Adjusting device for inclination angle of heating plate and heating plate
By combining a steel ball structure and a cam mechanism, the problems of guiding stability and repeatability of the heating plate angle adjustment device were solved, enabling precise adjustment of the heating plate angle and improving the repeatability of the deposition process and the uniformity of film thickness.
Patent Information
- Application Number
- CN202422309101.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-20
- Publication Date
- 2025-11-14
- Estimated Expiration
- 2034-09-20
AI Technical Summary
Existing heating plate angle adjustment devices cannot achieve real-time adjustment during the process, and have problems such as complex operation, poor guiding stability and repeatability.
By combining a steel ball structure and a cam mechanism, the angle of the heating plate can be precisely adjusted through the clamping of the steel ball holder with the flange and the eccentric drive of the cam, thereby improving the guiding stability.
This improves the guiding stability of the heating plate angle adjustment device and the repeatability of the deposition process, ensuring uniform film thickness.
Smart Images
Figure CN223548095U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor manufacturing, and more particularly to a device for adjusting the tilt angle of a heating plate, and a heating plate. Background Technology
[0002] During the deposition process, semiconductor coating equipment often encounters issues such as uneven film thickness on wafers and differences between high and low points reaching a certain range. It is necessary to adjust the angular relationship between the spray plate and the heating plate to ensure uniform film thickness and keep the difference between high and low points within a certain range.
[0003] In existing technologies, most angle adjustment devices are manually operated, which not only fails to achieve real-time adjustment during the process but also results in low efficiency and poor precision. Even those few angle adjustment devices that can achieve automatic angle adjustment suffer from complex operation due to their numerous guide components, leading to poor operability and stability. Furthermore, current automatic angle adjustment devices typically employ a sliding friction guiding method; therefore, with long-term wear of the guide components, their guiding stability inevitably decreases gradually, and repeatability accuracy gradually declines.
[0004] In order to overcome the above-mentioned defects in the existing technology, there is an urgent need in the field for an angle adjustment technology to adjust the angle of the heating plate, thereby improving the guiding stability of the heating plate angle adjustment device and improving the repeatability of the deposition process of the heating plate. Utility Model Content
[0005] The following provides a brief overview of one or more aspects to offer a basic understanding of them. This overview is not an exhaustive summary of all conceived aspects, nor is it intended to identify key or decisive elements of all aspects, nor to define the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as a prelude to the more detailed descriptions that follow.
[0006] In order to overcome the above-mentioned defects in the prior art, the present invention provides a heating plate tilt angle adjustment device and a heating plate for adjusting the angle of the heating plate, thereby improving the guiding stability of the heating plate angle adjustment device and improving the repeatability of the deposition process of the heating plate.
[0007] Specifically, according to the present invention, a heating plate tilt angle adjustment device provided in the first aspect includes: a first flange, which is fixedly connected to the heating plate and a first steel ball holder respectively, wherein the lower side of the first flange has a first guide slope; a second flange, which is connected to an external fixing device and has a second guide slope on its lower side, wherein the upper side of the second flange is connected to the first guide slope on the lower side of the first flange via a plurality of first steel balls, and the second guide slope on its lower side is connected to the upper side of the first steel ball holder via a plurality of second steel balls; the first steel ball holder, together with the first flange, clamps the second flange to stabilize the angle adjustment device; and an adjustment part for laterally pressing the side of the first flange to provide a lateral offset to adjust the tilt angle of the first flange and the first steel ball holder.
[0008] Furthermore, in some embodiments of this utility model, a second steel ball retainer is provided between the first flange and the second flange for limiting the position of the plurality of first steel balls.
[0009] Furthermore, in some embodiments of the present invention, the adjusting part includes a laterally rotating cam, wherein a first position of the cam near its rotation axis provides a small first lateral offset to the first flange to drive the heating plate to tilt in a first direction closer to the adjusting part via the first flange and the first ball retainer, and a second position of the cam away from its rotation axis provides a larger second lateral offset to the first flange to drive the heating plate to tilt in a second direction away from the adjusting part via the first flange and the first ball retainer.
[0010] Furthermore, in some embodiments of this utility model, the heating plate tilt angle adjustment device includes a plurality of adjustment parts, wherein each adjustment part provides a lateral offset in a different direction to the first flange to adjust the tilt angle of the first flange and the first steel ball holder.
