Particulate matter suppressor and inverted robot
By designing an annular dust collection component and a dust collection tray structure in the flip-chip wafer transport mechanism, the particulate matter contamination problem of the flip-chip wafer transport mechanism was solved, achieving effective suppression of particulate matter and improvement of cleanliness.
Patent Information
- Application Number
- CN202422967445.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-03
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-12-03
AI Technical Summary
The flip-chip wafer transport mechanism lacks an effective method for suppressing particulate matter, resulting in particulate matter contamination of the wafer, and existing technologies cannot meet the cleanliness requirements.
A ring-shaped dust collection device structure was designed, including a base, a sealing plate, and a negative pressure generating device. A negative pressure zone is formed through the dust collection groove, dust collection port, and air pipe interface to suck up particulate matter generated by the lifting device. The dust collection tray further blocks the escaping particulate matter to ensure that the particulate matter does not fall onto the wafer.
It effectively suppressed particulate matter contamination, improved the cleanliness during wafer transport, and met the cleanliness requirements of flip-chip wafer transport mechanisms.
Smart Images
Figure CN223527136U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to semiconductor wafer transmission technical field especially for flip type wafer transmission mechanism's particulate matter suppressor and flip type robot. BACKGROUND
[0002] With the rapid development of the semiconductor industry, the domestic IC industry and other industries demand for the diversity of semiconductor equipment functions is multiplied, such as the compact structure, small layout, easy maintenance and other needs of the CMP, cleaning machine and other process equipment applied in this field, which requires the use of flip type wafer transmission mechanism.
[0003] However, compared with the traditional vertical type wafer transmission mechanism (such as Figure 1 The positive type robot shown in the figure) can use fan exhaust or special structure layout method to discharge the internal particulate matter from the robot body to improve the cleanliness, while the flip type robot has no better way to achieve particulate suppression.
[0004] This is because if the direct use of the positive type robot structure is used for flip, the arm carrying the wafer will be on the underside of the robot body, and the fan of the positive structure is generally arranged at the bottom of the robot body, while the flip will be located at the top of the robot body, at this time the particulate matter discharged by the fan will fall on the wafer again due to the action of gravity, causing pollution to the wafer.
[0005] Therefore, the traditional method of adding a fan cannot achieve good particulate suppression effect for the flip robot. UTILITY MODEL CONTENTS
[0006] Therefore, the main purpose of the utility model is to provide a particulate matter suppressor and a flip type robot to solve the problem of particulate matter suppression of the flip type wafer transmission mechanism.
[0007] In order to achieve the above purpose, according to one aspect of the utility model, a particulate matter suppressor is provided, which is suitable for being matched with the fixing seat of the flip type wafer transmission mechanism, which comprises: a negative pressure generating device, a dust suction member, wherein the dust suction member comprises: a base, a sealing plate, the base is annular, and a dust suction groove is arranged on the ring body of the base, a plurality of dust suction ports communicated with the dust suction groove are arranged on the inner ring surface of the base, a connecting seat is arranged on the outer ring surface, and a gas pipe interface communicated with the dust suction groove is arranged, the sealing plate covers the dust suction groove to define a dust suction cavity communicated with the dust suction port and the gas pipe interface, the negative pressure generating device is matched with the gas pipe interface through the air suction pipe to communicate the dust suction cavity, so that a negative pressure area is formed at the inner ring port of the base through the dust suction port.
[0008] Preferably, the base outer ring surface is provided with a plurality of air pipe interfaces in communication with the dust suction groove, at least one of which is connected with the air suction pipe, and the rest are detachably closed by sealing members.
[0009] Preferably, the dust suction member further comprises a quick connector, and the air pipe interface and the air suction pipe are connected by the quick connector.
[0010] In order to achieve the above-mentioned purpose, according to another aspect of the present application, a flip type robot is provided, which comprises a fixing frame, a lifting device, a mechanical arm, and further comprises the particle suppressor as claimed in any one of the above, wherein the bottom of the fixing frame is provided with a fixing seat, the fixing seat is provided with a lifting opening, the dust suction member is arranged at the lifting opening, and the base ring opening of the dust suction member is in communication with the lifting opening; the lifting device is arranged on the fixing frame, and when the lifting shaft of the lifting device reciprocates through the base ring opening at the lifting opening, the lifting shaft passes through the base ring opening, and the lifting shaft is close to the dust suction opening of the base; and the mechanical arm is connected with the end of the lifting shaft of the lifting device.
