Plate body, thermal radiation reflecting layer structure and reflecting cover

Abstract

The utility model discloses a plate body, a heat radiation reflecting layer structure and a reflecting cover, the plate body comprises a plate body and a plurality of protrusions, and the protrusions are distributed on the plate body at intervals. Wherein the multiple plate bodies are suitable for being connected in an abutting mode, and at least part of the protrusions are suitable for being connected with the plate body of another plate body in an abutting mode, so that the plate bodies of every two adjacent plate bodies are spaced. In conclusion, according to the plate body, the heat radiation reflecting layer structure and the reflecting cover, the plurality of bulges are arranged on the plate body, so that not only is the structural strength of the plate body during combination increased, but also a heat insulation layer is formed through the butt joint of the bulges and the plate body of the other plate body, the heat conduction is effectively reduced, and the heat efficiency of heating equipment is improved; and moreover, the gap can compensate deformation of the plate body after being heated, and the heat insulation effect of the scheme of the application is further guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor manufacturing field field especially relates to a plate body, heat radiation reflection layer structure and reflector. BACKGROUND

[0002] In the field of semiconductor manufacturing, physical vapor deposition (PVD) technology is a key technology widely used in thin film preparation. PVD process usually needs to be carried out in high vacuum environment to ensure the purity of deposition material and the quality of thin film. In order to achieve this purpose, the PVD equipment is often equipped with specially designed DEGAS cavity for pretreatment of wafer or glass panel and other substrates, which removes the moisture and other impurities adsorbed on the surface through heating, so as to improve the effect of subsequent deposition process. This pretreatment step is crucial to maintain a good process environment, which can significantly improve the performance and reliability of the final product.

[0003] However, although most of the DEGAS cavities currently use single layer of stainless steel mirror panel or gold / silver plated metal or oxide layer as radiation reflection and heat insulation material, the reflectivity and heat insulation effect of these materials still need to be improved. Especially under the condition of long time high temperature operation, the temperature of the inner wall of the cavity and other non-target areas gradually rises, which not only consumes additional energy, but also may cause unnecessary thermal stress, affecting the stability and service life of the equipment. SUMMARY

[0004] The main purpose of the utility model is to provide a kind of plate body, heat radiation reflection layer structure and reflector, by being provided with multiple protrusions on plate body main body, not only increase the structural strength when plate body is combined, and by the abutment of protrusion and the plate body main body of another plate body, heat insulation layer is formed, effectively reduce heat conduction, improve the thermal efficiency of heating equipment, reduce energy consumption, and the gap can compensate the deformation of plate body after being heated, further guarantee the heat insulation effect of the application.

[0005] To achieve the above purpose, some embodiments of the utility model provide a kind of plate body, for the heat radiation reflection layer structure of heating equipment, one side of heat radiation reflection layer structure is used to define the heating chamber of heating equipment, and heat radiation reflection layer structure includes multiple plate bodies arranged in layers, characterized in that, plate body includes:

[0006] Plate body main body;

[0007] Multiple protrusions are distributed in plate body main body with interval;

[0008] Among them, multiple plate bodies are adapted to abut each other, and at least part of protrusions are adapted to abut the plate body main body of another plate body, so that the plate body main body of adjacent two plate bodies is spaced.

[0009] In some embodiments, the interval H between the two adjacent plate bodies satisfies: 1.5mm≤H≤4.5mm.

[0010] In some embodiments, the cross-sectional area of the protrusion gradually decreases along the protruding direction of the protrusion.

[0011] In some embodiments, the plate body is punched to form the protrusion and the notch, the protrusion abuts against the plate body of another plate body, and the protrusion avoids the notch.

[0012] In some embodiments, along the thickness direction of the plate body, the plurality of protrusions are all arranged on the same side of the plate body.

[0013] The second aspect of the utility model discloses a heat radiation reflection layer structure, adopts the plate body of any one of the above embodiments, and the heat radiation reflection layer structure further comprises:

[0014] The bottom shell comprises a bottom plate and a surrounding barrier protruding towards one side of the bottom plate;

[0015] The plurality of plate bodies are stacked in the bottom shell along the direction perpendicular to the bottom plate, and the plate bodies of adjacent plate bodies are spaced apart from each other;

[0016] Along the direction perpendicular to the bottom plate, the height of the surrounding barrier is higher than the thickness of the plurality of plate bodies stacked together.

