MOCVD (Metal Organic Chemical Vapor Deposition) equipment
By adding power generation and storage devices to MOCVD equipment, and using magnetic components and enclosed coils to cut magnetic field lines to generate electricity, the problems of high cost and power outage risk of traditional equipment are solved, achieving more efficient energy utilization and power supply reliability.
Patent Information
- Application Number
- CN202422852195.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-21
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-11-21
AI Technical Summary
Traditional MOCVD equipment consumes a lot of electricity, has high production costs, and cannot cope with the risks of unexpected events such as power outages.
Adding a power generation device and an energy storage device, the device generates electrical energy by cutting magnetic field lines through magnetic components and closed coils and stores it in the energy storage device to power the electrical devices of the MOCVD equipment. The device includes magnetic components forming closed magnetic field lines, closed coils rotating with the drive device to cut the magnetic field lines, and the energy storage device connected to the electrical devices.
It reduces production costs and can continue to supply power in case of power outages or other emergencies, thus improving equipment reliability and energy efficiency.
Smart Images
Figure CN223522665U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a semiconductor technical field, especially a kind of MOCVD equipment. BACKGROUND
[0002] Traditional MOCVD (Metal-organic Chemical Vapor Deposition, metal organic compound chemical vapor deposition) equipment is a power-consuming device, which includes various electrical devices and consumes a lot of electric energy. The traditional MOCVD equipment itself does not have the ability to store energy, and can only power various electrical devices through the power supply, so the production cost is high, and it is also unable to cope with the risk of power failure and other unexpected events. Therefore, a MOCVD equipment is needed to solve the problem of high production cost and the risk of power failure and other unexpected events. SUMMARY
[0003] Therefore, the utility model aims to provide a kind of MOCVD equipment, compared with traditional MOCVD equipment, increase power generation device and energy storage device, the electric energy generated by cutting magnetic induction line in power generation device is stored in energy storage device, energy storage device and electrical device in MOCVD equipment are connected, to power supply electrical device, to solve the problem of high production cost, and the risk of power failure and other unexpected events.
[0004] To solve the above technical problems, the utility model provides a kind of MOCVD equipment, including: the tray for placing substrate, the driving device for driving the tray rotation, power generation device and energy storage device;
[0005] The power generation device and the energy storage device are connected;The power generation device includes magnetic assembly and closed coil;The magnetic assembly forms closed magnetic induction line;The closed coil is formed by winding wire connected to the driving device at both ends, and the closed coil cuts the magnetic induction line during rotation with the driving device;
[0006] The energy storage device and the electrical device in the MOCVD equipment are connected.
[0007] Optionally, the driving device is a motor;One end of the motor is connected to the tray, and the other end of the motor is connected to both ends of the wire;The tray and the closed coil rotate with the motor.
[0008] Optionally, the power generation device further comprises a first slip ring and a second slip ring; the first slip ring is fixedly connected with one end of the wire, the second slip ring is fixedly connected with the other end of the wire, and the first slip ring and the second slip ring are both nested on the motor; the first slip ring and the second slip ring rotate with the motor.
[0009] Optionally, the magnetic assembly comprises a first electrode and a second electrode with opposite polarities; the first electrode and the second electrode are symmetrically arranged with the closed coil as the center.
[0010] Optionally, the MOCVD device further comprises a support device for supporting the tray; the first electrode and the second electrode are arranged on the support device.
[0011] Optionally, the support device comprises a support platform for supporting the tray, four support columns for supporting the support platform, and a base for supporting the support columns; the support platform and the base are both rectangular, four support columns are respectively located at the four corners of the base, and the first electrode and the second electrode are respectively arranged on two support columns located on the diagonal line of the base.
[0012] Optionally, the MOCVD device further comprises a housing, the housing is provided with a through hole; the electrical device is located in the interior of the housing; the energy storage device is located outside the housing and connected with the electrical device through the wire passing through the through hole.
[0013] Optionally, the closed coil is wound in a circular, semicircular or rectangular shape by the wire connected with the driving device at both ends.
[0014] Optionally, the MOCVD device further comprises a power supply and a control device.
[0015] The power supply is connected with the electrical device in the MOCVD device.
[0016] The control device is connected with the power supply, the energy storage device; when the control device detects that the link formed by the connection of the power supply and the electrical device is disconnected, the control device controls the link formed by the connection of the energy storage device and the electrical device to be turned on.