[0011] Preferably, the flip type robot further comprises a dust receiving disc, wherein the mechanical arm comprises a driver unit and an arm unit, the arm unit is drivingly connected with the driver unit, the dust receiving disc is annular, the outer ring of the dust receiving disc is provided with a dust blocking wall, and the dust receiving disc is sleeved on the outside of the driver unit through the inner ring opening of the dust receiving disc.
[0012] Preferably, the size of the disc surface of the dust receiving disc exceeds the fixing frame and the fixing seat thereof, so that the disc surface can at least receive the particles falling from the fixing frame and the lifting device.
[0013] Preferably, the inner ring opening of the dust receiving disc is provided with a sealing ring, and the dust receiving disc is sealingly sleeved with the driver unit through the sealing ring.
[0014] Preferably, the dust receiving disc comprises a pair of half-ring discs, the dust blocking wall is arranged at the outer arc surface of each half-ring disc, the connecting wall is arranged on the connecting portion at both ends of each half-ring disc, and the pair of half-ring discs are connected to form the dust receiving disc through the connecting wall.
[0015] Preferably, a sealing strip is filled in the connecting gap between the connecting walls of the pair of connected half-ring discs.
[0016] Preferably, the connecting wall is lower than the dust blocking wall.
[0017] The granule inhibitor and the inverted robot are characterized in that the annular dust suction member is sleeved on the lifting shaft of the lifting device, sucks the granules in the fixing frame and the granules generated during the operation of the lifting device, thereby avoiding the influence of gravity, following the lifting shaft, and overflowing and falling to the wafer through the lifting opening of the fixing base, thereby solving the problem of granule overflow during the inversion of the conventional upright robot, causing the pollution of the wafer, and achieving the granule inhibition effect and meeting the cleanliness requirement during the wafer transmission process.
[0018] In addition, in the corresponding preferred embodiment, by additionally arranging the dust receiving disc, the few heavy granules escaped from the dust suction member can be further compensated, thereby further improving the granule inhibition effect of the inverted robot and improving the cleanliness. BRIEF DESCRIPTION OF DRAWINGS
[0019] The accompanying drawings, which form a part of the present application, are intended to provide further understanding of the present application, and the illustrative embodiments of the present application and their description serve the purpose of explaining the present application. The present application is not limited by the accompanying drawings.
[0020] Figure 1 It is a structural schematic view of a conventional upright wafer transmission mechanism;
[0021] Figure 2 It is a structural schematic view of the dust suction member in the granule inhibitor of the present application;
[0022] Figure 3 It is a structural schematic view of the base in the granule inhibitor of the present application;
[0023] Figure 4 It is a structural schematic view of the inverted robot of the present application, wherein the fixing frame is partially cut open;
[0024] Figure 5 It is an assembly structural schematic view of the inverted robot of the present application, wherein the fixing frame is partially cut open;
[0025] Figure 6 It is an assembly structural schematic view of the dust suction member and the fixing base in the inverted robot of the present application;
[0026] Figure 7 It is a dust receiving disc structural schematic view in the inverted robot of the present application;
[0027] Figure 8 It is a structural schematic view of the inverted robot of the present application with the dust receiving disc.
[0028] BRIEF DESCRIPTION OF DRAWINGS
[0029] Dust suction device 1, fixing frame 2, lifting device 3, mechanical arm 4, dust receiving disc 5, wafer 9, base 11, sealing plate 12, dust suction groove 13, dust suction port 14, connecting seat 15, air pipe interface 16, air suction pipe 17, sealing element 18, quick plug 19, fixing seat 21, lifting port 22, lifting shaft 31, driver unit 41, arm unit 42, dust blocking wall 51, sealing ring 52, half ring disc 53, connecting wall 54, sealing strip 55. DETAILED DESCRIPTION
[0030] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.
[0031] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of the present application.
[0032] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.
[0033] In the description of the present application, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, or the orientations or positional relationships in which the product of the present application is usually placed, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third", etc. are only used for differentiation in description, and cannot be understood as indicating or implying relative importance. The terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion.
[0034] In addition, the terms "horizontal", "vertical", "overhanging", etc. do not mean that the components must be absolutely horizontal or overhanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.
