Dust and static electricity removing conveying equipment for conveying sputter coating cage frame

Abstract

The utility model discloses dust and static electricity removing conveying equipment for conveying a sputter coating cage frame, which comprises at least one coating chamber and a conveying component connected with the coating chamber, the conveying component is used for conveying the cage frame, and a driving mechanism for driving the cage frame to rotate is arranged on a conveying path of the cage frame. The dust and static electricity removing mechanism is located beside the driving mechanism, and the output end of the dust and static electricity removing mechanism faces the cage frame; before the cage frame enters the coating chamber, the driving mechanism drives the cage frame to rotate, so that the dust and static electricity removing mechanism acts on a workpiece on the side wall of the cage frame. The driving mechanism is arranged on the conveying path of the conveying assembly, and the driving mechanism drives the cage frame on the conveying assembly to rotate, so that the dust and static electricity removing mechanism placed beside the driving mechanism can remove dust and static electricity on workpieces on the cage frame; the dust and static electricity removing mechanism can remove dust and static electricity of workpieces at different positions on the side edge of the cage frame under rotation of the cage frame.

Description

TECHNICAL FIELD

[0001] The utility model relates to sputter coating field technology especially is used for conveying sputter coating cage's dust removal electrostatic conveying equipment. BACKGROUND

[0002] The sputter coating cage is a device used in vacuum coating equipment, mainly used for carrying and rotating the substrate or sample to be coated.

[0003] And the cage cooperates with the substrate hanger, which can be used for installing a large-area rectangular sputter source. This design can easily load and unload the substrate clamp and maximize the coating area of each batch production.

[0004] In some cases, the cage is a large steel structure combination, which is heavy and large. Using traditional conveying line can easily cause damage to the conveying line. In addition, after the substrate hanger is installed on the cage, the worker places the workpiece on the substrate hanger. During this process, due to the different processing environments, dust in the air may adhere to the workpiece. At this time, if the cage is moved into the coating chamber, it will affect the coating quality of the workpiece.

[0005] Therefore, some manufacturers will dust the workpiece on the cage before moving it into the coating chamber. However, due to the heavy and large size of the cage, manual dusting of the workpiece surface is extremely inefficient. Using equipment for dusting will cause the equipment to be unable to dust the side of the cage that cannot be touched, and will affect the dusting and electrostatic effect of the workpiece. UTILITY MODEL CONTENTS

[0006] Therefore, the utility model provides a dust removal electrostatic conveying equipment for conveying sputter coating cage, which solves the problem of dusting the workpiece on the cage before moving it into the coating chamber. Due to the heavy and large size of the cage, manual dusting of the workpiece surface is extremely inefficient. Using equipment for dusting will cause the equipment to be unable to dust the side of the cage that cannot be touched, and will affect the dusting and electrostatic effect of the workpiece.

[0007] To achieve the above purpose, the utility model adopts the following technical scheme: a dust removal electrostatic conveying equipment for conveying sputter coating cage, comprising at least one coating chamber and a conveying assembly connected to the coating chamber, the conveying assembly is used for conveying the cage,

[0008] The conveying path of the cage is provided with a driving mechanism for driving the rotation of the cage, and a dust removal electrostatic mechanism is located beside the driving mechanism. The output end of the dust removal electrostatic mechanism faces the cage;

[0009] Before the cage enters the coating chamber, the driving mechanism drives the cage to rotate, so that the dust-removing and static-removing mechanism acts on the workpieces on the side wall of the cage.

[0010] Further, the dust-removing and static-removing mechanism is a plasma blower, and a blowing end of the plasma blower faces the cage.

[0011] Further, the driving mechanism and the dust-removing and static-removing mechanism are arranged on the conveying assembly through a guide frame, and the guide frame is transversely arranged on two sides of the conveying assembly.

[0012] Further, the driving mechanism comprises a pushing assembly arranged below the guide frame, and an output end of the pushing assembly abuts against a lower end of the cage, so as to make the cage separate from the conveying assembly.

[0013] Further, the driving mechanism further comprises a driving assembly arranged above the guide frame, and an output end of the driving assembly abuts against an upper end of the cage, so that the driving assembly provides a driving force to make the cage rotate.

[0014] Further, the pushing assembly is a push rod, and an output end of the push rod faces the upper end of the cage.

[0015] Further, the driving assembly is a driving cylinder, and an output end of the driving cylinder faces the lower end of the cage.