[0017] In some embodiments, the heat radiation reflection layer structure further comprises a fastener, the plate body is provided with a first opening, the fastener comprises a connecting body and a boss, the connecting body is connected to the bottom shell through the first opening, and the boss abuts against the side of the plate body away from the bottom shell to fix the plurality of plate bodies.

[0018] In some embodiments, the boss is elliptical, and the first opening is elliptical in outline.

[0019] In some embodiments, the heat radiation reflection layer structure further comprises a separation gasket, and the separation gasket is arranged between the plurality of plate bodies.

[0020] The separation gasket is provided with a second opening, and the connecting body penetrates through the second opening.

[0021] The third aspect of the utility model discloses a reflector, which adopts the heat radiation reflection layer structure of any one of the above embodiments.

[0022] According to the above embodiments, the utility model has the beneficial effects that:

[0023] The plate body of the utility model comprises a plate body and a plurality of protrusions, and the plurality of protrusions are arranged at intervals on the plate body. The plurality of plate bodies are adapted to abut against each other, and at least part of the protrusions are adapted to abut against the plate body of another plate body, so that the plate bodies of adjacent two plate bodies are spaced apart.

[0024] In this way, the plate bodies of two adjacent plate bodies are kept at a distance, which helps to reduce direct heat conduction and improve the thermal efficiency of the heating device. Moreover, the plurality of protrusions abut the plate bodies of adjacent plates to space the plate bodies of two adjacent plates apart, that is, the two adjacent plate bodies are used in combination, and a sufficient reserved gap can still be maintained. It can be understood that the plate bodies will deform after being heated, and the reserved gap between the plate bodies of the present application compensates for this deformation, so that the plate bodies of the present application do not abut each other after deformation caused by heating, heat is difficult to conduct between the plurality of stacked plate bodies, and the plate bodies of the present application maintain the design that they will not be pressed together due to thermal deformation, which facilitates the disassembly of the plurality of stacked plate bodies after participating in work.

[0025] Additional aspects and advantages of the present application will be given in part in the following description, and will become apparent from the following description, or will be learned by practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description. Obviously, the drawings in the following description only constitute some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from the structures shown in these drawings without creative labor.

[0027] Figure 1 It is an embodiment of the present application.

[0028] Figure 2 It is an embodiment of the present application. Figure 1 It is an embodiment of the present application.

[0029] Figure 3 It is an embodiment of the present application.

[0030] Figure 4 It is an embodiment of the present application. Figure 3 It is an embodiment of the present application.

[0031] Figure 5 It is an embodiment of the present application. Figure 4 It is an embodiment of the present application.

[0032] Figure 6 It is an embodiment of the present application.

[0033] Figure 7 It is an embodiment of the present application. Figure 6A cross-sectional structure diagram of a middle heat radiation reflection layer structure is cut by a B-B plane;

[0034] Figure 8 For Figure 7 An enlarged view at middle A;

[0035] Figure 9 A structure diagram of a bottom shell in an embodiment of the present application;

[0036] Figure 10 A structure diagram of a reflecting cover in an embodiment of the present application.

[0037] Explanation of reference numerals:

[0038] Reflecting cover 10;

[0039] Heat radiation reflection layer structure 20;

[0040] Plate body 100; plate main body 110; protrusion 120; notch 130;

[0041] Bottom shell 200; bottom plate 210; fence 220;

[0042] Fastener 300; boss 310; connecting body 320;

[0043] Partition gasket 400.

[0044] The realization, functional features and advantages of the present application will be further described with reference to the accompanying drawings in combination with embodiments. DETAILED DESCRIPTION

[0045] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application.

[0046] It should be noted that if the embodiments of the present application involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative positional relationship, movement condition, etc. between components in a certain posture, and if the certain posture changes, the directional indications also change accordingly.

[0047] In addition, if the description of "first", "second" and the like is involved in the embodiments of the present application, the description of "first", "second" and the like is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can be explicitly or implicitly included at least one of the features. In addition, if "and / or", "and / or" or "and / or" appears in the whole text, it means that the three parallel schemes are included, for example, "A and / or B" includes A scheme, or B scheme, or A and B scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of the ordinary skilled in the art, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the protection scope required by the present application.

