Diaphragm structure applied to semiconductor pneumatic diaphragm pump

Abstract

The utility model discloses a diaphragm structure for a semiconductor diaphragm pump. The diaphragm structure comprises a reinforcing assembly, a diaphragm assembly and a connecting assembly, the connecting assembly is connected with the reinforcing assembly through the diaphragm assembly, the reinforcing assembly is located at the front end of the diaphragm assembly, and the connecting assembly is located at the rear end of the diaphragm assembly; the reinforcing assembly comprises an outer shell, a spring body and a supporting body. The supporting body is connected with the outer shell through the spring body, one end of the supporting body is connected with the spring body, and the other end of the supporting body is connected with the diaphragm assembly. The diaphragm assembly is arranged between the reinforcing assembly and the connecting assembly, the position of the diaphragm can be effectively fixed and supported, meanwhile, the outer shell, the spring body and the supporting body are arranged in the reinforcing assembly, the spring body can reversely provide acting force for the supporting body in the process of compressing the supporting body and the spring body, and therefore the supporting body can be compressed. And the diaphragm body is compressed to ensure the sealing performance, so that the diaphragm has better stability.

Description

Technical Field

[0001] This utility model relates to the field of diaphragm structure technology for pneumatic diaphragm pumps, and more particularly to a diaphragm structure applied to semiconductor pneumatic diaphragm pumps. Background Technology

[0002] A pneumatic diaphragm pump is a new type of fluid machinery that uses the reciprocating motion of a diaphragm to achieve the purpose of liquid transportation. It mainly uses compressed air as its main power source and has a strong self-priming ability. It can transport various corrosive, highly toxic, flammable, volatile liquids, as well as liquids containing small particles and high viscosity. It can support forward and reverse rotation and has good leak-proof, corrosion-resistant, and easy-to-maintain characteristics.

[0003] Pneumatic diaphragm pumps are also widely used in the semiconductor field, typically for conveying various chemical liquids, etching solutions, cleaning solutions, waste liquids, etc. In actual use, the diaphragm structure, as an important conveying component, plays a major role in liquid transportation. Currently, Chinese patent CN218266271U discloses a structure for replacing the composite diaphragm in a pneumatic diaphragm pump. The overall diaphragm structure disclosed in this solution is relatively simple, with only a first diaphragm clamping component and a second diaphragm clamping component on both sides of the diaphragm. During long-term use, its stability is poor, and problems such as damage and cracking of the diaphragm structure during reciprocating motion, loosening of the diaphragm from the external fixing device, and reduced firmness may occur, resulting in reduced sealing performance and durability of the pneumatic diaphragm pump. Utility Model Content

[0004] To address the aforementioned issues, this application proposes a diaphragm structure for a semiconductor pneumatic diaphragm pump. This structure solves the problems of existing technologies, such as a simple diaphragm structure, easy damage to the diaphragm structure, and potentially unstable connection between the diaphragm and external fixing devices during use. The result is a more stable, well-sealed, and durable semiconductor pneumatic diaphragm pump during long-term use.

[0005] This utility model provides the following solution:

[0006] A diaphragm structure for a semiconductor pneumatic diaphragm pump includes a reinforcing component, a diaphragm assembly, and a connecting component. The connecting component is connected to the reinforcing component through the diaphragm assembly, wherein the reinforcing component is located at the front end of the diaphragm assembly and the connecting component is located at the rear end of the diaphragm assembly. The reinforcing component includes a housing, a spring body, and a support body. The support body is connected to the housing through the spring body, one end of the support body is connected to the spring body, and the other end of the support body is connected to the diaphragm assembly.

[0007] Furthermore, the diaphragm assembly includes a diaphragm body, a first fixing plate, and a second fixing plate, with the diaphragm body located between the first fixing plate and the second fixing plate.

[0008] Furthermore, a reinforcing layer is provided in the diaphragm body, which is a fabric reinforcing layer.

[0009] Furthermore, the outer shell is provided with protrusions, and the diaphragm is provided with a groove. The outer shell is connected to the groove on the diaphragm through the protrusions.

[0010] Furthermore, the connecting assembly includes a threaded rod and a fastener, with the threaded rod connected to the fastener via threads.

