Fixing device of semiconductor substrate

Abstract

The utility model relates to the technical field of semiconductor substrates, and discloses a fixing device of a semiconductor substrate. Comprising a fixing assembly used for fixing a semiconductor substrate, a first adjusting assembly used for height adjustment after the semiconductor substrate is fixed and a second adjusting assembly used for rotation angle adjustment after the semiconductor substrate is fixed, the fixing assembly comprises a fixing shell, and the fixing shell is fixedly connected with a first driving motor; the output end of the first driving motor is fixedly connected with a first rotating shaft, the first rotating shaft is fixedly connected with a bidirectional threaded rod, the bidirectional threaded rod is in threaded connection with a clamping plate, a clamping groove is formed in the outer side of the clamping plate, the second adjusting assembly is arranged below the fixing assembly and comprises a fixing plate, and the fixing plate is fixedly connected with a third driving motor. The two groups of clamping grooves can clamp the semiconductor substrate at the same time, so that uniform fixing force is provided, and the substrate is effectively prevented from moving and shaking in the machining process.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor substrate, concretely to a kind of semiconductor substrate's fixing device. BACKGROUND

[0002] With the rapid development of emerging technologies such as 5G, Internet of Things, artificial intelligence, the requirements for semiconductor materials, devices and manufacturing processes are continuously improving.

[0003] After searching, prior art (application number: CN202420116518.0), which is described in the document "The utility model relates to the field of fixing device, concretely to a kind of base plate fixing seat includes locating seat piece, the locating seat piece upper end is provided with several one-way sliding frame seat groups, and the frame seat group upper end face left and right sides are symmetrically arranged with fixed frame group. The utility model uses, through the deformation ability of reset spring, to ensure that the limiting ratchet piece slides in the locating sliding groove in one direction, so that the fixed frame group arranged on the upper side of the frame seat group can be slid to the edge of the base plate to be fixed, and the rotation is realized by the limiting circular groove cooperating with the top of the limiting ratchet piece. The clamping direction of the clamping plate on the frame seat plate is adjusted, then the limiting folding rod is pressed down, the spring piece is contracted, the limiting folding rod is separated from the gap between the fixed columns, the corresponding limiting is released, the limiting sliding between the dovetail groove and the dovetail strip is realized, so that the upper sliding plate can slide on the frame seat plate to adapt to the length of the base plate and improve the flexibility of the seat frame itself."

[0004] However, the fixing of the semiconductor substrate in the prior art, although it proposes to fix the base plate and improve the flexibility of the seat frame, still has some shortcomings: the semiconductor substrate is clamped, cannot provide uniform fixing force, and it is inconvenient to adjust the clamping of thick base plates, resulting in low work efficiency. UTILITY MODEL CONTENTS

[0005] The utility model aims at solving the shortcomings in the prior art and provides a kind of semiconductor substrate's fixing device.

[0006] To achieve the above object, the utility model adopts the following technical scheme: a kind of semiconductor substrate's fixing device, including fixed component for being fixed to semiconductor substrate, first adjusting component for the height adjustment after being fixed to semiconductor substrate and second adjusting component for the rotation angle adjustment after being fixed to semiconductor substrate, the fixed component includes fixed shell, and fixed shell is fixedly connected with drive motor one, and the output end of drive motor one is fixedly connected with rotating shaft one, while rotating shaft one is fixedly connected with bidirectional screw rod, and bidirectional screw rod is threadedly connected with clamping plate, and the outside of clamping plate is equipped with clamping groove;

[0007] The second adjusting assembly is arranged below the fixing assembly, and comprises a fixing plate, and the fixing plate is fixedly connected with a driving motor three, the output end of the driving motor three is fixedly connected with a worm, the worm is connected with a worm gear, and the worm gear is fixedly connected with a sliding cylinder, the first adjusting assembly is arranged below the second adjusting assembly, and comprises a fixing bottom plate, and the fixing bottom plate is fixedly connected with a driving motor two, the output end of the driving motor two is fixedly connected with a one-way threaded rod, and the one-way threaded rod is threadedly connected with a threaded sleeve.

[0008] As a further description of the above technical solution:

[0009] The middle position of the fixing shell is fixedly connected with a placing plate, the clamping groove is arranged on the side of the clamping plate close to the placing plate, the clamping plate is arranged in two groups and on the two sides of the placing plate, and the placing plate is arranged above the two-way threaded rod.

[0010] As a further description of the above technical solution:

[0011] The inner side of the fixing shell is fixedly connected with a limiting sliding rod, the clamping plate is slidingly connected to the limiting sliding rod, and the limiting sliding rod is arranged in two groups and on the two sides of the two-way threaded rod.