[0017] Optionally, the energy storage device is a battery; and / or, the power supply is an AC power supply with two USB-C interfaces.
[0018] The utility model discloses a tray for placing substrate, drive device for driving the rotation of tray, power generation device and energy storage device, the power generation device and energy storage device connection, the power generation device includes magnetic assembly and closed coil, the magnetic assembly forms closed magnetic induction line, the closed coil is formed by the wire winding of both ends with drive device connection, and the closed coil cuts the magnetic induction line with drive device together in the rotation process, the energy storage device and the electric device in MOCVD equipment connection. The utility model discloses compared with traditional MOCVD equipment, increased power generation device and energy storage device, the power generation device includes magnetic assembly and closed coil, the magnetic assembly forms closed magnetic induction line, the closed coil is formed by the wire winding of both ends with drive device connection, and the closed coil cuts the magnetic induction line with drive device together in the rotation process. The electric energy generated by cutting the magnetic induction line is stored in the energy storage device, and the energy storage device and the electric device in MOCVD equipment are connected, can power supply for electric device, to better cope with the risk of power failure etc. occur unexpectedly, can save energy, reduce cost simultaneously. BRIEF DESCRIPTION OF DRAWINGS
[0019] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or prior art, below will be to the embodiment or prior art description needed to use the drawing briefly introduced, obviously, below description in the drawing only the embodiment of the utility model, for those skilled in the art, under the premise of not paying creative labor, can also obtain other drawings according to the provided drawing.
[0020] Figure 1 It is a kind of traditional MOCVD equipment structure schematic diagram;
[0021] Figure 2 It is a kind of MOCVD equipment partial structure schematic diagram provided by the embodiment of the utility model.
[0022] The reference signs are explained as follows:
[0023] 1-tray / planetary tray;2-drive device / motor;31-support platform;32-support column;33-base;41-first electrode;42-second electrode;51-first slip ring;52-second slip ring;53-closed coil;54-energy storage device / battery;55-control device;56-power supply / C2C AC power supply. DETAILED DESCRIPTION
[0024] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme of the embodiments of the utility model will be described clearly and completely in combination with the drawings in the embodiments of the utility model below. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skilled in the art without creative labor belong to the protection scope of the utility model.
[0025] Please refer to Figure 1 And Figure 2 , Figure 1 It is a structural schematic diagram of a traditional MOCVD equipment; Figure 2 It is a partial structural schematic diagram of a MOCVD equipment provided by the embodiments of the utility model. The MOCVD equipment provided by the embodiments of the utility model can include: a tray 1 for placing a substrate, a driving device 2 for driving the tray 1 to rotate, a power generation device and an energy storage device 54;
[0026] The power generation device and the energy storage device 54 are connected. The power generation device includes a magnetic assembly and a closed coil 53. The magnetic assembly forms a closed magnetic induction line. The closed coil 53 is formed by winding wires connected to the driving device 2 at both ends, and the closed coil 53 rotates with the driving device 2 to cut the magnetic induction line.
[0027] The energy storage device 54 and the power consuming device in the MOCVD equipment are connected.
[0028] The embodiments are not limited to the specific type of the tray 1, as long as it can place the substrate. For example, the tray 1 can be a planetary tray 1. The planetary tray 1 includes a first tray and at least two second trays inside the first tray. The size of the first tray is larger than that of the second tray.
[0029] The embodiments are not limited to the specific structure of the driving device 2, as long as it can drive the tray 1 to rotate. For example, the driving device 2 can be a motor 2. One end of the motor 2 is connected to the tray 1, and the other end of the motor 2 is connected to both ends of the wire. The tray 1 and the closed coil 53 rotate with the motor 2.
[0030] The embodiments are not limited to the specific type and number of the power consuming device. For example, the power consuming device can include but is not limited to any one or more of a lamp, a MO source (high-purity metal organic compound) nozzle, a pump and a driving device 2 that needs to be driven by electricity. Each of the above devices needs to consume electricity during the operation of the MOCVD equipment.
