Wafer expanding ring structure capable of easily and quickly identifying assembly error direction

Abstract

According to the wafer expanding ring structure capable of easily and rapidly identifying the assembly error direction, the first positioning identifier and the second positioning identifier which are opposite, and the first orientation identifier and the second orientation identifier are arranged on the outer ring and the inner ring, so that an assembler at a production end is helped to rapidly judge and confirm the assembly direction, the assembly error is avoided, and the production efficiency is improved. And the wrong direction judgment efficiency and the assembly efficiency and accuracy of the client can be improved at the same time.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of expansion wafer ring structure, especially an expansion wafer ring structure easy to quickly identify and assemble wrong direction. BACKGROUND

[0002] As a kind of wafer carrying tool, expansion wafer ring structure (also known as expansion ring) is widely used in semiconductor manufacturing process, for supporting wafer and performing electrical performance test on carrier stage. Traditional expansion wafer ring design usually includes two concentric circular plastic rings, i.e. inner ring and outer ring, which are connected by a specific way to adapt to different sizes of wafers.

[0003] In practical application, the working principle of expansion wafer ring is to fix the inner ring and outer ring together first, and then use mechanical force to uniformly stretch the protective film, i.e. blue film, covering on the wafer by the gap formed between the outer ring and inner ring. This stretching action not only helps to increase the spacing between wafers, but also facilitates subsequent processing, such as detection, cutting, etc.

[0004] However, the existing expansion wafer ring design has certain limitations. In order to ensure that the blue film can be smoothly and uniformly stretched, manufacturers add special auxiliary structures to the design of inner ring and outer ring, and specify the clear assembly direction. If the inner and outer rings are not assembled according to the specified direction, the blue film may be torn or damaged due to local stress concentration, which will affect the quality of wafers and production efficiency.

[0005] In addition, the existing expansion wafer ring generally completes the opening process of the blue film on the machine. The outer ring and inner ring when coming in are pre-assembled by manual at the production end, and then are split according to the existing direction at the corresponding machine at the customer end. Then, they are placed in the corresponding position of the machine, and finally the automatic assembly of the outer ring, blue film and inner ring is realized by the machine to realize the automatic expansion operation of the wafer.

[0006] Therefore, if the workers assemble the outer ring and inner ring in the wrong direction at the manual pre-assembly stage at the production end, the orientation verification and correction still need to be performed before the subsequent automatic expansion operation at the customer end, which not only wastes time and effort, but also easily leads to the phenomenon of blue film rupture and damage due to excessive tension.

[0007] Therefore, the present application is designed to provide an expansion wafer ring structure easy to quickly identify and assemble wrong direction. Utility model content

[0008] In order to solve the above problems, the technical scheme of the utility model is as follows:

[0009] An expansion ring structure capable of quickly identifying the assembly direction, comprising an outer ring and an inner ring buckled to the inner side surface of the outer ring, a gap between the outer ring and the inner ring for fixing the soft membrane of the expansion ring, wherein:

[0010] The two side surfaces of the outer ring along the axial direction are a front surface and a back surface respectively, a first guide arc surface is formed between the inner side surface of the outer ring and the front surface, a first step surface in the shape of a right angle is formed between the inner side surface of the outer ring and the back surface, and a positioning protrusion in the shape of an arc is formed on the inner side surface of the outer ring between the first guide arc surface and the first step surface.

[0011] The two side surfaces of the inner ring along the axial direction are a front surface and a back surface respectively, a second step surface in the shape of a right angle is formed between the outer side surface of the inner ring and the front surface, a second guide arc surface is formed between the outer side surface of the inner ring and the back surface, and a positioning recess in the shape of an arc is formed on the outer side surface of the inner ring between the second guide arc surface and the second step surface.

[0012] The back surface around the center of the outer ring is provided with a plurality of first positioning marks, and the front surface around the center of the inner ring is provided with a plurality of second positioning marks.

[0013] The outer side surface of the outer ring is provided with at least one first directional mark, and the inner side surface of the inner ring is provided with at least one second directional mark, the first directional mark and the second directional mark are used to indicate the assembly direction of the outer ring or the inner ring.

[0014] Preferably, the first positioning mark is a circular groove recessed inwardly along the back surface, and the second positioning mark is a circular groove recessed inwardly along the front surface.