[0011] Furthermore, the connecting assembly also includes a fixing gasket, one end of which is connected to the diaphragm assembly, and the other end of which is connected to the fixing member.

[0012] Furthermore, the outer casing has a threaded groove inside, through which the outer casing is connected to the connecting assembly.

[0013] Furthermore, a boss is provided inside the outer casing near the threaded groove. One end of the spring body is connected to the boss, and the other end is connected to the support body.

[0014] Furthermore, a limit stop is provided at the end of the support body near the spring. The limit stop is used to limit the position of the spring. The support body and the limit stop are designed as a single unit.

[0015] Furthermore, the outermost side of the diaphragm body is provided with a first connecting hole at equal intervals, and the first fixing plate and the second fixing plate are provided with a second connecting hole at equal intervals, and the first connecting hole and the second connecting hole are connected.

[0016] The beneficial effects of this application include, but are not limited to:

[0017] (1) By setting up a reinforcing component, a diaphragm component, and a connecting component, and placing the diaphragm component between the reinforcing component and the connecting component, the position of the diaphragm can be effectively fixed and supported, so that the diaphragm can maintain better stability during the reciprocating liquid transport process. At the same time, the reinforcing component is equipped with an outer shell, a spring body, and a support body, so that during the compression of the support body and the spring body, the spring body can provide a reverse force to the support body, better press the diaphragm body to ensure its sealing performance, so that the diaphragm has better stability.

[0018] (2) By setting a first fixing plate and a second fixing plate on both sides of the diaphragm body and setting a fabric reinforcement layer inside the diaphragm body, the strength and toughness of the diaphragm itself can be effectively improved. At the same time, the first fixing plate and the second fixing plate can reinforce the diaphragm body to prevent cracking during large-amplitude reciprocating motion, further improving the connection reliability between the diaphragm pump and the diaphragm structure, and making the diaphragm have better stability.

[0019] (3) By setting protrusions on the outer shell and grooves on the diaphragm, the positions of the outer shell and the diaphragm can be better defined. At the same time, the protrusions on the upper part of the outer shell and the grooves on the diaphragm fit tightly together, so that the outer shell, as a fixed device, will not move relative to the diaphragm during the reciprocating motion of the diaphragm, thereby further improving the sealing and stability of the diaphragm structure. Attached Figure Description

[0020] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0021] Figure 1 This is a front view of the diaphragm structure provided by this utility model;

[0022] Figure 2 This is a cross-sectional schematic diagram of the diaphragm structure provided by this utility model;

[0023] Figure 3 This is a rear view of the diaphragm structure provided by this utility model;

[0024] Figure 4 This is a schematic diagram of section A of the diaphragm structure provided by this utility model.

[0025] List of components and reference numerals:

[0026] 1. Reinforcing component; 2. Diaphragm assembly; 3. Connecting component; 101. Threaded groove; 102. Boss; 103. Outer shell; 104. Protrusion; 105. Support body; 106. Spring body; 107. Limiting stop; 201. Diaphragm body; 202. First fixing plate; 203. First connecting hole; 204. Second fixing plate; 205. Second connecting hole; 206. Groove; 301. Threaded rod; 302. Fixing component; 303. Fixing gasket. Detailed Implementation

[0027] To more clearly illustrate the overall concept of this application, a detailed explanation is provided below with reference to the accompanying drawings.

[0028] To better understand the above-mentioned objectives, features, and advantages of this application, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0029] Many specific details are set forth in the following description in order to provide a full understanding of this application. However, this application may also be implemented in other ways different from those described herein. Therefore, the scope of protection of this application is not limited to the specific embodiments disclosed below.