[0031] The embodiment is not limited to the specific shape of the closed coil 53, which can be any shape as long as it is closed, such as a circular, semicircular, or rectangular closed coil 53 formed by winding a wire connected to the driving device 2 at both ends. Taking the rectangular closed coil 53 as an example, one end of the wire is connected to the driving device 2, the other end of the wire is first extended in a first direction away from the driving device 2, then extended in a second direction perpendicular to the first direction, and finally extended in a third direction towards the driving device 2, forming a rectangular closed coil 53.
[0032] The embodiment is not limited to the specific type of wire, as long as it can conduct electricity, such as a metal wire.
[0033] In the embodiment, the closed coil 53 is a rotor and the magnetic assembly is a stator. The embodiment is not limited to the specific connection method of the closed coil 53 and the driving device 2, which can be determined according to the specific type of the driving device 2, as long as the coil can rotate with the driving device 2, such as when the driving device 2 is a motor 2, the power generation device can also include a first slip ring 51 and a second slip ring 52; the first slip ring 51 and one end of the wire are fixedly connected, the second slip ring 52 and the other end of the wire are fixedly connected, and the first slip ring 51 and the second slip ring 52 are both nested on the motor 2; the first slip ring 51 and the second slip ring 52 both rotate with the motor 2.
[0034] The embodiment is not limited to the specific connection method of the power generation device and the energy storage device 54, as long as the power generation device and the energy storage device 54 can be electrically connected, such as the power generation device can be connected to the energy storage device 54 through a wire.
[0035] The embodiment is not limited to the specific type of the magnetic assembly, as long as it can form a closed magnetic field line, such as the magnetic assembly can include a first electrode 41 and a second electrode 42 with opposite polarities; the first electrode 41 and the second electrode 42 are symmetrically arranged with the closed coil 53 as the center. In the embodiment, the first electrode 41 and the second electrode 42 can be located on any two sides of the closed coil 53, as long as the first electrode 41 and the second electrode 42 are symmetric about the closed coil 53. In the embodiment, the first electrode 41 can be an N-pole electrode, and the corresponding second electrode 42 can be an S-pole electrode; the first electrode 41 can also be an S-pole electrode, and the corresponding second electrode 42 can also be an N-pole electrode.
[0036] Further, the MOCVD device in the embodiment can further comprise a supporting device for supporting the tray 1. The embodiment does not limit the specific structure of the supporting device, as long as the supporting device can support the tray 1. For example, the supporting device can comprise a supporting platform 31 for supporting the tray 1, four supporting columns 32 for supporting the supporting platform 31, and a base 33 for supporting the supporting columns 32; the supporting platform 31 and the base 33 are both rectangular, and the four supporting columns 32 are respectively located at the four corners of the base 33.
[0037] The embodiment does not limit the specific positions of the first electrode 41 and the second electrode 42, which can be fixed in any form near the closed coil 53. For example, the first electrode 41 and the second electrode 42 can be arranged on the supporting device. Further, the specific positions of the first electrode 41 and the second electrode 42 can be determined according to the specific structure of the supporting device. For example, when the supporting device comprises a supporting platform 31 for supporting the tray 1, four supporting columns 32 for supporting the supporting platform 31, and a base 33 for supporting the supporting columns 32; the supporting platform 31 and the base 33 are both rectangular, and the four supporting columns 32 are respectively located at the four corners of the base 33, the first electrode 41 and the second electrode 42 can be respectively arranged on two supporting columns 32 located on the diagonal line of the base 33.
[0038] Further, the MOCVD device in the embodiment can further comprise a shell, and the shell is provided with a through hole; the electric device is located in the interior of the shell. In addition to the driving device 2, the tray 1 and the power generation device can all be located in the interior of the shell.
[0039] The embodiment does not limit the specific position of the energy storage device 54. For example, the energy storage device 54 can be located in the interior of the shell; the energy storage device 54 can also be located outside the shell. The energy storage device 54 needs to be connected with the electric device, and different relative positions of the energy storage device 54 and the electric device correspond to different connection modes of the energy storage device 54 and the electric device.
[0040] The embodiment does not limit the specific connection mode of the energy storage device 54 and the electric device, as long as the power generation device and the energy storage device 54 can be electrically connected. For example, the energy storage device 54 can be located outside the shell and connected with the electric device through a lead wire passing through the through hole; the energy storage device 54 can be located in the interior of the shell and directly connected with the electric device through a lead wire.