[0015] Preferably, the first positioning mark and the second positioning mark are both provided with four and are uniformly distributed around the center of the outer ring and the inner ring respectively.

[0016] Preferably, the first positioning mark and the second positioning mark both include a directional recess and a positioning mark.

[0017] Preferably, the positioning mark is a protruding structure with a directional structure, the positioning mark protrudes outwardly along the inner bottom of the directional recess, and the two positioning marks point to the front surface along the back surface and to the back surface along the front surface respectively to prompt the assembly direction.

[0018] Preferably, the positioning mark is a triangular protrusion or an arrow-shaped protrusion, and the directional structure is the tip of the triangular protrusion or the arrow of the arrow-shaped protrusion.

[0019] Preferably, the sidewalls of the two directional recesses respectively extend to the back surface of the outer ring and the front surface of the inner ring.

[0020] Preferably, the positioning protrusion and the first step surface form a first annular surface, the positioning protrusion and the first guide arc surface form a second annular surface, the positioning recess and the second step surface form a third annular surface, the positioning recess and the second guide arc surface form a fourth annular surface, the inner diameter of the first annular surface is smaller than the second annular surface so that it protrudes from the second annular surface, the outer diameter of the third annular surface is larger than the fourth annular surface so that it protrudes from the fourth annular surface, and when the positioning protrusion and the positioning recess are buckled, the first annular surface and the fourth annular surface and the second annular surface and the third annular surface are parallel and fit.

[0021] The beneficial effects of the utility model are as follows:

[0022] The utility model discloses a first positioning mark and a second positioning mark are set reversely, and the assembly process of the expansion crystal ring at the production end is prompted and the assembly result is quickly verified at the client side. When the assembly operator of the client side sees the first positioning mark and the second positioning mark simultaneously, it shows that the assembly direction is wrong. Only when the assembler of the client side sees only one mark, it is the correct assembly situation.

[0023] In addition, considering that the assembler can hold only the outer ring or the inner ring at a time during the manual pre-assembly process at the production end, and the outer side annular surface of the outer ring or the inner side annular surface of the inner ring is more easily noticed during assembly. Therefore, the utility model discloses that the first directional mark and the second directional mark are arranged on the outer side annular surface of the outer ring and the inner side annular surface of the inner ring respectively. These marks can help the assembler to quickly determine the assembly direction, ensure that the buckle assembly of the outer ring and the inner ring is carried out through the correct direction, thereby saving the time of repeatedly confirming the assembly direction, and making the subsequent automatic assembly process at the client side more smooth. BRIEF DESCRIPTION OF DRAWINGS

[0024] The drawings described herein are used to provide further understanding of the utility model and constitute a part of the utility model. The illustrative embodiments of the utility model and the description thereof are used to explain the utility model, and do not constitute improper limitation on the utility model.

[0025] Among them:

[0026] Figure 1 It is the overall structure schematic view of the utility model;

[0027] Figure 2 It is the three-dimensional structure schematic view of the utility model;

[0028] Figure 3 It is the overhead structure schematic view of the utility model;

[0029] Figure 4 It is Figure 3 A-A section structure schematic view in it;

[0030] Figure 5 is Figure 4 is a partial enlarged structural schematic view of the B area in the middle;

[0031] Figure 6 is Figure 4 is a partial enlarged structural schematic view of the C area in the middle;

[0032] Figure 7 is a partial sectional structural schematic view of the inner ring and the outer ring in the embodiment;

[0033] Figure 8 is a partial structural schematic view of the outer ring and the first positioning mark in the utility model;

[0034] Figure 9 is a partial structural schematic view of the inner ring and the second positioning mark in the utility model.

[0035] Label explanation:

[0036] 10, outer ring; 11, front surface; 12, back surface; 13, first guide curved surface; 14, first step surface; 15, positioning protrusion; 16, first annular surface; 17, second annular surface; 20, inner ring; 21, front surface; 22, back surface; 23, second step surface; 24, second guide curved surface; 25, positioning groove; 26, third annular surface; 27, fourth annular surface; 30, gap; 40, first positioning mark; 50, second positioning mark; 60, first directional mark; 61, directional groove; 62, positioning mark; 70, second directional mark. DETAILED DESCRIPTION

[0037] In order to make the technical problems, technical schemes and beneficial effects to be solved by the utility model more clear and explicit, the utility model is further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the utility model, and are not used to limit the utility model.

