Crucible material supplementing structure for realizing induction evaporation coating material supplementing

Abstract

The utility model relates to a crucible material supplementing structure for realizing induction evaporation coating material supplementing, which relates to the field of vacuum coating technology, and comprises a crucible main body, a material supplementing channel arranged on the side wall of the crucible main body, and a wire feeding mechanism for supplementing and conveying metal wires, and the material supplementing channel is communicated with the crucible main body. The coating device has the effect of automatically supplementing materials so as to improve the coating efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of vacuum coating technology, in particular to a crucible feeding structure for realizing induction evaporation coating material feeding. BACKGROUND

[0002] Induction evaporation coating is a kind of vacuum coating technology, which uses electromagnetic induction heating to heat the coating material to the evaporation state in a high vacuum environment and condense on the substrate surface to form a thin film. Induction heating is a non-contact heating method for crucible through a coil, which has the advantages of uniform heating and fast speed, and is widely used in the manufacture of optical elements, semiconductor devices and decorative coatings.

[0003] At present, the induction evaporation coating equipment on the market mostly adopts single evaporation and single feeding design, and does not realize automatic feeding without opening the cavity during the evaporation process. Manual feeding is required during shutdown, which limits the length and thickness of one-time coating and reduces production efficiency. CONTENT OF THE INVENTION

[0004] In order to solve the above technical problems, the present application provides a crucible feeding structure for realizing induction evaporation coating material feeding.

[0005] The present application provides a crucible feeding structure for realizing induction evaporation coating material feeding, which adopts the following technical solution:

[0006] A crucible feeding structure for realizing induction evaporation coating material feeding, comprising a crucible main body, a feeding channel arranged on the side wall of the crucible main body, and a wire feeding mechanism for feeding metal wires; the feeding channel is in communication with the crucible main body.

[0007] By adopting the above technical solution, the wire feeding mechanism feeds the metal wires into the feeding channel, and the metal wires enter the crucible main body through the feeding channel, so that manual feeding is not required during shutdown, thereby improving the production efficiency.

[0008] Preferably, a heating element is arranged outside the feeding channel.

[0009] Preferably, the heating element is a heating coil or a heating resistor.

[0010] By adopting the above technical solution, the heating element heats the metal wires in the feeding channel, so that the metal wires are in a molten state, which is conducive to maintaining the uniform temperature of the side wall of the crucible main body, thereby reducing the negative impact of the feeding process on the uniformity of the coating.

[0011] Preferably, the wire feeding mechanism comprises a wire spool for storing metal wires and a wire feeding support for feeding metal wires.

[0012] Preferably, the wire feeding support comprises a mounting plate, a rotating roller arranged on the mounting plate for conveying the wire, and a motor for driving the rotating roller to rotate, the motor being arranged on the mounting plate.

[0013] By adopting the above technical solution, the motor drives the rotating roller to rotate, and the rotating roller conveys the wire into the feeding channel, thereby realizing automatic feeding.

[0014] Preferably, the wire feeding support further comprises a guide roller, the guide roller being used for guiding the wire.

[0015] Preferably, the wire feeding support further comprises a guide tube, the wire passing through the guide tube and entering the feeding channel.

[0016] By adopting the above technical solution, the guide roller and the guide tube guide the wire, so that the wire enters the feeding channel.

[0017] Preferably, the feeding channel contains molten metal.

[0018] By adopting the above technical solution, the molten metal in the feeding channel helps to melt the wire for feeding and is conducive to maintaining the uniformity of the temperature of the side wall of the crucible main body, providing an isolation area for heat exchange from the crucible main body, thereby reducing the negative effect of the melting temperature disturbance on evaporation, and further reducing the negative effect of the feeding process on the uniformity of the film.

[0019] Preferably, the communication between the feeding channel and the crucible main body is located at one end close to the bottom of the crucible main body.

[0020] By adopting the above technical solution, when the wire enters the crucible main body, it is located at the bottom of the crucible main body, thereby reducing the influence of the wire for feeding on the surface of the molten metal in the crucible main body, and further reducing the negative effect of the feeding process on the uniformity of the film.

[0021] In summary, the present application has the following beneficial technical effects:

[0022] 1. The present application realizes automatic feeding of the wire through the feeding channel and the wire feeding mechanism, without the need for manual feeding during shutdown, thereby improving the film production efficiency.