[0035] In the description of the utility model, still need to explain, unless another explicit provision and limitation, term " set up " " cloth set up " " install " " link " " connection " should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected, can be mechanical connection, also can be electrical connection, can be directly connected, also can be indirectly connected through the intermediate medium, can be two element inside the communication. For ordinary skilled in the art, can be combined with prior art according to specific circumstances to understand the specific meaning of the above-mentioned terms in the utility model. In addition, the embodiments in the utility model and the features in the embodiments can be combined with each other without conflict. And one or more of the components in the illustration can be necessary or unnecessary, and the relative position relationship between the components in the above-mentioned illustration can be adjusted according to actual needs.
[0036] In order to solve the problem of particle suppression of the inverted wafer conveying mechanism, as shown in Figures 2 to 3 The utility model provides a particle suppressor, its example includes: negative pressure generating device (not shown in the drawing), dust suction part 1, wherein the dust suction part 1 includes: base 11, sealing plate 12, the base 11 is annular, and the annular body is equipped with dust suction groove 13, the inner ring surface of base 11 is equipped with several dust suction ports 14 communicated with dust suction groove 13, as shown in 1, 6 dust suction ports 14 can be provided to be evenly distributed at the inner ring surface, the outer ring surface of base 11 is equipped with connecting seat 15 and air pipe interface 16 communicated with dust suction groove 13, wherein the sealing plate 12 covers dust suction groove 13 to define dust suction cavity communicated with dust suction port 14 and air pipe interface 16, and the negative pressure generating device can be selected as existing negative pressure equipment such as negative pressure pump, which is connected with air pipe interface 16 through air suction pipe 17 to communicate dust suction cavity, so that negative pressure is formed in the cavity to form a negative pressure zone at the inner ring port of base 11 through dust suction port 14.
[0037] Specifically, in order to facilitate the installation of dust suction part 1 in the inverted wafer conveying mechanism, in the alternative embodiment, as shown in Figure 3 The outer ring surface of the base 11 can be provided with several air pipe interfaces 16 and connecting seats 15 communicated with the dust suction groove 13, and only any one of the air pipe interfaces 16 needs to be connected with the air suction pipe 17 during assembly, and the remaining dust suction ports 14 are detachably closed by sealing members 18 such as top screws. In this way, negative pressure can be formed in the dust suction cavity to suck particles outward through the dust suction port 14, thereby reducing the positioning requirements during assembly of the base 11, and facilitating the adjustment of the position of the air pipe interface 16 connected with the air suction pipe 17 according to the actual situation, and facilitating the design layout of the internal components of the inverted wafer conveying mechanism.
[0038] In addition, in the alternative example, as shown in Figure 3The air pipe interface 16 and the dust suction port 14 can be arranged coaxially in pairs, which is convenient to be drilled through by a drilling machine during processing. This not only allows for the freedom of subsequent installation of the suction pipe 17, but also facilitates production and processing.
[0039] Furthermore, to facilitate the installation of the inhalation tube 17 with each airway interface 16 and to ensure a sealing effect, in optional embodiments, such as... Figure 2 As shown, the vacuum cleaner 1 also includes a quick-connect fitting 19, wherein the tail of the quick-connect fitting 19 is connected to the suction pipe 17 and the head is inserted into the corresponding air pipe interface 16 on the base 11, thereby ensuring that the negative pressure generating device is reliably connected to the base 11.
[0040] On the other hand, corresponding to the above-mentioned particulate matter suppressors, such as Figures 4 to 8 As shown, this utility model also provides an inverted robot, an example of which includes: a fixed frame 2, a lifting device 3, a robotic arm 4, and a particulate matter suppressor as described in the example above.
[0041] Specifically, such as Figures 4 to 5 , Figure 8 As shown, in this example, the mounting bracket 2 is enclosed, and its bottom is provided with a mounting base 21. (As indicated...) Figure 6 As shown, the fixed base 21 is provided with a lifting port 22. The dust suction component 1 is fixed to the lifting port 22 via the connecting seat 15 on the base 11. The base 11 and the lifting port 22 are coaxially arranged and connected. The lifting device 3 is mounted on the fixed frame 2 and is in a closed state by the fixed frame 2. Only its lifting shaft 31 is allowed to reciprocate through the lifting port 22 to pass through the base 11. The negative pressure generating device can be set inside the fixed frame 2 or externally. This example does not impose any restrictions. The robotic arm 4 is connected to the end of the lifting shaft 31 of the lifting device 3 and moves up and down with it.
