Crystal furnace high-temperature online atmosphere isolation gate valve device

Abstract

The utility model discloses a high-temperature online atmosphere isolation gate valve device of a crystal furnace, which is positioned between a furnace chamber and an auxiliary chamber, is used for cutting dirty materials on seed crystals by opening and closing, and comprises an upper valve body arranged below the auxiliary chamber and movably connected with the auxiliary chamber. The lower valve body is located below the upper valve body, and the top face of the lower valve body is detachably connected with the upper valve body and movably connected with the furnace chamber. The valve plate assembly part is arranged in the lower valve body, located between the upper valve body and the lower valve body, connected with the upper valve body and the lower valve body in a rolling mode and used for completing opening or closing action through reciprocating motion. When all dirty materials on the liquid level of the crucible are extracted by seed crystals, the dirty materials are lifted to the auxiliary chamber through the lifting mechanism, the valve plate assembly part is operated anticlockwise, the valve plate assembly part moves between the upper valve body and the lower valve body to close the gate valve, at the moment, the furnace chamber and the auxiliary chamber are isolated into an independent system, the dirty materials are cut off, and then the seed crystals are cut off. Therefore, the quality of the directly drawn single crystal is ensured.

Description

Technical Field

[0001] This utility model relates to the field of dirty material removal technology for seed crystal rods in crystal furnaces, and in particular to a high-temperature online atmosphere isolation gate valve device for crystal furnaces. Background Technology

[0002] A single crystal furnace is a device that melts polycrystalline materials such as polycrystalline silicon in an inert gas environment (mainly nitrogen and helium) using a graphite heater, and grows dislocation-free single crystals using the Czochralski method.

[0003] The structure of a single crystal furnace mainly includes: a sub-chamber, a furnace chamber, a furnace cover, a furnace cylinder, a crucible, and a lifting mechanism. When the single crystal furnace is working, after the polycrystalline material in the crucible is melted by the heater, some dirt will float on the liquid surface. Directly pulling single crystals will affect the quality of the single crystal and may even cause crystallization. Therefore, it is necessary to remove the dirt from the liquid surface. At the same time, it is also necessary to ensure that the vacuum degree or positive pressure atmosphere inside the furnace is not changed. This requires removing the dirt and lifting it to the sub-chamber, then closing the gate valve and cutting the dirt off the seed crystal.

[0004] Therefore, a device is needed to cut and remove the contaminant from the seed crystal. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides a high-temperature online atmosphere isolation gate valve device for crystal furnaces, which removes the dirt on the seed crystal rod by moving the valve plate assembly between the upper and lower valve bodies.

[0006] To achieve the above objectives, this utility model is implemented through the following technical solution:

[0007] A high-temperature online atmosphere isolation gate valve device for a crystal furnace, located between the furnace chamber and the auxiliary chamber, is used to remove contaminants from the seed crystal by opening and closing. The device includes:

[0008] The upper valve body is located below the auxiliary chamber and is movably connected to the auxiliary chamber.

[0009] The lower valve body is located below the upper valve body. Its top surface is detachably connected to the upper valve body and is movably connected to the furnace chamber.

[0010] The valve plate assembly is located in the lower valve body, between the upper and lower valve bodies, and is rotatably connected to both valve bodies. It is used to complete the opening or closing action through reciprocating motion.

[0011] Compared with the prior art, the present invention has the following advantages:

[0012] After all the contaminants on the surface of the molten crucible have been extracted by the seed crystal, they are lifted to the auxiliary chamber via the lifting mechanism. The valve plate assembly is then operated counter-clockwise, moving between the upper and lower valve bodies to close the gate valve. At this point, the furnace chamber and the auxiliary chamber are isolated into independent systems, and the contaminants are removed. After opening the auxiliary chamber door and removing the contaminants grown on the seed crystal, a vacuum is drawn, or a vacuum is drawn and then argon is added to ensure the atmosphere in the auxiliary chamber is the same as in the furnace chamber. The gate valve is then opened, and single crystal pulling can proceed normally, thus ensuring the quality of the directly pulled single crystals.

[0013] More preferably, the valve plate assembly includes:

[0014] The valve plate is mounted on the lower valve body, and its bottom surface is slidably connected to the lower valve body.

[0015] A guide plate is mounted on the valve plate, located between the valve plate and the upper valve body. Its bottom surface is fixedly connected to the top surface of the valve plate, and its top surface is slidably connected to the upper valve body.