[0012] As a further description of the above technical solution:

[0013] The rotating shaft one is rotatably connected to the fixing shell, the two-way threaded rod is rotatably connected to the end of the fixing shell away from the rotating shaft one, and the driving motor one is fixedly connected to the outer extension plate of the end of the fixing shell close to the rotating shaft one.

[0014] As a further description of the above technical solution:

[0015] The driving motor three is fixedly connected to the upper end extension plate of the fixing plate, the worm is rotatably connected to the extension plate of the end of the fixing plate away from the driving motor three, the rotating shaft two is rotatably connected to the middle position of the upper end of the fixing plate, the end of the rotating shaft two away from the fixing plate is fixedly connected to the middle position of the lower end of the fixing shell, and the worm and the worm gear are meshingly arranged.

[0016] As a further description of the above technical solution:

[0017] The driving motor two is fixedly connected to the upper end of the fixing bottom plate, the driving motor two is arranged at the middle position of the fixing bottom plate, the threaded sleeve is arranged at the upper end of the one-way threaded rod, and the threaded sleeve is fixedly connected to the middle position of the lower end of the fixing plate.

[0018] As a further description of the above technical solution:

[0019] The upper end of the fixed base plate is fixedly connected to a sliding cylinder, and the upper end of the sliding cylinder is slidably connected to a sliding column. The end of the sliding column away from the sliding cylinder is fixedly connected to the lower end of the fixed plate. At the same time, there are two sets of sliding cylinders and sliding columns, and the sliding cylinders and sliding columns are respectively located on both sides of the threaded sleeve.

[0020] This utility model has the following beneficial effects:

[0021] 1. By starting the drive motor, the two sets of clamping plates and clamping slots move in opposite directions. The two sets of clamping slots can clamp the semiconductor substrate at the same time, thereby providing a uniform fixing force and effectively preventing the substrate from moving and shaking during the processing.

[0022] 2. By starting drive motor three, the fixed component is rotated. By starting drive motor two, the height of the fixed component is adjusted, which can reduce auxiliary time in the processing and improve the overall processing efficiency. Attached Figure Description

[0023] Figure 1 A three-dimensional structural diagram of a semiconductor substrate fixing device proposed in this utility model. Figure 1 ;

[0024] Figure 2 A three-dimensional structural diagram of a semiconductor substrate fixing device proposed in this utility model. Figure 2 ;

[0025] Figure 3 A three-dimensional structural diagram of a semiconductor substrate fixing device proposed in this utility model. Figure 3 ;

[0026] Figure 4 This is a partial structural schematic diagram of a semiconductor substrate fixing device proposed in this utility model.

[0027] Legend:

[0028] 1. Fixing assembly; 11. Fixing shell; 12. Drive motor one; 13. Rotating shaft one; 14. Bidirectional threaded rod; 15. Clamping plate; 16. Clamping groove; 17. Limiting slide rod; 18. Placement plate; 2. First adjusting assembly; 21. Fixing base plate; 22. Drive motor two; 23. One-way threaded rod; 24. Threaded sleeve; 25. Slide cylinder; 26. Slide column; 3. Second adjusting assembly; 31. Fixing plate; 32. Drive motor three; 33. Worm gear; 34. Worm wheel; 35. Rotating shaft two. Detailed Implementation

[0029] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model.

[0030] Referring to Figures 1-4 The utility model provides a kind of fixing device of semiconductor substrate, comprising: fixed component 1, first adjusting component 2 and second adjusting component 3.

[0031] Specifically, including fixed component 1 is used to fix semiconductor substrate, first adjusting component 2 is used to adjust the height after fixing semiconductor substrate and second adjusting component 3 is used to adjust the rotation angle after fixing semiconductor substrate, fixed component 1 includes fixed shell 11, and fixed shell 11 is fixedly connected with drive motor one 12, and the output end of drive motor one 12 is fixedly connected with rotating shaft one 13, while rotating shaft one 13 is fixedly connected with bidirectional screw rod 14, and bidirectional screw rod 14 is threadedly connected with clamping plate 15, and the outside of clamping plate 15 is equipped with clamping groove 16;

[0032] Second adjusting component 3 is located below fixed component 1, and second adjusting component 3 includes fixed plate 31, and fixed plate 31 is fixedly connected with drive motor three 32, while the output end of drive motor three 32 is fixedly connected with worm 33, and worm 33 is connected with worm gear 34, and worm gear 34 is fixedly connected with sliding cylinder 25, first adjusting component 2 is located below second adjusting component 3, and first adjusting component 2 includes fixed bottom plate 21, and fixed bottom plate 21 is fixedly connected with drive motor two 22, while the output end of drive motor two 22 is fixedly connected with one-way screw rod 23, and one-way screw rod 23 is threadedly connected with threaded sleeve 24.

