Cleaning device

Abstract

The utility model relates to the technical field of cleaning equipment, in particular to a cleaning device. The cleaning device is suitable for cleaning the carrying disc and comprises a conveying assembly used for conveying the carrying disc; the cleaning assembly comprises a cleaning liquid storage unit and a first spray head, the cleaning liquid storage unit is used for conveying cleaning liquid to the first spray head, and the first spray head is used for spraying the cleaning liquid to the carrying disc in the conveying process; the drying assembly is used for carrying out drying treatment on the cleaned carrying disc; the conveying assembly is arranged to be used for enabling the carrying disc to be kept in an upright state in the conveying process. According to the cleaning device, the problem that viscous foreign matter particles on the surface of the carrying disc are difficult to remove through an existing carrying disc cleaning method can be solved, and the cleaning effect can be improved.

Description

Technical Field

[0001] This application relates to the field of cleaning equipment technology, and more specifically, to a cleaning device suitable for cleaning trays. Background Technology

[0002] After wafers are diced into individual chips, they are typically placed in resin carriers for encapsulation. To prevent contamination of the chips and resulting in package failure, the carriers usually need to be cleaned before use.

[0003] Current methods for cleaning carrier trays involve horizontally transporting the trays through a cleaning area using belts, rollers, or other tracks. Compressed dry gas and vacuum are then used to clean the particles adhering to the trays, achieving the cleanliness requirements of a cleanroom. However, these methods are ineffective at removing sticky foreign particles from the tray surface, resulting in poor cleaning performance. Utility Model Content

[0004] This application provides at least one cleaning device suitable for cleaning carrier disks, which can improve the problem that existing carrier disk cleaning methods have difficulty removing sticky foreign particles from the surface of the carrier disk, and is conducive to improving the cleaning effect.

[0005] This application provides a cleaning device, including: a conveying assembly for conveying the carrier tray; a cleaning assembly including a cleaning fluid storage unit and a first nozzle, the cleaning fluid storage unit for supplying cleaning fluid to the first nozzle, and the first nozzle for spraying cleaning fluid onto the carrier tray during conveying; and a drying assembly for drying the cleaned carrier tray; wherein the conveying assembly is configured to keep the carrier tray upright during conveying.

[0006] In one optional embodiment, the conveying assembly includes an upper roller and a lower roller, which are parallel to each other and arranged opposite to each other, and rotate in opposite directions; wherein, the upper roller is provided with an upper limit groove along its circumference, and the lower roller is provided with a lower limit groove corresponding to the upper limit groove along its circumference, and the upper limit groove and the lower limit groove are used to accommodate the carrier plate and keep it in an upright state.

[0007] In one optional embodiment, the cleaning fluid storage unit is provided with a heating element for heating the cleaning fluid stored in the cleaning fluid storage unit.

[0008] In one alternative embodiment, the cleaning assembly further includes a first filter disposed between the cleaning fluid storage unit and the first nozzle, the first filter being used to filter the cleaning fluid.

[0009] In one optional embodiment, the cleaning assembly further includes a dosing device disposed between the cleaning fluid storage unit and the first nozzle, the dosing device being used to add a chemical to the cleaning fluid.

[0010] In one alternative embodiment, the drying assembly includes a hot air blower and a second nozzle, the hot air blower being used to deliver hot air to the second nozzle, the second nozzle being used to spray hot air onto the carrier plate during transport.

[0011] In one alternative embodiment, the device further includes an isolation component disposed between the drying component and the cleaning component, the isolation component being used to prevent cleaning fluid from splashing and contaminating the dried tray.

[0012] In one alternative embodiment, the isolation component includes a jetting device for rapidly jetting air to form an air wall between the drying component and the cleaning component.

[0013] In one alternative embodiment, the device further includes an electrostatic elimination component for performing electrostatic elimination treatment on the dried carrier disk.

[0014] In one alternative embodiment, the electrostatic elimination assembly further includes an ion generator and a third nozzle, the ion generator being used to deliver ion air to the third nozzle, and the third nozzle being used to spray ion air onto the carrier plate during transport.

[0015] The above-mentioned technical solution of this application has the following beneficial technical effects:

[0016] The cleaning device of this application embodiment can clean the carrier tray by washing with water, which can effectively remove more attached contaminants compared to gas cleaning. Furthermore, because the carrier tray remains upright during transport, the cleaning fluid carries away the attached contaminants after rinsing the tray, making it less likely to remain on the tray. In other words, this cleaning device can improve the problem of existing carrier tray cleaning methods failing to remove sticky foreign particles from the carrier tray surface, thus improving the cleaning effect.