[0016] The movable positioning component is set in the guide plate and is connected to the guide plate to position the valve plate on the guide plate.

[0017] The swing lever, mounted on the guide plate and rotatably connected to the guide plate, is used to control the opening and closing of the valve plate.

[0018] Using the above technical solution, the swing rod moves forward within the guide plate and drives the guide plate to move. With the cooperation of the moving positioning component, the guide plate drives the valve plate to move to close the slide valve, thus isolating the furnace chamber and the auxiliary chamber into independent spaces.

[0019] More preferably, the movable positioning element includes:

[0020] The first needle roller bearing is longitudinally arranged in the guide plate, distributed on the edge and end of the guide plate, and slidably connected to the lower valve body.

[0021] The second needle roller bearing is laterally mounted on the guide plate and is tactilely connected to the guide plate and the upper valve body, respectively, and is used to position the valve plate between the upper valve body and the lower valve body.

[0022] By adopting the above technical solution, the valve plate is positioned and moved between the upper valve body and the valve body through the first needle roller bearing and the second needle roller bearing.

[0023] More preferably, the valve plate assembly also includes:

[0024] There are four connecting rods, which are set in the guide plate and symmetrically distributed on the guide plate, and are connected to the valve plate and the guide plate respectively.

[0025] Two tension springs are provided, one connected to the guide plate and the other to the valve plate, and are used to adjust the preload between the valve plate and the guide plate.

[0026] By adopting the above technical solution, the valve plate and the guide plate are well connected together through the connecting rod and the tension spring.

[0027] Further optimization involves a guide groove on the guide plate, which is racetrack-shaped, and the swing rod is rotatably connected to the guide groove.

[0028] Using the above technical solution, the swing rod is installed in the guide plate through the guide groove to realize the opening and closing of the valve plate, thereby realizing the opening and closing of the slide valve.

[0029] Further optimizations include:

[0030] A sealing cap is installed on the upper valve body and is sleeved with a swing rod, which passes through the sealing cap.

[0031] O-rings are respectively installed between the upper and lower valve bodies and between the sealing cover and the swing rod.

[0032] The water jacket is installed on the valve plate, located at the end of the valve plate, and is fixedly connected to the valve plate.

[0033] Using the above technical solution, the swing rod is well connected to the upper valve body through the sealing cover and O-ring, and the O-ring also provides a good seal between the upper and lower valve bodies. Cooling water in the water jacket provides cooling to the valve plate.

[0034] Further optimization involves providing a water-cooling groove on the valve plate, which is connected to the water jacket to cool the high-temperature atmosphere inside the furnace chamber with cooling water from the water jacket.

[0035] Using the above technical solution, the cooling water flowing through the water jacket flows into the water-cooling tank, and then transfers the cooling capacity to the valve plate, thereby reducing the temperature inside the furnace.

[0036] Further optimization involves having five first needle roller bearings, with four first needle roller bearings distributed on both sides of the guide plate and adapted to the guide plate, and one first needle roller bearing adapted to the side of the guide plate away from the swing rod.

[0037] By adopting the above technical solution, the valve plate can move together with the guide plate between the upper valve body and the lower valve body.

[0038] Further optimization involves having four second needle roller bearings, each distributed on one side of one of the four first needle roller bearings.

[0039] By adopting the above technical solution, the valve plate and guide plate are well positioned on the lower valve body.

[0040] A further optimization involves connecting a swing handle to the swing arm, with the swing handle being detachably connected to the swing arm.

[0041] By adopting the above technical solution, the swing handle is pushed, and the swing handle drives the swing rod to move in the guide groove, thereby driving the valve plate to move and realize the opening and closing of the slide valve. Attached Figure Description

[0042] Figure 1 This is a cross-sectional structural diagram of this embodiment.

[0043] Figure 2 This is a schematic diagram of the lower valve body in this embodiment.

[0044] Figure 3 This is a structural schematic diagram of the valve plate assembly in this embodiment.

[0045] Figure 4 This is a schematic diagram of the guide plate in this embodiment.

[0046] Figure 5 This is a schematic diagram of the valve plate in this embodiment.

