Micro-motion platform

Abstract

The utility model provides a micro-motion platform. The micro-motion platform is provided with a base, and the vertical driving mechanism is arranged between the base and the moving pedestal and drives the moving pedestal to move in a vertical direction close to or far away from the base. The vertical driving mechanism comprises three first linear motors which are dispersedly arranged between the base and the motion pedestal by taking the geometric shape center of the motion pedestal as the center and provide driving force in the vertical direction; the three first encoders are respectively adjacent to the first linear motors, are arranged between the base and the moving pedestal and are used for detecting the displacement state of the moving pedestal after being driven by the first linear motors, and each first encoder comprises a sensing part and a measuring part which are arranged on the moving pedestal and the base; a measuring axis is defined in the linear measuring direction of the sensing part to the measuring part. The measuring shafts linearly extend towards the geometric center of the motion pedestal along the axial direction of the measuring shafts to form virtual straight lines, and the virtual straight lines are orthogonal or parallel to each other, so that at least one virtual straight line does not pass through the geometric center of the motion pedestal.

Description

TECHNICAL FIELD

[0001] The utility model relates to precision machining technology, in particular to a micro-motion platform. BACKGROUND

[0002] The high-resolution dynamic positioning mechanism for sample detection and processing disclosed in WO2005010940A2 can effectively reduce the overall volume of a conventional Z-axis tip-tilt (ZTT) device and does not affect the dynamic performance of an X-Y platform or related elements, thereby improving the deficiencies of conventional technology.

[0003] Although the '940 case controls the Z-axis direction movement range through a sheet-shaped ZTT-θ positioner, factors affecting the tip and tilt rotation in the Z-axis direction are not only limited to the ZTT-θ positioner, but also limited to the range that can be normally sensed by the encoder that feeds back the motion position, as shown in Figure 1 The encoder (A, B, C) of the '940 case is perpendicular to the tangent of the circle (D) centered on the Z-axis (E) to provide real-time position information, but when it is tipped or tilted in the Z-axis direction, the sensing end of each encoder and the linear scale will deviate correspondingly, causing the sensing of the position encoder to be inaccurate or lost, and further causing the tip and tilt rotational ranges (or angle tolerance) of the technology disclosed in the '940 case to be only ±0.05 degrees, which is still insufficient. SUMMARY

[0004] Therefore, the main purpose of the utility model is to provide a micro-motion platform that can improve the angle tolerance of deflection in the Z-axis direction.

[0005] Therefore, the main purpose of the utility model is to provide a micro-motion platform that can improve the angle tolerance of deflection in the Z-axis direction.

[0006] The vertical driving mechanism includes three first linear motors, which are arranged between the base and the moving base in a dispersed manner with respect to the geometric center of the moving base, and are used to provide driving force in the vertical direction; three first encoders, which are arranged adjacent to the first linear motors respectively, are used to detect the displacement of different positions of the moving base after being driven by the first linear motors respectively, each of the first encoders comprises a sensing part and a measurement part parallel to the sensing part, and a straight line perpendicular to the sensing part and the measurement part is defined as a measurement axis.

[0007] One technical feature of the utility model lies in that a virtual straight line is formed by extending along the axial direction of each of the measurement axes to the geometric center of the moving base, and the virtual straight lines are orthogonal or parallel to each other, and at least one of the virtual straight lines does not pass through the geometric center of the moving base.

[0008] The first linear motors are voice coil motors.

[0009] Any straight line passing through the geometric center of the moving base and parallel or orthogonal to the virtual straight lines is defined as an x-axis, and the included angle between each of the measurement axes and the x-axis is independently 0 degree, 90 degree, 180 degree or 270 degree.

[0010] The first encoders are linear optical scales.

[0011] Another technical feature of the utility model lies in that the utility model further comprises at least one gravity compensation part, the gravity compensation part comprises a tension spring, which is arranged between the base and the moving base in a stretched manner, and the horizontal plane where the connection position of the tension spring and the base is located is higher than the horizontal plane where the connection position of the tension spring and the moving base is located.

[0012] The base comprises a seat body, and at least one first column extending upward from the seat body along the direction of gravity;

[0013] The moving base comprises a table body, and at least one second column extending downward from the table body along the direction of gravity and adjacent to the first column;

[0014] The tension spring is arranged between the extension end of the first column and the extension end of the second column in a bridging manner.

[0015] The first column is slidably positioned on the seat body.

[0016] The utility model further comprises a guide part arranged between the base and the moving base, the guide part comprises an elastic spring sheet, and the elastic spring sheet comprises:

[0017] Three first arc segments are fixedly connected to the base respectively;

[0018] Three second arc segments are respectively fixed to the motion platform, and the first arc segments and the second arc segments are intersected with each other with the center of curvature of the geometric shape of the motion platform as the center of curvature.