[0048] The plate body, the heat radiation reflection layer structure and the reflection cover according to the embodiments of the present application will be described below with reference to Figures 1 to 10

[0049] Referring to Figures 1 to 3 In some embodiments, the plate body 100 of the present application includes a plate body 110 and a plurality of protrusions 120. The plate body 110 constitutes the basic structure of the plate body 100, which can be made of materials with good high-temperature resistance, such as stainless steel, ceramics, etc., to ensure long-term stable use in high-temperature environment. A plurality of protrusions 120 are distributed on the plate body 110, and the design purpose of these protrusions 120 is to ensure the gap between the two adjacent plate bodies 100 when the plurality of plate bodies 100 are arranged in layers, thereby forming an effective heat insulation layer. The shape of the protrusion 120 can be cylindrical, conical or other geometric shapes that can provide stable support. In this way, the plate body 110 of the adjacent two plate bodies 100 maintains a certain distance, which helps to reduce the direct conduction of heat and improve the thermal efficiency of the heating equipment. Moreover, the plurality of protrusions 120 abut against the plate body 110 of the adjacent plate body to space the plate body 110 of the adjacent two plate bodies, i.e. the two adjacent plate bodies 110 are used in combination, and still maintain sufficient reserved gap. It can be understood that the plate body 110 will deform after being heated, and the reserved gap between the plate body 110 of the present application compensates for this deformation, so that the plate body 110 of the present application will not abut against each other after being deformed by heat, and the heat is difficult to conduct between the plurality of stacked plate bodies 110, and the plate body 110 of the plate body 100 of the present application maintains the design that it will not be squeezed together due to thermal deformation, which is beneficial to the disassembly of the plurality of stacked plate bodies 100 after participating in work.

[0050] ​In summary, the application sets multiple protrusions 120 on the plate body 110, which not only increases the structural strength when the plate body 100 is combined, but also forms a heat insulation layer through the abutment of the protrusions 120 and the plate body 110 of another plate body 100, effectively reducing heat conduction, improving the thermal efficiency of the heating equipment, reducing energy consumption, and the gap can compensate for the deformation of the plate body 100 after being heated, further ensuring the heat insulation effect of the application.

[0051] Of course, it can be understood that the profile of the plate body 110 can be rectangular, circular, oval, etc. Multiple plate bodies 100 of the same size can be stacked and combined, or plate bodies 100 of different sizes can be stacked and combined, as long as the protrusions 120 can separate the plate bodies 100.

[0052] Regarding the design of the protrusions 120, it can be understood that the protrusions 120 can be configured to be located on only one side of the plate body 110 along the thickness direction, or the protrusions 120 can be configured to be located on both sides of the plate body 110 along the thickness direction. The protrusions 120 can be columnar and welded to the surface of the plate body 110; the protrusions 120 can also be stamped contacts and protrude from the plate body 110 by stamping. Of course, the shapes of the protrusions 120 can be the same or different, and their sizes can be arbitrarily set, as long as they can separate the plate bodies 100 when the plate bodies 100 are stacked and assembled. In addition, in some embodiments, in order to ensure that the surfaces of the plate bodies 110 of the adjacent two plate bodies 100 are parallel when they are stacked and assembled, the side of the other plate body 110 that is abutted can be provided with a resilient gasket or the like to adjust the degree of interference when the protrusions 120 abut the plate body 110.

[0053] Regarding the material selection of the protrusions 120, the same material as the plate body 110 can be considered to ensure that the thermal expansion coefficients of the overall structure are consistent and reduce structural deformation caused by temperature changes. In addition, the connection method of the protrusions 120 and the plate body 110 can be welding, casting integration, or mechanical processing, depending on the manufacturing cost and process feasibility.

[0054] Referring to Figure 7 and Figure 8 In some embodiments, the gap H between the adjacent two plate bodies 110 satisfies 1.5mm≤H≤4.5mm, for example, the gap H between the two plate bodies 110 can be 1.5mm, 2mm, 3mm, 4mm, 4.5mm, and preferably 3mm. Designing the size in this range can ensure that the gas convection between the gaps of the plate bodies 110 is weak, so that the heat loss is slower, the heat conduction between the plate bodies 100 is weaker, and the heat insulation effect is better.