[0041] Further, the MOCVD device in the embodiment can further include a power supply 56 and a control device 55; the power supply 56 and the electrical device in the MOCVD device are connected; the control device 55 is connected with the power supply 56 and the energy storage device 54; when the control device 55 detects that the link formed by the connection of the power supply 56 and the electrical device is disconnected, the control device 55 controls the link formed by the connection of the energy storage device 54 and the electrical device to be connected. It should be noted that, by adding the control device 55, the power supply 56 and the energy storage device 54 can be flexibly switched to supply power to the electrical device, so as to ensure that the electrical device can be powered by the power supply 56 in the absence of power failure and the like; and the electrical device can be powered by the energy storage device 54 in the presence of power failure and the like, so as to better cope with the risk of power failure and the like.
[0042] The embodiment does not limit the specific connection mode of the control device 55 and the energy storage device 54, as long as the electrical connection between the control device 55 and the energy storage device 54 can be ensured, for example, the control device 55 can be connected with the energy storage device 54 through a wire.
[0043] The embodiment does not limit the specific connection mode of the control device 55 and the power supply 56, as long as the electrical connection between the control device 55 and the power supply 56 can be ensured, for example, the control device 55 can be connected with the power supply 56 through a wire.
[0044] The embodiment does not limit the specific type of the energy storage device 54, as long as the electrical energy generated by cutting the magnetic induction line can be stored, for example, the energy storage device 54 can be a battery 54. When the battery 54 is connected, the positive and negative poles of the battery 54 need to be connected respectively to form a closed loop.
[0045] The embodiment does not limit the specific type of the power supply 56, as long as the electrical device can be powered, for example, the power supply 56 can be an AC power supply with two USB-C interfaces (referred to as C2C AC power supply 56).
[0046] Based on the above embodiment, compared with the traditional MOCVD device, the utility model adds a power generation device and an energy storage device; the power generation device includes a magnetic assembly and a closed coil; the magnetic assembly forms a closed magnetic induction line; the closed coil is formed by winding wires connected with the driving device at both ends, and the closed coil cuts the magnetic induction line during rotation with the driving device. The electrical energy generated by cutting the magnetic induction line is stored in the energy storage device, the energy storage device is connected with the electrical device in the MOCVD device, and the electrical device can be powered, so as to better cope with the risk of power failure and the like; meanwhile, energy can be saved and cost can be reduced.
[0047] In order to make the utility model more convenient for understanding, the working principle of the MOCVD equipment provided by the utility model embodiment will be described in detail below in combination with specific examples.
[0048] The MOCVD equipment of the embodiment adopts the tray and the supporting device shown in Figure 1 .
[0049] The tray 1 is a planetary tray 1; the planetary tray 1 comprises a first tray and at least two second trays inside the first tray; the size of the first tray is larger than that of the second tray;
[0050] The supporting device comprises a supporting platform 31 for supporting the tray 1, four supporting columns 32 for supporting the supporting platform 31 and a base 33 for supporting the supporting columns 32; the supporting platform 31 and the base 33 are both rectangular, and the four supporting columns 32 are respectively located at the four top corners of the base 33.
[0051] The MOCVD equipment of the embodiment adopts the driving device 2, the power generation device, the energy storage device 54, the power supply 56 and the control device 55 shown in Figure 2 ; the power generation device is connected with the energy storage device 54 through wires; the energy storage device 54 is connected with the power-consuming devices in the MOCVD equipment (not shown in the figure); the power supply 56 is connected with the power-consuming devices in the MOCVD equipment (not shown in the figure); the control device 55 is connected with the energy storage device 54 through wires, and the control device 55 is connected with the power supply 56 through wires; when the control device 55 detects that the link formed by the connection of the power supply 56 and the power-consuming devices is disconnected, the control device 55 controls the link formed by the connection of the energy storage device 54 and the power-consuming devices to be connected.
