Threaded hole structure

Abstract

The utility model discloses a threaded hole structure. The threaded hole structure comprises a base; a threaded hole is formed in the base; a threaded conversion piece is arranged on the inner side of the threaded hole; according to the ceramic threaded hole, the problem that threads are broken and broken in the using process due to the fact that materials of a ceramic component are fragile is solved, the durability and applicability of the ceramic threaded hole are enhanced, and it is guaranteed that the ceramic component can be better applied to semiconductor equipment for a longer time.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor components, and in particular to a threaded hole structure. Background Technology

[0002] With the rapid development of semiconductors, their applications in various industries are becoming increasingly widespread. Due to the high hardness, high strength, corrosion resistance, and excellent insulation properties of ceramic materials, ceramic components play a crucial role in semiconductor chip manufacturing processes. As more metal components are being ceramicized, the processing methods and technologies for ceramic parts are becoming increasingly mature. However, ceramic materials are relatively hard and brittle, inevitably leading to issues of fragility and cracking during use (see reference). Figure 1 During use, the threaded holes and threads on ceramic components may crack or even fall off due to prolonged stress, high torque, and high temperature sealing conditions. This cracking is especially serious in high-process semiconductor equipment, which can severely affect the operation of the semiconductor equipment. Utility Model Content

[0003] The purpose of this utility model is to address the shortcomings of existing technologies by proposing a threaded hole structure.

[0004] To achieve the above objectives, this utility model adopts the following technical solution: a threaded hole structure, comprising:

[0005] Base;

[0006] The substrate has threaded holes;

[0007] A thread conversion component is provided inside the threaded hole.

[0008] As a further description of the above technical solution: a volumetric cavity is also provided below the threaded hole of the substrate.

[0009] As a further description of the above technical solution: the outer diameter of the thread conversion component is connected to the threaded hole, so that the thread conversion component is placed inside the threaded hole.

[0010] As a further description of the above technical solution: the thread conversion component has a gap between it and the upper end face of the threaded hole.

[0011] As a further description of the above technical solution: the distance of the gap is 1 times the pitch of the thread conversion component.

[0012] As a further description of the above technical solution: the threaded conversion component extends into the inner side of the volume cavity and contacts the lower end face of the volume cavity.

[0013] As a further description of the above technical solution: the thread conversion component is a threaded sleeve or a toothed nest, and the threaded sleeve is formed by spiral machining of metal wire.

[0014] As a further description of the above technical solution: the rotating tooth nest is cylindrical, and threads are provided on both the outer and inner diameter surfaces.

[0015] As a further description of the above technical solution: adhesive is applied to the outer diameter of the thread conversion component.

[0016] As a further description of the above technical solution: the material of the substrate is ceramic, and the material of the thread conversion component is stainless steel.

[0017] The above technical solution has the following advantages or beneficial effects:

[0018] This invention solves the problem of thread breakage and fracture during use caused by the brittleness and fragility of ceramic components, enhances the durability and applicability of ceramic threaded holes, and ensures that ceramic components can be used in semiconductor equipment for a longer and better time. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of an existing threaded hole structure;

[0020] Figure 2 This is a schematic diagram of the installation of the threaded hole structure proposed in this utility model;

[0021] Figure 3 for Figure 2 A schematic diagram of the structure of the threaded hole;

[0022] Figure 4 This is an installation diagram of another embodiment of the threaded hole structure proposed in this utility model;

[0023] Figure 5 for Figure 4 A schematic diagram of the structure of the threaded hole.

[0024] Legend:

[0025] 1. Base; 2. Threaded hole; 3. Thread conversion part; 4. Volumetric cavity. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Reference Figures 2-5 The present invention provides an embodiment of a threaded hole structure, comprising: a base 1; a threaded hole 2 is provided on the base 1; a thread conversion component 3 is provided inside the threaded hole 2; the base 1 is made of ceramic, and the thread conversion component 3 is made of stainless steel.

[0028] In this embodiment, a threaded hole 2 adapted to the thread conversion component 3 is provided on the substrate 1. Semiconductor devices are installed and connected through the internal thread of the thread conversion component 3. This solves the problem of thread breakage and damage during use caused by the brittleness and fragility of ceramic components. It enhances the durability and applicability of the threaded hole 2, ensuring that ceramic components can be used in semiconductor devices better and for a longer period of time.

[0029] A volumetric cavity is provided below the threaded hole 2 of the base 1; the threaded adapter 3 extends into the inner side of the volumetric cavity and contacts the lower end face of the volumetric cavity.

[0030] In this embodiment, when machining the threaded hole 2 on the base 1, a relief groove is machined on the lower side of the threaded hole 2 to form a volumetric cavity, so as to avoid damaging the threaded hole 2. When the volumetric cavity is engaged with the thread conversion component 3, it can also ensure that the thread conversion component 3 is installed at the bottom of the volumetric cavity.