[0055] Further, when the H value is less than 1.5 mm (this minimum interval is determined according to the size of the plate body 100), although the compactness and stability of the structure can be improved, the efficiency of vacuum pumping will be affected due to the reduced gap, so it is necessary to confirm the range of H in the form of balanced vacuum pumping and heat convection; when the H value is greater than 4.5 mm, a stronger gas convection will occur between the larger gaps, and the enhanced gas convection will make the heat dissipate faster, resulting in poor heat insulation effect. Therefore, by precisely controlling the interval H between the adjacent two plate bodies 110 to be between 1.5 mm and 4.5 mm, the heat radiation reflection efficiency can be ensured while maintaining good heat insulation effect.

[0056] It can be understood that in some embodiments, the interval H between adjacent plate bodies 110 can be achieved by adjusting the height of the protrusions 120. The height of the protrusions 120 needs to be designed considering the physical properties of the material, such as the elastic modulus and yield strength, to ensure that the protrusions 120 can still maintain a stable shape and not be permanently deformed in a long-term high-temperature environment. In addition, in order to further improve the heat radiation reflection efficiency, a high-reflectivity metal coating such as silver or aluminum can be applied to the surface of the protrusions 120, which not only enhances the reflection effect of heat radiation but also plays a certain role in heat insulation.

[0057] At the same time, in order to ensure good contact between the plate bodies 100, the top of the protrusion 120 can be designed as a small sphere or hemisphere, and the protrusion 120 directly abuts the planar structure of the plate body 110 to reduce the contact area between adjacent plate bodies 110 and reduce the thermal conductivity. Such a design not only helps to improve the heat radiation reflection efficiency, but also effectively prolongs the service life of the plate body 100.

[0058] Specifically, referring to Figures 1 to 3 In some embodiments, the plate body 110 and the plurality of protrusions 120 constitute the plate body 100, wherein the plurality of protrusions 120 are spaced apart on the plate body 110. Along the protruding direction of the protrusions 120, the cross-sectional area of the protrusions 120 gradually decreases. The main purpose of this design is to reduce the contact area between adjacent plate bodies 100, thereby reducing the thermal conductivity and improving the heat radiation reflection efficiency. The protrusions 120 are designed in the shape of a cone or a wedge, so that the contact point between the protrusions 120 and the plate body 110 is as small as possible, reducing the possibility of heat transfer through the contact surface. At the same time, this design also helps to form more gaps between the plate bodies 100, further improving the heat radiation reflection effect.

[0059] It can be understood that, in some embodiments, the gradually decreasing cross-sectional area design of the protrusions 120 can be implemented in various ways. For example, the protrusions 120 can be designed to be conical, pyramidal or wedge-shaped. The tip of the conical protrusion 120 has the smallest contact area, which is suitable for occasions requiring extremely high thermal insulation effect; the pyramidal protrusion 120 can provide better structural stability while ensuring thermal insulation effect; and the wedge-shaped protrusion 120 is suitable for occasions requiring a balance between thermal insulation effect and structural strength. In some embodiments, in order to ensure good contact between the plate bodies 100, the top of the protrusion 120 can be designed to be slightly spherical or hemispherical to reduce the contact area and reduce the thermal conductivity. Such a design not only helps to improve the thermal radiation reflection efficiency, but also effectively prolongs the service life of the plate body 100.

[0060] In some embodiments, the protrusions 120 can be connected to the plate body 110 by welding or the like. In order to facilitate production, in some embodiments, the protrusions 120 can also be punched from the plate body 110. Specifically, referring to Figures 1 to 3 In some embodiments, the plate body 100 forms the protrusions 120 and the notches 130 through a punching process. The protrusions 120 are designed to have a gradually decreasing cross-sectional area along the protruding direction, which is beneficial to the formation of point and surface contact when the tip of the protrusion 120 contacts the surface of another plate body 110, thereby reducing the heat conduction between the plate bodies 100 by reducing the contact area.

[0061] It can be understood that, when the protrusions 120 are punched out through the punching process, the notches 130 will be correspondingly generated. In order to maintain the excellent state of the aforementioned point and surface contact, in some embodiments, the protrusions 120 avoid the notches 130, that is, the protrusions 120 abut on the plane of the plate body 110 and do not extend into the notches 130. Such a design ensures that the contact area between the two plate bodies 100 is small enough when they abut on each other, and does not increase the additional contact area due to the abutment of the side walls of the protrusions 120 and the notches 130, so as to ensure that the plate bodies 100 have a low heat conduction effect.