[0047] Reference numerals in the attached drawings: 1-furnace chamber; 2-sub-chamber; 3-lower valve body; 4-upper valve body; 5-valve plate assembly; 51-valve plate; 511-water cooling tank; 52-guide plate; 521-guide groove; 53-moving positioning component; 531-first needle roller bearing; 532-second needle roller bearing; 54-swing rod; 55-connecting rod; 56-tension spring; 57-swing handle; 6-valve port; 7-O-ring seal; 8-water jacket; 9-sealing cover. Detailed Implementation

[0048] The following is in conjunction with the appendix Figures 1-5 This utility model will be described in further detail.

[0049] A high-temperature online atmosphere isolation gate valve device for a crystal furnace is located between furnace chamber 1 and auxiliary chamber 2, such as... Figure 1 As shown, the method for removing dirt from the seed crystal by opening and closing includes:

[0050] The upper valve body 4 is located below the auxiliary chamber 2 and is movably connected to the auxiliary chamber 2.

[0051] The lower valve body 3 is located below the upper valve body 4. Its top surface is detachably connected to the upper valve body 4 and movably connected to the furnace chamber 1.

[0052] The valve plate assembly 5 is located in the lower valve body 3, between the upper valve body 4 and the lower valve body 3, and is rotatably connected to the upper valve body 4 and the lower valve body 3. It is used to complete the opening or closing action through reciprocating motion.

[0053] After all the contaminants on the surface of the molten crucible have been extracted by the seed crystal, the contaminants are lifted to the secondary chamber 2 via the lifting mechanism. Then, the valve plate assembly 5 is operated counterclockwise. The valve plate assembly 5 moves between the upper valve body 4 and the lower valve body 3, closing the gate valve. At this point, furnace chamber 1 and secondary chamber 2 are isolated into independent systems, and the contaminants are removed. After opening the door of secondary chamber 2 and removing the contaminants grown on the seed crystal, a vacuum is drawn, or after vacuuming and purging with argon gas to make the atmosphere in secondary chamber 2 the same as in furnace chamber 1. Then, the gate valve is opened, and single crystals can be pulled normally, thus ensuring the quality of directly pulled single crystals.

[0054] Specifically, such as Figure 1 , Figure 2 as well as Figure 3 As shown, in this embodiment, the valve plate assembly 5 includes:

[0055] Valve plate 51 is mounted on the lower valve body 3, and its bottom surface is slidably connected to the lower valve body 3.

[0056] The guide plate 52 is disposed on the valve plate 51 and located between the valve plate 51 and the upper valve body 4. Its bottom surface is fixedly connected to the top surface of the valve plate 51, and its top surface is slidably connected to the upper valve body 4.

[0057] The movable positioning component 53 is disposed in the guide plate 52 and is connected to the guide plate 52 to position the valve plate 51 on the guide plate 52.

[0058] The swing arm 54 is mounted on the guide plate 52 and is rotatably connected to the guide plate 52. It is used to control the opening and closing of the valve plate 51.

[0059] The swing rod 54 moves forward within the guide plate 52 and drives the guide plate 52 to move. With the cooperation of the moving positioning component 53, the guide plate 52 drives the valve plate 51 to move to close the slide valve, thus isolating the furnace chamber 1 and the auxiliary chamber 2 into independent spaces.

[0060] Specifically, such as Figure 3 and Figure 4 As shown, in this embodiment, the movable positioning element 53 includes:

[0061] The first needle roller bearing 531 is longitudinally arranged in the guide plate 52, distributed on the edge and end of the guide plate 52, and is slidably connected to the lower valve body 3.

[0062] The second needle roller bearing 532 is laterally disposed on the guide plate 52 and is tactilely connected to the guide plate 52 and the upper valve body 4, respectively, and is used to position the valve plate 51 between the upper valve body 4 and the lower valve body 3.

[0063] The first needle roller bearing 531 and the second needle roller bearing 532 are used to position and move the valve plate 51 between the upper valve body 4 and the valve body.

[0064] Specifically, such as Figure 4 As shown, in this embodiment, the valve plate assembly 5 also includes:

[0065] There are four connecting rods 55, which are set in the guide plate 52 and symmetrically distributed on the guide plate 52, and are respectively connected to the valve plate 51 and the guide plate 52.

[0066] There are two tension springs 56, which are connected to the guide plate 52 and the valve plate 51 respectively, and are used to adjust the preload between the valve plate 51 and the guide plate 52.

[0067] The valve plate 51 and the guide plate 52 are well connected by the connecting rod 55 and the tension spring 56.

