Water pipe protection plate structure in chamber of magnetron sputtering machine table
By designing the water pipe guard plate structure of the main guard plate and inclined support components, the problems of inconvenient installation and sputtering caused by the small gap between the target material and the water pipe were solved, achieving stable support and convenient disassembly and assembly of the water pipe, and improving the operational reliability of the magnetron sputtering machine.
Patent Information
- Application Number
- CN202423176069.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-23
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-12-23
AI Technical Summary
In the existing technology, the gap between the target material and the water pipe is small, which makes it inconvenient to install the protective plate. Furthermore, during the magnetron sputtering process, target atoms or molecules will sputter onto the surface of the protective plate, causing the bolts, pins, and holes on the water pipe support to become connected together and unable to be separated normally.
Design a water pipe guard plate structure including a main guard plate, a secondary guard plate, a front inclined support component, and a rear inclined support component. The water pipe is supported by inclined side plates and inclined wing plates, reducing the need for holes. Push-pull assembly and disassembly are achieved by using guide protrusions and mounting rails to avoid scratches inside the chamber.
This achieves stable support and convenient assembly/disassembly of the water pipe, prevents target atoms or molecules from adhering on the inclined plane, ensures reliable separation of the water pipe from the support, and improves installation efficiency and equipment stability.
Smart Images
Figure CN223522648U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a guard plate technical field, specifically is a water pipe guard plate structure in chamber of magnetron sputtering machine. BACKGROUND
[0002] The composite current collector is a lithium battery material with a three-layer composite structure, the middle layer is a polymer material, and the upper and lower surfaces are metal conductive layers. The outer layer uses corrosion-resistant materials such as ceramics and plastics to form a sandwich structure. The middle layer of polymer material provides insulation and support. The introduction of the polymer material layer allows the composite current collector to quickly melt at high temperatures, preventing battery thermal runaway, and its lightweight properties also help improve the energy density of the battery. The metal conductive layer is located on both sides of the polymer material layer and is responsible for conducting current. The metal conductive layer forms a nanoscale metal layer on the surface of the polymer material through vacuum evaporation and magnetron sputtering processes, and then deposits and thickens the metal layer to more than 1 μm through electroplating. The high conductivity and corrosion resistance of the metal conductive layer make it an indispensable part of the battery, and the isolation of the polymer material layer further improves the safety of the battery.
[0003] The working principle of magnetron sputtering is that electrons, under the action of an electric field, collide with argon atoms during their flight to the substrate, causing ionization to produce Ar positive ions and new electrons. New electrons fly to the substrate, and Ar ions accelerate to the cathode target under the action of an electric field and hit the target surface with high energy, causing the target material to sputter. In the sputtering particles, neutral target atoms or molecules deposit on the substrate to form a thin film, and the secondary electrons produced will be affected by the electric and magnetic fields to move in a circular motion on the target surface in the form of a trochoid. A large amount of heat is generated during the entire process, and cooling means such as general cooling, deep cooling, and water cooling are required to cool the chamber.
[0004] The composite current collector magnetron sputtering substrate is usually made of PP / PET material, which will deform and burn through at high temperatures. Some machines use water pipes around the target material and L-shaped guards to protect the water pipes for cooling. In the original design, the L-shaped guard conducts heat through copper wires attached to the surface of the water pipe. During installation, the short side of the guard is first placed in the gap between the water pipe and the target material. The short side of the L-shaped guard is placed under the target material by rotating it, and the long side surface hole is aligned with the bolt of the water pipe support for placement. Finally, the pin is used to fix it. However, in actual production, it was found that because the gap between the target material and the water pipe is small, the installation of the guard is not convenient, and the neutral target atoms or molecules will sputter towards other places during magnetron sputtering, causing a large amount of target material to deposit on the surface of the guard, making the bolt, pin, and hole of the water pipe support connected together, which cannot be separated normally. SUMMARY
[0005] The utility model discloses a magnetron sputtering machine platform chamber water pipe guard board structure to solve the small gap between target material and water pipe in prior art, the installation of the guard board is inconvenient, the neutral target atom or molecule in magnetron sputtering can be sputtered to other places, and a large amount of target material is deposited on the surface of the guard board to make the bolt, bolt and hole on the water pipe support connect together, and the problem that cannot be separated normally.