[0062] Of course, in other embodiments, in order to facilitate the assembly of the plate body 100, the protrusions 120 can also extend into the notches 130 of another plate body corresponding thereto, so as to quickly align the two plate bodies 100, under the premise of ensuring that the plate bodies 100 have a low heat conduction effect.

[0063] Referring to Figures 1 to 3In some embodiments, the plurality of protrusions 120 are arranged on the same side of the plate body 110 in the thickness direction of the plate body 110. This design ensures that the protrusions 120 of the plate body 100 always face the same direction when stacked, thereby ensuring that the gap between adjacent plate bodies 100 is more uniform and stable. The distribution density of the protrusions 120 also needs to be adjusted according to the requirements of the heat insulation effect to ensure good heat insulation performance under different use conditions.

[0064] By arranging the plurality of protrusions 120 on the same side of the plate body 110, not only the manufacturing and installation process of the plate body 100 is simplified, but also the gap between adjacent plate bodies 100 is more uniform and stable, improving the heat insulation effect and overall stability of the heat radiation reflection layer structure 20.

[0065] In some embodiments, the plurality of protrusions 120 are evenly distributed on the surface of the plate body 110 to ensure that the force is evenly distributed when two plate bodies 100 abut each other, ensuring the stability of the mechanical structure after abutting.

[0066] It can be understood that in some embodiments, the protrusions 120 are usually made of the same material as the plate body 110 to ensure that the overall coefficient of thermal expansion is consistent and reduce structural deformation caused by temperature changes. In some cases, to further improve the heat insulation effect, low thermal conductivity materials such as silicone and glass fiber can be filled between the protrusions 120 and the plate body 110, which can further reduce heat conduction without affecting the structural strength.

[0067] Referring to Figures 1 to 9 The second aspect of the present application proposes a heat radiation reflection layer structure 20 using any of the above-mentioned plate bodies 100. The heat radiation reflection layer structure 20 further comprises a bottom shell 200 and a plurality of plate bodies 100. The bottom shell 200 comprises a bottom plate 210 and a surrounding barrier 220 protruding towards the bottom plate 210 in the circumferential direction of the bottom plate 210. The bottom shell 200 provides a stable support platform to ensure that the plurality of plate bodies 100 can be neatly stacked. The plurality of plate bodies 100 are stacked in the bottom shell 200 in a direction perpendicular to the bottom plate 210, and the plate bodies 110 of adjacent plate bodies 100 are spaced apart from each other. This design ensures that heat radiation can be effectively reflected when the heating equipment is running, reducing heat loss. The height of the surrounding barrier 220 is higher than the thickness of the plurality of plate bodies 100 stacked together, which not only provides additional protection, but also ensures that the plate bodies 100 will not tilt or shift when stacked, improving the stability of the overall structure. Moreover, the wrapping ability of the surrounding barrier 220 can prevent heat loss.

[0068] Through the design of the bottom shell 200 and the enclosure 220, not only a stable support platform is provided, but also the neatness and stability of the plurality of plate bodies 100 when stacked are ensured, and the heat radiation reflection layer structure 20 is improved in heat insulation effect and overall reliability.

[0069] It can be understood that, in some embodiments, the bottom plate 210 of the bottom shell 200 and the enclosure 220 can be made of a high-temperature-resistant and corrosion-resistant material, such as stainless steel, aluminum alloy, etc., to ensure long-term stable use in a high-temperature environment. The height of the enclosure 220 can be adjusted according to actual application requirements. For example, in the case of limited space, the height of the enclosure 220 can be appropriately reduced, but in a high-temperature or high-vibration environment, the height of the enclosure 220 can be increased to provide better protection.

[0070] In some embodiments, the bottom shell 200 is a stainless steel mirror panel. In some cases, in order to further improve the heat insulation effect, a layer of reflective material, such as aluminum foil or ceramic coating, can be coated on the inner wall of the bottom shell 200. These materials can effectively reflect heat radiation and reduce heat loss. In addition, the manufacturing of the bottom shell 200 can adopt stamping, casting or welding process, depending on the production cost and process feasibility.