[0016] Further, output shafts of the pushing assembly and the driving assembly are connected with chucks, and the two chucks are connected with the upper end and the lower end of the cage respectively.

[0017] Further, the conveying assembly comprises two oppositely arranged guide rails and a transmission assembly arranged in the guide rails, and an upper end surface of the guide rail is provided with a bearing plate for bearing the cage, and the bearing plate is connected with the transmission assembly, so that the transmission assembly drives the bearing plate to move on the guide rail.

[0018] Further, the transmission assembly comprises a cavity arranged at an upper end of the guide rail, and a row of first driving wheels and second driving wheels arranged in the cavity, the first driving wheels and the second driving wheels are connected with the bearing plate, and the first driving wheels and the second driving wheels are connected with conveying belts arranged on opposite end surfaces of the two guide rails.

[0019] A plurality of detachable mounting plates are arranged on side walls of the guide rails, and the conveying belts are arranged on the mounting plates, and the conveying belts are divided into a first chain conveying belt and a second chain conveying belt arranged on a row of first connecting rods and second connecting rods.

[0020] Compared with the prior art, the utility model has obvious advantages and beneficial effects, specifically, according to the above technical scheme, the driving mechanism is arranged on the conveying path of the conveying assembly, and the cage on the conveying assembly is driven to rotate through the driving mechanism, so that the dust-removing and static-removing mechanism arranged beside the driving mechanism can remove dust and static electricity from the workpieces on the cage, in addition, the dust-removing and static-removing mechanism can remove dust and static electricity from the workpieces at different positions on the side edge of the cage under the rotation of the cage.

[0021] In order to make the structural features and effects of the present application more clear, the present application will be described in detail below with reference to the drawings and specific embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a perspective view of embodiment 1 of the present application.

[0023] Figure 2 is a plan view of embodiment 1 of the present application.

[0024] Figure 3 is a view of the cage and conveying assembly of embodiment 1 of the present application.

[0025] Figure 4 is a perspective view of the cage of embodiment 1 of the present application.

[0026] Figure 5 is a plan view of the cage of embodiment 1 of the present application.

[0027] Figure 6 is a perspective view of the guide frame and conveying assembly of embodiment 1 of the present application.

[0028] Figure 7 is a perspective view of the guide frame of embodiment 1 of the present application.

[0029] Figure 8 is an oblique view of the conveying assembly of embodiment 1 of the present application.

[0030] Figure 9 is a sectional view of the guide frame of embodiment 1 of the present application.

[0031] Figure 10 is a perspective view of the conveying belt of embodiment 1 of the present application.

[0032] BRIEF DESCRIPTION OF DRAWINGS

[0033] 1 workpiece;

[0034] 10 coating chamber;

[0035] 20 conveying assembly, 21 guide rail, 211 cavity, 22 transmission assembly, 221 first drive wheel, 222 second drive wheel, 223 conveying belt, 2231 first chain conveying belt, 2232 second chain conveying belt, 224 first connecting rod, 225 second connecting rod, 23 bearing tray, 24 mounting plate;

[0036] 30 cage, 31 connecting port, 32 arc surface;

[0037] 40 driving mechanism, 41 pushing assembly, 42 driving assembly, 43 chuck, 431 first part, 432 second part;

[0038] 50 dust and static electricity removing mechanism;

[0039] 60 guide frame. DETAILED DESCRIPTION

[0040] Please refer to Figures 1-10 The figure shows the specific structure of the preferred first embodiment of the utility model, which is a dust and static electricity removing conveying equipment for conveying sputtering coating cages, comprising at least one coating chamber 10 and a conveying assembly 20 connected to the coating chamber 10, the conveying assembly 20 is used for conveying a cage 30,

[0041] A driving mechanism 40 for driving the cage 30 to rotate is arranged on the conveying path of the cage 30, and a dust and static electricity removing mechanism 50 is arranged beside the driving mechanism 40, and the output end of the dust and static electricity removing mechanism 50 faces the cage 30;

[0042] Before the cage 30 enters the coating chamber 10, the driving mechanism 40 drives the cage 30 to rotate, so that the dust and static electricity removing mechanism 50 acts on the workpiece 1 on the side wall of the cage 30. Compared with the existing manual dust removal and static electricity removal of the workpiece 1, in the present application, the driving mechanism 40 is arranged on the conveying path of the conveying assembly 20, and the cage 30 on the conveying assembly 20 is driven to rotate by the driving mechanism 40, so that the dust and static electricity removing mechanism 50 arranged beside the driving mechanism 40 can remove dust and static electricity from the workpiece 1 on the cage 30. In addition, the dust and static electricity removing mechanism 50 can remove dust and static electricity from the workpiece 1 at different positions on the side edge of the cage 30 under the rotation of the cage 30.