[0019] Three pairs of elastic segments are located at the two ends of the arc of the second arc segments and connected to the adjacent first arc segments, respectively, to provide displacement margin of the second arc segments relative to the first arc segments in the vertical direction.

[0020] The elastic spring further includes three sheet-shaped reinforcing segments, which are respectively bridged between the paired elastic segments.

[0021] It further includes a lifting mechanism disposed on the base, the lifting mechanism having a top body for lifting an object located on the moving platform to remove it from the moving platform, or placing the object back onto the moving platform. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 A schematic diagram of an encoder configuration for existing technology.

[0024] Figure 2 This is an exploded perspective view of a preferred embodiment of the present invention.

[0025] Figure 3 This is a three-dimensional assembly diagram of a preferred embodiment of the present utility model.

[0026] Figure 4 This is a top view of a preferred embodiment of the present invention, omitting the motion platform.

[0027] Figure 5 For along Figure 3 Sectional view of section line 5-5.

[0028] Figure 6 This is a plan view of the guide section of a preferred embodiment of the present invention.

[0029] Figure 7 This is a perspective view of the lifting mechanism of a preferred embodiment of the present invention.

[0030] Figure 8 For along Figure 7 Sectional view of section line 8-8 in the middle.

[0031] Figure 9A The configuration diagram of the encoder of a preferred embodiment of the present application.

[0032] Figure 9B The configuration example of the encoder of the present application.

[0033] Wherein, (A) (B) (C) encoder; (Sa) (Sb) (Sc) sensing direction; (E) center; (D) circle; (10) micro-motion platform; (20) base; (21) seat body; (22) arc wall; (23) containing space; (24) first column; (30) motion pedestal; (31) table body; (32) through hole; (33) second column; (40) rotary driving mechanism; (41) stator; (42) rotor; (43) through hole; (50) vertical driving mechanism; (51) first linear motor; (52) first encoder; (521) sensing part; (522) measurement part; (60) guide part; (61) elastic spring piece; (611) first arc segment; (612) second arc segment; (613) elastic segment; (6131) first segment piece; (6132) second segment piece; (6133) connecting segment piece; (614) reinforced arc segment; (62) fixed block; (70) jacking mechanism; (71) lower part; (72) upper part; (73) top body; (74) second linear motor; (75) second encoder; (76) guide piece; (80) gravity compensation part; (81) tension spring; (S) measurement shaft; (S') virtual straight line; (E') center; (θ1) (θ2) (θ3) (θ4) included angle. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme of the embodiments of the present application will be described clearly and completely below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0035] Firstly, the description about directionality in the present embodiment is based on the illustration and is not limited to the scope of the present application. For example, the reference to the direction of gravity is based on the horizontal placement of the disclosed article in the drawings. When the base changes, the reference should also change, for example, the reference changes from the direction of gravity to the horizontal line.

[0036] Please refer to Figures 2 to 5As shown in the utility model one preferable embodiment provided micro - move platform (10), it mainly contains a base (20), a movement pedestal (30), a rotation drive mechanism (40), a vertical drive mechanism (50), a guide part (60), a jacking mechanism (70) and a gravity compensation part (80).

[0037] The base (20) contains a flat seat body (21), can be properly installed on the outside X-Y motion platform, so that the micro - move platform (10) can be driven by the X-Y motion platform, in a horizontal plane, two-dimensional direction movement, three arc wall (22) each other with concave arc surface oppositely divided in the upper side seat surface of the seat body (21), so as to define a cylindrical containing space (23) between each arc wall (22).

[0038] The movement pedestal (30) contains a flat platform body (31), located above the seat body (21), a through hole (32) allowing the jacking mechanism to pass through the platform body (31) and coaxially corresponding to the containing space (23).

[0039] The rotation drive mechanism (40) in the embodiment is a rotary motor as a specific example, and it belongs to the scope of prior art, so it is not disclosed in detail in the drawings, in the technology, the rotation drive mechanism (40) is received in the containing space (23), and contains a ring-shaped stator (41), an internal hollow cylindrical rotor (42) and three through holes (43) provided on the cylindrical closed end of the rotor (42), wherein the ring-shaped stator (41) is located in the containing space (23), and is fixed on the top of the platform body (31), the hollow rotor (42) is coaxially located in the stator (41), and the top end is located in the through hole (32), so that the rotation drive mechanism (40) can provide the required force for the angular displacement of the rotor (42) with the vertical direction (Z axis) as the rotation axis, which is the same as the direction of gravity.