[0006] In order to realize the above-mentioned purpose, the utility model provides the following technical scheme: a magnetron sputtering machine platform chamber water pipe guard board structure, including main guard board and two water pipes, one end of the main guard board is fixedly connected with auxiliary guard board, one side of the auxiliary guard board is provided with front end inclined support assembly, the side of the main guard board away from the auxiliary guard board is provided with rear end inclined support assembly, and the main guard board is provided with support assembly inside.
[0007] Preferably, the front end inclined support assembly includes side wing board one fixedly connected with the auxiliary guard board, and the auxiliary guard board is fixedly connected with two guide lugs two inside.
[0008] Preferably, the bottom of the side wing board one is provided with inclined wing board one, the inclined wing board one is fixedly connected with the auxiliary guard board, one end of the inclined wing board one is fixedly connected with L-shaped backing plate one, and the bottom of the inclined wing board one is fixedly connected with two guide lugs three.
[0009] Preferably, the rear end inclined support assembly includes side wing board two fixedly connected with the main guard board, the bottom of the side wing board two is provided with inclined wing board two, one end of the inclined wing board two is fixedly connected with L-shaped backing plate two, and the main guard board is fixedly connected with two guide lugs one inside.
[0010] Preferably, the inclined wing board two is fixedly connected with the main guard board, and the bottom of the inclined wing board two is fixedly connected with two guide lugs four.
[0011] Preferably, the support assembly includes two support vertical beams, two filling racks are fixedly connected between the two support vertical beams, the top and the bottom of one of the filling racks are provided with mounting guide rails one, the mounting guide rails one are fixedly connected with the two support vertical beams, the top and the bottom of another filling rack are provided with mounting guide rails two, and the mounting guide rails two are fixedly connected with the two support vertical beams.
[0012] Preferably, the bottom of the two support vertical beams is fixedly connected with support inclined beams on both sides, and two mounting guide rails three are fixedly connected between the two support inclined beams on the same side.
[0013] Compared with the prior art, the utility model has the beneficial effects that:
[0014] 1、The front end inclined support assembly and the rear end inclined support assembly in the application are arranged, without arranging bolts on the main guard plate, avoiding scratching inside the chamber, the water pipes are supported by the inclined side wing plate two, the inclined wing plate two, the side wing plate one and the inclined wing plate one, the arrangement of holes is reduced, the adhesion structure is distributed on the inclined plane under the action of target atoms or molecules, and the water pipes are convenient to separate.
[0015] 2、When the application is used, the side wing plate one supports one side of the water pipe on the same side, and the L-shaped backing plate one supports the bottom of the guide protrusion three on the same side and the other side; the side wing plate two supports one side of the water pipe on the same side, and the L-shaped backing plate two supports the bottom of the guide protrusion three on the same side and the other side, so that the water pipe is supported by different upper support points and the stability of the water pipe is ensured. When the water pipe guard plate structure formed by the main guard plate, the front end inclined support assembly, the rear end inclined support assembly and the guide protrusion two is used, the disassembly and assembly can be realized through the push-pull mode. BRIEF DESCRIPTION OF DRAWINGS
[0016] Figure 1 It is a structural schematic view of the utility model;
[0017] Figure 2 It is a structural schematic view of the main guard plate of the utility model;
[0018] Figure 3 It is an enlarged view of structure A of Figure 2
[0019] Figure 4 It is a structural schematic view of the inclined wing plate two of the utility model.
[0020] Marked numbers in the figure: 1, main guard plate; 2, guide protrusion one; 3, auxiliary guard plate; 4, guide protrusion two; 5, side wing plate one; 6, side wing plate two; 7, support vertical beam; 8, filling frame; 9, installation guide rail one; 10, installation guide rail two; 11, support inclined beam; 12, installation guide rail three; 13, inclined wing plate two; 14, L-shaped backing plate two; 15, guide protrusion four; 16, inclined wing plate one; 17, L-shaped backing plate one; 18, guide protrusion three; 19, water pipe. DETAILED DESCRIPTION
[0021] The technical scheme in the embodiments of the utility model will be clearly and completely described below in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.