[0071] Referring to Figures 3 to 8 In some embodiments, the heat radiation reflection layer structure 20 further comprises a fastener 300, the plate body 100 is provided with a first opening, and the fastener 300 comprises a boss 310 and a connecting body 320. The connecting body 320 is connected to the bottom shell 200 through the first opening of the plate body 100, and the boss 310 abuts against the side of the plate body 100 away from the bottom shell 200, so as to fix the plurality of plate bodies 100.

[0072] Specifically, referring to Figure 6 , the fastener 300 and the boss 310 are designed as a waist hole, i.e. an elliptical design. Since the temperature rise between each layer of plate bodies 100 is different during heating, for example, the temperature of the cavity rises from 20 degrees Celsius to 100 degrees Celsius, the plate body 100 and the fastener 300 will expand and elongate to a certain extent during heating. The purpose of the waist hole design is to have a certain amount of movement, so that after thermal expansion, it can elongate in a predetermined direction, i.e. release its internal stress, thereby preventing the plurality of plate bodies 100 from being squeezed and deformed. In addition, due to the waist hole design of the fastener 300 having a certain amount of movement, after thermal expansion, the threads of the fastener 300 will not be stuck, improving the reliability and maintenance convenience of the heat radiation reflection layer structure 20.

[0073] It can be understood that in some embodiments, the material of the fastener 300 is usually selected to be high-temperature resistant and corrosion-resistant, such as stainless steel, titanium alloy, etc., to ensure long-term stable use in high-temperature environments. The height and diameter of the boss 310 need to be adjusted according to the actual application requirements to ensure that there is no excessive pressure on the plate body 100 when fixing the plate body 100, while providing sufficient fixing force. The length and diameter of the connecting body 320 also need to be designed according to the thickness of the plate body 100 and the structure of the bottom shell 200 to ensure the stability and reliability of the connection. In addition, the manufacturing of the fastener 300 can adopt processes such as precision casting, cold heading or machining, depending on the production cost and process feasibility.

[0074] Referring to Figure 8 In some embodiments, the heat radiation reflection layer structure 20 further comprises a partition pad 400 located between the plurality of plate bodies 100. The partition pad 400 is provided with a second opening through which the connecting body 320 penetrates. This design not only further ensures the stable spacing between adjacent plate bodies 100, but also provides additional thermal insulation effect. The thickness and shape of the partition pad 400 can be adjusted according to the actual application requirements to ensure the best thermal insulation effect and structural stability.

[0075] It can be understood that in some embodiments, the material of the partition pad 400 is usually selected to be low thermal conductivity and high-temperature resistant, such as silica gel, glass fiber, ceramic fiber, etc., to ensure long-term stable use in high-temperature environments. The thickness of the partition pad 400 can be adjusted according to the actual application requirements, corresponding to the thickness of the boss 310. The shape of the partition pad 400 can be rectangular, circular or other suitable geometric shapes, depending on the structure of the plate body 100 and the installation requirements. In some cases, in order to further improve the thermal insulation effect, a layer of reflective material such as aluminum foil or ceramic coating can be coated on the surface of the partition pad 400, which can effectively reflect heat radiation and reduce heat loss. In addition, the manufacturing of the partition pad 400 can adopt processes such as molding, injection molding or cutting, depending on the production cost and process feasibility. The second opening of the partition pad 400 needs to be accurately aligned with the connecting body 320 of the fastener 300 to ensure the stability and reliability of the connection.

[0076] Referring to Figures 6 to 9In some embodiments, the thermal radiation reflection layer structure 20 includes multiple groups of plate bodies 100, each group of plate bodies 100 includes multiple plate bodies 100 stacked together, and each group of plate bodies 100 is accommodated in the bottom shell 200 and distributed in a direction parallel to the surface of the bottom plate 210. This design enables the thermal radiation reflection layer structure 20 to provide uniform heat insulation effect in a larger area, suitable for large-sized heating equipment. The bottom plate 210 and the enclosure 220 of the bottom shell 200 provide a stable support platform to ensure that the multiple groups of plate bodies 100 can be arranged and fixed in an orderly manner. The spacing between each group of plate bodies 100 can be adjusted according to the actual application requirements to optimize the heat insulation effect and structural stability.

