Cathode arc target

Abstract

The utility model discloses a cathode arc target, which comprises a flange seat, a first electrode, a second electrode and a third electrode, the target assembly comprises a target seat and a target material, the target seat is connected with the flange seat, the target seat is located in the hollow cavity, and the target material is connected with the target seat; the magnet assembly comprises a magnet seat, an inner magnet and an outer magnet, the magnet seat is connected with the side, away from the target material, of the target seat, the magnet seat is provided with an outer annular groove and an inner annular groove, the outer annular groove extends along the circumferential outer side of the target material, the inner magnet is arranged in the inner annular groove, and the outer magnet is arranged in the outer annular groove; the electromagnetic coil comprises a framework and a coil winding, the coil winding is wound on the framework, and the framework is connected with the side, away from the target seat, of the magnet seat. The magnetic field distribution of the target material can be adjusted, and the magnetic field intensity is improved, so that the moving speed of arc spots on the surface of the target material is improved, the sizes of generated particles are smaller, and a coated product is smoother.

Description

Technical Field

[0001] This utility model relates to the technical field of target coating, and in particular to a cathode arc target. Background Technology

[0002] Vacuum plating refers to the process of depositing various metal and non-metal thin films on the surface of a product under vacuum conditions through evaporation, sputtering, or ionization. It mainly includes several types such as vacuum evaporation, sputtering, and ion plating. Among these, ion plating includes vacuum arc coating technology, which is currently the most widely used in industry. This technology is mainly achieved by a cathode arc source on a coating machine. During operation, the arc source uses an arc-initiating needle to ignite an arc on the target material. The arc spot moves rapidly across the target surface. In this technology, a small cathode spot exists on the cathode surface with high current density. The material temperature in the area where the arc spot is located rapidly rises above its boiling point, generating intense evaporation, sputtering, and ionization, which deposits onto the substrate.

[0003] The existing arc source includes a cathode holder, a target material, and a magnet. The target material is placed on one side of the cathode holder, and the magnet is placed on the side of the cathode holder away from the magnet, so that the magnetic field of the magnet is distributed on the target material. When the arc source is working, an arc spot can be generated on the surface of the target material.

[0004] However, the arc spot movement speed of the target material in existing arc sources is not fast enough, and the arc spot stays on the target surface for a long time, resulting in high target surface temperature, large liquid particle size, and relatively rough coating film formed by the particles adhering to the product surface, which cannot meet product requirements. Utility Model Content

[0005] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a cathode arc target that can adjust the magnetic field distribution of the target material and increase the magnetic field strength, thereby increasing the movement speed of the arc spot on the target surface, resulting in smaller particle size and a smoother coated product.

[0006] A cathode arc target according to an embodiment of the present invention includes: a flange seat having a hollow cavity; a target assembly including a target base and a target material, the target base being connected to the flange seat and located within the hollow cavity, the target material being connected to the target base; a magnet assembly including a magnet base, an inner magnet, and an outer magnet, the magnet base being connected to the side of the target base away from the target material, the magnet base having an outer annular groove and an inner annular groove, the outer annular groove extending circumferentially outward along the target material, the inner annular groove arranging the inner magnet, and the outer annular groove arranging the outer magnet; and an electromagnetic coil including a frame and a coil winding, the coil winding being wound around the frame, the frame being connected to the side of the magnet base away from the target base.

[0007] A cathode arc target according to an embodiment of the present invention has at least the following beneficial effects:

[0008] This invention, by setting up an inner magnet, an outer magnet, and an electromagnetic coil, distributes the magnetic fields of the inner and outer magnets on the target material. By using the electromagnetic coil to input a periodically changing current, the magnetic field distribution on the target material can be altered, increasing the magnetic field strength. This improves the movement speed of the arc spot generated on the target material, preventing the target surface temperature from becoming too high. This results in smaller liquid particle sizes, and the particles adhere to the product surface to form a smoother coating, meeting product requirements. At the same time, the arc spot periodically passes through every point on the target surface, enabling uniform consumption of the target material and improving its utilization rate.

[0009] According to an embodiment of the present invention, a cathode arc target further includes a first cooling assembly. The first cooling assembly includes a drain pipe, a water inlet pipe located inside the drain pipe, a first water inlet connector communicating with the water inlet pipe, and a first water outlet connector communicating with the drain pipe. The electromagnetic coil has a central hole, the drain pipe is installed in the central hole, and a first cold water chamber is formed between the magnet base and the target base. The first cold water chamber communicates with the water inlet pipe and the drain pipe.

