Mask box unlocking workbench for mask visual inspection

Abstract

The utility model discloses a mask box unlocking working table for mask visual inspection, a mask box comprises a box body, a mask and a box cover, and a clamping groove is formed in the bottom of the box body; the unlocking workbench comprises a base, a visual inspection platform and a box cover moving mechanism are arranged on the base, the visual inspection platform is provided with ejector pins corresponding to the clamping grooves, the ejector pins are used for positioning the box body and jacking up the box body, and the box cover moving mechanism comprises a box cover bracket and a lifting mechanism controlling the box cover bracket to ascend and descend. The mask box unlocking workbench for the mask visual inspection is reasonable in structure and easy and convenient to operate, has the advantages of automation, accuracy and high safety, and can remarkably improve the working efficiency and safety in the mask visual inspection process.

Description

Technical Field

[0001] This utility model relates to the field of visual inspection equipment technology, and in particular to a mask box unlocking workbench for mask visual inspection. Background Technology

[0002] In semiconductor manufacturing, the mask plays a crucial role as a core component in the photolithography process. The mask is etched with the pattern of the integrated circuit. The photolithography process uses a light source to illuminate the mask pattern, and then transfers the pattern onto a silicon wafer using photoresist. Therefore, the quality of the mask directly affects the precision and performance of the final chip. Throughout the production process, masks typically undergo rigorous visual inspection to ensure their surface is free of contaminants, the pattern is intact, and there are no defects.

[0003] Masks typically consist of a high-precision glass substrate and a coating layer, with tiny patterns or markings on their surface used for photolithography. Mask cases are used to store and protect masks from damage during storage and transportation. The structure of a mask case is usually complex, including components such as the case body, the mask, and the case cover, and these components need to fit precisely to ensure that the mask is not deformed, contaminated, or damaged by external environmental influences. The design and operation methods of the mask case are of great importance for the protection and visual inspection of the mask.

[0004] Traditional mask inspection is typically done manually. Workers must manually open the mask box, remove the mask, inspect it, and then put it back in. This process is not only cumbersome but also prone to mask damage or human error due to improper handling. Furthermore, most existing mask boxes lack precise positioning and unlocking designs, making the opening and closing process complex. Improper operation can lead to jamming or damage to the mask and the box.

[0005] Therefore, in order to improve the efficiency, accuracy and safety of mask visual inspection, there is an urgent need for a new device to enable the rapid and safe unlocking of the mask box, and to ensure the accurate positioning and safe operation of the mask during the visual inspection process. Utility Model Content

[0006] Purpose of the invention: The purpose of this utility model is to provide a mask box unlocking workbench for mask visual inspection. It has a reasonable structure, is easy to operate, and has the advantages of automation, precision and high security, which can significantly improve the work efficiency and safety in the mask visual inspection process.

[0007] Technical solution:

[0008] A mask box unlocking workbench for mask visual inspection is provided. The mask box includes a box body, a mask, and a box cover. The bottom of the box body is provided with a slot. The unlocking workbench includes a base, on which a visual inspection platform and a box cover moving mechanism are provided. The visual inspection platform is provided with a pin corresponding to the slot for positioning the box body and lifting the box body. The box cover moving mechanism includes a box cover support and a lifting mechanism for controlling the lifting and lowering of the box cover support.

[0009] Furthermore, the box cover includes a top cover and an annular surrounding side cover fixedly connected to the top cover, and the box cover support is provided corresponding to the annular surrounding side cover.

[0010] Furthermore, the box body and the lid are snap-fitted together. The bottom of the box body is provided with a rotating block that can be rotated to unlock the box body and the lid. The rotating block has an insertion hole. The visual inspection platform is provided with a rotatable unlocking pin seat in the middle. The unlocking pin seat has an unlocking pin facing upward. The visual inspection platform is also provided with an unlocking control device to control the rotation of the unlocking pin seat.

[0011] Furthermore, the lifting mechanism is a lead screw and nut structure.

[0012] Furthermore, the upper end of the lid support is provided with a limiting block for horizontally limiting the lid.

[0013] Furthermore, the lid moving mechanism also includes a translation mechanism for controlling the lid support and the lifting mechanism to move together. During visual inspection, sometimes the mask is picked up, and when picking it up, there is a bending motion. The lid at the top may affect the line of sight or collide with the head, causing personal injury and dust to fall, affecting the quality of the mask. Therefore, the translation mechanism moves the mask to the side or rear end, which is more convenient for visual inspection.