[0077] Specifically, through the design of multiple groups of plate bodies 100, not only the coverage area of the thermal radiation reflection layer structure 20 is expanded, but also uniform heat insulation effect can be provided in large-sized heating equipment, improving the overall thermal efficiency and reliability.

[0078] It can be understood that in some embodiments, the arrangement of multiple groups of plate bodies 100 can be linear arrangement, matrix arrangement or other suitable arrangement, depending on the structure and use requirements of the heating equipment. The spacing between each group of plate bodies 100 can be achieved by adjusting the thickness of the separation pad 400 or setting a positioning structure in the bottom shell 200.

[0079] Referring to Figure 10 The third aspect of the present application proposes a reflector 10 which adopts the thermal radiation reflection layer structure 20 of any of the preceding embodiments. The design purpose of the reflector 10 is to provide an efficient thermal radiation reflection and insulation layer outside the heating equipment to reduce heat loss and improve the thermal efficiency of the heating equipment. The reflector 10 includes a bottom shell 200 and multiple groups of plate bodies 100, the bottom shell 200 provides a stable support platform, and the multiple groups of plate bodies 100 ensure stable spacing between adjacent plate bodies 100 through the design of the protrusions 120 and the notches 130. The shape and size of the reflector 10 can be customized according to the specific structure of the heating equipment to ensure the best installation and use effect. By adopting the reflector 10 with the thermal radiation reflection layer structure 20, not only the thermal efficiency of the heating equipment is improved, but also the service life of the equipment is prolonged, the energy consumption is reduced, and the overall economy and environmental protection are improved.

[0080] The reflector 10 of the present application adopts the plate body 100 design of the present application, which can reduce convection between the plate bodies 100, thereby reducing heat loss and achieving good heat insulation effect.

[0081] It can be understood that in some embodiments, the material of the reflecting cover 10 can be selected to be high-temperature resistant and corrosion resistant, such as stainless steel, aluminum alloy, etc., to ensure long-term stable use in high-temperature environment. The surface of the reflecting cover 10 can be coated with a layer of reflective material, such as aluminum foil or ceramic coating, to further improve the heat radiation reflection effect. The manufacturing of the reflecting cover 10 can adopt processes such as stamping, casting or welding, depending on the production cost and process feasibility. In some cases, in order to improve the installation convenience of the reflecting cover 10, buckles or threaded holes can be provided on the enclosure 220 of the bottom shell 200 to facilitate quick installation and disassembly of the reflecting cover 10. In addition, the internal structure of the reflecting cover 10 can be designed to be modularized for easy maintenance and replacement. For example, multiple groups of plate bodies 100 can be designed as independent modules, each module can be installed and disassembled by a simple plug-in manner, thereby simplifying the maintenance process.

[0082] In the following, the plate body, the heat radiation reflection layer structure and the reflecting cover of the present application are systematically described in a specific embodiment. Referring to Figures 1 to 10 Specifically, the utility model provides a reflecting cover 10 to realize high-efficiency heat insulation. In the same space size, the heat insulation efficiency of the structure is higher than that of the reflecting cover 10 with single-layer reflecting plate. The amount of heat radiation transferred from the radiation source perpendicular to the reflecting plate finally reaching the back of the reflecting plate is less. The reflecting cover 10 covers the end face and the opening of the heat radiation reflection layer structure 20, reducing the end face heat dissipation.

[0083] The heat radiation reflection layer structure 20 is mainly composed of a plurality of plate bodies 100 arranged in layers. The plate body 100 is a thin single-layer stainless steel mirror plate. The plate body 100 and the reflection cover 10 are fastened on the mounting surface with a gap by means of stepped screws. The plate body 100 is mainly composed of a plate body 110 and a plurality of protrusions 120. The protrusions 120 are evenly arranged on each plate body 110. The fastener 300 includes a boss 310 and a connecting body 320. The plurality of fasteners 300 arranged on the heat radiation reflection layer structure 20 combine the plurality of plate bodies 100 according to the specified layer spacing. The protrusions 120 on each layer of plate body 110 are used together with the separation pad 400 in the layer spacing to ensure the layer spacing, enhance the overall rigid structure, resist the deformation of the thin plate during transportation and installation, prevent the deformation of adjacent plate bodies 110 during heating, ensure the gap between the layers, make the vacuum pumping more efficient, and reduce the contact heat transfer area. In the process of air intake and baking degassing in low vacuum, the small heat convection in the gap between the layers can also be reduced, and the heat insulation effect can be improved. The assembly method of the fastener 300 can make the reflection cover 10 be layered and disassembled, so as to facilitate the individual cleaning of the plate body 100 in the initial installation. The screw fastening and clamping design can reduce the risk of thread heating combination. The fastener 300 is fastened with a gap to maintain a certain activity gap when installed, so as to cope with the combined elongation in the length and width directions caused by heating. By reserving the heat elongation direction movement allowance, the deformation and stress caused by hindering heat elongation are reduced.