[0068] Specifically, such as Figure 4 As shown, in this embodiment, a guide groove 521 is provided on the guide plate 52. The guide groove 521 is racetrack shaped. The swing rod 54 is rotatably connected to the guide groove 521. The swing rod 54 is installed in the guide plate 52 through the guide groove 521 to realize the opening and closing of the valve plate 51, thereby realizing the opening and closing of the slide valve.

[0069] Specifically, such as Figure 2 As shown, this embodiment also includes:

[0070] The sealing cover 9 is set on the upper valve body 4 and is sleeved with the swing rod 54, which passes through the sealing cover 9.

[0071] O-rings 7 are respectively installed between the upper valve body 4 and the lower valve body 3, and between the sealing cover 9 and the swing rod 54.

[0072] Water jacket 8 is installed on valve plate 51, located at the end of valve plate 51, and is fixedly connected to valve plate 51.

[0073] The swing rod 54 is securely connected to the upper valve body 4 via the sealing cap 9 and the O-ring 7, and the O-ring 7 also provides a good seal between the upper valve body 4 and the lower valve body 3. Cooling water in the water jacket 8 provides cooling to the valve plate 51.

[0074] Specifically, such as Figure 1 and Figure 2 As shown, in this embodiment, a water-cooling groove 511 is provided on the valve plate 51. The water-cooling groove 511 is connected to the water jacket 8 and is used to cool the high-temperature atmosphere in the furnace chamber 1 with cooling water from the water jacket 8. The cooling water flowing through the water jacket 8 flows into the water-cooling groove 511 and then transfers the cooling capacity to the valve plate 51, thereby reducing the temperature in the furnace chamber 1 through the valve plate 51.

[0075] Specifically, such as Figure 3 and Figure 4As shown, in this embodiment, there are 5 first needle roller bearings 531, of which 4 first needle roller bearings 531 are distributed on both sides of the guide plate 52 and are adapted to the guide plate 52, and 1 first needle roller bearing 531 is adapted to the side of the guide plate 52 away from the swing rod 54, so that the valve plate 51 can move together with the guide plate 52 between the upper valve body 4 and the lower valve body 3.

[0076] Specifically, such as Figure 4 As shown, in this embodiment, there are four second needle roller bearings 532, which are distributed on one side of the four first needle roller bearings 531, so as to properly position the valve plate 51 and the guide plate 52 on the lower valve body 3.

[0077] Specifically, such as Figure 4 and Figure 5 As shown, in this embodiment, a swing handle 57 is connected to the swing rod 54. The swing handle 57 is detachably connected to the swing rod 54. By pushing the swing handle 57, the swing handle 57 drives the swing rod 54 to move in the guide groove 521, thereby driving the valve plate 51 to move and realize the opening and closing of the slide valve.

[0078] Please combine Figures 1-5 As shown, the working principle of the embodiments in this book is described as follows:

[0079] After the valve plate assembly 5 is installed into the lower valve body 3, the upper valve body 4 is covered and the upper valve body 4 and the lower valve body 3 are connected and fastened with bolts. The upper valve body 4 and the lower valve body 3 are sealed by O-ring seal 7. The swing rod 54 is sealed with the upper valve body 4 by O-ring seal 7, and the sealing cover 9 is bolted to the upper valve body 4.

[0080] When starting, push the swing handle 57 clockwise in the opposite direction. The swing handle 57 drives the swing rod 54 to move. The swing rod 54 moves in the guide groove 521. The swing rod 54 drives the guide plate 52 to move to the right, which in turn drives the valve plate 51 to move to the right and open the slide gate valve. After the seed crystal rod is lifted into the auxiliary chamber 2 by the weighing mechanism, pull the swing handle 57 counterclockwise in the opposite direction. The swing rod 54 moves in the guide groove 521. The swing rod 54 drives the guide plate 52 to move to the left, which in turn drives the valve plate 51 to move to the left and close the slide gate valve, while removing the dirty material.

[0081] In summary, after removing the contaminant from the seed crystal through the above process, and after vacuuming, ensuring that the pressure in the auxiliary chamber 2 and the furnace chamber 1 are the same, the insert valve can be opened to pull single crystals normally, thus improving the quality of directly pulled single crystals.

[0082] This specific embodiment is merely an explanation of the utility model and is not intended to limit it. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but such modifications are protected by patent law as long as they fall within the scope of protection of this utility model.