[0014] Furthermore, the translation mechanism is a lead screw and nut structure.

[0015] Furthermore, the unlocking workbench also includes a PLC control system and a control panel, wherein the PLC control system is connected to the lid moving mechanism and the unlocking control device.

[0016] Furthermore, a U-shaped anti-pinch sensor is provided at the lower end of the lid support.

[0017] Beneficial effects: The mask box unlocking workbench for mask visual inspection provided by the present invention has a reasonable structure, is easy to operate, and has the advantages of automation, precision and high security, which can significantly improve the work efficiency and safety in the mask visual inspection process. Attached Figure Description

[0018] Figure 1 This is a perspective view of the present invention;

[0019] Figure 2 This is a schematic diagram of the first working state of this utility model;

[0020] Figure 3 This is a schematic diagram of the second working state of this utility model;

[0021] Figure 4 This is a schematic diagram of the third working state of this utility model. Detailed Implementation

[0022] To make the technical solution of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0023] Example 1

[0024] like Figure 1 As shown, a mask box unlocking workbench for mask visual inspection is disclosed. The mask box 1 includes a box body 11, a mask 12, and a box cover 13. A slot is provided at the bottom of the box body 11. The unlocking workbench includes a base 2, on which an inspection platform 3 and a box cover moving mechanism 4 are provided. The inspection platform 3 is provided with a pin 31 corresponding to the slot for positioning and lifting the box body 11. The box cover moving mechanism 4 includes a box cover support 41 and a lifting mechanism 42 for controlling the lifting and lowering of the box cover support. The pin 31 on the inspection platform is used to position and lift the box body 11 through the slot, making it easier for the operator to handle the box body 11.

[0025] In this embodiment, the box cover 13 includes a top cover and an annular surrounding side cover fixedly connected to the top cover. The box cover support 41 is provided corresponding to the annular surrounding side cover. With this structure, the box cover support 41 is not affected by the box body 11 when lifting the box cover.

[0026] In this embodiment, the box body 11 and the box lid 13 are snap-fitted together. The bottom of the box body 11 is provided with a rotating block capable of rotatable to unlock the box body and lid. The rotating block has an insertion hole. A rotatable unlocking pin seat 32 is provided in the center of the visual inspection platform 3, and an unlocking pin 33 is provided upwards from the unlocking pin seat. The visual inspection platform is also provided with an unlocking control device to control the rotation of the unlocking pin seat. The unlocking pin seat 32 and unlocking pin 33 are located at the center of the visual inspection platform to facilitate the unlocking process of the box body and lid. It can be understood that the rotating block can adopt a cam structure; when rotating, it pushes a push rod to push the snap-fit ​​together, thereby unlocking the box.

[0027] In this embodiment, the lifting mechanism 42 is a lead screw and nut structure. A servo motor controls the rotation of the lead screw to move the movable seat. This lead screw and nut structure offers high stability and control precision, ensuring smooth lifting and lowering of the lid. This structure is commonly found in existing technologies and effectively meets the precision requirements of the mask box unlocking workbench.

[0028] In this embodiment, the upper end of the lid support 41 is provided with a limiting block 44 for horizontally limiting the lid, which can not only ensure that the mask box 1 is accurately positioned when placed on the visual inspection platform 3, but also prevent the lid from falling off when moving.

[0029] In this embodiment, the lid moving mechanism 4 further includes a translation mechanism 43 for controlling the joint movement of the lid support 41 and the lifting mechanism. Since the mask 12 is sometimes picked up during visual inspection, and this requires bending over, the lid 13 at the top may obstruct the view or collide with the head, causing injury and dust accumulation, thus affecting the mask quality. Therefore, the translation mechanism 43 moves the mask 12 to the side or rear end, making visual inspection easier.

[0030] In this embodiment, the translation mechanism is a lead screw and nut structure. The translation mechanism 43 adopts a lead screw and nut structure, which provides smooth movement and can accurately control the horizontal displacement of the box cover support 41 and the lifting mechanism 42, ensuring the safety and convenience of the operator during visual inspection.