[0043] As Figure 3 shown, the dust and static electricity removing mechanism 50 is an ionizing air blower, and the blowing end of the ionizing air blower faces the cage 30. When the dust and static electricity removing mechanism 50 is an ionizing air blower, the surface of the workpiece 1 can be blown by the ionizing air blower to remove dust and static electricity. In addition, compared with the dust and static electricity removing equipment such as ionizing rod, the airflow blown by the ionizing air blower can cover a larger range of the workpiece 1, so as to enhance the effect of dust and static electricity removal.

[0044] In one embodiment, when the dust and static electricity removing mechanism 50 is an ionizing rod, the ionizing rod can quickly neutralize the static electricity on the surface of the object by releasing a large number of positive and negative ions, thereby reducing dust adsorption and achieving the effect of dust removal. However, the effect of static electricity removal by the ionizing rod is determined by the distance between the ionizing rod and the workpiece 1, that is, the closer the distance, the stronger the effect. In addition, the ionizing rod needs to be cleaned regularly to maintain good dust and static electricity removal effect. Compared with the ionizing air blower, the effect is slightly worse.

[0045] As Figure 3As shown, the driving mechanism 40 and the dust and static electricity removing mechanism 50 are arranged on the conveying assembly 20 through the guide frame 60, which is arranged across the two sides of the conveying assembly 20. The arrangement of the guide frame 60 provides installation space for the driving mechanism 40 and provides more choices for the selection of the conveying assembly 20.

[0046] Specifically, the driving mechanism 40 includes a pushing assembly 41 arranged below the guide frame 60, and the output end of the pushing assembly 41 abuts against the lower end of the cage 30 to facilitate the disengagement of the cage 30 from the conveying assembly 20. Since the cage 30 is conveyed on the conveying assembly 20, the driving mechanism 40 needs to drive the cage 30 to rotate, and thus the cage 30 needs to be separated from the conveying assembly 20 to reduce the resistance when the cage 30 rotates. Therefore, the pushing assembly 41 is arranged below the guide frame 60, and the pushing assembly 41 pushes the cage 30 to separate the cage 30 from the conveying assembly 20 to reduce the resistance when the cage 30 rotates.

[0047] Specifically, the driving mechanism 40 further includes a driving assembly 42 arranged above the guide frame 60, and the output end of the driving assembly 42 abuts against the upper end of the cage 30 to provide driving force to facilitate the rotation of the cage 30. Since the pushing assembly 41 pushes the cage 30 to separate the cage 30 from the conveying assembly 20, the cage 30 can be connected to the output shaft of the driving assembly 42 arranged above the guide frame 60, so that the cage 30 can rotate under the driving of the driving assembly 42, and the workpiece 1 placed on the side wall of the cage 30 can be dusted and static electricity removed through cooperation with the dust and static electricity removing mechanism 50 to provide better sputtering and coating forming effect.

[0048] In one embodiment, the pushing assembly 41 is a push rod, and the output end of the push rod faces the upper end of the cage 30. The pushing assembly 41 is a push rod, which can be electric or pneumatic. When the pushing assembly 41 is an electric push rod, the electric push rod 41 can be pushed to move the cage 30 closer to the driving assembly 42 through electric control driving.

[0049] In one embodiment, the driving assembly 42 is a driving cylinder, and the output end of the driving cylinder faces the lower end of the cage 30. The driving assembly 42 is a driving cylinder, which can be electric. When the cage 30 is connected to the output end of the driving cylinder under the pushing of the pushing assembly 41, the cage 30 can be rotated through the driving of the driving cylinder, so that the cage 30 drives the workpiece 1 placed thereon to rotate to cooperate with the dust and static electricity removing mechanism 50 to remove dust and static electricity.

[0050] As Figure 8As shown, the output shafts of the pushing assembly 41 and the driving assembly 42 are connected with the chucks 43, and the two chucks 43 are connected with the upper end and the lower end of the cage 30 respectively to connect the dust-removing and static-removing mechanism 50. In order to make the connection area of the pushing assembly 41 and the driving assembly 42 with the cage 30 larger to ensure the stability when driving the cage 30, the chucks 43 are installed on the pushing assembly 41 and the driving assembly 42, and the connection area of the pushing assembly 41 and the driving assembly 42 with the cage 30 is increased through the cooperation of the chucks 43 and the cage 30, so that the cage 30 is better controlled to move to cooperate with the dust-removing and static-removing mechanism 50.