[0031] The thread converter 3 has a gap between itself and the upper end face of the threaded hole 2; the gap is 1 times the pitch of the thread converter 3.

[0032] In this embodiment, the depth of the threaded hole 2 is greater than the length of the thread conversion component 3. After assembly, the thread conversion component 3 is spaced from the upper end face of the threaded hole 2 by a length equal to the pitch of the thread conversion component 3. During assembly, adhesive is applied to the outside of the thread conversion component 3, leaving a gap to avoid adhesive overflow and affecting the assembly of the base 1.

[0033] The outer diameter of the thread conversion part 3 is connected to the threaded hole 2, so that the thread conversion part 3 is placed inside the threaded hole 2; the thread conversion part 3 is a threaded sleeve or a toothed nest, and the threaded sleeve is formed by spiral machining of metal wire.

[0034] In this embodiment, when the thread conversion component 3 is a threaded sleeve, the thread conversion component 3 is rotatably fitted with the threaded hole 2. The thread conversion component 3 is screwed into the inner side of the threaded hole 2 using a thread conversion component installation tool. The threaded hole 2 is machined on the base 1 according to the M6 ​​thread parameters. Then, the M6 ​​metal thread conversion component 3 is inserted using the thread conversion component installation tool. Common materials include stainless steel, carbon steel, alloy steel, etc. In this way, the ceramic thread is converted into the metal thread conversion component 3. By forming an elastic connection between the thread conversion component 3 and the internal thread of the base 1, the thread manufacturing error is eliminated and the connection strength is improved. When in use, the thread conversion component 3 is directly subjected to force, which solves the problem of the ceramic thread being brittle and easily broken.

[0035] In another embodiment, when the thread conversion component 3 is a rotating tooth nest, the rotating tooth nest is cylindrical and has threads on both the outer and inner diameter surfaces; adhesive is applied to the outer diameter of the thread conversion component 3.

[0036] In this embodiment, under more demanding operating conditions, including deformation or even pull-out of the threaded insert when using high torque, loosening of the threaded insert and easy seizing when the thread fit accuracy is low, and easy damage to the ceramic thread during installation and disassembly, as well as easy rusting, a thread conversion nest can be used for scenarios with higher requirements. The thread conversion component 3 is designed as a thread conversion metal thread conversion component 3, for example, external thread M10, internal thread M6. Through the conversion by thread conversion nest, the threaded hole 2 of the base 1 can be made into an M10 large pitch threaded hole. The large pitch ensures that the ceramic thread is thicker and less prone to breakage under force. The bottom of the threaded hole 2 is provided with a relief groove to ensure that the thread conversion component 3 can be fully installed. The thread conversion metal thread conversion component 3 is screwed into the threaded hole 2 of the base 1. Before screwing it in, glue is evenly applied to the external thread of the thread conversion component 3 to ensure a more secure embedding and prevent loosening. In some high-temperature operating conditions, high-temperature resistant glue needs to be selected to ensure that the glue performance does not change under high temperature and to prevent the thread conversion component 3 from being pulled up.

[0037] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A threaded hole structure, characterized in that, include: Base (1); A threaded hole (2) is provided on the base (1); A thread conversion component (3) is provided inside the threaded hole (2).

2. The threaded hole structure according to claim 1, characterized in that: A volumetric cavity is also provided below the threaded hole (2) of the base (1).

3. The threaded hole structure according to claim 1, characterized in that: The outer diameter of the thread conversion component (3) is connected to the threaded hole (2), so that the thread conversion component (3) is placed inside the threaded hole (2).

4. The threaded hole structure according to claim 1, characterized in that: The threaded adapter (3) has a gap between itself and the upper end face of the threaded hole (2).

5. The threaded hole structure according to claim 4, characterized in that: The distance of the gap is 1 times the pitch of the thread converter (3).

6. The threaded hole structure according to claim 2, characterized in that: The threaded adapter (3) extends into the inner side of the volume cavity and contacts the lower end face of the volume cavity.

7. The threaded hole structure according to claim 1, characterized in that: The thread conversion component (3) is a threaded sleeve or a toothed nest, and the threaded sleeve is formed by spiral processing of metal wire.

8. The threaded hole structure according to claim 7, characterized in that: The rotating tooth nest is cylindrical, with threads on both the outer and inner diameter surfaces.

9. The threaded hole structure according to claim 1, characterized in that: The outer diameter of the thread conversion part (3) is coated with adhesive.

10. The threaded hole structure according to claim 1, characterized in that: The substrate (1) is made of ceramic, and the threaded adapter (3) is made of stainless steel.

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