PVD (Physical Vapor Deposition) electroplating hanging tool structure

By introducing a rotatable intermediate turntable and anti-slip pad into the PVD electroplating suspension fixture structure, the problem that the suspension fixture can only be installed by suspension is solved, and uniform electroplating of the workpiece is achieved, thus improving the electroplating effect.

CN223535197UActive Publication Date: 2025-11-11WUXI QIANTAI NEW MATERIAL TECH CO LTD
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Patent Information

Application Number
CN202423199447.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-24
Publication Date
2025-11-11
Estimated Expiration
2034-12-24

AI Technical Summary

Technical Problem

Common PVD electroplating suspension fixtures can only mount workpieces by suspension. Some workpieces do not have suspension points, making electroplating difficult.

Method used

A PVD electroplating suspension fixture structure was designed, comprising a mounting base, a bottom, and a middle box. The middle box is equipped with a rotatable central turntable and an anti-slip pad. The workpiece can be placed on the anti-slip pad for electroplating, and the rotation is driven by a motor to achieve the workpiece's rotation and improve the uniformity of electroplating.

Benefits of technology

It achieves uniform electroplating on all workpieces, solves the problem of electroplating difficulties on some workpieces that lack suspension points, and improves the uniformity and efficiency of electroplating.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a PVD (Physical Vapor Deposition) electroplating hanging tool structure, which belongs to the technical field of PVD electroplating, and comprises a mounting bottom box, a bottom support rod is fixedly mounted at the top of the mounting bottom box, two overlapped middle box bodies are arranged at the top of the bottom support rod, a middle support rod is fixedly mounted at the top of each middle box body, and the middle support rod is fixedly mounted at the top of each middle box body. A top plate is fixedly mounted at the top of the upper middle supporting rod. According to the PVD electroplating hanging tool structure, the rotatable middle rotating disc is arranged at the top of the middle box body, the middle non-slip mat is arranged at the top of the middle rotating disc, a workpiece can be hung, the workpiece can be placed at the top of the middle non-slip mat and subjected to PVD electroplating, and the middle rotating disc rotates and drives the workpiece to rotate in the PVD electroplating process; and the problems that a common hanging tool can only be used for installing the workpieces in a hanging mode, part of the workpieces do not have hanging points, and the workpieces are difficult to hang for electroplating are solved.
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Description

Technical Field

[0001] This utility model relates to the field of PVD electroplating technology, specifically to a PVD electroplating suspension fixture structure. Background Technology

[0002] PVD electroplating, or Physical Vapor Deposition, is an advanced surface treatment technology widely used in various fields. PVD electroplating is a technique that, under vacuum conditions, vaporizes the material source surface into gaseous atoms, molecules, or partially ionized ions using physical methods, and then deposits a thin film with specific functions onto the substrate surface through a low-pressure gas or plasma process. PVD electroplating is mainly divided into three categories: vacuum evaporation coating, vacuum sputtering coating, and vacuum ion plating. The basic principle of PVD electroplating includes three steps: vaporization of the plating material, migration of plating material atoms, molecules, or ions, and deposition of plating material atoms, molecules, or ions onto the substrate.

[0003] PVD electroplating produces virtually no harmful substances, resulting in minimal environmental pollution and aligning with green production and sustainable development requirements. It can deposit various materials onto diverse substrates, such as metals, alloys, and ceramics. PVD electroplating can produce high-purity, highly crystalline, and strongly adhesive thin films, suitable for aerospace, electronics, optics, machinery, and many other fields. PVD electroplating is widely used in decorative coatings, such as surface coatings for mobile phone cases, watches, jewelry, and eyeglasses. It is also used to deposit hard films on the surfaces of tools, drill bits, and molds, improving hardness, wear resistance, and corrosion resistance. Furthermore, PVD electroplating is used to deposit conductive and semiconductor thin films to improve the photoelectric conversion efficiency of solar cells. In semiconductor manufacturing, PVD electroplating is used to deposit metal and insulating films, significantly impacting chip performance and reliability.