[0038] Please refer to Figures 1 to 9 , which is an easy-to-quickly-identify misassembled expansion ring structure, comprising two concentric circular plastic outer rings 10 and an inner ring 20, the inner ring 20 is buckled and connected to the inner annular surface of the outer ring 10, and the gap 30 for fixing the expansion soft film is formed between the outer ring 10 and the inner ring 20, wherein:

[0039] The outer ring 10 has a positive face 11 and a negative face 12 distributed along its axial direction, and a first guide arc face 13 and a first step face 14 are formed between the inner side of the outer ring 10 and the positive face 11 and the negative face 12 respectively, and a positioning protrusion 15 is formed in the middle of the inner side of the outer ring 10 between the first guide arc face 13 and the first step face 14;

[0040] The inner ring 20 has a positive face 21 and a negative face 22 distributed along its axial direction, and a second step face 23 and a second guide arc face 24 are formed between the outer side of the inner ring 20 and the positive face 21 and the negative face 22 respectively, and a positioning recess 25 is formed in the outer side of the inner ring 20 between the second guide arc face 24 and the second step face 23;

[0041] Specifically, the positioning protrusion 15 and the first step face 14 form a first ring face 16, the positioning protrusion 15 and the first guide arc face 13 form a second ring face 17, the positioning recess 25 and the second step face 23 form a third ring face 26, and the positioning recess 25 and the second guide arc face 24 form a fourth ring face 27, the inner diameter of the first ring face 16 is smaller than that of the second ring face 17 so that the first ring face 16 protrudes from the second ring face 17, the outer diameter of the third ring face 26 is larger than that of the fourth ring face 27 so that the third ring face 26 protrudes from the fourth ring face 27, and the first ring face 16 and the fourth ring face 27 and the second ring face 17 and the third ring face 26 are parallel when the positioning protrusion 15 and the positioning recess 25 are buckled.

[0042] The assembly process of the outer ring 10 and the inner ring 20 is as follows:

[0043] First, the inner ring 20 is placed on the side of the first guide arc face 13 of the outer ring 10, so that the second guide arc face 24 of the inner ring 20 faces the first guide arc face 13 of the outer ring 10, then the inner ring 20 is moved close to the outer ring 10 or the outer ring 10 is moved close to the inner ring 20, so that the inner ring 20 and the outer ring 10 move towards each other under the guidance of the first guide arc face 13 and the second guide arc face 24, when the inner ring 20 enters the inner side of the outer ring 10, the positioning recess 25 of the inner ring 20 is buckled into the positioning protrusion 15 of the outer ring 10, and the assembly process of the inner ring 20 and the outer ring 10 is completed.

[0044] The first annular surface 16 and the third annular surface 26 are arranged in a protruding manner, which can reduce the inner diameter of the outer ring 10 on the side of the first step surface 14 and expand the outer diameter of the inner ring 20 on the side of the second step surface 23, i.e. reduce the size of the gap on one side of the outer ring 10 and expand the ring diameter on one side of the inner ring 20, thereby increasing the resistance when the inner ring 20 or the outer ring 10 is clamped from the wrong direction, and reversely prompting the assembler that the current state is misassembled by increasing the resistance.

[0045] In addition, the reverse surface 12 is provided with a plurality of first positioning marks 40 around the center of the outer ring 10, and the forward surface 21 is provided with a plurality of second positioning marks 50 around the center of the inner ring 20.

[0046] In the embodiment, the first positioning mark 40 is a circular groove recessed inward along the reverse surface 12, and the second positioning mark 50 is a circular groove recessed inward along the forward surface 21. Alternatively, the first positioning mark 40 and the second positioning mark 50 can also be designed in other common shapes, such as triangular, quadrilateral, pentagonal or hexagonal grooves, without limitation, so that the assembler can conveniently and quickly position the first positioning mark 40 or the second positioning mark 50 to identify the correct assembly state.

[0047] Further, the first positioning mark 40 and the second positioning mark 50 are both provided with four and are uniformly distributed around the center of the outer ring 10 and the inner ring 20. By providing four uniformly distributed first positioning marks 40 and second positioning marks 50, the operator can quickly identify and position the orientation of the outer ring 10 or the inner ring 20, and quickly judge whether the assembly direction is correct.