[0084] Regarding the design of the pad and the bottom shell 200 enclosure 220 in the reflection cover 10 structure, after the heat radiation reflection layer structure 20 and the reflection cover 10 are installed, the bottom plate 210 and the enclosure 220 partially cover the edge end surface and the opening or notch of the heat radiation reflection layer structure 20, reducing the exposure of the end surface heat leakage, while leaving a gap to ensure the rate during pumping.

[0085] The heat radiation reflection layer structure 20 realizes high heat insulation efficiency in the direction of radiation. The reflection cover 10 composed of the heat radiation reflection layer structure 20 reduces the heat dissipation of the reflection plate opening structure and the end surface. For the assembly and installation structure of the heat radiation reflection layer structure 20 and the reflection cover 10, the deformation and stress problem caused by the heat elongation of the plate body 100 in the continuous heating is reduced. According to the position design of the cavity structure and the heating element, the assembly design of the plate body 100 in multiple directions can be carried out.

[0086] The above are only preferred embodiments of the present application, and do not limit the patent range of the present application, and any equivalent structural transformation made by using the present application specification and drawing contents, or directly / indirectly applied in other related technical fields are included in the patent protection range of the present application.

Claims

1. A panel for a heat radiation reflection layer structure of a heating apparatus, one side of the heat radiation reflection layer structure being used to define a heating chamber of the heating apparatus, the heat radiation reflection layer structure comprising a plurality of the panels arranged in a stack, characterized in that, The plate body comprises: a plate body; a plurality of protrusions distributed at intervals on the plate body; wherein the plate bodies are adapted to abut each other, and at least part of the protrusions are adapted to abut the plate body of another plate body, so that the plate bodies of two adjacent plate bodies are spaced apart.

2. The panel according to claim 1, characterized in that The spacing H between the plate bodies of two adjacent plate bodies satisfies 1.5mm≤H≤4.5mm.

3. The panel of claim 1, wherein The cross-sectional area of the protrusion gradually decreases in the protruding direction of the protrusion.

4. The panel according to claim 3, characterized in that The plate body is stamped to form the protrusion and the recess, the protrusion abuts the plate body of another plate body, and the protrusion avoids the recess.

5. The panel of claim 1, wherein Along the thickness direction of the plate body, a plurality of protrusions are arranged on the same side of the plate body.

6. A heat radiation reflection layer structure using the sheet body according to any one of claims 1 to 5, characterized by The heat radiation reflection layer structure further comprises: a bottom shell comprising a bottom plate and a surrounding wall protruding from the bottom plate towards one side of the bottom plate; a plurality of plate bodies stacked on the bottom shell along a direction perpendicular to the bottom plate, and the plate bodies of adjacent plate bodies are spaced apart from each other; along a direction perpendicular to the bottom plate, the height of the surrounding wall is higher than the thickness of the plurality of plate bodies stacked together.

7. The heat radiation reflection layer structure according to claim 6, wherein The heat radiation reflection layer structure further comprises a fastener, the plate body is provided with a first opening, the fastener comprises a connecting body and a protrusion, the connecting body is connected to the bottom shell through the first opening, and the protrusion abuts one side of the plate body away from the bottom shell to fix the plurality of plate bodies.

8. The heat radiation reflection layer structure according to claim 7, wherein The protrusion is elliptical, and the first opening is elliptical.

9. The heat radiation reflection layer structure according to claim 7, wherein The heat radiation reflection layer structure further comprises a separation pad between the plurality of plate bodies; wherein the separation pad is provided with a second opening, and the connecting body penetrates through the second opening.

10. A reflector characterized by, The heat radiation reflection layer structure comprises any one of claims 6-9.

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