[0004] In the common PVD electroplating process, the workpiece needs to be suspended inside the PVD electroplating machine using a suspension fixture. The PVD electroplating machine drives the suspension fixture to rotate, causing the workpiece to rotate inside the PVD electroplating machine, thus ensuring uniform electroplating. However, common suspension fixtures can only install workpieces by suspension, and some workpieces do not have suspension points, making it difficult to suspend them for electroplating. In view of this, this application proposes a PVD electroplating suspension fixture structure. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides a PVD electroplating suspension fixture structure, which has the advantages of placing workpieces on the top of the mounting base and intermediate box for PVD electroplating. It solves the problem that common suspension fixtures can only install workpieces by suspension, and some workpieces do not have suspension points, making it difficult to suspend them for electroplating.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a PVD electroplating suspension fixture structure, including a mounting base box, a bottom support rod fixedly mounted on the top of the mounting base box, two overlapping intermediate boxes provided on the top of the bottom support rod, a middle support rod fixedly mounted on the top of the intermediate boxes, a top plate fixedly mounted on the top of the upper middle support rod, a middle hook fixedly mounted on the bottom of the intermediate boxes, and a top hook fixedly mounted on the bottom of the top plate;

[0007] A middle partition is fixedly installed on the inner side wall of the middle box. Four middle turntables are rotatably installed on the top of the middle box. Four middle transmission wheels are rotatably installed on the top of the middle partition. The top of the middle transmission wheels is fixedly connected to the bottom of the middle turntable. Adjacent middle transmission wheels are connected by belt drive.

[0008] Furthermore, an intermediate motor is fixedly installed at the bottom of the intermediate partition, and the output shaft of the intermediate motor is fixedly connected to the bottom of one of the intermediate transmission wheels.

[0009] Furthermore, an intermediate battery is fixedly installed at the bottom of the intermediate partition, an intermediate charging port adapted to the intermediate battery is fixedly installed on the surface of the intermediate housing, and an intermediate anti-slip pad is fixedly installed on the top of the intermediate turntable.

[0010] Furthermore, a bottom partition is fixedly installed on the inner side wall of the mounting base box, and four bottom turntables are rotatably installed on the top of the mounting base box, with bottom anti-slip pads fixedly installed on the top of the bottom turntables.

[0011] Furthermore, four bottom drive wheels are rotatably mounted on the top of the bottom partition, the top of the bottom drive wheels are fixedly connected to the bottom of the bottom turntable, and adjacent bottom drive wheels are connected by belt drive.

[0012] Furthermore, a bottom motor is fixedly installed on the bottom of the bottom partition, the output shaft of the bottom motor is fixedly connected to the bottom of one of the bottom transmission wheels, a bottom battery is fixedly installed on the bottom of the bottom partition, and a bottom charging port adapted to the bottom battery is fixedly installed on one side of the mounting box.

[0013] Furthermore, support side plates are fixedly installed on the two mutually distant sides of the mounting base box, and mounting screws are threaded onto the top of the support side plates. A movable wheel is rotatably installed at one end of the mounting screw located at the bottom of the support side plate via a wheel frame, and an adjustment knob is fixedly installed at the top of the mounting screw.

[0014] Compared with the prior art, this utility model provides a PVD electroplating suspension fixture structure, which has the following beneficial effects:

[0015] This PVD electroplating suspension fixture structure features a rotatable central turntable at the top of the central housing, with an anti-slip pad on top of the turntable. Besides suspending the workpiece, it can also place the workpiece on top of the anti-slip pad for PVD electroplating. During the PVD electroplating process, the central turntable rotates, causing the workpiece to rotate, resulting in more uniform electroplating. This solves the problem of common suspension fixtures that only allow workpieces to be installed by suspension, and where some workpieces lack suspension points, making it difficult to suspend them for electroplating. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of this utility model;

[0017] Figure 2 This is a front view of the structure of this utility model;

[0018] Figure 3 This is a front sectional view of the middle box of this utility model;

[0019] Figure 4 This is a three-dimensional schematic diagram of the intermediate box of this utility model.