[0048] Preferably, the outer side annular surface of the outer ring 10 is provided with at least one first directional mark 60, and the inner side annular surface of the inner ring 20 is provided with at least one second directional mark 70, which are used to indicate the assembly direction of the outer ring 10 or the inner ring 20. In the embodiment, the first directional mark 60 and the second directional mark 70 are each provided with one.

[0049] In the embodiment, the first positioning mark 40 and the second positioning mark 50 each include a directional groove 61 and a positioning mark 62. The positioning mark 62 is a protruding structure with a directional structure, which protrudes outward along the inner bottom of the directional groove 61, and the two positioning marks 62 point to the positive surface 11 along the reverse surface 12 and the reverse surface 22 along the forward surface 21, respectively, to prompt the assembly direction.

[0050] Preferably, the positioning mark 62 is a triangular protrusion or an arrow-shaped protrusion, and the directional structure is the tip of the triangular protrusion or the arrow of the arrow-shaped protrusion.

[0051] In this embodiment, the positioning marks 62 are triangular protrusions, and the tips of the two positioning marks 62 point from the reverse surface 12 to the front surface 11 and from the front surface 21 to the reverse surface 22 to indicate the assembly direction.

[0052] In the manual assembly process, the assembler can only hold the outer ring 10 or the inner ring 20 at a time, and it is easier to notice the outer side surface of the outer ring 10 or the inner side surface of the inner ring 20 during assembly. Therefore, the two positioning marks 62 are arranged on the outer side surface of the outer ring 10 and the inner side surface of the inner ring 20, respectively. These positioning marks can help the assembler to quickly determine the assembly direction by the tips of the triangular protrusions, thereby ensuring that the outer ring 10 and the inner ring 20 are assembled in the correct direction, saving time for repeatedly confirming the assembly direction, and making the subsequent automatic assembly process smoother.

[0053] Preferably, the side walls of the two directional grooves 61 respectively extend to the reverse surface 12 of the outer ring 10 and the front surface 21 of the inner ring 20.

[0054] Therefore, by extending the boundaries of the directional grooves 61 to the reverse surface 12 of the outer ring 10 and the front surface 21 of the inner ring 20, the operator can more quickly find the position of the directional grooves 61 when observing the surface of the outer ring 10 or the inner ring 20, without needing to specially observe from the side, and quickly determine the assembly direction of the outer ring 10 or the inner ring 20 by the positioning marks 62 in the directional grooves 61, thereby facilitating subsequent assembly operations.

[0055] The working process and beneficial effects of the utility model are as follows:

[0056] First, after production is completed by a production enterprise, an assembler at the production end takes out a pair of outer ring 10 and inner ring 20, quickly determines the front and reverse directions of the outer ring 10 and the inner ring 20 through the first positioning mark 40 or the second positioning mark 50 on the outer ring 10 and the inner ring 20, quickly identifies the position of the positioning mark 62 through the boundaries of the directional groove 61, and quickly judges the assembly direction of the outer ring 10 and the inner ring 20 through the positioning mark 62.

[0057] Subsequently, the outer ring 10 or the inner ring 20 with the positioning mark 62 pointing downward is taken out alone, and is pressed downward according to the pointing direction of the positioning mark 62, so that the outer ring 10 is buckled into the outer side of the inner ring 20 or the inner ring 20 is buckled into the inner side of the outer ring 10, and the quick assembly process of the inner ring 20 and the outer ring 10 is completed.

[0058] In addition, when the utility model is sold to customers, an assembler at the customer end can quickly judge whether the wafer expanding ring structure is misassembled by identifying whether the first positioning mark 40 and the second positioning mark 50 appear at the same time during the automatic assembly of the outer ring 10, the blue film, and the inner ring 20, thereby facilitating subsequent automatic wafer expanding operations.

[0059] Thus, the first positioning mark 40 and the second positioning mark 50 are reversely arranged to prompt the assembly process of the expansion crystal ring at the production end and to assist the client in quickly verifying the assembly result. When the assembly operator of the client simultaneously sees the first positioning mark and the second positioning mark, it indicates that the assembly direction is wrong. Only when the assembly operator of the client sees only one of the marks, is the assembly correct.