[0031] In this embodiment, the unlocking workbench also includes a PLC control system and a control panel 5. The PLC control system is connected to the lid moving mechanism 4 and the unlocking control device. This system can automatically control the lifting, lateral movement, and unlocking functions of the lid. With the PLC system connected to the lid moving mechanism 4 and the unlocking control device, and through the control panel 5, operators can easily set and adjust the operation of the entire workbench, improving its automation level and operational accuracy.

[0032] In this embodiment, a U-shaped anti-pinch sensor 6 is provided at the lower end of the lid support 41. To increase operational safety, the lid support 41 is equipped with a U-shaped anti-pinch sensor 6. This sensor can detect whether there is a hand pinch or foreign object. Once a hand pinch risk is detected, the system will automatically stop moving or issue an alarm to avoid injury to personnel due to improper operation.

[0033] Working principle: such as Figure 2-4As shown, firstly, the mask box 1 is positioned by the pin 31 on the visual inspection platform 3. At this time, the box body 11 is located above the visual inspection platform 3, and the box cover 13 is located above the box cover support 41. At the same time, the unlocking pin 33 is inserted into the insertion hole of the box body 11. The unlocking control device controls the unlocking pin seat in the center of the visual inspection platform to rotate, thereby driving the rotating block to rotate, realizing the unlocking of the box body 11 and the box cover 13. Then, the lifting mechanism 42 controls the box cover support 41 to drive the box cover to move upward, completing the separation of the box cover 13 from the box body 11.

[0034] To facilitate visual inspection, the translation mechanism 43 can move the lid 11 horizontally to the rear end, avoiding interference with the operator. All operations of the workbench are automatically controlled by the PLC control system, improving operational convenience and accuracy. Simultaneously, an anti-pinch sensor at the lower end of the lid support monitors safety during operation in real time. If there is a risk of pinching, the system will automatically stop movement or issue an alarm to ensure personnel safety.

[0035] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention. Therefore, the scope of protection of this patent should be determined by the appended claims.

Claims

1. A mask box unlocking workbench for mask visual inspection, characterized in that, The mask box (1) includes a box body (11), a mask (12) and a box cover (13). The bottom of the box body (11) is provided with a slot. The unlocking workbench includes a base (2). The base (2) is provided with an inspection platform (3) and a box cover moving mechanism (4). The inspection platform (3) is provided with a pin (31) corresponding to the slot for positioning the box body (11) and lifting the box body. The box cover moving mechanism (4) includes a box cover support (41) and a lifting mechanism (42) for controlling the box cover support to rise and fall.

2. The mask box unlocking workbench for mask visual inspection according to claim 1, characterized in that, The box cover (13) includes a top cover and an annular surrounding side cover fixedly connected to the top cover, and the box cover support (41) is provided corresponding to the annular surrounding side cover.

3. A mask box unlocking workbench for mask visual inspection according to claim 1 or 2, characterized in that, The box body (11) is snapped together with the lid (13). The bottom of the box body (11) is provided with a rotating block that can be rotated to unlock the box body and the lid. The rotating block has an insertion hole. The visual inspection platform (3) is provided with a rotatable unlocking pin seat (32) in the middle. The unlocking pin seat is provided with an unlocking pin (33) facing upward. The visual inspection platform is also provided with an unlocking control device to control the rotation of the unlocking pin seat.

4. The mask box unlocking workbench for mask visual inspection according to claim 1, characterized in that, The lifting mechanism (42) is a lead screw and nut structure.

5. A mask box unlocking workbench for mask visual inspection according to claim 1, characterized in that, The upper end of the lid support (41) is provided with a limiting block (44) for limiting the lid in the horizontal direction.

6. A mask box unlocking workbench for mask visual inspection according to claim 1, characterized in that, The lid moving mechanism (4) also includes a translation mechanism (43) for controlling the lid support (41) and the lifting mechanism to move together.

7. A mask box unlocking workbench for mask visual inspection according to claim 6, characterized in that, The translation mechanism is a lead screw and nut structure.

8. A mask box unlocking workbench for mask visual inspection according to claim 1, characterized in that, The unlocking workbench also includes a PLC control system and a control panel (5), wherein the PLC control system is connected to the lid moving mechanism (4) and the unlocking control device.

9. A mask box unlocking workbench for mask visual inspection according to claim 1, characterized in that, A U-shaped anti-pinch sensor (6) is provided at the lower end of the lid support (41).

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