[0023] 2. The heating element is arranged outside the feeding channel, and the feeding channel contains molten metal, which is conducive to maintaining the uniformity of the temperature of the side wall of the crucible main body, and further reducing the negative effect of the feeding process on the uniformity of the film. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 is a partial cross-sectional structure schematic diagram of the crucible feeding structure for realizing inductive evaporation film feeding provided by Embodiment 1 of the present application;

[0025] Figure 2 Figure 1 is a schematic diagram of a part of the wire feeding support provided in Embodiment 1 of the present application;

[0026] Figure 3 Figure 2 is a schematic diagram of the structure of the crucible body and the material feeding channel provided in Embodiment 2 of the present application;

[0027] Figure 4 Figure 3 is a schematic diagram of the structure of the crucible body and the material feeding channel provided in Embodiment 3 of the present application;

[0028] Figure 5 Figure 4 is a schematic diagram of the structure of the crucible body and the material feeding channel provided in Embodiment 4 of the present application;

[0029] Figure 6 Figure 5 is a schematic diagram of the structure of the crucible body and the material feeding channel provided in Embodiment 5 of the present application;

[0030] Figure 7 Figure 6 is a schematic diagram of the structure of the crucible body and the material feeding channel provided in Embodiment 6 of the present application;

[0031] Figure 8 Figure 7 is a schematic diagram of the structure of the crucible body and the material feeding channel provided in Embodiment 7 of the present application.

[0032] Legend: 1, crucible body; 2, material feeding channel; 3, metal wire; 4, wire feeding mechanism; 41, wire reel; 42, wire feeding support; 421, mounting plate; 422, rotating roller; 423, motor; 424, guide roller; 425, guide tube; 5, heating element. DETAILED DESCRIPTION

[0033] The following will be described in detail with reference to the accompanying drawings. Figures 1-8 The present application will be described in further detail.

[0034] Embodiments 1-7 of the present application disclose a crucible material feeding structure for realizing induction evaporation coating material feeding.

[0035] Embodiment 1

[0036] With reference to Figure 1 and Figure 2 , a crucible material feeding structure for realizing induction evaporation coating material feeding, comprising a crucible body 1, a material feeding channel 2 arranged on the side wall of the crucible body 1, and a wire feeding mechanism 4 for feeding the metal wire 3. The material feeding channel 2 is in communication with the crucible body 1. In Embodiment 1 of the present application, the material feeding channel 2 is arranged obliquely, and the end of the material feeding channel 2 away from the crucible body 1 is inclined away from the bottom of the crucible body 1. The material of the crucible body 1 is graphite, and the material of the material feeding channel 2 can be graphite, or non-graphite materials such as ceramic, alloy, etc. The material feeding channel 2 and the crucible body 1 can be integrally formed, or can be separate structures.

[0037] A heating element 5 is arranged outside the feeding channel 2. The heating element 5 is a heating coil or a heating resistor.

[0038] The wire feeding mechanism 4 comprises a wire reel 41 for storing the metal wire 3 and a wire feeding support 42 for feeding the metal wire 3.

[0039] The wire feeding support 42 comprises a mounting plate 421, rotating rollers 422 arranged on the mounting plate 421 for feeding the metal wire 3, and a motor 423 for driving the rotating rollers 422 to rotate, the motor 423 being fixedly arranged on the mounting plate 421, and a transmission shaft of the motor 423 being fixedly connected with the rotating rollers 422. The axis of the rotating rollers 422 is arranged perpendicularly to the mounting plate 421, and the number of the rotating rollers 422 is two, and the metal wire 3 passes through the gap between the two rotating rollers 422.

[0040] The wire feeding support 42 further comprises a guide roller 424 for guiding the metal wire 3. The axis of the guide roller 424 is parallel to that of the rotating rollers 422, and the guide roller 424 is arranged between the wire reel 41 and the rotating rollers 422.

[0041] The wire feeding support 42 further comprises a guide tube 425, and the metal wire 3 passes through the guide tube 425 to enter the feeding channel 2.

[0042] The feeding channel 2 contains molten metal.

[0043] Example 2

[0044] The difference from Example 1 is that, referring to Figure 3 , the structure of the feeding channel 2 is an L-shaped pipeline. The end of the feeding channel 2 away from the crucible body 1 extends away from the bottom of the crucible body 1.

[0045] Example 3

[0046] The difference from Example 1 is that, referring to Figure 4 , the structure of the feeding channel 2 is an obliquely arranged pipeline, one end of the feeding channel 2 is arranged at the opening of the crucible body 1, and the other end of the feeding channel 2 extends away from the bottom of the crucible body 1.