[0011] Furthermore, in some embodiments of this utility model, the heating plate tilt angle adjustment device includes two adjustment parts, wherein the first adjustment part provides a first lateral offset to the first flange along a preset X direction to adjust the tilt angle of the first flange and the first steel ball holder along the X direction, and the second adjustment part provides a second lateral offset to the first flange along a preset Y direction to adjust the tilt angle of the first flange and the first steel ball holder along the Y direction, wherein the X direction is perpendicular to the Y direction.
[0012] Furthermore, in some embodiments of this utility model, the adjusting device further includes a driving device for rotating the cam to adjust the lateral offset it provides to the first flange.
[0013] Furthermore, in some embodiments of this utility model, the adjusting device further includes: a reducer, disposed between the driving device and the cam, for providing the cam with a reduced rotational amount to improve its driving force and control accuracy for the lateral offset.
[0014] Furthermore, in some embodiments of this utility model, the first steel ball retainer is connected to the first flange by screws, and presses the plurality of first steel balls and the plurality of second steel balls against both sides of the second flange. The clamping force of the first steel balls and the second steel balls on the second flange increases as the screws rotate in a first tightening direction, and decreases as the screws rotate in a second loosening direction.
[0015] Furthermore, in some embodiments of this utility model, the adjusting device further includes: a base, which is fixedly connected to the fixing device; and a fixing frame, the first end of which is fixedly connected to the base, and the second end of which is fixedly connected to the second flange, so as to indirectly fix the second flange to the fixing device.
[0016] Furthermore, the heating plate provided according to the second aspect of the present invention includes: a heating plate body; and an adjustment device for the tilt angle of the heating plate as described in any one of the first aspects of the present invention. Attached Figure Description
[0017] The above-described features and advantages of this invention can be better understood after reading the following detailed description of the embodiments of this disclosure in conjunction with the accompanying drawings. In the drawings, the components are not necessarily drawn to scale, and components having similar related characteristics or features may have the same or similar reference numerals.
[0018] Figure 1 A cross-sectional structural schematic diagram of a heating plate provided according to some embodiments of the present invention is shown.
[0019] Figure 2 A schematic diagram of the principle of the heating plate tilt angle adjustment device provided according to some embodiments of the present invention is shown in its normal state.
[0020] Figure 3 A schematic diagram of the working principle of the heating plate tilt angle adjustment device according to some embodiments of the present invention is shown.
[0021] Figures 4A-4BA schematic diagram of the structure of the cam of the heating plate tilt angle adjustment device provided according to some embodiments of the present invention is shown.
[0022] Figure 5 An exploded structural schematic diagram of a heating plate tilt angle adjustment device provided according to some embodiments of the present invention is shown.
[0023] Figure 6 A partial cross-sectional schematic diagram of the structure of a heating plate tilt angle adjustment device provided according to some embodiments of the present invention is shown.
[0024] Figure label:
[0025] 10. Heating plate body
[0026] 11. Adjustment device for the tilt angle of the heating plate
[0027] 20 First flange
[0028] 30 Second flange
[0029] 40 First ball retainer
[0030] 401 Second Steel Ball
[0031] 402 First Guide Inclined Surface
[0032] 50 Second ball retainer
[0033] 501 First Steel Ball
[0034] 502 Second Guide Inclined Surface
[0035] 60 Cam
[0036] 601 Rotary Shaft
[0037] 602 connector
[0038] 70 Fixture
[0039] 80 base
[0040] 901 Reducer
[0041] 902 drive unit Detailed Implementation
[0042] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. Although the description of this utility model will be presented in conjunction with preferred embodiments, this does not mean that the features of this utility model are limited to this embodiment. On the contrary, the purpose of describing the utility model in conjunction with the embodiments is to cover other options or modifications that may be derived based on the claims of this utility model. To provide a deep understanding of this utility model, many specific details will be included in the following description. This utility model may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of this utility model, some specific details will be omitted in the description.
[0043] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0044] Furthermore, the terms "upper," "lower," "left," "right," "top," "bottom," "horizontal," and "vertical" used in the following description should be understood as the orientations shown in the relevant paragraphs and accompanying drawings. These relative terms are for illustrative purposes only and do not imply that the described device must be manufactured or operated in a specific orientation; therefore, they should not be construed as limiting the scope of this invention.
[0045] It is understood that although terms such as "first," "second," and "third" may be used herein to describe various components, regions, layers, and / or parts, these components, regions, layers, and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, regions, layers, and / or parts. Therefore, the first component, region, layer, and / or part discussed below may be referred to as the second component, region, layer, and / or part without departing from some embodiments of this utility model.
