Probe adjusting machine for probe card

Abstract

The utility model discloses a probe adjusting machine for a probe card, which comprises a base, a door-shaped bracket is arranged on the base, and a microscope assembly is arranged on the door-shaped bracket; a probe card mounting seat and a pinhole comparison assembly are arranged on the base, the pinhole comparison assembly comprises a reference card mounting seat, a rotatable mounting shaft is arranged on the reference card mounting seat, and a reference card is fixed at the end part of the mounting shaft; a handle is arranged on the side surface of the reference card mounting seat and can drive the reference card to turn over through the mounting shaft; the base is further provided with a display screen, the display screen is connected with the microscope assembly, two layers of overlapped images are displayed on the display screen, the first image layer is a pinhole reference point distribution diagram, and the second image layer is an image, displayed in real time, of a probe on the probe card. According to the utility model, the image of the probe is compared with the pinhole reference point distribution diagram pre-stored on the display screen, and the position of the probe can be adjusted at one time according to the position difference displayed on the display screen, so that the reference card does not need to be turned back and forth, and the adjustment efficiency is greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of needle adjustment machine technology, and in particular to a needle adjustment machine for probe cards. Background Technology

[0002] Probe cards serve as the interface between electronic test systems and semiconductor wafers. During use, probe cards frequently experience wear and tilting, leading to probe misalignment and inconsistent spacing, ultimately affecting wafer testing results. Therefore, after a period of use, probe cards require probe adjustment to correct probe tilt and ensure consistent spacing.

[0003] Currently, before needle adjustment, it is generally necessary to observe the probes on the probe card to determine the location of damage. At present, the probe card is generally observed with the naked eye or with the aid of a microscope. A pinhole comparison device is usually also set up to compare the probes on the probe card with a reference card containing pinhole reference points. By observing and comparing the pinhole positions with the probe positions, it is possible to quickly determine whether the probe is tilted or bent, and then correct it. During correction, the reference card needs to be removed first, and then the probe is adjusted little by little from memory. During the adjustment process, the reference card needs to be rotated continuously. This rotation can easily cause shaking, leading to deviations in the pinholes on the sheet, thus affecting the needle adjustment effect. Utility Model Content

[0004] To address the aforementioned problems, this invention provides a needle adjustment machine for probe cards, which ensures the normal operation of probe cards through accurate needle adjustment.

[0005] Therefore, the technical solution of this utility model is: a needle adjustment machine for probe cards, including a base, a gate-shaped bracket on the base, and a microscope assembly on the gate-shaped bracket; the base is provided with a probe card mounting seat and a pinhole comparison assembly, the pinhole comparison assembly including a reference card mounting seat, the reference card mounting seat being provided with a rotatable mounting shaft, and a reference card being fixed at the end of the mounting shaft; the reference card mounting seat is provided with a handle on its side, which can drive the reference card to rotate through the mounting shaft; the base is also provided with a display screen, the display screen being connected to the microscope assembly, the display screen displaying two overlapping images, the first layer being a pinhole reference point distribution map, and the second layer being a real-time image of the probes on the probe card.

[0006] Based on the above scheme and as a preferred embodiment of the above scheme: the microscope assembly is a trinocular microscope, connected to the display screen, and transmits images of the probes on the probe card in real time.

[0007] Based on the above scheme and as a preferred embodiment of the above scheme: the reference card is made of transparent material and has several pinhole reference points.

[0008] Based on the above scheme and as a preferred embodiment of the above scheme: the pinhole comparison component further includes stacked X-axis adjustment stage, Y-axis adjustment stage and Z-axis adjustment stage, and the reference card mounting base is mounted on the Z-axis adjustment stage.

[0009] Based on the above scheme and as a preferred embodiment of the above scheme: the probe card mounting base includes a chassis, a rotating disk is rotatably mounted on the chassis, an adjusting rod is provided on the side of the chassis, and the end of the adjusting rod abuts against the side of the rotating disk; the rotating disk is provided with two movable probe card support frames, and the probe card support frames are provided with card slots.