[0052] The driving device 2 is a motor 2; one end of the motor 2 is connected with the tray, and the other end of the motor 2 is connected with both ends of the wires; the tray 1 and the closed coil 53 rotate together with the motor 2;
[0053] The power generation device comprises a magnetic assembly, a closed coil 53, a first slip ring 51 and a second slip ring 52; the magnetic assembly comprises first and second electrodes 41 and 42 with opposite polarities; the first and second electrodes 41 and 42 are symmetrically arranged with the closed coil 53 as the center; the first and second electrodes 41 and 42 are respectively arranged on the two supporting columns 32 located on the diagonal lines of the base 33; the magnetic assembly forms a closed magnetic induction line; the closed coil 53 is wound in a rectangle shape by the wires connected with the motor 2 at both ends, and the closed coil 53 cuts the magnetic induction line during the rotation together with the motor 2; the first slip ring 51 is fixedly connected with one end of the wire, the second slip ring 52 is fixedly connected with the other end of the wire, and the first and second slip rings 51 and 52 are both embedded on the motor 2; the first and second slip rings 51 and 52 rotate together with the motor 2; the first slip ring 51 is connected with the negative electrode of the battery 54 through wires; the second slip ring 52 is connected with the positive electrode of the battery 54 through wires;
[0054] The energy storage device 54 is a battery 54; the power source 56 is a C2C AC power source 56.
[0055] Using the MOCVD equipment provided in this embodiment, the rotation of the motor 2 after being powered on drives the closed coil 53 to cut the magnetic field lines in the first electrode 41 and the second electrode 42 to generate electrical energy, which is stored in the battery 54. The battery 54 is connected to the electrical device in the MOCVD equipment and can be used to cope with emergencies such as power outages. When no power outages or other special circumstances occur, the electrical device is powered by the C2C AC power supply 56; in the event of a power outage or other special circumstances, the battery 54 supplies power to the electrical device through a conductive link formed by its connection to the electrical device. This also saves energy and reduces costs.
[0056] The above provides a detailed description of the MOCVD equipment provided by this utility model. For those skilled in the art, based on the ideas of the embodiments of this utility model, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this utility model.
Claims
1. A MOCVD apparatus, characterized by, The utility model relates to a kind of MOCVD equipment, including: Tray for placing substrate, driving device for driving the rotation of the tray, power generation device and energy storage device; The power generation device and the energy storage device are connected;The power generation device includes magnetic assembly and closed coil;The magnetic assembly forms closed magnetic induction line;The closed coil is formed by winding wire, both ends of which are connected with the driving device, and the closed coil cuts the magnetic induction line during rotation with the driving device; The energy storage device and the power device in the MOCVD equipment are connected.
2. The MOCVD apparatus according to claim 1, wherein, The driving device is a motor;One end of the motor is connected with the tray, and the other end of the motor is connected with both ends of the wire;The tray and the closed coil rotate with the motor.
3. The MOCVD apparatus according to claim 2, wherein, The power generation device further includes a first slip ring and a second slip ring;The first slip ring is fixedly connected with one end of the wire, and the second slip ring is fixedly connected with the other end of the wire, and the first slip ring and the second slip ring are both nested on the motor;The first slip ring and the second slip ring rotate with the motor.
4. The MOCVD apparatus according to claim 1, wherein, The magnetic assembly includes a first electrode and a second electrode with opposite polarities;The first electrode and the second electrode are symmetrically arranged with the closed coil as the center.
5. The MOCVD apparatus according to claim 4, wherein Further comprising: Supporting device for supporting the tray;The first electrode and the second electrode are arranged on the supporting device.
6. The MOCVD apparatus according to claim 5, wherein, The supporting device includes a supporting platform for supporting the tray, four supporting columns for supporting the supporting platform, and a base for supporting the supporting columns;The supporting platform and the base are both rectangular, and the four supporting columns are respectively located at the four corners of the base, and the first electrode and the second electrode are respectively arranged on two supporting columns located on the diagonal line of the base.
7. The MOCVD apparatus according to claim 1, wherein Further comprising: Housing, the housing is provided with a through hole;The power device is located in the interior of the housing; The energy storage device is located outside the housing and is connected with the power device through the wire passing through the through hole.
8. The MOCVD apparatus of claim 1, wherein, The closed coil is circular, semicircular or rectangular in shape and is wound by the wire, both ends of which are connected with the driving device.
9. The MOCVD apparatus according to any one of claims 1 to 8, characterized in that, Further comprising: Power supply and control device; The power supply is connected with the power device in the MOCVD equipment; The control device is connected with the power supply, the energy storage device;When the control device detects that the link formed by the connection of the power supply and the power device is disconnected, the control device controls the link formed by the connection of the energy storage device and the power device to be connected.
10. The MOCVD apparatus of claim 9, wherein, The energy storage device is a battery;And / or, the power supply is an AC power supply with two USB-C interfaces.