[0042] With this setting, a negative pressure can be generated in the dust collection chamber when the negative pressure generating device is working, such as preferably -70Kpa to -80Kpa. It can also be adapted according to the lifting frequency of the lifting device 3. This example does not impose any limitations. In this state, the dust collection port 14 surrounding the inner ring surface of the base 11 can form a negative pressure zone at the inner ring opening of the base 11, thereby continuously sucking up the particles carried by the movement of the lifting shaft 31 of the lifting device 3, and even the particles overflowing from the body of the fixing frame 2, so as to prevent these particles from falling onto the robotic arm 4 and the wafer 9 and causing contamination.
[0043] In an optional embodiment, in order to improve the particulate matter suction efficiency of the vacuum cleaner 1, the inner ring size of the base 11 can be adjusted appropriately so that the lifting shaft 31 is close to the suction port 14 of the base 11, thereby ensuring that the overflowing particulate matter is captured by the negative pressure zone, preventing it from escaping, and ensuring the particulate matter suppression effect.
[0044] Further, since some larger particles can not be captured by the negative pressure zone, and thus can escape from the lifting port 22, as shown in the optional embodiment, the inverted robot further comprises a dust collection disc 5, wherein the mechanical arm 4 comprises a driver unit 41 and an arm unit 42, wherein the arm unit 42 is drivingly connected to the driver unit 41, and the dust collection disc 5 is annular, and a dust blocking wall 51 is arranged at the outer ring of the dust collection disc 5, and the dust collection disc 5 is sleeved on the driver unit 41 through the inner ring of the dust collection disc 5, so as to collect the particles falling from the lifting port 22 of the fixing seat 21, so as to prevent the particles from polluting the wafer 9. Figures 7 to 8 Further, in order to better block the particles falling above the arm unit 42, in the optional embodiment, the size of the disc surface of the dust collection disc 5 can be arranged to be larger than the fixing frame 2 and the fixing seat 21, so that the disc surface covers the fixing frame 2 and the fixing seat 21 above, and collects the particles falling from the fixing frame 2 and the lifting device 3.
[0045] Further, in order to improve the sealing performance of the connection between the dust collection disc 5 and the driver unit 41, in the optional embodiment, a sealing ring 52 is arranged at the inner ring of the dust collection disc 5, and the dust collection disc 5 is sealingly sleeved on the driver unit 41 through the sealing ring 52, so as to avoid dust escaping from there.
[0046] Further, since the particles in the dust collection disc 5 cannot disappear by itself, it needs to be cleaned regularly, in order to facilitate the dismounting of the dust collection disc 5, in the optional embodiment, as shown in the figure, the dust collection disc 5 comprises a pair of half-ring discs 53, and the dust blocking wall 51 is arranged at the outer arc surface of each half-ring disc 53, and a connecting wall 54 is arranged at the connecting portion of each half-ring disc 53, and the pair of half-ring discs 53 are bolted to form the dust collection disc 5 through the connecting wall 54.
[0047] Further, in order to improve the sealing performance of the connection between the dust collection disc 5 and the driver unit 41, in the optional embodiment, a sealing ring 52 is arranged at the inner ring of the dust collection disc 5, and the dust collection disc 5 is sealingly sleeved on the driver unit 41 through the sealing ring 52, so as to avoid dust escaping from there. Figure 7 Further, in order to improve the sealing performance of the connection between the dust collection disc 5 and the driver unit 41, in the optional embodiment, a sealing ring 52 is arranged at the inner ring of the dust collection disc 5, and the dust collection disc 5 is sealingly sleeved on the driver unit 41 through the sealing ring 52, so as to avoid dust escaping from there.
[0048] Further, in order to improve the sealing performance of the connection between the dust collection disc 5 and the driver unit 41, in the optional embodiment, a sealing ring 52 is arranged at the inner ring of the dust collection disc 5, and the dust collection disc 5 is sealingly sleeved on the driver unit 41 through the sealing ring 52, so as to avoid dust escaping from there.
[0049] Further, in order to improve the sealing performance of the connection between the dust collection disc 5 and the driver unit 41, in the optional embodiment, a sealing ring 52 is arranged at the inner ring of the dust collection disc 5, and the dust collection disc 5 is sealingly sleeved on the driver unit 41 through the sealing ring 52, so as to avoid dust escaping from there.