[0022] Embodiment: as Figures 1-4 The utility model provides a kind of water pipe protection plate structure in magnetron sputtering machine chamber technical scheme shown, including main protection plate 1 and two water pipes 19, main protection plate 1 one end is fixedly connected with auxiliary protection plate 3, auxiliary protection plate 3 one side is provided with front end inclined support assembly, the side of main protection plate 1 away from auxiliary protection plate 3 is provided with rear end inclined support assembly, main protection plate 1 inside is provided with support assembly.
[0023] Specifically, preset support assembly in appropriate position, two support vertical beams 7 in support assembly and the fixedly connected support inclined beam 11 of two sides of the bottom of two support vertical beams 7 are all fixed in advance by welding, bolt, embedding etc., so that support assembly whole cannot displace, support vertical beam 7 and two inclinedly arranged support inclined beam 11 constitute a stable support frame, two support frames are installed together by two filling racks 8 and four installation guide rails one 9, guarantee the stability of support assembly use, two filling racks 8 are fixedly connected between two support vertical beams 7, two filling racks 8 are symmetrically arranged on the two sides of support vertical beam 7, one of the two filling racks 8 is provided with installation guide rail one 9 at top and bottom, and the installation guide rail one 9 is fixedly connected with two support vertical beams 7, and the other filling rack 8 is provided with installation guide rail two 10 at top and bottom, and the installation guide rail two 10 is fixedly connected with two support vertical beams 7.
[0024] And two installation guide rails three 12 are fixedly connected between two support inclined beams 11 of the same side, and the installation guide rail three 12 further increases the structural strength between two support vertical beams 7, to guarantee the stability of support assembly use.
[0025] When the position of two water pipes 19 is fixed in advance, it is not described here.
[0026] The main protection plate 1 integrally arranged in U shape can be moved to the outside of the support frame, the main protection plate 1 and the auxiliary protection plate 3 fixedly connected with the front end of the main protection plate 1 are pushed, the main protection plate 1 and the auxiliary protection plate 3 are pushed forward from the rear end of the water pipe 19 with a smaller diameter, the auxiliary protection plate 3 is in front of the movement direction, the front end inclined support assembly arranged on one side of the auxiliary protection plate 3 is in front of the movement direction, the side wing plate one 5 in the front end inclined support assembly is fixedly connected with the auxiliary protection plate 3, two guide protrusions two 4 are fixedly connected in the auxiliary protection plate 3, the guide protrusions two 4 are pushed after being aligned with the two installation guide rails two 10, so that the guide protrusions two 4 enter the inside of the installation guide rails two 10.
[0027] With the pushing of the main protection plate 1 and the auxiliary protection plate 3, the two guide protrusions one 2 fixedly connected in the main protection plate 1 are inserted into the inside of the two installation guide rails one 9, so that the main protection plate 1 is installed to the outside of the support assembly, finally, after the movement of the auxiliary protection plate 3 is blocked by the larger diameter end of the water pipe 19 outside, the installation of the main protection plate 1 is completed, at this time, the auxiliary protection plate 3 is arranged between the two water pipes 19, the two water pipes 19 are isolated, to avoid the case that target atoms or molecules are sputtered from one side to the other side of the water pipe 19.
[0028] The bottom of the side wing plate one 5 fixedly connected with the side plate one of the auxiliary guard plate 3 is provided with an inclined wing plate one 16, the inclined wing plate one 16 is fixedly connected with the auxiliary guard plate 3, the bottom of the inclined wing plate one 16 is fixedly connected with two guide lugs three 18, at this time, the two guide lugs three 18 are moved into the inside of the two installation guide rails three 12 of the same side, so that the inclined wing plate one 16 is directly supported by the supporting assembly, and the possibility of deformation of the inclined wing plate one 16 is reduced. Similarly, the side wing plate two 6 fixedly connected with the side plate two of the rear end inclined supporting assembly is fixedly connected with the main guard plate 1 on one side, the bottom of the side wing plate two 6 is provided with an inclined wing plate two 13, one end of the inclined wing plate two 13 is fixedly connected with an L-shaped backing plate two 14, and the bottom of the inclined wing plate two 13 fixedly connected with the main guard plate 1 is fixedly connected with two guide lugs four 15; at this time, the two guide lugs four 15 enter the inside of the two installation guide rails three 12 of the same side, so that the possibility of deformation of the inclined wing plate two 13 is reduced.