[0033] In the embodiment, fixed component 1, first adjusting component 2 and second adjusting component 3 constitute the fixing device of semiconductor substrate related to the application, which realizes the operation of fixing and height angle adjusting of semiconductor substrate.

[0034] In the embodiment, semiconductor substrate provides electronic connection between chip and PCB female plate, ensures that the signal of chip can be accurately transmitted to the whole circuit. It is the key bridge to realize communication between chip and external circuit.

[0035] In the embodiment, through the rotation of bidirectional screw rod 14, two groups of clamping plates 15 are driven to move oppositely and slide oppositely on limiting slide rod 17, and clamping plates 15 are limited by limiting slide rod 17 to prevent clamping plates 15 from rotating with bidirectional screw rod 14.

[0036] It needs to be explained that through the rotation of the worm 33, the worm gear 34 and the rotating shaft two 35 can be driven to rotate, so that the fixed assembly 1 can be adjusted in rotation angle.

[0037] Specifically, the middle position of the fixed shell 11 is fixedly connected with a placement plate 18, the clamping groove 16 is arranged on one side of the clamping plate 15 close to the placement plate 18, the clamping plate 15 is provided with two groups and is arranged on both sides of the placement plate 18, the placement plate 18 is arranged above the bidirectional threaded rod 14, the inner side of the fixed shell 11 is fixedly connected with a limiting sliding rod 17, the clamping plate 15 is slidingly connected to the limiting sliding rod 17, the limiting sliding rod 17 is provided with two groups and is arranged on both sides of the bidirectional threaded rod 14, the rotating shaft one 13 penetrates through and is rotationally connected to the fixed shell 11, the bidirectional threaded rod 14 is rotationally connected to one end of the fixed shell 11 away from the rotating shaft one 13, and the driving motor one 12 is fixedly connected to the outer side of the extension plate of the fixed shell 11 close to one end of the rotating shaft one 13.

[0038] As a preferred embodiment, through the rotation of the bidirectional threaded rod 14, the two groups of clamping plates 15 are driven to move oppositely, so that the semiconductor substrate can be fixed through the slot on the clamping plate 15.

[0039] As a preferred embodiment, the placement plate 18 is arranged to place the semiconductor substrate, and the two groups of clamping grooves 16 are arranged to fix the semiconductor substrate.

[0040] Specifically, the driving motor three 32 is fixedly connected to the upper end extension plate of the fixed plate 31, the worm 33 is rotationally connected to the extension plate of the fixed plate 31 away from the driving motor three 32, the rotating shaft two 35 is rotationally connected to the upper end middle position of the fixed plate 31, one end of the rotating shaft two 35 away from the fixed plate 31 is fixedly connected to the lower end middle position of the fixed shell 11, the worm 33 and the worm gear 34 are meshed, the driving motor two 22 is fixedly connected to the upper end of the fixed bottom plate 21, the driving motor two 22 is arranged at the middle position of the fixed bottom plate 21, the threaded sleeve 24 is arranged at the upper end of the unidirectional threaded rod 23, the threaded sleeve 24 is fixedly connected to the lower end middle position of the fixed plate 31, the upper end of the fixed bottom plate 21 is fixedly connected with a sliding cylinder 25, the upper end of the sliding cylinder 25 is slidingly connected with a sliding column 26, one end of the sliding column 26 away from the sliding cylinder 25 is fixedly connected to the lower end of the fixed plate 31, the sliding cylinder 25 and the sliding column 26 are provided with two groups, and the sliding cylinder 25 and the sliding column 26 are respectively arranged on both sides of the threaded sleeve 24.

[0041] As a preferred embodiment, through the rotation of the unidirectional threaded rod 23, the threaded sleeve 24 can be driven to move upward, so that the first adjusting assembly 2 and the fixed assembly 1 can be adjusted in height.

[0042] It should be noted that when the threaded sleeve 24 pushes the first adjusting assembly 2 and the fixed assembly 1 to adjust the height, the slide column 26 is driven to slide on the slide cylinder 25, the threaded sleeve 24 is limited, and the threaded sleeve 24 is prevented from rotating with the one-way threaded rod 23.

