and a wedge-shaped platform (320), the wedge-shaped platform (320) being hinged to the adjusting assembly (310) through the hinge shaft (330) so as to change the slope relative to the adjusting assembly (310); the adjusting assembly (310) is connected to the linear driving mechanism (200) and can be driven by the linear driving mechanism (200) to move in a first horizontal direction relative to the base (100), wherein the length direction of the hinge shaft (330) is along a second horizontal direction, and the first horizontal direction and the second horizontal direction are perpendicular to each other; a carrier platform (400) arranged on the base (100) in a lifting manner, and the carrier platform (400) is placed on the wedge-shaped platform (320).

2. The precision displacement platform of claim 1, wherein, The adjusting assembly (310) comprises a support (311) and a lifting driving element (312), the support (311) is arranged on the linear driving mechanism (200) and can be driven by the linear driving mechanism (200) to move in the first horizontal direction, and the lifting driving element (312) and the hinge shaft (330) are both arranged on the support (311), and the lifting driving element (312) can drive the wedge-shaped platform (320) to swing around the central axis of the hinge shaft (330).

3. The precision displacement platform of claim 2, wherein, The lifting driving element (312) comprises a telescopic driving source, one end of which is fixed to the support (311), and the other end is in sliding contact with the side of the wedge-shaped platform (320) which is away from the carrier platform (400), and the contact position of the lifting driving element (312) and the wedge-shaped platform (320) is away from the hinge shaft (330) in the first horizontal direction.

4. The precision displacement platform of claim 3, wherein, The part of the lifting driving element (312) used to contact the carrier platform (400) is arranged as an arc surface (313), and the generatrix of the arc surface (313) is along the second horizontal direction.

5. The precision displacement platform according to any one of claims 2-4, wherein, The side of the support (311) which is towards the carrier platform (400) is provided with a receiving cavity (314), and the receiving cavity (314) is away from the hinge shaft (330) in the first horizontal direction, and the lifting driving element (312) is located in the receiving cavity (314).

6. The precision displacement platform of claim 1, wherein, The side of the carrier platform (400) which is towards the wedge-shaped platform (320) is provided with a rotatable roller (410), the length direction of the roller (410) is along the second horizontal direction, and the roller (410) is in contact with the wedge-shaped platform (320).

7. The precision displacement platform of claim 1, wherein, The base (100) comprises a bottom plate (110) and a guide column (120) arranged vertically on the bottom plate (110), the linear driving mechanism (200) is arranged on the bottom plate (110), the guide column (120) penetrates the carrier platform (400), and the carrier platform (400) can slide relative to the guide column (120).

8. The precision displacement platform of claim 1, wherein, The precision displacement platform further comprises a displacement sensor (500) for detecting the lifting height of the object table (400), and the adjusting assembly (310) is capable of adjusting the slope of the wedge-shaped table (320) according to the detection result of the displacement sensor (500).

9. The precision displacement platform of claim 1, wherein, The linear driving mechanism (200) comprises a driving member (210) and a sliding pair (220), the driving member (210) is arranged on the base (100) and is in driving connection with the adjusting assembly (310), the adjusting assembly (310) is fixedly connected with a sliding block (222) of the sliding pair (220), a sliding rail (221) of the sliding pair (220) is arranged on the base (100), and the length direction of the sliding rail (221) is along the first horizontal direction.

10. The precision displacement platform of claim 9, wherein, The driving member (210) comprises a driving motor, and the driving member (210) further comprises a screw pair (230), a screw (231) of the screw pair (230) is rotatably arranged on the base (100) through two bearing seats (233), the length direction of the screw (231) is along the first horizontal direction, a stator of the driving motor is fixed on one bearing seat (233), a rotor of the driving motor is coaxially connected with the screw (231), and a nut (232) of the screw pair (230) is fixedly connected with the adjusting assembly (310).

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