[0020] In the diagram: 1. Base box; 2. Bottom support rod; 3. Middle box; 31. Middle partition; 32. Middle turntable; 321. Middle anti-slip pad; 33. Middle drive wheel; 4. Middle support rod; 5. Top plate; 6. Middle hook; 7. Top hook; 8. Middle motor; 9. Middle battery; 10. Middle charging port; 11. Bottom partition; 12. Bottom turntable; 121. Bottom anti-slip pad; 13. Bottom drive wheel; 14. Bottom motor; 15. Bottom battery; 16. Bottom charging port; 17. Support side plate; 18. Mounting screw; 19. Caster wheel; 20. Adjustment knob. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Example 1: Please refer to Figures 1 to 4 A PVD electroplating suspension fixture structure includes a mounting base box 1, a bottom support rod 2 fixedly mounted on the top of the mounting base box 1, two overlapping intermediate boxes 3 set on the top of the bottom support rod 2, an intermediate support rod 4 fixedly mounted on the top of the intermediate boxes 3, a top plate 5 fixedly mounted on the top of the upper intermediate support rod 4, an intermediate hook 6 fixedly mounted on the bottom of the intermediate boxes 3, and a top hook 7 fixedly mounted on the bottom of the top plate 5.

[0023] The inner wall of the intermediate box 3 is fixedly installed with a middle partition plate 31, and four intermediate turntables 32 are rotatably installed on the top of the intermediate box 3. Four intermediate transmission wheels 33 are rotatably installed on the top of the middle partition plate 31. The top of the intermediate transmission wheels 33 is fixedly connected to the bottom of the intermediate turntable 32, and two adjacent intermediate transmission wheels 33 are connected by belt drive.

[0024] Secondly, an intermediate motor 8 is fixedly installed at the bottom of the intermediate partition 31, and the output shaft of the intermediate motor 8 is fixedly connected to the bottom of one of the intermediate transmission wheels 33. The intermediate motor 8 drives one of the intermediate transmission wheels 33 to rotate, which in turn drives the other intermediate transmission wheels 33 to rotate synchronously via a belt, thereby driving the four intermediate turntables 32 to rotate and causing the workpiece placed on top of the intermediate turntables 32 to rotate, making the electroplating of the workpiece more uniform.

[0025] An intermediate battery 9 is fixedly installed at the bottom of the intermediate partition 31, and an intermediate charging port 10 adapted to the intermediate battery 9 is fixedly installed on the surface of the intermediate housing 3. An intermediate anti-slip pad 321 is fixedly installed on the top of the intermediate turntable 32. The intermediate battery 9 is charged through the intermediate charging port 10, and the intermediate battery 9 provides power to the intermediate motor 8.

[0026] Meanwhile, a bottom partition 11 is fixedly installed on the inner side wall of the mounting base box 1, and four bottom turntables 12 are rotatably installed on the top of the mounting base box 1. A bottom anti-slip pad 121 is fixedly installed on the top of the bottom turntables 12.

[0027] The bottom partition 11 has four bottom drive wheels 13 rotatably mounted on its top. The top of the bottom drive wheels 13 is fixedly connected to the bottom of the bottom turntable 12, and adjacent bottom drive wheels 13 are connected by belt drive.

[0028] Secondly, a bottom motor 14 is fixedly installed on the bottom of the bottom partition 11. The output shaft of the bottom motor 14 is fixedly connected to the bottom of one of the bottom transmission wheels 13. A bottom battery 15 is fixedly installed on the bottom of the bottom partition 11. A bottom charging port 16 adapted to the bottom battery 15 is fixedly installed on one side of the mounting box 1. The bottom battery 15 is charged through the bottom charging port 16. The bottom battery 15 drives the bottom motor 14 to work, which drives the bottom transmission wheel 13 to rotate, which drives the bottom turntable 12 to rotate, and drives the workpiece placed on the bottom turntable 12 to rotate.