[0043] In use, by starting the driving motor one, the rotating shaft one and the bidirectional threaded rod can be driven to rotate, the semiconductor substrate can be clamped and fixed through the two groups of clamping plates and clamping grooves, by starting the driving motor three, the worm is driven to rotate, the rotating shaft two can be driven to rotate through the worm wheel, and the fixed assembly can be driven to rotate, by starting the driving motor two, the one-way threaded rod is driven to rotate, the threaded sleeve can be driven to ascend and descend, and the fixed assembly can be adjusted in height.

[0044] The fixing device of the semiconductor substrate can provide uniform fixing force, effectively prevent the semiconductor substrate from moving and shaking in the processing process, reduce auxiliary time in the processing process, and improve overall processing efficiency.

[0045] Finally, it should be noted that: the above only for the preferred embodiments of the utility model, and does not limit the utility model, although the utility model has been described in detail with reference to the foregoing embodiments, for the person skilled in the art, it still can modify the technical scheme recorded in the foregoing each embodiment, or equivalent replacement to part of technical features, any modification, equivalent replacement, improvement etc. within the spirit and principles of the utility model, should be included in the protection scope of the utility model.

Claims

1. A fixing device of a semiconductor substrate, characterized by: The utility model provides a semiconductor substrate fixing device, including fixed component (1) for fixing semiconductor substrate, first adjusting component (2) for height adjustment after fixing semiconductor substrate and second adjusting component (3) for rotation angle adjustment after fixing semiconductor substrate, fixed component (1) includes fixed shell (11), and fixed shell (11) is fixed with drive motor one (12), and the output of drive motor one (12) is fixed with rotating shaft one (13), simultaneously rotating shaft one (13) is fixed with two -way threaded rod (14), and two -way threaded rod (14) is threadedly connected with clamping plate (15), and the outside of clamping plate (15) is equipped with clamping groove (16); Second adjusting component (3) is located below fixed component (1), and second adjusting component (3) includes fixed plate (31), and fixed plate (31) is fixed with drive motor three (32), simultaneously the output of drive motor three (32) is fixed with worm (33), and worm (33) is connected with worm wheel (34), and worm wheel (34) is fixed with sliding cylinder (25), first adjusting component (2) is located below second adjusting component (3), and first adjusting component (2) includes fixed bottom plate (21), and fixed bottom plate (21) is fixed with drive motor two (22), simultaneously the output of drive motor two (22) is fixed with one -way threaded rod (23), and one -way threaded rod (23) is threadedly connected with threaded sleeve (24).

2. The apparatus according to claim 1, wherein: The middle position of fixed shell (11) is fixed with placing plate (18), clamping groove (16) is located on the side of clamping plate (15) close to placing plate (18), clamping plate (15) is equipped with two groups and is located on the both sides of placing plate (18), and placing plate (18) is located above two -way threaded rod (14).

3. The apparatus according to claim 2, wherein: The inner side of fixed shell (11) is fixed with limit slide rod (17), clamping plate (15) is slidably connected on limit slide rod (17), and limit slide rod (17) is equipped with two groups and is located on the both sides of two -way threaded rod (14).

4. The apparatus according to claim 3, wherein: Rotating shaft one (13) is rotatably connected on fixed shell (11), two -way threaded rod (14) is rotatably connected on the end of fixed shell (11) away from rotating shaft one (13), and drive motor one (12) is fixed on the outside extension plate of the end of fixed shell (11) close to rotating shaft one (13).

5. The apparatus according to claim 4, wherein: Drive motor three (32) is fixed on the upper end extension plate of fixed plate (31), worm (33) is rotatably connected on the extension plate of the end of fixed plate (31) away from drive motor three (32), rotating shaft two (35) is rotatably connected on the middle position of the upper end of fixed plate (31), the end of rotating shaft two (35) away from fixed plate (31) is fixed on the middle position of the lower end of fixed shell (11), and worm (33) and worm wheel (34) are meshed.

6. The apparatus according to claim 5, wherein: The driving motor two (22) is fixed to the upper end of the fixed bottom plate (21), and the driving motor two (22) is arranged at the middle position of the fixed bottom plate (21), and the threaded sleeve (24) is arranged at the upper end of the one-way threaded rod (23), and the threaded sleeve (24) is fixed to the middle position of the lower end of the fixed plate (31).

7. The apparatus according to claim 6, wherein: The upper end of the fixed bottom plate (21) is fixed with a sliding cylinder (25), the upper end of the sliding cylinder (25) is slidingly connected with a sliding column (26), and one end of the sliding column (26) away from the sliding cylinder (25) Fixed to the lower end of the fixed plate (31), while the sliding cylinder (25) and the sliding column (26) are provided with two groups, And the sliding cylinder (25) and the sliding column (26) are arranged on both sides of the threaded sleeve (24) respectively.

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