[0017] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly described below. These drawings are incorporated in and constitute a part of this specification. They illustrate embodiments conforming to this application and, together with the specification, serve to explain the technical solutions of this application. It should be understood that the following drawings only show some embodiments of this application and should not be considered as limiting the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 A schematic diagram of a cleaning device provided in an embodiment of this application is shown;

[0020] Figure 2 A schematic diagram of the transmission component provided in an embodiment of this application is shown;

[0021] Figure 3 A schematic diagram of the cleaning components provided in an embodiment of this application is shown;

[0022] Figure 4 A schematic diagram of the drying assembly provided in an embodiment of this application is shown;

[0023] Figure 5 A schematic diagram of the static elimination component provided in an embodiment of this application is shown;

[0024] Reference numerals: 1. Conveying assembly; 11. Upper roller; 12. Lower roller; 13. Upper limit groove; 14. Lower limit groove; 2. Cleaning assembly; 21. Cleaning fluid storage unit; 22. First nozzle; 23. Pressure pump; 24. First filter; 25. Dosing device; 3. Drying assembly; 31. Hot air blower; 32. Second nozzle; 33. Second filter; 4. Isolation assembly; 5. Static elimination assembly; 51. Ion generator; 52. Third nozzle; 53. Third filter; 6. Carrier tray. Detailed Implementation

[0025] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present application.

[0026] The embodiments of this application will now be described in detail. Examples of these embodiments are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0027] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise stated, "multiple" means two or more. Furthermore, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0028] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0029] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0030] refer to Figures 1 to 5 This application provides a cleaning apparatus for cleaning a carrier disk suitable for wafer packaging.

[0031] In some embodiments, the cleaning device includes a conveying assembly 1, a cleaning assembly 2, and a drying assembly 3. The conveying assembly 1 conveys the carrier tray 6. The cleaning assembly 2 is located in the cleaning zone and includes a cleaning fluid storage unit 21 and a first nozzle 22. The cleaning fluid storage unit 21 delivers cleaning fluid to the first nozzle 22, which sprays the cleaning fluid onto the carrier tray 6 during conveying. The drying assembly 3 is located in the drying zone (downstream of the cleaning zone) and dries the cleaned carrier tray 6. The conveying assembly 1 is configured to keep the carrier tray 6 upright during conveying. Specifically, this cleaning device can clean the carrier tray 6 by washing with water, which effectively removes more adhering contaminants compared to gas cleaning. Furthermore, because the carrier tray 6 remains upright during conveying, the cleaning fluid carries away the adhering contaminants after rinsing the carrier tray 6, preventing residue buildup. In other words, this cleaning device improves upon existing carrier tray cleaning methods that struggle to remove sticky foreign particles from the surface of the carrier tray 6, thus enhancing the cleaning effect.

[0032] In some embodiments, the conveying component 1 is a roller conveying mechanism. For example, the conveying component 1 includes an upper roller 11 and a lower roller 12, which are parallel to each other and arranged opposite to each other, and rotate in opposite directions. During use, by controlling the upper roller 11 and the lower roller 12 to rotate synchronously, the carrier 6 located between the upper roller 11 and the lower roller 12 can be conveyed to the next workstation. However, the embodiments of this application do not limit this in any way. It should be noted that the rollers in the roller conveying mechanism are usually driven by motors, chains, etc., which is common knowledge to those skilled in the art and will not be described in detail here.

[0033] In some embodiments, the upper roller 11 is provided with an upper limit groove 13 along its circumference, and the lower roller 12 is provided with a lower limit groove 14 corresponding to the upper limit groove 13 along its circumference. The upper limit groove 13 and the lower limit groove 14 are used to accommodate the tray 6 and keep it in an upright state. Specifically, the upper limit groove 13 and the lower limit groove 14 are vertically opposite each other. During the conveying process, the upper edge of the tray 6 is located in the upper limit groove 13, and the lower edge is located in the lower limit groove 14. The upper limit groove 13 and the lower limit groove 14 limit the tray 6, thereby keeping the tray 6 in an upright state. However, the embodiments of this application do not impose any limitations on this.

[0034] In some embodiments, the cleaning fluid storage unit 21 may be a storage tank or a storage pool, etc. However, the embodiments of this application do not impose any limitations on this.

[0035] In some embodiments, the outlet of the cleaning fluid storage unit 21 is equipped with a pressure pump 23, which applies pressure to the cleaning fluid to deliver it to the first nozzle 22. Specifically, the outlet of the cleaning fluid storage unit 21 is connected to the inlet of the first nozzle 22 via the pressure pump 23. During use, the cleaning fluid storage unit 21 can pump the cleaning fluid into the first nozzle 22 via the pressure pump 23, and then the first nozzle 22 can spray it out. However, this embodiment does not limit the scope of the invention. It should be noted that, in a specific configuration, the pressure pump 23 is connected to a controller, and the operator can operate the controller to control the pressure pump 23 to adjust the pressure of the cleaning fluid.