[0050] In summary, the granular matter inhibitor and the flip-chip robot are provided by the utility model, a ring-shaped dust suction member 1 structure is designed ingeniously, is sleeved outside the lifting shaft 31 of the lifting device 3, sucks the granular matter generated when the lifting device 3 operates in the fixing frame 2, and the granular matter is avoided from being affected by gravity, following the lifting shaft 31, overflowing and falling to the wafer 9 through the fixed seat 21 lifting port 22, thereby solving the problem that the granular matter overflows when the traditional right-hand mechanical hand is flipped, causing the wafer 9 to be polluted, achieving the granular matter inhibition effect, meeting the cleanliness requirement in the wafer 9 transmission process.
[0051] The above disclosed preferred embodiments of the utility model are only used to help the description of the utility model. The preferred embodiments do not describe all the details, and the utility model is not limited to the specific implementation. Obviously, according to the content of the specification, many modifications and changes can be made. The specification selects and specifically describes these embodiments, in order to better explain the principle and practical application of the utility model, so that the person skilled in the art can well understand and utilize the utility model. The utility model is limited by the claims and the whole scope and equivalents, and any modification, equivalent replacement, improvement, etc. within the spirit and principle of the utility model should be included in the protection scope of the utility model.
[0052] In addition, various different embodiments of the utility model embodiments can also be combined arbitrarily, as long as it does not deviate from the spirit and principle of the utility model embodiments, and it should be considered as the disclosed content of the utility model embodiments.
Claims
1. A particulate matter suppressor characterized by The invention relates to a dust collection device, comprising: a negative pressure generating device and a dust collection member, wherein the dust collection member comprises a base and a sealing plate, the base is annular, and a dust collection groove is arranged on the annular body of the base, a plurality of dust collection ports communicating with the dust collection groove are arranged on the inner annular surface of the base, a connecting seat is arranged on the outer annular surface of the base, and a gas pipe interface communicating with the dust collection groove is arranged on the outer annular surface of the base, the sealing plate covers the dust collection groove to define a dust collection cavity communicating with the dust collection ports and the gas pipe interface, and the negative pressure generating device is connected to the gas pipe interface through the air suction pipe to communicate with the dust collection cavity, so that a negative pressure zone is formed at the inner annular port of the base through the dust collection ports.
2. The particulate matter suppressor of claim 1, wherein, A plurality of gas pipe interfaces communicating with the dust collection groove are arranged on the outer annular surface of the base, at least any one of the gas pipe interfaces is connected to the air suction pipe, and the remaining gas pipe interfaces are detachably closed by a sealing member.
3. The particulate matter suppressor of any of claims 1-2, wherein, The dust collection member further comprises a quick connector, and the gas pipe interface and the air suction pipe are connected by the quick connector.
4. An inverted robot comprising: The invention further relates to a particle suppressor, comprising:
5. The inverted robot of claim 4, wherein, a fixing frame, a lifting device, and a mechanical arm, wherein the fixing frame is provided with a fixing seat at the bottom, the fixing seat is provided with a lifting port, the dust collection member is arranged at the lifting port, the annular port of the base of the dust collection member communicates with the lifting port, the lifting device is arranged on the fixing frame, and the lifting shaft of the lifting device reciprocates through the annular port of the base when reciprocating through the lifting port, the lifting shaft is close to the dust collection port of the base, and the mechanical arm is connected to the end of the lifting shaft of the lifting device. The invention further relates to a dust collection device, comprising:
6. The inverted robot of claim 5, wherein, a dust collection disc, wherein the mechanical arm comprises a driver unit and an arm unit, the arm unit is drivingly connected to the driver unit, the dust collection disc is annular, a dust blocking wall is arranged at the outer ring of the dust collection disc, and the dust collection disc is sleeved on the driver unit through the inner annular port of the dust collection disc.
7. The inverted robot of claim 5, wherein, The size of the disc surface of the dust collection disc exceeds the fixing frame and the fixing seat thereof, so that the disc surface of the dust collection disc can at least collect the particles falling from the fixing frame and the lifting device.
8. The inverted robot of claim 5, wherein, A sealing ring is arranged at the inner annular port of the dust collection disc, and the dust collection disc is sealingly sleeved on the driver unit through the sealing ring.
9. The inverted robot of claim 8, wherein, The dust collection disc comprises a pair of half-ring discs, the dust blocking wall is arranged at the outer arc surface of each half-ring disc, a connecting wall is arranged on the connecting portion at each end of each half-ring disc, and the pair of half-ring discs are connected by the connecting wall to form the dust collection disc.
10. The inverted robot of claim 8, wherein, A sealing strip is filled in the connecting gap between the connecting walls of the pair of connected half-ring discs. The connecting wall is lower than the dust blocking wall.