[0010] Based on the above scheme and as a preferred embodiment of the above scheme: a support platform is mounted on the base, and the support platform is inserted into the outside of the probe card support frame.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] By setting a camera eyepiece on the microscope assembly, the probe image can be sent to the display screen in real time and compared with the pinhole reference point distribution map pre-stored on the display screen. Based on the position difference displayed on the display screen, the position of the probe can be adjusted in one go without having to flip the reference card back and forth, which greatly improves the adjustment efficiency. Moreover, the pinhole reference point distribution map on the display screen does not move during the probe adjustment process, ensuring the accuracy of probe adjustment. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of this utility model;

[0014] Figure 2 This is a schematic diagram of the structure of the base of this utility model;

[0015] Figure 3 This is a schematic diagram of the probe card mounting base of this utility model;

[0016] Figure 4 This is a schematic diagram of the pinhole comparison component of this utility model.

[0017] The components in the diagram are labeled as follows: 1. Base; 2. Gate-shaped bracket; 3. Microscope assembly; 4. Display screen; 5. Probe card mounting base; 51. Chassis; 52. Rotary disk; 53. Adjusting rod; 54. Limiting arc groove; 55. Probe card support frame; 56. Slide groove; 57. Card slot; 6. Pinhole comparison assembly; 61. Reference card mounting base; 62. Mounting shaft; 63. Reference card; 64. Handle; 65. X-axis adjustment stage; 66. Y-axis adjustment stage; 67. Z-axis adjustment stage; 7. Support platform. Detailed Implementation

[0018] In the description of this utility model, it should be noted that the directional terms such as "center", "horizontal (X)", "longitudinal (Y)", "vertical (Z)", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", and "counterclockwise" indicate the orientation and positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. They should not be construed as limiting the specific protection scope of this utility model.

[0019] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features. Thus, the use of "first" and "second" to define a feature may explicitly or implicitly include one or more of that feature. In the description of this utility model, "several" or "a number" means two or more, unless otherwise explicitly specified.

[0020] See the attached figures. The probe adjustment device for the probe card described in this embodiment includes a base 1, a gate-shaped bracket 2 on the base, and a microscope assembly 3 on the gate-shaped bracket 2. The microscope assembly 3 is a trinocular microscope connected to a display screen to transmit images of the probes on the probe card in real time. The base 1 also has a display screen 4 connected to the microscope assembly 3. The display screen 4 displays two overlapping images: the first layer is a distribution map of pinhole reference points, and the second layer is a real-time image of the probes on the probe card.

[0021] The base 1 is equipped with a probe card mounting base 5 and a pinhole comparison assembly 6. The probe card mounting base 5 includes a chassis 51, on which a rotating disk 52 is rotatably mounted. An adjusting rod 53 is provided on the side of the chassis 51, with its end abutting against the side of the rotating disk 52. The rotating disk 52 has a limiting arc groove 54 to limit its rotation angle. The rotating disk 52 is equipped with two movable probe card support frames 55, and two sliding grooves 56. The probe card support frames 55 are slidably installed in the sliding grooves 56. The probe card support frames 55 are equipped with slots 57, into which probe cards can be inserted and fixed. A support platform 7 is mounted on the base 1, which is engaged with the outside of the probe card support frames. The support platform provides a convenient place for the operator's elbow, improving operating comfort.

[0022] The pinhole comparison assembly 6 includes a reference card mounting base 61, on which a rotatable mounting shaft 62 is provided. A reference card 63 is fixed to the end of the mounting shaft 62. The reference card 63 is made of transparent material and has several pinhole reference points. A handle 64 is provided on the side of the reference card mounting base 61, which can drive the reference card to flip through the mounting shaft. The pinhole comparison assembly 6 also includes stacked X-axis adjustment stages 65, Y-axis adjustment stages 66, and Z-axis adjustment stages 67. The reference card mounting base 61 is mounted on the Z-axis adjustment stage 67. The X-axis adjustment stages 65, Y-axis adjustment stages 66, Z-axis adjustment stages 67, and the rotating disk 52 on the probe card mounting base 5 are all manually adjustable stages, which are existing mature technologies and will not be described in detail here.