[0036] In some embodiments, the cleaning fluid storage unit 21 is provided with a heating element that converts electrical energy into heat energy to heat the cleaning fluid stored within the unit. In other words, the cleaning fluid storage unit 21 can heat the cleaning fluid stored within it. Compared to using a conventional storage unit, this unit can increase the temperature of the cleaning fluid, which facilitates reducing the adhesion of contaminants and making them easier to wash off. However, this embodiment does not limit the scope of the invention. It should be noted that in a specific configuration, the heating element is connected to a controller, allowing the operator to control the heating element and adjust the heating temperature of the cleaning fluid.

[0037] In some embodiments, the cleaning assembly 2 further includes a first filter 24 disposed between the cleaning fluid storage unit 21 and the first nozzle 22, and the first filter 24 is used to filter the cleaning fluid. Specifically, the outlet of the cleaning fluid storage unit 21 is connected to the inlet of the first nozzle 22 through the first filter 24. During use, the cleaning fluid can be filtered by the first filter 24 and then fed into the first nozzle 22, and then sprayed out by the first nozzle 22. In this way, impurities in the cleaning fluid can be filtered out, which can prevent the first nozzle 22 from clogging and prevent impurities from contaminating the carrier tray 6. However, the embodiments of this application do not limit this in any way.

[0038] In some embodiments, the cleaning component 2 further includes a dosing device 25, which is disposed between the cleaning fluid storage unit 21 and the first nozzle 22. The dosing device 25 is used to add chemicals to the cleaning fluid. Specifically, the outlet of the dosing device 25 is connected to the outlet of the cleaning fluid storage unit 21 and the inlet of the first nozzle 22. During use, the operator can use the dosing device 25 to add chemicals to the cleaning fluid to adjust the cleaning effect. However, this embodiment does not limit the scope of the invention.

[0039] In practical implementation, the dosing device 25 can be used to add surfactants, solvents, and preservatives to the cleaning solution. Surfactants reduce the surface tension of the liquid, making it easier for water molecules to penetrate the stains, thus achieving a cleaning effect. Common surfactants include anionic, cationic, nonionic, and amphoteric surfactants. Solvents dissolve and disperse stains. Common solvents include water, alcohols, and ethers. Preservatives extend the shelf life of the cleaning solution and prevent contamination by bacteria, mold, and other microorganisms. Common preservatives include sodium benzoate and potassium sorbate.

[0040] In some embodiments, the drying assembly 3 includes a hot air blower 31 and a second nozzle 32. The hot air blower 31 supplies hot air to the second nozzle 32, and the second nozzle 32 sprays hot air onto the carrier tray 6 during transport. During use, the hot air blower 31 heats the air it draws in and sends it into the second nozzle 32, where it is then sprayed out. The hot air sprayed onto the surface of the carrier tray 6 achieves the drying process. However, this embodiment does not limit the scope of the invention.

[0041] In some embodiments, the drying assembly 3 further includes a second filter 33, which is disposed between the hot air blower 31 and the second nozzle 32. The second filter 33 is used to filter hot air. Specifically, the air outlet of the hot air blower 31 is connected to the air inlet of the second nozzle 32 through the second filter 33. During use, hot air can be filtered by the second filter 33 and then sent into the second nozzle 32, where it is then sprayed out. This removes impurities from the hot air, preventing the second nozzle 32 from becoming clogged and avoiding contamination of the carrier tray 6 by impurities. However, this embodiment does not impose any limitations on this.

[0042] In some embodiments, the cleaning device further includes an isolation component 4, which is disposed between the drying component 3 and the cleaning component 2. The isolation component 4 is used to prevent cleaning fluid from splashing and contaminating the dried tray 6. Specifically, the isolation component 4 is disposed between the cleaning zone and the drying zone. The isolation component 4 serves as a barrier to prevent cleaning fluid from splashing onto the dried tray 6 in the drying zone, thus affecting the drying effect, and also to prevent secondary contamination of the tray 6 by the cleaning fluid.

[0043] In some embodiments, the isolation component 4 includes a partition located between the drying component 3 and the cleaning component 2. That is, the isolation component 4 can achieve a barrier function by using the partition to prevent cleaning fluid from splashing onto the already dried tray 6 in the drying area. However, this embodiment does not limit this. In other embodiments, the isolation component 4 may also include a jetting device for high-speed air jetting to form an air wall between the drying component 3 and the cleaning component 2. The air wall can also achieve a barrier function to prevent cleaning fluid from splashing onto the already dried tray 6 in the drying area. Of course, the isolation component 4 can include both a partition and a jetting device, which can improve the barrier effect.

