Piezoelectric driving galvanometer

Abstract

The utility model discloses a piezoelectric driving galvanometer. Comprising a reflecting mirror, a plurality of groups of beams fixedly connected with the reflecting mirror and a plurality of groups of piezoelectric blocks with the same group number as the beams, and the piezoelectric blocks are fixedly connected with the beams and are arranged corresponding to the beams up and down; the piezoelectric blocks and the beams are arranged in the circumferential direction with the reflector as the center, and when the piezoelectric blocks are subjected to external excitation, the beams deform so as to drive the reflector to turn over in different axial directions. According to the technical scheme, the problems that in the prior art, an electrostatic comb tooth driving MEMS scanning mirror cannot resist impact and vibration in practical application, and the caliber is small can be solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of micro light machine (MEMS), especially to a piezoelectric drive galvanometer. BACKGROUND

[0002] MEMS scanning mirror has great application value in the fields of laser radar, projection display, optical coherence tomography and optical communication due to its small volume, low driving power consumption, fast response speed, high scanning frequency and long service life. Electrostatic comb drive has become the mainstream MEMS scanning mirror driving mode due to its good process compatibility, small chip size, high reliability and low processing cost. However, most of the current electrostatic comb drive MEMS scanning mirrors cannot resist impact and vibration in actual application, and have the problem of small aperture. SUMMARY

[0003] The utility model discloses a piezoelectric drive galvanometer to solve the problem that the electrostatic comb drive MEMS scanning mirror cannot resist impact and vibration in actual application and has a small aperture in the prior art.

[0004] To solve the above technical problems, the utility model provides the following technical scheme:

[0005] A piezoelectric drive galvanometer comprises a mirror, a plurality of groups of beams in tight connection with the mirror, and a plurality of groups of piezoelectric blocks equal in number to the groups of beams, wherein the piezoelectric blocks are in tight connection with the beams and are arranged in correspondence with the beams above and below.

[0006] The piezoelectric blocks and the beams are arranged in a circle with the mirror as the center, and when the piezoelectric blocks are subjected to external excitation, the deformation of the beams causes the mirror to flip in different axial directions.

[0007] Specifically, the beam comprises a piezoelectric fixed part in tight connection with the piezoelectric block, a connecting part and a first supporting part arranged between the piezoelectric fixed parts, a deformation part, and a second supporting part; the first supporting part is arranged between the connecting part and the deformation part, the deformation part is provided with a hollow groove, and the two ends are connected with the first supporting part and the second supporting part respectively.

[0008] Preferably, the beam is of an integrated structure and is provided with four groups.

[0009] Preferably, the piezoelectric blocks are provided with four groups, each group comprises two piezoelectric blocks, the four groups of piezoelectric blocks are symmetrically distributed above, below, left and right with the mirror as the center, and a gap is left between each group of piezoelectric blocks and corresponds to each other.

[0010] Preferably, the piezoelectric blocks are provided with four groups, each group comprises one piezoelectric block, the four piezoelectric blocks are symmetrically distributed above, below, left and right with the mirror as the center, and a groove is arranged in the middle of each piezoelectric block and corresponds to each other.

[0011] Preferably, the width of the first support part is smaller than the gap width between each group of piezoelectric blocks, and the height of the piezoelectric fixing part in the Z-axis direction is higher than that of the connecting part, and the piezoelectric fixing part is coplanar with the side of the connecting part away from the piezoelectric block.

[0012] Specifically, at least one pair of opposite deformation parts are deformed in opposite directions along the Z-axis to control the mirror to flip along the X and Y axes.

[0013] Specifically, the mirror includes a mirror surface, the back of the mirror surface is provided with a reinforcing rib, and the center of the back of the mirror surface is provided with a beam connecting part for fastening connection with the beam.

[0014] Specifically, the beam further includes a mirror fixing part fastening connected with the second support part and the beam connecting part.

[0015] Preferably, the piezoelectric block is a ceramic block.

[0016] Compared with the prior art, the piezoelectric drive galvanometer provided by the utility model forms a piston type structure through the effective cooperation of the deformation part, the support part and the gap between each group of piezoelectric blocks on the beam, can realize large-angle flipping of the mirror when the piezoelectric driving force is large, can be matched with different mirror surface sizes, realizes large rotation angle and high resonance frequency, and at the same time, the reinforcing rib arranged on the back of the mirror surface can significantly reduce the dynamic deformation amount of the mirror while almost not increasing the weight of the mirror. The structure can reduce the impact and vibration of the galvanometer in actual application and solve the problem of small aperture. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 Fig. 1 is a structural schematic view of the piezoelectric drive galvanometer of the utility model;