[0029] Finally, the side wing plate one 5 supports one side of the water pipe 19 of the same side, the L-shaped backing plate one 17 supports the bottom of the guide lugs three 18 of the same side and the other side; the side wing plate two 6 supports one side of the water pipe 19 of the same side, and the L-shaped backing plate two 14 supports the bottom of the guide lugs three 18 of the same side and the other side, so that the water pipe 19 is supported by different upper supporting points, and the stability of the water pipe 19 is guaranteed. When the water pipe guard plate structure formed by the main guard plate 1, the front end inclined supporting assembly, the rear end inclined supporting assembly and the guide lugs two 4 is used, the push-pull mode can be used to realize disassembly and assembly.
[0030] The front end inclined supporting assembly and the rear end inclined supporting assembly are arranged, so that it is unnecessary to arrange bolts on the main guard plate 1, the scratch in the inside of the cavity is avoided, the water pipe 19 is supported by the inclined side wing plate two 6, the inclined wing plate two 13, the side wing plate one 5 and the inclined wing plate one 16, the arrangement of holes is reduced, and the adhesion structure is distributed on the inclined plane under the action of target atoms or molecules, so that the water pipe 19 is conveniently separated.
[0031] It is apparent for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and the present application can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be regarded as exemplary and non-restrictive, and the scope of the present application is defined by the appended claims rather than the above description, and all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be regarded as limiting the claims involved.
Claims
1. A water pipe guard structure in a magnetron sputtering machine chamber, comprising a main guard plate (1) and two water pipes (19), characterized in that: The main guard plate (1) is fixedly connected with a vice guard plate (3) at one end, the vice guard plate (3) is provided with a front end inclined support assembly on one side, the main guard plate (1) is provided with a rear end inclined support assembly on the side away from the vice guard plate (3), and the main guard plate (1) is provided with a support assembly inside.
2. The water pipe guard plate structure in a magnetron sputtering machine chamber according to claim 1, wherein: The front end inclined support assembly comprises a side wing plate one (5) fixedly connected with the vice guard plate (3) on one side, and the vice guard plate (3) is fixedly connected with two guide lugs two (4) inside.
3. The water pipe guard plate structure in a magnetron sputtering machine chamber according to claim 2, wherein: The bottom of the side wing plate one (5) is provided with an inclined wing plate one (16), the inclined wing plate one (16) is fixedly connected with the vice guard plate (3), one end of the inclined wing plate one (16) is fixedly connected with an L-shaped backing plate one (17), and the bottom of the inclined wing plate one (16) is fixedly connected with two guide lugs three (18).
4. The water pipe guard structure in a magnetron sputtering chamber according to claim 1, wherein: The rear end inclined support assembly comprises a side wing plate two (6) fixedly connected with the main guard plate (1) on one side, the bottom of the side wing plate two (6) is provided with an inclined wing plate two (13), one end of the inclined wing plate two (13) is fixedly connected with an L-shaped backing plate two (14), and the main guard plate (1) is fixedly connected with two guide lugs one (2) inside.
5. The water pipe guard structure in a magnetron sputtering chamber according to claim 4, wherein: The inclined wing plate two (13) is fixedly connected with the main guard plate (1), and the bottom of the inclined wing plate two (13) is fixedly connected with two guide lugs four (15).
6. The water pipe guard structure in a magnetron sputtering chamber according to claim 1, wherein: The support assembly comprises two support vertical beams (7), two filling frames (8) are fixedly connected between the two support vertical beams (7), one of the filling frames (8) is provided with a mounting guide rail one (9) at the top and the bottom, the mounting guide rail one (9) is fixedly connected with the two support vertical beams (7), and the other filling frame (8) is provided with a mounting guide rail two (10) at the top and the bottom, and the mounting guide rail two (10) is fixedly connected with the two support vertical beams (7).
7. The water pipe guard structure in a magnetron sputtering chamber according to claim 6, wherein: The bottom of the two support vertical beams (7) is fixedly connected with support inclined beams (11) on both sides, and two mounting guide rails three (12) are fixedly connected between the two support inclined beams (11) on the same side.