[0044] In some embodiments, the cleaning apparatus further includes an electrostatic elimination component 5, located in the electrostatic elimination zone (downstream of the drying zone), which is used to perform electrostatic elimination treatment on the dried carrier tray 6. This enables the carrier tray 6 to meet the electrostatic protection requirements of the cleanroom.

[0045] In some embodiments, the static elimination assembly 5 includes an ion generator 51 and a third nozzle 52. The ion generator 51 supplies ion air to the third nozzle 52, and the third nozzle 52 sprays ion air onto the carrier tray 6 during transport. During use, the ion generator 51 sends the generated ion air into the third nozzle 52, which then sprays it out. The ion air sprayed onto the surface of the carrier tray 6 eliminates static electricity. In a specific configuration, the third nozzle 52 can be located downstream of the second nozzle 32; that is, the drying assembly 3 can perform static elimination treatment after drying the carrier tray 6. However, this embodiment does not limit this.

[0046] In some embodiments, the electrostatic elimination assembly 5 further includes a third filter 53, which is disposed between the ion generator 51 and the third nozzle 52. The third filter 53 is used to filter the ion air. Specifically, the air outlet of the ion generator 51 is connected to the air inlet of the third nozzle 52 through the third filter 53. During use, the ion air can be filtered by the third filter 53 and then sent into the third nozzle 52, and then ejected by the third nozzle 52. In this way, impurities in the ion air can be filtered out, which can prevent the third nozzle 52 from clogging and avoid contamination of the carrier plate 6 by impurities. However, the embodiments of this application do not limit this in any way.

[0047] In some embodiments, the cleaning device further includes a loading mechanism and a unloading mechanism. The loading mechanism is located at the loading end of the conveying assembly 1 and is used to feed the tray 6 to be cleaned into the conveying assembly 1. The unloading mechanism is located at the unloading end of the conveying assembly 1 and is used to remove the cleaned tray 6 from the conveying assembly 1. In specific configurations, both the loading mechanism and the unloading mechanism can be robotic arms. However, the embodiments of this application do not impose any limitations on this.

[0048] One or more embodiments in this specification are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of one or more embodiments in this specification should be included within the protection scope of this application.

[0049] The above are merely specific embodiments of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A cleaning device suitable for cleaning a carrier tray, characterized in that, include: A conveying assembly for conveying the carrier disk; A cleaning assembly, comprising a cleaning fluid storage unit and a first nozzle, wherein the cleaning fluid storage unit is used to deliver cleaning fluid to the first nozzle, and the first nozzle is used to spray cleaning fluid onto the carrier plate during delivery. A drying assembly for drying the cleaned carrier disk; The conveying component is configured to keep the carrier tray upright during the conveying process.

2. The cleaning device according to claim 1, characterized in that, The conveying assembly includes an upper roller and a lower roller, which are parallel to each other and arranged opposite to each other, and the upper roller and the lower roller rotate in opposite directions. The upper roller is provided with an upper limit groove along its circumference, and the lower roller is provided with a lower limit groove corresponding to the upper limit groove along its circumference. The upper limit groove and the lower limit groove are used to accommodate the carrier plate and keep it in an upright state.

3. The cleaning device according to claim 1, characterized in that, The cleaning fluid storage unit is equipped with a heating element, which is used to heat the cleaning fluid stored in the cleaning fluid storage unit.

4. The cleaning device according to claim 1, characterized in that, The cleaning assembly further includes a first filter disposed between the cleaning fluid storage unit and the first nozzle, the first filter being used to filter the cleaning fluid.

5. The cleaning device according to claim 1, characterized in that, The cleaning assembly also includes a dosing device disposed between the cleaning fluid storage unit and the first nozzle, the dosing device being used to add chemicals to the cleaning fluid.

6. The cleaning device according to claim 1, characterized in that, The drying assembly includes a hot air blower and a second nozzle, the hot air blower being used to deliver hot air to the second nozzle, and the second nozzle being used to spray hot air onto the carrier plate during transport.

7. The cleaning device according to claim 1, characterized in that, Also includes: An isolation component is disposed between the drying component and the cleaning component, the isolation component being used to prevent cleaning fluid from splashing and contaminating the dried carrier tray.

8. The cleaning device according to claim 7, characterized in that, The isolation component includes a jetting device for rapidly jetting air to form an air wall between the drying component and the cleaning component.

9. The cleaning device according to claim 1, characterized in that, Also includes: An electrostatic elimination component is used to perform electrostatic elimination treatment on the dried carrier disk.

10. The cleaning device according to claim 9, characterized in that, The electrostatic elimination component includes an ion generator and a third nozzle. The ion generator is used to deliver ion air to the third nozzle, and the third nozzle is used to spray ion air onto the carrier plate during the delivery process.

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