[0029] Example 2: Please refer to Figures 1 to 4Based on Embodiment 1, support side plates 17 are fixedly installed on the two mutually distant sides of the mounting base 1. A mounting screw 18 is threaded onto the top of the support side plate 17. A movable wheel 19 is rotatably mounted on one end of the mounting screw 18 at the bottom of the support side plate 17 via a wheel bracket. An adjustment knob 20 is fixedly installed on the top of the mounting screw 18. The movable wheel 19 allows the structure to move freely on the ground, facilitating the transfer of workpieces. During PVD electroplating, adjusting the knob 20 rotates the mounting screw 18, causing the movable wheel 19 to rise, and then the structure is placed inside the PVD electroplating machine.

[0030] In this embodiment, workpieces with suspension points are suspended at the bottom of the middle box 3 and the bottom of the top plate 5 via the middle hook 6 and the top hook 7 for PVD electroplating. Workpieces without suspension points are placed on the middle turntable 32 and the bottom turntable 12 for PVD electroplating, so that various different workpieces can be electroplated on this structure.

[0031] All electrical components mentioned in the text are electrically connected to the main controller and power supply. The main controller can be a conventional and known device such as a computer, and the existing publicly available power connection technology will not be elaborated in the text.

[0032] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0033] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A PVD electroplating suspension fixture structure, comprising a mounting base (1), characterized in that: The bottom support rod (2) is fixedly installed on the top of the mounting base box (1). Two overlapping intermediate boxes (3) are set on the top of the bottom support rod (2). An intermediate support rod (4) is fixedly installed on the top of the intermediate box (3). A top plate (5) is fixedly installed on the top of the upper intermediate support rod (4). An intermediate hook (6) is fixedly installed on the bottom of the intermediate box (3). A top hook (7) is fixedly installed on the bottom of the top plate (5). The inner sidewall of the intermediate box (3) is fixedly installed with a middle partition plate (31). Four intermediate turntables (32) are rotatably installed on the top of the intermediate box (3). Four intermediate transmission wheels (33) are rotatably installed on the top of the middle partition plate (31). The top of the intermediate transmission wheel (33) is fixedly connected to the bottom of the intermediate turntable (32). Adjacent intermediate transmission wheels (33) are connected by belt drive.

2. The PVD electroplating suspension fixture structure according to claim 1, characterized in that: An intermediate motor (8) is fixedly installed at the bottom of the intermediate partition (31), and the output shaft of the intermediate motor (8) is fixedly connected to the bottom of one of the intermediate transmission wheels (33).

3. The PVD electroplating suspension fixture structure according to claim 2, characterized in that: The bottom of the intermediate partition (31) is fixedly installed with an intermediate battery (9), the surface of the intermediate housing (3) is fixedly installed with an intermediate charging port (10) adapted to the intermediate battery (9), and the top of the intermediate turntable (32) is fixedly installed with an intermediate anti-slip pad (321).

4. The PVD electroplating suspension fixture structure according to claim 1, characterized in that: The inner wall of the mounting base (1) is fixedly fitted with a bottom partition (11), and four bottom turntables (12) are rotatably mounted on the top of the mounting base (1). Bottom anti-slip pads (121) are fixedly mounted on the top of the bottom turntables (12).

5. The PVD electroplating suspension fixture structure according to claim 4, characterized in that: The top of the bottom partition (11) is rotatably mounted with four bottom drive wheels (13). The top of the bottom drive wheels (13) is fixedly connected to the bottom of the bottom turntable (12). Adjacent bottom drive wheels (13) are connected by belt drive.

6. The PVD electroplating suspension fixture structure according to claim 5, characterized in that: A bottom motor (14) is fixedly installed on the bottom of the bottom partition (11). The output shaft of the bottom motor (14) is fixedly connected to the bottom of one of the bottom transmission wheels (13). A bottom battery (15) is fixedly installed on the bottom of the bottom partition (11). A bottom charging port (16) adapted to the bottom battery (15) is fixedly installed on one side of the mounting box (1).

7. The PVD electroplating suspension fixture structure according to claim 1, characterized in that: Supporting side plates (17) are fixedly installed on the two mutually distant sides of the mounting base (1). A mounting screw (18) is threaded onto the top of the supporting side plate (17). A movable wheel (19) is rotatably mounted on one end of the mounting screw (18) located at the bottom of the supporting side plate (17) via a wheel frame. An adjustment knob (20) is fixedly installed on the top of the mounting screw (18).