[0047] Example 4

[0048] The difference from Example 1 is that, referring to Figure 5 , the communication between the feeding channel 2 and the crucible body 1 is located at one end close to the bottom of the crucible body 1. The middle part of the feeding channel 2 is fixedly connected with the crucible body 1, one end of the feeding channel 2 is inserted into the interior of the crucible body 1, and the other end of the feeding channel 2 is obliquely arranged away from the crucible body 1. The angle between the axis of the feeding channel 2 and the side wall of the crucible body 1 is 25°.

[0049] Example 5

[0050] The difference from example 1 is that, referring to Figure 6 , one end of the feeding channel 2 is inclined away from the crucible body 1, and the other end is communicated with the side wall of the crucible body 1. The communication position of the feeding channel 2 with the crucible body 1 is close to the bottom of the crucible body 1. The angle between the axis of the feeding channel 2 and the side wall of the crucible body 1 is 6°.

[0051] Example 6

[0052] The difference from example 1 is that, referring to Figure 7 , one end of the feeding channel 2 is parallel to the side wall of the crucible body 1 and extends along the inner side wall of the crucible body 1 to the bottom of the crucible body 1, and the other end of the feeding channel 2 is inclined away from the crucible body 1, and the angle between the axis of the inclined part of the feeding channel 2 and the side wall of the crucible body 1 is 140°.

[0053] Example 7

[0054] The difference from example 1 is that, referring to Figure 8 , one end of the feeding channel 2 is parallel to the side wall of the crucible body 1 and extends along the outer side wall of the crucible body 1 to the bottom of the crucible body 1, and the other end of the feeding channel 2 is communicated with the side wall of the crucible body 1, and the communication position is close to the bottom of the crucible body 1. The other end of the feeding channel 2 is inclined away from the crucible body 1, and the angle between the axis of the inclined part of the feeding channel 2 and the side wall of the crucible body 1 is 150°.

[0055] The implementation principle of the crucible feeding structure for realizing inductive evaporation coating feeding of the embodiment of the application is that the motor 423 drives the rotating roller 422 to rotate, the rotating roller 422 drives the metal wire 3 to move, the guide roller 424 and the guide pipe 425 guide the metal wire 3, so that the metal wire 3 enters the feeding channel 2, and the metal wire 3 enters the inside of the crucible body 1 through the feeding channel 2, thereby realizing automatic feeding into the crucible body 1, realizing on-demand feeding without stopping, and further improving the coating production efficiency.

[0056] The above are the preferred embodiments of the application, which do not limit the protection scope of the application, so: any equivalent changes made on the basis of the structure, shape, principle of the application should be covered within the protection scope of the application.

Claims

1. A crucible feeding structure for induction evaporation coating feeding, characterized in that: It includes a crucible body (1), a feeding channel (2) disposed on the side wall of the crucible body (1), and a wire feeding mechanism (4) for feeding and conveying metal wire (3); the feeding channel (2) is connected to the crucible body (1); The feeding channel (2) contains molten metal; The connection between the feeding channel (2) and the crucible body (1) is located at one end near the bottom of the crucible body (1).

2. The crucible feeding structure for induction evaporation coating feeding according to claim 1, characterized in that: A heating element (5) is arranged around the outside of the feeding channel (2).

3. The crucible feeding structure for induction evaporation coating feeding according to claim 2, characterized in that: The heating element (5) is a heating coil or a thermal resistor.

4. The crucible feeding structure for induction evaporation coating feeding according to claim 1, characterized in that: The wire feeding mechanism (4) includes a wire spool (41) for storing the metal wire (3) and a wire feeding bracket (42) for conveying the metal wire (3).

5. A crucible feeding structure for induction evaporation coating feeding according to claim 4, characterized in that: The wire feeding bracket (42) includes a mounting plate (421), a rotating roller (422) for feeding metal wire (3) disposed on the mounting plate (421), and a motor (423) for driving the rotating roller (422) to rotate. The motor (423) is disposed on the mounting plate (421).

6. A crucible feeding structure for induction evaporation coating feeding according to claim 5, characterized in that: The wire feeding bracket (42) also includes a guide roller (424) for guiding the metal wire (3).

7. A crucible feeding structure for induction evaporation coating feeding according to claim 6, characterized in that: The wire feeding bracket (42) also includes a guide tube (425), through which the metal wire (3) passes into the feeding channel (2).

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