[0030] Furthermore, it should be understood in the description of this application that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0031] A diaphragm structure for use in semiconductor pneumatic diaphragm pumps, such as Figure 2-3 As shown, it includes a reinforcing component 1, a diaphragm assembly 2, and a connecting component 3; the connecting component 3 is connected to the reinforcing component 1 through the diaphragm assembly 2, wherein the reinforcing component 1 is located at the front end of the diaphragm assembly 2, and the connecting component 3 is located at the rear end of the diaphragm assembly 2; the reinforcing component 1 includes a housing 103, a spring 106, and a support 105; the support 105 is connected to the housing 103 through the spring 106, one end of the support 105 is connected to the spring 106, and the other end of the support 105 is connected to the diaphragm assembly 2. By setting up a reinforcing component 1, a diaphragm component 2, and a connecting component 3, and placing the diaphragm component 2 between the reinforcing component 1 and the connecting component 3, the position of the diaphragm can be effectively fixed and supported, ensuring that the diaphragm does not shift position during reciprocating liquid delivery and maintaining better stability and sealing. Additionally, the reinforcing component 1 also includes a housing 103, a spring 106, and a support 105. One end of the spring 106 is in direct contact with the interior of the housing 103, and the other end is in direct contact with the support 105. The end of 105 away from the spring body 106 is in direct contact with the diaphragm assembly 2. The connecting assembly 3 squeezes the diaphragm towards the reinforcing assembly 1, making the connection of the diaphragm structure more stable. At the same time, when the diaphragm body 201 is squeezed, it will come into contact with the outer shell 103 and the support body 105. At this time, the diaphragm body 201 will apply pressure to the support body 105. While the spring body 106 is compressed, it will also react on the support body 105. The support body 105 will further press the diaphragm to better ensure its sealing and stability and will not shift during the reciprocating motion.

[0032] In another embodiment, such as Figure 2As shown, the diaphragm assembly 2 includes a diaphragm body 201, a first fixing plate 202, and a second fixing plate 204, with the diaphragm body 201 located between the first fixing plate 202 and the second fixing plate 204. By providing the first fixing plate 202 and the second fixing plate 204 on both sides of the diaphragm body 201, the first fixing plate 202 and the second fixing plate 204 can reinforce the area around the diaphragm body 201, preventing cracking during large-amplitude reciprocating motion, further improving the connection reliability between the diaphragm pump and the diaphragm structure, and giving the diaphragm structure better stability.

[0033] In another embodiment, such as Figure 2 As shown, a reinforcing layer, which is a fabric reinforcing layer, is provided in the diaphragm body 201. By providing a fabric reinforcing layer inside the diaphragm body 201, the strength and toughness of the diaphragm assembly 2 itself can be effectively improved, ensuring that it will not crack during reciprocating motion. At the same time, the fabric reinforcing layer can also be set as a stainless steel wire mesh or a rubber reinforcing layer as needed to better meet the requirements of diaphragm use.

[0034] In another embodiment, such as Figure 1-2 As shown, the outer shell 103 is also provided with a protrusion 104, and the diaphragm body 201 is provided with a groove 206. The outer shell 103 is connected to the groove 206 on the diaphragm body 201 through the protrusion 104. By providing a protrusion 104 on the upper part of the outer shell 103 and a groove 206 on the diaphragm body 201, the outer shell 103 and the protrusion 104 can be tightly fitted and connected to the groove 206 on the diaphragm body 201. This ensures that the diaphragm body 201 structure will not loosen during reciprocating motion, and the outer shell 103, as a fixing device, will not shift or rotate slightly, thus improving the connection sealing and overall stability.

[0035] In another embodiment, such as Figure 2-4 As shown, the connecting assembly 3 includes a threaded rod 301 and a fixing member 302. The threaded rod 301 is connected to the fixing member 302 by threads. The end of the threaded rod 301 is connected to the outer shell 103. When the diaphragm body 201 passes through the threaded rod 301, the fixing member 302 provides a compressive force to the diaphragm assembly 2 through the rotation of the threaded rod 301, thereby fixing the diaphragm assembly 2.

[0036] In another embodiment, such as Figure 2-4As shown, the connecting assembly 3 also includes a fixing gasket 303. One end of the fixing gasket 303 is connected to the diaphragm assembly 2, and the other end of the fixing gasket 303 is connected to the fixing member 302. By providing a fixing gasket 303 between the diaphragm body 201 and the fixing member 302, firstly, it can prevent the fixing member 302 from directly contacting the diaphragm and causing localized stress; secondly, it can increase the friction between the fixing member 302 and the fixing gasket 303, and between the fixing gasket 303 and the diaphragm body 201, preventing rotational deviation; and thirdly, it can provide a certain buffering and protection effect on the diaphragm during the reciprocating motion of the diaphragm body 201. Here, the material of the fixing gasket 303 can be metal, and rubber is not limited.