[0018] Figure 2 Fig. 2 is a structural top view of the piezoelectric drive galvanometer of the utility model;

[0019] Figure 3 Fig. 3 is a structural bottom view of the piezoelectric drive galvanometer of the utility model;

[0020] Figure 4 Fig. 4 is a structural schematic view of the connecting surface between the mirror and the beam of the piezoelectric drive galvanometer of the utility model;

[0021] Figure 5 Fig. 5 is a structural schematic view of the piezoelectric block of the piezoelectric drive galvanometer of the utility model;

[0022] Figure 6 Fig. 6 is a structural schematic view of the beam of the piezoelectric drive galvanometer of the utility model;

[0023] Figure 7 Fig. 7 is a schematic view of the working principle of the piezoelectric drive galvanometer of the utility model.

[0024] In the figure, 1, reflector, 2, beam, 3, piezoelectric block, 4, reinforcing rib, 5, beam connecting part, 6, piezoelectric fixing part, 7, connecting part, 8, first supporting part, 9, deformation part, 10, second supporting part, 11, reflector fixing part. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. As long as the effects of the present application can be achieved, various changes can be made to the embodiments, and these embodiments are provided so that the present application can be more thoroughly understood and the scope of the present application can be completely conveyed to those skilled in the art.

[0026] Referring to Figures 1-7 A piezoelectric driving galvanometer of the present embodiment is further described.

[0027] Figure 1 An embodiment of the piezoelectric driving galvanometer of the present application is shown, which includes a reflector 1, a beam 2 and a piezoelectric block 3. The reflector 1 is tightly connected with the beam 2, and the beam 2 is tightly connected with the piezoelectric block 3.

[0028] As shown in Figure 2 , 4 , the reflector 1 includes a mirror surface, the back of the mirror surface is provided with a reinforcing rib 4, which can significantly reduce the dynamic deformation of the reflector 1 without increasing the weight of the reflector 1, thereby ensuring the strength of the reflector 1; and the center point of the back of the mirror surface is provided with an outwardly protruding beam connecting part 5 for tightly connecting with the beam 2.

[0029] As shown in Figure 3 , 5 , the piezoelectric block 3 is provided with four groups, each group being two piezoelectric blocks 3, the four groups of piezoelectric blocks 3 are arranged symmetrically above, below, left and right with the reflector 1 as the center; a gap is left between the two piezoelectric blocks 3, and the gaps left between the opposite two groups of piezoelectric blocks 3 correspond to each other. Alternatively, the piezoelectric block 3 can also be provided with four groups, each group being an integral piezoelectric block 3, the four piezoelectric blocks 3 are arranged symmetrically above, below, left and right with the reflector as the center; each piezoelectric block 3 is provided with a groove in the middle and corresponding to each other.

[0030] Preferably, the piezoelectric block 3 is made of ceramic block.

[0031] As shown in Figure 6As shown, the beam 2 is sequentially provided with piezoelectric fixing parts 6, connecting parts 7, first supporting parts 8, deformation parts 9 and second supporting parts 10 from the outer edge to the central position, the piezoelectric fixing parts 6 are fixedly connected with the piezoelectric blocks 3, the connecting parts 7 are arranged between the piezoelectric fixing parts 6, the first supporting parts 8 are arranged between the connecting parts 7 and the deformation parts 9, and the deformation parts 9 are respectively connected with the first supporting parts 8 and the second supporting parts 10 at both ends.

[0032] Preferably, the beam 2 is an integral structure, and four groups are arranged, each group corresponding to the piezoelectric block 3 at the lower part.

[0033] Preferably, the piezoelectric blocks 3 and the beam 2 are provided in an even number of groups.

[0034] Specifically, the width of the first supporting part 8 is smaller than the gap width between each group of piezoelectric blocks 3, the height of the piezoelectric fixing part 6 on the side close to the piezoelectric block 3 in the Z-axis direction is higher than that of the connecting part 7, and the hollowed-out groove is arranged between the deformation parts 9, so that the beam 3 can rapidly deform and restore to the original state under the condition of reducing impact and vibration when receiving external excitation, and the large-angle flipping of the mirror 1 can be realized when the piezoelectric driving force is large.

[0035] Preferably, the piezoelectric fixing part 6 and the connecting part 7 are coplanar on the side away from the piezoelectric block 3, and the outer edge of the piezoelectric fixing part 6 is flush with the outer edge of the piezoelectric block 3; the outer edge of the mirror 1 is flush with the side of the hollowed-out groove of the deformation part 9 close to the first supporting part 8.

[0036] In addition, the beam 2 further comprises a mirror fixing part 11, which is tightly connected with the four second supporting parts 10 and the five beam connecting parts.