[0051] In one embodiment, the two ends of the cage 30 are provided with the connection ports 31 connected with the pushing assembly 41 and the driving assembly 42, and the chuck 43 includes the first part 431 matched with the connection port 31 and the second part 432 overlapped with the end face of the cage 30. In order to increase the contact area of the chuck 43 with the cage 30 without affecting the rotation of the cage 30 after the chuck 43 is connected with the connection port 31, the chuck 43 is divided into the first part 431 and the second part 432, the first part 431 is inserted into the connection port 31, and the second part 432 is overlapped with the end face of the cage 30, so that the contact area of the chuck 43 with the cage 30 is increased without affecting the rotation of the cage 30 driven by the driving part 41.

[0052] Further, the connection part of the first part 431 and the connection port 31 is provided with the matched arc surface 32. In order to make the resistance of the first part 431 inserted into the connection port 31 smaller when rotating, and the connection of the first part 431 on the pushing part 42 with the connection port 31 can also play a certain supporting effect, the matched arc surface 32 is arranged at the connection part of the first part 431 and the connection port 31. After the first part 431 is inserted into the connection port 31, the first part 431 and the arc surface 32 on the connection port 31 are connected and matched, which stops moving, and thus the first part 431 can rotate in the connection port 31 conveniently, and also plays a certain supporting effect.

[0053] As shown in Figure 9 As shown, the conveying assembly 20 includes two oppositely arranged guide rails 21 and a transmission assembly 22 arranged in the guide rail 21, and the upper end face of the guide rail 21 is provided with a bearing carrier plate 23 bearing the cage 30. The bearing carrier plate 23 is connected with the transmission assembly 22, so that the transmission assembly 22 drives the bearing carrier plate 23 to move on the guide rail 21. In order to make the cage 30 move on the guide rail 21 under the driving of the transmission assembly 22, the bearing carrier plate 23 is installed on the lower end face of the cage 30 and is slidably connected on the guide rail 21, and the bearing carrier plate 23 can move on the guide rail 21 under the pushing of the transmission assembly 22.

[0054] As shown in Figure 10As shown, the transmission assembly 22 includes a cavity 211 provided at the upper end of the guide rail 21, and a row of first driving wheels 221 and second driving wheels 222 provided in the cavity 211, the first driving wheels 221 and the second driving wheels 222 are connected with the bearing plate 23, and the first driving wheels 221 and the second driving wheels 222 are connected with the conveyor belt 223 on the opposite end surface of the guide rail 21;

[0055] The side wall of the guide rail 21 is provided with a plurality of detachable mounting plates 24, and the conveyor belt 223 is mounted on the mounting plates 24, and the conveyor belt 223 is divided into a first chain conveyor belt 2231 and a second chain conveyor belt 2232 which are provided on a row of first connecting rods 224 and second connecting rods 225. In order to provide sufficient installation space for the transmission assembly 22, a cavity 211 is provided at the upper end of the guide rail 21, so that the first driving wheels 221 and the second driving wheels 222 can be placed in the cavity 211, and the conveyor belt 223 mounted on the side wall of the guide rail 21 can drive the first driving wheels 221 and the second driving wheels 222 to rotate, and the rotation of the first driving wheels 221 and the second driving wheels 222 can drive the bearing plate 23 on the guide rail 21 to move the cage 30.

[0056] The first driving wheels 221 and the second driving wheels 222 are located in the cavity 211, and the conveyor belt 223 is located on the outer side wall of the guide rail 21, so that the conveyor belt 223 can drive the first driving wheels 221 and the second driving wheels 222 to rotate, the first connecting rods 224 and the second connecting rods 225 are connected with the first driving wheels 221 and the second driving wheels 222 respectively, and the first connecting rods 224 and the second connecting rods 225 pass through the guide rail 21 and are connected with the conveyor belt 223.