[0046] As mentioned above, during the deposition process, semiconductor coating equipment often encounters issues such as uneven film thickness on the wafer and differences between high and low points reaching a certain range. It is necessary to adjust the angular position relationship between the spray plate and the heating plate to ensure uniform film thickness and keep the difference between high and low points within a certain range.
[0047] In existing technologies, most angle adjustment devices are manually operated, which not only fails to achieve real-time adjustment during the process but also results in low efficiency and poor precision. Even those few angle adjustment devices that can achieve automatic angle adjustment suffer from complex operation due to their numerous guide components, leading to poor operability and stability. Furthermore, current automatic angle adjustment devices typically employ a sliding friction guiding method; therefore, with long-term wear of the guide components, their guiding stability inevitably decreases gradually, and repeatability accuracy gradually declines.
[0048] In order to overcome the above-mentioned defects in the prior art, the present invention provides a heating plate tilt angle adjustment device and a heating plate for adjusting the angle of the heating plate, thereby improving the guiding stability of the heating plate angle adjustment device and improving the repeatability of the deposition process of the heating plate.
[0049] like Figure 1 As shown, Figure 1 A cross-sectional structural schematic diagram of a heating plate provided according to some embodiments of the present invention is shown.
[0050] like Figure 1 In some non-limiting embodiments, the heating plate tilt angle adjustment device provided in the first aspect of the present invention can be configured on the heating plate provided in the second aspect of the present invention. The heating plate includes a heating plate body 10 connected to an adjustment flange; and a heating plate tilt angle adjustment device 11 as provided in any of the first aspects of the present invention.
[0051] Furthermore, the method for adjusting the tilt angle of the heating plate provided in the third aspect of this utility model can be implemented based on the device for adjusting the tilt angle of the heating plate provided in the first aspect of this utility model. Specifically, the device for adjusting the tilt angle of the heating plate is equipped with a memory and a processor. The memory includes, but is not limited to, the computer-readable storage medium provided in the fourth aspect of this utility model. The processor is connected to the memory and configured to execute computer instructions stored in the memory. When the computer instructions are executed by the processor, the method for adjusting the tilt angle of the heating plate as described in any of the third aspects of this utility model is implemented.
[0052] Please refer to the details. Figures 2-3 , Figure 2 A schematic diagram of the heating plate tilt angle adjustment device provided according to some embodiments of the present invention is shown in its normal state. Figure 3 A schematic diagram of the structure of the heating plate tilt angle adjustment device provided according to some embodiments of the present invention in its working state is shown.
[0053] like Figures 2-3As shown, the device for adjusting the tilt angle of the heating plate includes a first flange 20, a second flange 30, a first steel ball retainer 40, and an adjustment part.
[0054] Specifically, the first flange 20 is fixedly connected to the heating plate and the first ball retainer 40. The lower side of the first flange 20 has a first guide ramp 402. The second flange 30 is connected to an external fixing device and has a second guide ramp 502 on its lower side. The upper side of the second flange 30 is connected to the first guide ramp 402 on the lower side of the first flange 20 via a plurality of first ball bearings 501, while the lower side of the second guide ramp 502 is connected to the upper side of the first ball retainer 40 via a plurality of second ball bearings 401. The first ball retainer 40, together with the first flange 20, clamps the second flange 30 to stabilize the angle adjustment device. The adjustment part is used to laterally press the side of the first flange 20, providing it with a lateral offset to adjust the tilt angle of the first flange 20 and the first ball retainer 40.
[0055] Here, the upper and lower rows of steel balls are tightly clamped on both sides of the second flange 30 through the first flange 20 and the first steel ball retainer 40, thereby improving the guiding stability of the heating plate level adjustment system. The use of steel ball structure for stability setting can effectively solve the wear problem caused by sliding friction guidance, thereby improving the repeatability of the deposition process of the heating plate.
[0056] Please refer to Figures 4A-4B , Figures 4A-4B A schematic diagram of the structure of the cam of the heating plate tilt angle adjustment device provided according to some embodiments of the present invention is shown.
[0057] like Figure 4A As shown, in some non-limiting embodiments, the adjusting part includes a laterally rotating cam 60 supported by a rotating shaft 601 and connected to the rotating shaft and the first flange 20 via a connector 602, so that the first flange 20 rotates with the cam 60. A first position of the cam 60 near its rotating shaft 601 provides a small first lateral offset to the first flange 20, thereby causing the heating plate to tilt in a first direction closer to the adjusting part via the first flange 20 and the first ball retainer 40.