[0037] When the piezoelectric block 3 in the X-axis direction receives external excitation, the deformation part 9 of the beam 2 is transmitted through the piezoelectric fixing part 6, the connecting part 7 and the first supporting part 8, high resonance frequency is generated, the deformation parts 9 in the X-axis direction relatively generate deformation in the opposite direction along the Z-axis, thereby controlling the large-angle flipping of the mirror 1 along the X-axis.

[0038] When the piezoelectric block 3 in the Y-axis direction receives external excitation, the deformation part 9 of the beam 2 is transmitted through the piezoelectric fixing part 6, the connecting part 7 and the first supporting part 8, high resonance frequency is generated, the deformation parts 9 in the Y-axis direction relatively generate deformation in the opposite direction along the Z-axis, thereby controlling the large-angle flipping of the mirror 1 along the Y-axis.

[0039] When the piezoelectric blocks 3 in the X-axis and Y-axis directions both receive external excitation, the deformation part 9 of the beam 2 is transmitted through the piezoelectric fixing part 6, the connecting part 7 and the first supporting part 8, high resonance frequency is generated, the deformation parts 9 in the X-axis and Y-axis directions relatively generate deformation in the opposite direction along the Z-axis, thereby controlling the large-angle flipping of the mirror 1 along the X-axis and Y-axis.

[0040] In the embodiment, the deformation part 9 can be a flexible deformable structure, a flexible bending beam, a flexible conductive material, etc., and any structure or material capable of shape change can be used, and is not limited to the above-mentioned forms; in addition, the embodiment can realize large rotation angles and high resonance frequencies for different mirror sizes, and is not limited to large mirrors, and small mirrors can also be implemented.

[0041] The above describes the embodiments of the present application, and those skilled in the art can understand that various changes, modifications, replacements and deformations can be made to the embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A piezoelectrically driven galvanometer comprising: The mirror (1), a plurality of groups of beams (2) and a plurality of groups of piezoelectric blocks (3) are provided, the piezoelectric blocks (3) are in fastening connection with the beams (2) and are arranged correspondingly with the beams (2); The piezoelectric blocks (3) and the beams (2) are arranged in a circle with the mirror (1) as the center, when the piezoelectric blocks (3) are excited, the beams (2) are deformed to drive the mirror (1) to rotate in different axes.

2. The piezoelectrically driven galvanometer according to claim 1, wherein The beam (2) comprises a piezoelectric fixed part (6) in fastening connection with the piezoelectric block (3), a connecting part (7) and a first supporting part (8) arranged between the piezoelectric fixed parts (6), a deformation part (9) and a second supporting part (10); the first supporting part (8) is arranged between the connecting part (7) and the deformation part (9), the deformation part (9) is provided with a hollow slot, and the two ends are connected with the first supporting part (8) and the second supporting part (10) respectively.

3. The piezoelectrically driven galvanometer of claim 2, wherein The beam (2) is an integral structure, and four groups are provided.

4. The piezoelectrically driven galvanometer of claim 1, wherein The piezoelectric block (3) is provided with four groups, each group is two piezoelectric blocks (3), and the four groups of piezoelectric blocks (3) are symmetrically distributed above, below, left and right with the mirror (1) as the center, and a gap is left between each group of piezoelectric blocks (3) and correspondingly.

5. The piezoelectrically driven galvanometer of claim 1, wherein The piezoelectric block (3) is provided with four groups, each group is one piezoelectric block (3), and the four piezoelectric blocks (3) are symmetrically distributed above, below, left and right with the mirror (1) as the center, and a groove is arranged in the middle of each piezoelectric block (3) and correspondingly.

6. The piezoelectrically driven galvanometer of claim 2, wherein The width of the first supporting part (8) is smaller than the gap width between each group of piezoelectric blocks (3), the height of the piezoelectric fixed part (6) in the Z-axis direction is higher than that of the connecting part, and the piezoelectric fixed part (6) and the connecting part (7) are coplanar on the side away from the piezoelectric block (3).

7. The piezoelectrically driven galvanometer of claim 6, wherein At least one pair of opposite deformation parts (9) are deformed in opposite directions along the Z-axis to control the mirror (1) to rotate along the X and Y axes.

8. The piezoelectrically driven galvanometer of claim 2, wherein The mirror (1) comprises a mirror surface, a reinforcing rib (4) is arranged on the back of the mirror surface, and a beam connecting part (5) is arranged at the center of the back of the mirror surface and is in fastening connection with the beam (2).

9. The piezoelectrically driven galvanometer of claim 8, wherein The beam (2) further comprises a mirror fixed part (11) in fastening connection with the second supporting part (10) and the beam connecting part (5).

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