[0010] According to an embodiment of the present invention, a cathode arc target is provided, wherein a first annular plate is connected between the drain pipe and the magnet base, and the first annular plate and the target base are sealed together by a first sealing ring. The water inlet pipe is provided with a partition plate, which is located in the first cold water chamber. The partition plate divides the first cold water chamber into a cold water channel and a return channel. The cold water channel is connected to the water inlet pipe, and the return channel is connected to the drain pipe. The partition plate is provided with a plurality of through holes, which are located near the outer edge of the partition plate.

[0011] According to an embodiment of the present invention, a cathode arc target has a thin film portion disposed on the side of the target holder near the target material. The thin film portion is used to form the sidewall of the cold water channel and is arranged along the outer shape of the target material.

[0012] According to an embodiment of the present invention, a cathode arc target is provided with a second annular plate on the side of the target holder near the target material. The inner side of the second annular plate accommodates the target material. A slot is provided between the second annular plate and the target holder. The target material is provided with a snap-fit ​​part. An avoidance hole is provided on the inner side of the second annular plate. The snap-fit ​​part snaps into the slot after passing through the avoidance hole.

[0013] According to an embodiment of the present invention, a cathode arc target includes a flange seat comprising a coaxial first annular seat, a cylindrical body, and a second annular seat. The cylindrical body connects the first annular seat and the second annular seat, and the first annular seat, the cylindrical body, and the second annular seat are welded together integrally.

[0014] According to an embodiment of the present invention, a cathode arc target includes an outer cylinder and an inner cylinder, a second cold water chamber is formed between the outer cylinder and the inner cylinder, and a first annular seat is provided with a second water inlet connector and a second water outlet connector, both of which are connected to the second cold water chamber.

[0015] According to an embodiment of the present invention, a cathode arc target is provided between the second annular seat and the target seat, one side of the ceramic ring is connected to the target seat through a second sealing ring, and the other side of the ceramic ring is connected to the second annular seat through a third sealing ring.

[0016] According to an embodiment of the present invention, a cathode arc target further includes an arc-extinguishing shroud located inside the second annular seat. The arc-extinguishing shroud extends circumferentially along the outer periphery of the target material, and the arc-extinguishing shroud and the second annular seat are connected by bolts.

[0017] According to an embodiment of the present invention, a cathode arc target has an electromagnetic coil with a handle disposed away from the magnet base.

[0018] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of a cathode arc target according to an embodiment of the present invention;

[0021] Figure 2 for Figure 1 A cross-sectional view of a cathode arc target is shown.

[0022] Figure 3 for Figure 1 An exploded view of a cathode arc target is shown.

[0023] Figure 4 for Figure 1 The diagram shows a target holder and target material for a cathode arc target.

[0024] Reference numerals: 100-Flange seat, 110-Hollow cavity, 120-Target seat, 130-Target material, 140-Magnet seat, 150-Inner magnet, 160-Outer magnet, 170-Electromagnetic coil, 180-Frame, 190-Coil winding, 200-Drain pipe, 210-Inlet pipe, 220-First inlet connector, 230-First outlet connector, 240-First cold water chamber, 250-First annular plate, 260-First sealing ring, 270-Partition plate, 280-Cold water passage 290-Return channel, 300-Through hole, 310-Membrane part, 320-Second annular plate, 330-Slot, 340-Snap-fit ​​part, 350-First annular seat, 360-Cylinder body, 370-Second annular seat, 380-Outer cylinder, 390-Inner cylinder, 400-Second cold water chamber, 410-Ceramic ring, 420-Second sealing ring, 430-Third sealing ring, 440-Arc extinguishing cover, 450-Handle, 460-Second water inlet connector, 470-Second water outlet connector. Detailed Implementation

[0025] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0026] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0027] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. If "first" and "second" are mentioned, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the order of the indicated technical features.

[0028] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation, connection, and linkage" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0029] A cathode arc target according to an embodiment of the present invention is described below with reference to the accompanying drawings.

[0030] Reference Figure 1 The present invention aims to provide an embodiment of a cathode arc target.