[0058] like Figure 4B As shown, the second position of the cam 60, away from its axis of rotation 601, provides a larger second lateral offset to the first flange 20, so as to drive the heating plate to tilt in a second direction away from the adjustment part via the first flange 20 and the first ball retainer 40.
[0059] Please refer to Figures 5-6 , Figure 5 An exploded view of a heating plate tilt angle adjustment device provided according to some embodiments of the present invention is shown. Figure 6 A partial cross-sectional schematic diagram of the structure of a heating plate tilt angle adjustment device provided according to some embodiments of the present invention is shown.
[0060] like Figures 5-6 As shown, in some non-limiting embodiments, the heating plate tilt angle adjustment device includes two adjustment parts. The first adjustment part provides a first lateral offset to the first flange 20 along a preset X direction to adjust the tilt angle of the first flange 20 and the first ball retainer 40 along the X direction. The second adjustment part provides a second lateral offset to the first flange 20 along a preset Y direction to adjust the tilt angle of the first flange 20 and the first ball retainer 40 along the Y direction. The X direction is perpendicular to the Y direction, thereby achieving tilting in the combined X and Y directions. The cooperation of these two sets of adjustment parts can be achieved by software algorithms, which will not be elaborated here.
[0061] Furthermore, in some non-limiting embodiments, a second steel ball retainer 50 is provided between the first flange 20 and the second flange 30 to limit the multiple first steel balls 501 so as to keep the first steel balls 501 fixed.
[0062] Furthermore, in some non-limiting embodiments, the heating plate tilt angle adjustment device also includes a drive device 902, a reducer 901, a base 80, and a fixing frame 70.
[0063] Specifically, the drive unit 902 is used to rotate the cam 60 to adjust the lateral offset it provides to the first flange 20. The reducer 901 is located between the drive unit 902 and the cam 60, providing a reduced rotational amount to the cam 60. Here, the drive unit 902, connected to the reducer 901, acts as a power source to drive the cam 60, thereby utilizing the eccentricity of the cam 60 to drive the flange, thus improving its driving force and control accuracy for the lateral offset. The base 80 is fixedly connected to the fixing device. The first end of the fixing bracket 70 is fixedly connected to the base 80, and its second end is fixedly connected to the second flange 30, thereby indirectly fixing the second flange 30 to the fixing device.
[0064] Those skilled in the art will understand that the embodiments of the two adjustment parts are merely a non-limiting implementation provided by the present invention, intended to clearly demonstrate the main concept of the present invention, rather than the entire structure of the adjustment device for limiting the tilt angle of the heating plate.
[0065] Optionally, in some non-limiting embodiments, the heating plate tilt angle adjustment device may further include multiple adjustment parts. Each adjustment part provides a lateral offset in a different direction to the first flange 20 to adjust the tilt angle of the first flange 20 and the first ball retainer 40.
[0066] Furthermore, in some non-limiting embodiments, the first ball retainer 40 is connected to the first flange 20 by screws, and presses a plurality of first balls 501 and a plurality of second balls 401 against both sides of the second flange 30. The clamping force of the first balls 501 and the second balls 401 on the second flange 30 increases as the screws rotate in a first tightening direction and decreases as the screws rotate in a second loosening direction.
[0067] The following will describe the working principle of the heating plate tilt angle adjustment device and the heating plate by referring to some embodiments of the heating plate tilt angle adjustment method. Those skilled in the art will understand that these embodiments of the heating plate tilt angle adjustment method are merely non-limiting implementations provided by this utility model, intended to clearly demonstrate the main concept of this utility model and provide some specific solutions convenient for public implementation, rather than limiting all functions or all working methods of the heating plate tilt angle adjustment device. Similarly, the heating plate tilt angle adjustment device is also merely a non-limiting implementation provided by this utility model and does not limit the executing entity or execution order of each step in the heating plate tilt angle adjustment method.
[0068] Specifically, the device for adjusting the tilt angle of the heating plate can first detect the film thickness at multiple locations on the wafer sample processed by the heating plate. Then, based on the film thickness distribution at multiple locations, it determines the tilt angle adjustment amount of the heating plate. Based on the tilt angle adjustment amount, it determines the target lateral offset of the first flange 20.