[0037] In another embodiment, such as Figure 3 As shown, the outer casing 103 has a threaded groove 101 inside, and the outer casing 103 is connected to the connecting assembly 3 through the threaded groove 101. By providing the threaded groove 101 inside the outer casing 103, the threaded rod 301 in the connecting assembly 3 is connected to the threaded groove 101 inside the outer casing 103 to form a stable integral structure, so that the diaphragm 201 is better fixed on the threaded rod 301.

[0038] In another embodiment, such as Figure 3 As shown, a boss 102 is provided inside the outer casing 103 near the threaded groove 101. One end of the spring body 106 is connected to the boss 102, and the other end is connected to the support body 105. By providing the boss 102 inside the outer casing 103 and the spring body 106 inside, with one end of the spring body 106 connected to the support body 105 and the other end connected to the boss 102, the support body 105 can exert a force on the spring, compressing the spring. The spring then provides a counterforce to the support body 105, better supporting the diaphragm, preventing positional shift and rotation, and improving the stability of the device.

[0039] In another embodiment, such as Figure 3 As shown, a limiting stop 107 is also provided at the end of the support body 105 near the spring. The limiting stop 107 is used to limit the position of the spring. The support body 105 and the limiting stop 107 are designed as a single unit. By setting the limiting stop 107, the spring can be effectively fixed at the fixed position of the support body 105 and the boss 102, and no positional displacement will occur. In particular, during the compression process, the spring will not shift due to compression.

[0040] In another embodiment, Figure 1As shown, the outermost side of the diaphragm body 201 has a first connecting hole that is equidistantly provided, and the first fixing plate 202 and the second fixing plate 204 have second connecting holes 205 that are equidistantly provided, and the first connecting holes and the second connecting holes 205 are connected. By providing the second connecting holes 205 on the first fixing plate 202 and the second fixing plate 204, which can communicate with the first connecting holes on the outermost side of the diaphragm body 201, the diaphragm body 201 can be protected, preventing problems such as breakage at the edge connection of the diaphragm body 201.

[0041] The above description is merely an embodiment of this application and is not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. A diaphragm structure for use in a semiconductor pneumatic diaphragm pump, characterized in that, Includes reinforcing components, diaphragm components, and connecting components; The connecting component is connected to the reinforcing component via the diaphragm component, wherein the reinforcing component is located at the front end of the diaphragm component and the connecting component is located at the rear end of the diaphragm component; The reinforcing component includes an outer shell, a spring body, and a support body; the support body is connected to the outer shell via the spring body, one end of the support body is connected to the spring body, and the other end of the support body is connected to the diaphragm assembly.

2. The diaphragm structure according to claim 1, characterized in that, The diaphragm assembly includes a diaphragm body, a first fixing plate, and a second fixing plate, with the diaphragm body located between the first fixing plate and the second fixing plate.

3. The diaphragm structure according to claim 2, characterized in that, The diaphragm body is provided with a reinforcing layer, which is a fabric reinforcing layer.

4. The diaphragm structure according to claim 2, characterized in that, The outer shell is also provided with a protrusion, and the diaphragm is provided with a groove. The outer shell is connected to the groove on the diaphragm through the protrusion.

5. The diaphragm structure according to claim 1, characterized in that, The connecting assembly includes a threaded rod and a fixing member, wherein the threaded rod is connected to the fixing member by threads.

6. The diaphragm structure according to claim 5, characterized in that, The connecting assembly further includes a fixing gasket, one end of which is connected to the diaphragm assembly and the other end of which is connected to a fixing member.

7. The diaphragm structure according to claim 1, characterized in that, The outer casing has a threaded groove inside, and the outer casing is connected to the connecting assembly through the threaded groove.

8. The diaphragm structure according to claim 7, characterized in that, A boss is provided inside the outer casing near the threaded groove. One end of the spring body is connected to the boss, and the other end is connected to the support body.

9. The diaphragm structure according to claim 1, characterized in that, The support body is also provided with a limit stop at one end near the spring. The limit stop is used to limit the position of the spring. The support body and the limit stop are designed as a single unit.

10. The diaphragm structure according to claim 2, characterized in that, The outermost side of the diaphragm is provided with a first connecting hole at equal intervals, and the first fixing plate and the second fixing plate are provided with a second connecting hole at equal intervals. The first connecting hole and the second connecting hole are connected.

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