[0060] In addition, considering that the assembly operator can only hold the outer ring or the inner ring at a time during the manual pre-assembly process at the production end, and it is easier to notice the outer side ring surface of the outer ring or the inner side ring surface of the inner ring during assembly, the first directional mark and the second directional mark are arranged on the outer side ring surface of the outer ring and the inner side ring surface of the inner ring, respectively. These marks can help the assembly operator quickly determine the assembly direction, ensure that the buckle assembly of the outer ring and the inner ring is performed in the correct direction, thereby saving the time for repeatedly confirming the assembly direction, and making the subsequent automatic assembly process at the client more smooth.

[0061] The utility model has been described above in conjunction with the drawings, and obviously, the specific implementation of the utility model is not limited by the above mode, as long as various non-essential improvements are adopted by using the method concept and the technical scheme of the utility model, or the concept and the technical scheme of the utility model are directly applied to other occasions without improvement, and all fall within the protection scope of the utility model.

Claims

1. A structure of a spread crystal ring, which is easy to quickly identify an assembly misorientation, characterized in that, The outer ring (10) and the inner ring (20) are connected by a buckle, and the gap (30) for fixing the expanded soft membrane is formed between the outer ring (10) and the inner ring (20). The inner side surface of the outer ring (10) and the front surface (11) form a first guide arc surface (13), and the inner side surface of the outer ring (10) and the back surface (12) form a first step surface (14) in the shape of a right angle. The outer side surface of the inner ring (20) and the front surface (21) form a second step surface (23) in the shape of a right angle, and the outer side surface of the inner ring (20) and the back surface (22) form a second guide arc surface (24). The back surface (12) is provided with a plurality of first positioning marks (40) around the center of the outer ring (10), and the front surface (21) is provided with a plurality of second positioning marks (50) around the center of the inner ring (20). The outer side surface of the outer ring (10) is provided with at least one first directional mark (60), and the inner side surface of the inner ring (20) is provided with at least one second directional mark (70), which are used to indicate the assembly direction of the outer ring (10) or the inner ring (20).

2. The expanded ring structure of claim 1, wherein, The first positioning mark (40) is a groove recessed inwardly along the back surface (12), and the second positioning mark (50) is a groove recessed inwardly along the front surface (21).

3. The expanded ring structure of claim 2, wherein, The first positioning mark (40) and the second positioning mark (50) are each provided with four and are uniformly distributed around the center of the outer ring (10) and the inner ring (20).

4. The expanded ring structure of claim 1, wherein, The first positioning mark (40) and the second positioning mark (50) each include a directional groove (61) and a positioning mark (62).

5. The expanded ring structure of claim 4, wherein, The positioning mark (62) is a protruding structure with a directional structure, which protrudes outwardly along the inner bottom of the directional groove (61), and the two positioning marks (62) point to the front surface (11) along the back surface (12) and the back surface (22) along the front surface (21) to indicate the assembly direction.

6. The expanded ring structure of claim 5, wherein, The positioning mark (62) is a triangular protrusion or an arrow-shaped protrusion, and the directional structure is the tip of the triangular protrusion or the arrow of the arrow-shaped protrusion.

7. The expanded ring structure of claim 4, wherein, The side walls of the two directional grooves (61) respectively penetrate the back surface (12) of the outer ring (10) and the front surface (21) of the inner ring (20).

8. The expanded ring structure of claim 1, wherein, The positioning protrusion (15) and the first step surface (14) form a first annular surface (16), the positioning protrusion (15) and the first guide arc surface (13) form a second annular surface (17), the positioning recess (25) and the second step surface (23) form a third annular surface (26), the positioning recess (25) and the second guide arc surface (24) form a fourth annular surface (27), the inner diameter of the first annular surface (16) is smaller than the second annular surface (17) so that it protrudes from the second annular surface (17), the outer diameter of the third annular surface (26) is larger than the fourth annular surface (27) so that it protrudes from the fourth annular surface (27), when the positioning protrusion (15) and the positioning recess (25) are snap-fitted, the first annular surface (16) and the fourth annular surface (27) and the second annular surface (17) and the third annular surface (26) are parallelly attached.

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