[0031] A cathode arc target according to an embodiment of this utility model, referring to... Figure 1 , Figure 2 and Figure 3 The system includes a flange seat 100, a target assembly, a magnet assembly, and an electromagnetic coil 170. The flange seat 100 has a hollow cavity 110. The target assembly includes a target holder 120 and a target material 130. The target holder 120 is connected to the flange seat 100 and is located within the hollow cavity 110. The target material 130 is connected to the target holder 120. The magnet assembly includes a magnet holder 140, an inner magnet 150, and an outer magnet 160. The magnet holder 140 is connected to the side of the target holder 120 away from the target material 130. The magnet holder 140 has an outer annular groove and an inner annular groove. The outer annular groove extends circumferentially outward from the target material 130. The inner annular groove is arranged with the inner magnet 150, and the outer annular groove is arranged with the outer magnet 160. The electromagnetic coil 170 includes a frame 180 and a coil winding 190. The coil winding 190 is wound around the frame 180, and the frame 180 is connected to the side of the magnet holder 140 away from the target holder 120.

[0032] Understandably, by setting up an inner magnet 150, an outer magnet 160, and an electromagnetic coil 170, with multiple inner magnets 150 and outer magnets 160 respectively, and multiple inner magnets 150 arranged sequentially along the extension direction of the inner annular groove, and multiple outer magnets 160 arranged sequentially along the extension direction of the outer annular groove, the magnetic fields of the inner magnets 150 and outer magnets 160 are distributed on the target material 130. By using the electromagnetic coil 170 to input a periodically changing current, the magnetic field distribution on the target material 130 can be changed, increasing the magnetic field strength. This can increase the moving speed of the arc spot generated on the target material 130, preventing the surface temperature of the target material 130 from becoming too high, resulting in smaller liquid particle sizes. The coating formed by the particles adhering to the product surface is smoother, meeting product requirements. At the same time, the arc spot periodically passes through every point on the surface of the target material 130, enabling uniform consumption of the target material 130 and improving the utilization rate of the target material 130.

[0033] In some embodiments of this utility model, reference is made to Figure 2 It also includes a first cooling assembly, which includes a drain pipe 200, an inlet pipe 210 located inside the drain pipe 200, a first inlet connector 220 communicating with the inlet pipe 210, and a first outlet connector 230 communicating with the drain pipe 200. The electromagnetic coil 170 has a central hole, the drain pipe 200 is installed in the central hole, and a first cold water chamber 240 is formed between the magnet base 140 and the target base 120. The first cold water chamber 240 communicates with the inlet pipe 210 and the drain pipe 200.

[0034] By setting up a drain pipe 200, a water inlet pipe 210, a first water inlet connector 220, and a first water outlet connector 230, refer to Figure 2 The cooling water flows in the direction that the first water inlet connector 220 can be connected to an external water pipe. The cooling water enters the first cold water chamber 240 through the first water inlet connector 220 and the water inlet pipe 210. After the cooling water cools the target material 130, the cooling water is discharged through the drain pipe 200 and the first water outlet connector 230, thereby carrying away the heat of the target material 130 and preventing the target material 130 from getting too hot.

[0035] In some embodiments of this utility model, a first annular plate 250 is connected between the drain pipe 200 and the magnet base 140, and the first annular plate 250 and the target base 120 are sealed together by a first sealing ring 260. The water inlet pipe 210 is provided with a partition plate 270, which is located inside the first cold water chamber 240. The partition plate 270 divides the first cold water chamber 240 into a cold water channel 280 and a return channel 290. The cold water channel 280 is connected to the water inlet pipe 210, and the return channel 290 is connected to the drain pipe 200. The partition plate 270 is provided with a plurality of through holes 300, which are located near the outer edge of the partition plate 270.

[0036] By setting a first annular plate 250, which is welded between the drain pipe 200 and the magnet seat 140, the first annular plate 250 forms an inner wall of the first cold water chamber 240. Furthermore, by setting a first sealing ring 260 between the first annular plate 250 and the target seat 120, water leakage of cooling water in the first cold water chamber 240 at the connection between the first annular plate 250 and the target seat 120 is prevented.

[0037] Meanwhile, by setting a partition plate 270, the first cold water chamber 240 is divided into a cold water channel 280 and a return channel 290. After the cooling water in the cold water channel 280 fully cools the target material 130, the cooling water flows through the through hole 300 to the return channel 290 and is discharged through the drain pipe 200. Thus, the cooling water cools the target material 130 to the maximum extent.