[0057] When the coating chamber 10 contains multiple, the conveyor belt 223 will also increase with the increase of the length of the coating chamber 10, at this time, if a row of first connecting rods 224 and second connecting rods 225 are connected with one conveyor belt 223, the conveyor belt 223 may be difficult to maintain due to its length, therefore, the first chain conveyor belt 2231 and the second chain conveyor belt 2232 are installed on the first connecting rods 224 and the second connecting rods 225 at intervals, so as to facilitate the maintenance and replacement of the first chain conveyor belt 2231 and the second chain conveyor belt 2232 when they are damaged.

[0058] The above is only a preferred embodiment of the present application, and does not limit the technical scope of the present application, so any slight modification, equivalent change and modification made according to the technical essence of the present application are still within the scope of the technical solution of the present application.

Claims

1. A dust removal and static electricity removal conveying device for conveying sputtering coating cages, comprising at least one coating chamber (10) and a conveying assembly (20) connected to the coating chamber (10), the conveying assembly (20) being used to convey the cages (30), characterized in that: The cage (30) is provided with a drive mechanism (40) for driving the cage (30) to rotate on the conveying path, and a dust removal and static electricity removal mechanism (50) located on the side of the drive mechanism (40), with the output end of the dust removal and static electricity removal mechanism (50) facing the cage (30). Before the cage (30) enters the coating chamber (10), the driving mechanism (40) drives the cage (30) to rotate, so that the dust removal and static electricity removal mechanism (50) acts on the workpiece (1) on the side wall of the cage (30).

2. The dust removal and static electricity removal conveying equipment for conveying sputtering coating cages according to claim 1, characterized in that: The dust removal and static electricity removal mechanism (50) is a plasma fan, and the blowing end of the plasma fan faces the cage (30).

3. The dust removal and static electricity removal conveying equipment for conveying sputtering coating cages according to claim 1, characterized in that: The drive mechanism (40) and the dust removal and static electricity removal mechanism (50) are mounted on the conveying assembly (20) via a guide frame (60), which spans both sides of the conveying assembly (20).

4. The dust removal and static electricity removal conveying equipment for conveying sputtering coating cages according to claim 3, characterized in that: The drive mechanism (40) includes a push component (41) located below the guide frame (60). The output end of the push component (41) abuts against the lower end of the cage (30), causing the cage (30) to disengage from the conveying component (20).

5. A dust removal and static electricity removal conveying device for conveying sputtering coating cages according to claim 4, characterized in that: The drive mechanism (40) also includes a drive assembly (42) located above the guide frame (60). The output end of the drive assembly (42) abuts against the upper end of the cage frame (30). The drive assembly (42) provides driving force to cause the cage frame (30) to rotate.

6. A dust removal and static electricity removal conveying device for conveying sputtering coating cages according to claim 5, characterized in that: The pushing component (41) is a push rod, and the output end of the push rod faces the upper end of the cage (30).

7. A dust removal and static electricity removal conveying device for conveying sputtering coating cages according to claim 6, characterized in that: The drive assembly (42) is a drive cylinder, and the output end of the drive cylinder faces the lower end of the cage (30).

8. A dust removal and static electricity removal conveying device for conveying sputtering coating cages according to claim 7, characterized in that: The output shafts of the push assembly (41) and the drive assembly (42) are both connected to chucks (43), and the two chucks (43) are respectively connected to the upper and lower ends of the cage (30).

9. A dust removal and static electricity removal conveying device for conveying sputtering coating cages according to claim 1, characterized in that: The conveying assembly (20) includes two oppositely arranged guide rails (21) and a transmission assembly (22) provided in the guide rails (21). The upper end face of the guide rails (21) is provided with a support plate (23) for supporting the cage (30). The support plate (23) is connected to the transmission assembly (22) so that the transmission assembly (22) drives the support plate (23) to move on the guide rails (21).

10. A dust removal and static electricity removal conveying device for conveying sputtering coating cages according to claim 9, characterized in that: The transmission assembly (22) includes a cavity (211) located at the upper end of the guide rail (21), and a row of first drive wheels (221) and second drive wheels (222) spaced apart within the cavity (211). The first drive wheels (221) and second drive wheels (222) are connected to the support plate (23), and the first drive wheels (221) and second drive wheels (222) are connected to the conveyor belts (223) on opposite end faces of the two guide rails (21). The side wall of the guide rail (21) is provided with multiple detachable mounting plates (24), and the conveyor belt (223) is mounted on the mounting plate (24). The conveyor belt (223) is divided into a first chain conveyor belt (2231) and a second chain conveyor belt (2232) that are spaced apart on a row of first connecting rods (224) and second connecting rods (225).

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