Claims

1. A high-temperature online atmosphere isolation gate valve device for a crystal furnace, characterized in that, Located between the furnace chamber and the auxiliary chamber (2), it is used to remove dirt from the seed crystal by opening and closing, including: The upper valve body (4) is located below the sub-chamber (2) and is movably connected to the sub-chamber (2); The lower valve body (3) is located below the upper valve body (4), and its top surface is detachably connected to the upper valve body (4) and movably connected to the furnace chamber; The valve plate assembly (5) is disposed in the lower valve body (3), located between the upper valve body (4) and the lower valve body (3), and is rotatably connected to the upper valve body (4) and the lower valve body (3), and is used to complete the opening or closing action through reciprocating motion.

2. The high-temperature online atmosphere isolation gate valve device for crystal furnaces according to claim 1, characterized in that, The valve plate assembly (5) includes: A valve plate (51) is disposed on the lower valve body (3), and its bottom surface is slidably connected to the lower valve body (3); A guide plate (52) is disposed on the valve plate (51) and located between the valve plate (51) and the upper valve body (4). Its bottom surface is fixedly connected to the top surface of the valve plate (51), and its top surface is slidably connected to the upper valve body (4). A movable positioning component (53) is disposed in the guide plate (52) and is connected to the guide plate (52) to position the valve plate (51) on the guide plate (52); A swing rod (54) is mounted on the guide plate (52) and is rotatably connected to the guide plate (52) to control the opening and closing of the valve plate (51).

3. The high-temperature online atmosphere isolation gate valve device for crystal furnaces according to claim 2, characterized in that, The movable positioning element (53) includes: The first needle roller bearing (531) is longitudinally arranged in the guide plate (52) and distributed on the edge and end of the guide plate (52), and is slidably connected to the lower valve body (3); The second needle roller bearing (532) is laterally arranged on the guide plate (52) and is tumbledly connected to the guide plate (52) and the upper valve body (4) respectively, and is used to position the valve plate (51) between the upper valve body (4) and the lower valve body (3).

4. The high-temperature online atmosphere isolation gate valve device for crystal furnaces according to claim 3, characterized in that, The valve plate assembly (5) also includes: There are 4 connecting rods (55) arranged in the guide plate (52) and symmetrically distributed on the guide plate (52), respectively connected to the valve plate (51) and the guide plate (52); Two tension springs (56) are connected to the guide plate (52) and the valve plate (51) respectively, and are used to adjust the preload between the valve plate (51) and the guide plate (52).

5. The high-temperature online atmosphere isolation gate valve device for crystal furnaces according to claim 2, characterized in that, The guide plate (52) has a guide groove (521) which is racetrack shaped, and the swing rod (54) is rotatably connected to the guide groove (521).

6. The high-temperature online atmosphere isolation gate valve device for crystal furnaces according to claim 5, characterized in that, Also includes: A sealing cover (9) is provided on the upper valve body (4) and sleeved with the swing rod (54), the swing rod (54) passing through the sealing cover (9); O-rings (7) are respectively disposed between the upper valve body (4) and the lower valve body (3), and between the sealing cover (9) and the swing rod (54); A water jacket (8) is disposed on the valve plate (51), located at the end of the valve plate (51), and is fixedly connected to the valve plate (51).

7. The high-temperature online atmosphere isolation gate valve device for crystal furnaces according to claim 6, characterized in that, A water-cooling groove (511) is provided on the valve plate (51), and the water-cooling groove (511) is connected to the water jacket (8) for cooling the high-temperature atmosphere in the furnace chamber with cooling water from the water jacket (8).

8. The high-temperature online atmosphere isolation gate valve device for crystal furnaces according to claim 3, characterized in that, The number of the first needle roller bearings (531) is 5, of which 4 of the first needle roller bearings (531) are distributed on both sides of the guide plate (52) and are adapted to the guide plate (52), and 1 of the first needle roller bearings (531) is adapted to the side of the guide plate (52) away from the swing rod (54).

9. The high-temperature online atmosphere isolation gate valve device for crystal furnaces according to claim 3, characterized in that, There are four second needle roller bearings (532), which are distributed on one side of the four first needle roller bearings (531).

10. The high-temperature online atmosphere isolation gate valve device for crystal furnaces according to claim 2, characterized in that, The swing rod (54) is connected to a swing handle (57), and the swing handle (57) is detachably connected to the swing rod (54).

Images