[0023] When using:

[0024] 1) Adjust the position of the probe card support frame 55 according to the position of the probe card so that the edge of the probe card can be easily inserted into the slot 57 of the probe card support frame 55.

[0025] 2) Adjust the position of the reference card mounting base 61 using the X-axis adjustment stage 65, Y-axis adjustment stage 66, and Z-axis adjustment stage 67, thereby adjusting the position of the reference card 63. If there is an angular deviation, adjust the angle of the rotating disk 52 on the probe card mounting base 5 so that when the reference card 63 is flipped down, most of the probes on the probe card are aligned with the pinhole reference point. The condition of the probe card and the reference card 63 can be observed through the microscope assembly 3.

[0026] 3) After determining the position of the reference card 63, the position of the probe card and the reference card is displayed on the display screen 4 in real time. Move the distribution map of the pinhole reference points stored on the display screen 4 to overlap with the pinhole reference points on the adjusted reference card 64. After obtaining the position distribution map of the probe in the ideal state, save the distribution map as a fixed layer. The distribution map is the position map of each point and will not block the image of the probe.

[0027] 4) Flip reference card 63 so that it is away from above the probe;

[0028] 5) The display screen 4 acquires the real-time position of the probe through the camera on the microscope assembly 3 and compares it with the saved distribution map.

[0029] 6) Using tweezers, staff can adjust the probe's position in one go based on the positional difference displayed on screen 4, without having to repeatedly flip the reference card and adjust it bit by bit. Staff can observe the probe through the microscope assembly or view it on the screen.

[0030] The above description is merely a preferred embodiment of this utility model. The protection scope of this utility model is not limited to the above embodiments. All technical solutions falling within the scope of this utility model's concept are protected. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principle of this utility model should also be considered within the protection scope of this utility model.

Claims

1. A needle adjustment device for probe cards, comprising a base, a gate-shaped bracket on the base, and a microscope assembly on the gate-shaped bracket; the base is provided with a probe card mounting seat and a pinhole comparison assembly, the pinhole comparison assembly including a reference card mounting seat, the reference card mounting seat having a rotatable mounting shaft, and a reference card fixed to the end of the mounting shaft; the reference card mounting seat has a handle on its side, which can rotate the reference card via the mounting shaft; characterized in that: The base is also equipped with a display screen, which is connected to the microscope assembly. The display screen shows two overlapping images: the first layer is a distribution map of pinhole reference points, and the second layer is a real-time image of the probe on the probe card.

2. The needle-adjusting machine for probe cards as described in claim 1, characterized in that: The microscope assembly is a trinocular microscope connected to a display screen, which transmits images from the probes on the probe card in real time.

3. The needle-adjusting machine for probe cards as described in claim 1, characterized in that: The reference card is made of transparent material and has several pinhole reference points.

4. The needle-adjusting machine for probe cards as described in claim 1, characterized in that: The pinhole comparison assembly also includes stacked X-axis adjustment stages, Y-axis adjustment stages, and Z-axis adjustment stages, with the reference card mounting base mounted on the Z-axis adjustment stage.

5. A needle-adjusting machine for probe cards as described in claim 1, characterized in that: The probe card mounting base includes a chassis, on which a rotating disk is rotatably mounted. An adjusting rod is provided on the side of the chassis, with the end of the adjusting rod abutting against the side of the rotating disk. The rotating disk is provided with two movable probe card support frames, and the probe card support frames are provided with card slots.

6. A needle-adjusting machine for probe cards as described in claim 5, characterized in that: A support platform is mounted on the base, and the support platform is inserted into the outside of the probe card support frame.

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