[0038] In some embodiments of this utility model, a thin film portion 310 is provided on the side of the target holder 120 near the target material 130. The thin film portion 310 is used to form the sidewall of the cold water channel 280 and is arranged along the outer shape of the target material 130.

[0039] It is understandable that by using the thin film portion 310 to closely adhere to the target material 130, and by using the thin film portion 310 to have a very small thickness, the cooling water can quickly remove the heat from the target material 130, which is beneficial to improving the cooling efficiency.

[0040] In some embodiments of this utility model, reference is made to Figure 2 and Figure 4 A second annular plate 320 is provided on the side of the target holder 120 near the target 130. The inner side of the second annular plate 320 accommodates the target 130. A slot 330 is provided between the second annular plate 320 and the target holder 120. The target 130 is provided with a snap-fit ​​part 340. An avoidance hole is provided on the inner side of the second annular plate 320. The snap-fit ​​part 340 snaps into the slot 330 after passing through the avoidance hole.

[0041] By setting a second annular plate 320, a slot 330 is provided between the second annular plate 320 and the target base 120, avoiding the method of machining the slot 330 in the target base 120, thus reducing the manufacturing difficulty of the slot 330.

[0042] When installing the target 130, the snap-fit ​​part 340 of the target 130 is passed through the clearance hole and the snap-fit ​​part 340 is inserted into the slot 330. Then, the target 130 is rotated so that the snap-fit ​​part 340 and the slot 330 are engaged, so that the target 130 is installed on the target base 120. This avoids using a threaded connection to install the target 130 on the target base 120, which can reduce the thickness of the target 130 and improve the utilization rate of the target 130.

[0043] In some embodiments of this utility model, the flange seat 100 includes a coaxial first annular seat 350, a cylindrical body 360, and a second annular seat 370. The cylindrical body 360 connects the first annular seat 350 and the second annular seat 370, and the first annular seat 350, the cylindrical body 360, and the second annular seat 370 are welded together as a single unit.

[0044] Understandably, the entire arc target can be fixed in the vacuum equipment using the first annular seat 350. A hollow cavity 110 can be formed inside the cylinder 360, and the target assembly can be installed in the hollow cavity 110. Furthermore, the cylinder 360, the first annular seat 350, and the second annular seat 370 are welded together to fix them in place. Welding can eliminate the gap at the connection between the cylinder 360, the first annular seat 350, and the second annular seat 370, thus meeting the usage requirements.

[0045] In some embodiments of this utility model, the cylinder 360 includes an outer cylinder 380 and an inner cylinder 390, and a second cold water chamber 400 is formed between the outer cylinder 380 and the inner cylinder 390. The first annular seat 350 is provided with a second water inlet connector 460 and a second water outlet connector 470, and both the second water inlet connector 460 and the second water outlet connector 470 are connected to the second cold water chamber 400.

[0046] It is understandable that the introduction of cooling water into the second cold water chamber 400 can reduce the temperature on the outside of the arc target. Furthermore, the welding of the outer cylinder 380 and the inner cylinder 390 to the first annular seat 350 and the second annular seat 370 helps to improve the sealing performance of the second cold water chamber 400 and prevent water leakage.

[0047] In some embodiments of this utility model, a ceramic ring 410 is provided between the second annular seat 370 and the target seat 120. One side of the ceramic ring 410 is connected to the target seat 120 through a second sealing ring 420, and the other side of the ceramic ring 410 is connected to the second annular seat 370 through a third sealing ring 430, thereby making the second annular seat 370 and the target seat 120 insulated.

[0048] In some embodiments of this utility model, an arc-extinguishing cover 440 is also included. The arc-extinguishing cover 440 is located inside the second annular seat 370. The arc-extinguishing cover 440 extends circumferentially along the outer periphery of the target material 130. The arc-extinguishing cover 440 and the second annular seat 370 are connected by bolts, thereby making the installation of the arc-extinguishing cover 440 more convenient.

[0049] In some embodiments of this invention, the electromagnetic coil has a handle that is positioned away from the magnet base.