[0069] Subsequently, the adjustment device can acquire the target lateral offset of the first flange 20 of the heating plate tilt angle adjustment device. Then, based on the target lateral offset, the adjustment part of the heating plate tilt angle adjustment device is adjusted to laterally press the side of the first flange 20 to adjust the tilt angle of the first flange 20, thereby causing the heating plate to change its tilt angle.
[0070] In summary, the heating plate tilt angle adjustment device and heating plate provided by this utility model can be used to adjust the angle of the heating plate, thereby improving the guiding stability of the heating plate angle adjustment device and improving the repeatability of the deposition process of the heating plate.
[0071] Although the methods described above are illustrated and depicted as a series of actions for the sake of simplicity, it should be understood and appreciated that these methods are not limited by the order of the actions, as some actions may occur in a different order and / or concurrently with other actions from the illustrations and descriptions herein or not illustrated and described herein but which may be understood by those skilled in the art, according to one or more embodiments.
[0072] The prior description of this disclosure is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to this disclosure will be apparent to those skilled in the art, and the general principles defined herein may be applied to other variations without departing from the spirit or scope of this disclosure. Therefore, this disclosure is not intended to be limited to the examples and designs described herein, but should be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A device for adjusting the tilt angle of a heating plate, characterized in that, include: The first flange is fixedly connected to the heating plate and the first steel ball holder, wherein the lower side of the first flange has a first guide slope; The second flange is connected to an external fixing device and has a second guide slope on its lower side. The upper side of the second flange is connected to the first guide slope on the lower side of the first flange via a plurality of first steel balls, and the second guide slope on its lower side is connected to the upper side of the first steel ball holder via a plurality of second steel balls. The first ball retainer, together with the first flange, clamps the second flange to stabilize the angle adjustment device; and An adjustment section is used to laterally press the side of the first flange and provide it with a lateral offset to adjust the tilt angle of the first flange and the first ball retainer.
2. The adjusting device as described in claim 1, characterized in that, A second steel ball retainer is provided between the first flange and the second flange to limit the position of the plurality of first steel balls.
3. The adjusting device as described in claim 1, characterized in that, The adjusting part includes a cam that rotates laterally, wherein, The cam, at a first position near its axis of rotation, provides a small first lateral offset to the first flange, thereby tilting the heating plate in a first direction toward the adjusting portion via the first flange and the first ball retainer. The second position of the cam, away from its axis of rotation, provides a larger second lateral offset to the first flange, thereby causing the heating plate to tilt in a second direction away from the adjustment section via the first flange and the first ball retainer.
4. The adjusting device as described in claim 3, characterized in that, It also includes a plurality of the aforementioned adjustment parts, wherein each of the aforementioned adjustment parts provides a lateral offset in a different direction to the first flange to adjust the tilt angle of the first flange and the first ball retainer.
5. The adjusting device as described in claim 4, characterized in that, The angle adjustment device includes two adjustment parts, wherein the first adjustment part provides a first lateral offset to the first flange along a preset X direction to adjust the tilt angle of the first flange and the first ball retainer along the X direction, and the second adjustment part provides a second lateral offset to the first flange along a preset Y direction to adjust the tilt angle of the first flange and the first ball retainer along the Y direction, wherein the X direction is perpendicular to the Y direction.
6. The adjusting device as described in claim 3, characterized in that, Also includes: A drive mechanism for rotating the cam to adjust the lateral offset it provides to the first flange.
7. The adjusting device as described in claim 6, characterized in that, Also includes: A speed reducer is disposed between the drive device and the cam to provide the cam with a reduced rotational amount, thereby improving its driving force and control accuracy for the lateral offset.
8. The adjusting device as described in claim 1, characterized in that, The first ball retainer is connected to the first flange by screws, and presses the plurality of first balls and the plurality of second balls against both sides of the second flange, wherein, The clamping force of the first steel ball and the second steel ball on the second flange increases as the screw rotates in the first tightening direction and decreases as the screw rotates in the second loosening direction.
9. The adjusting device as described in claim 1, characterized in that, Also includes: Base, fixed connection and fixing device; as well as A fixing frame, the first end of which is fixedly connected to the base, and the second end of which is fixedly connected to the second flange, so as to indirectly fix the second flange to the fixing device.
10. A heating plate, characterized in that, include: Heating plate body; as well as The device for adjusting the tilt angle of the heating plate as described in any one of claims 1 to 9.