[0050] In the description of this specification, references to terms such as "an embodiment," "some embodiments," "illustrative embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0051] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A cathode arc target, characterized in that, include: Flange seat (100) has a hollow cavity (110); The target assembly includes a target holder (120) and a target material (130). The target holder (120) is connected to the flange seat (100) and the target holder (120) is located in the hollow cavity (110). The target material (130) is connected to the target holder (120). A magnet assembly includes a magnet base (140), an inner magnet (150), and an outer magnet (160). The magnet base (140) is connected to the side of the target base (120) away from the target material (130). The magnet base (140) has an outer annular groove and an inner annular groove. The outer annular groove extends circumferentially outward from the target material (130). The inner annular groove is provided with the inner magnet (150), and the outer annular groove is provided with the outer magnet (160). The electromagnetic coil (170) includes a frame (180) and a coil winding (190) wound around the frame (180), and the frame (180) is connected to the magnet holder (140) on the side away from the target holder (120).

2. The cathode arc target according to claim 1, characterized in that, It also includes a first cooling assembly, which includes a drain pipe (200), an inlet pipe (210) located inside the drain pipe (200), a first inlet connector (220) communicating with the inlet pipe (210), and a first outlet connector (230) communicating with the drain pipe (200). The electromagnetic coil (170) has a central hole, the drain pipe (200) is installed in the central hole, and a first cold water chamber (240) is formed between the magnet base (140) and the target base (120). The first cold water chamber (240) communicates with the inlet pipe (210) and the drain pipe (200).

3. The cathode arc target according to claim 2, characterized in that, A first annular plate (250) is connected between the drain pipe (200) and the magnet base (140). The first annular plate (250) and the target base (120) are sealed together by a first sealing ring (260). The water inlet pipe (210) is provided with a partition plate (270). The partition plate (270) is located in the first cold water chamber (240). The partition plate (270) divides the first cold water chamber (240) into a cold water channel (280) and a return channel (290). The cold water channel (280) is connected to the water inlet pipe (210). The return channel (290) is connected to the drain pipe (200). The partition plate (270) is provided with a plurality of through holes (300). The through holes (300) are located near the outer edge of the partition plate (270).

4. The cathode arc target according to claim 3, characterized in that, The target holder (120) has a thin film portion (310) on the side near the target material (130). The thin film portion (310) is used to form the sidewall of the cold water channel (280). The thin film portion (310) is arranged along the shape of the target material (130).

5. A cathode arc target according to claim 1, characterized in that, The target holder (120) is provided with a second annular plate (320) on the side near the target material (130). The inner side of the second annular plate (320) accommodates the target material (130). A slot (330) is provided between the second annular plate (320) and the target holder (120). The target material (130) is provided with a snap-fit ​​part (340). An avoidance hole is provided on the inner side of the second annular plate (320). The snap-fit ​​part (340) snaps into the slot (330) after passing through the avoidance hole.

6. The cathode arc target according to claim 1, characterized in that, The flange seat (100) includes a coaxial first annular seat (350), a cylindrical body (360), and a second annular seat (370). The cylindrical body (360) connects the first annular seat (350) and the second annular seat (370). The first annular seat (350), the cylindrical body (360), and the second annular seat (370) are welded together as a single unit.

7. A cathode arc target according to claim 6, characterized in that, The cylinder (360) includes an outer cylinder (380) and an inner cylinder (390), and a second cold water chamber (400) is formed between the outer cylinder (380) and the inner cylinder (390). The first annular seat (350) is provided with a second water inlet connector (460) and a second water outlet connector (470), and both the second water inlet connector (460) and the second water outlet connector (470) are connected to the second cold water chamber (400).

8. A cathode arc target according to claim 6, characterized in that, A ceramic ring (410) is provided between the second annular seat (370) and the target seat (120). One side of the ceramic ring (410) is connected to the target seat (120) through a second sealing ring (420), and the other side of the ceramic ring (410) is connected to the second annular seat (370) through a third sealing ring (430).

9. A cathode arc target according to claim 6, characterized in that, It also includes an arc-extinguishing cover (440), which is located inside the second annular seat (370). The arc-extinguishing cover (440) extends circumferentially along the outer periphery of the target material (130). The arc-extinguishing cover (440) and the second annular seat (370) are connected by bolts.

10. A cathode arc target according to claim 1, characterized in that, The electromagnetic coil (170) has a handle (450) disposed away from the magnet base (140).

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