[0040] The vertical drive mechanism (50) is between the seat body (21) and the platform body (31), and is located outside the containing space (23), and contains three first linear motors (51) and three first encoders (52), wherein:

[0041] The first linear motors 51 are voice coil motors in this embodiment. Since the technical details of voice coil motors are known in the art, they are not shown in detail in the drawings. Each first linear motor 51 has a stator end and a mover end bridging the base 20 and the moving base 30, respectively, to provide the moving base 30 with the force required for linear displacement in the Z-axis direction. By differentiating the stroke of the first linear motors 51, the moving base 30 can be tilted in the Z-axis direction to change the angle between the moving base 30 and the horizontal plane.

[0042] The first encoders 52 are linear optical scales in this embodiment. Each first encoder 52 includes a sensing portion 521 formed by an optical sensing head and a measuring portion 522 formed by a linear scale. Each first encoder 52 is adjacent to a first linear motor 51, with the sensing portion 521 fixed to the seat body 21 and the measuring portion 522 fixed to the table body 31.

[0043] Referring to FIG. 1, Figure 6 As shown in FIG. 1, the guide portion 60 includes an elastic spring sheet 61 and a plurality of fixing blocks 62.

[0044] The elastic spring sheet 61 includes three first arc segments 611, three second arc segments 612, three pairs of elastic segments 613, and three reinforcing arc segments 614. The first arc segments 611 are fixed to the top ends of the arc walls 22 with concave arc surfaces facing each other. The second arc segments 612 are fixed to the bottom side surfaces of the table body 31 with concave arc surfaces facing each other. The pairs of elastic segments 613 are located at the arc-shaped ends of the second arc segments 612 and connected to the adjacent first arc segments 611, thereby providing displacement margins of the second arc segments 612 relative to the first arc segments 611 in the Z-axis direction. The reinforcing arc segments 614 are located radially outside the second arc segments 612 and bridged between the pairs of elastic segments 613. Each elastic segment 613 includes a first segment plate 6131 and a second segment plate 6132 separated from each other along the radial direction, and a connecting segment plate 6133 bridged between the first segment plate 6121 and the second segment plate 6132.

[0045] The fixed blocks (62) are respectively attached to one side of the first arc segments (611) and the second arc segments (612), and the first arc segments (611) are between the corresponding fixed blocks (62) and the corresponding arc walls (22) ends, and the second arc segments (612) are between the corresponding fixed blocks (62) and the table body (31), and part of the fixed blocks (62), the first arc segments (611) and the arc walls (22) can be locked by fixing connection technology means (not shown in the figure) such as screwing, and part of the fixed blocks (62), the second arc segments (612) and the table body (31), thereby providing the motion base (30) with Z-axis displacement guidance.

[0046] Please refer to Figure 7 and Figure 8 The jacking mechanism (70) is installed in the inner space of the rotor (42) of the rotary drive mechanism, and includes a lower part (71), an upper part (72), three cylindrical jacking bodies (73), a pair of second linear motors (74), a second encoder (75) and a pair of elastic guide members (76), the upper part (72) and the lower part (71) are both sheet-shaped and parallel to each other in the rotor (42), the jacking bodies (73) are respectively fixed at one end on the upper part (72) and coaxially extend at the other end in the through holes (43), the second linear motors (74) are specifically exemplified as existing voice coil motors in this embodiment, bridged between the upper part (72) and the lower part (71), used to drive the linear displacement of the upper part (72) in the inner space of the rotor (42), thereby driving each jacking body (73) to extend or retract in the corresponding through hole (43), the second encoder (75) is also exemplified as a conventional linear optical scale, and the optical sensor and the linear scale are respectively fixed on the lower part (71) and the upper part (72), used to sense the displacement position of the upper part (72), and the guide members (76) are respectively bridged between the upper part (72) and the lower part (71), used to provide elastic guiding effect of the Z-axis direction for the movement of the upper part (72).

[0047] The gravity compensation unit (80) is used to provide resistance to the gravity effect on the moving base (30) and the rotation driving mechanism (40) and the jacking mechanism (70) connected with the moving base, so as to reduce the load degree of the vertical driving mechanism (50). Further, the gravity compensation mechanism (80) comprises three tension springs (81) bridged between the base (20) and the moving base (30). The base (20) further comprises three first columns (24) extending upward along the Z axis from the seat body (21) by a proper distance. The moving base (30) comprises three second columns (33) extending downward along the Z axis from the base body (31) by a proper distance adjacent to the first columns (24), so that the tension springs (81) can be bridged at both ends of the adjacent first column (24) extension end and the second column (33) extension end, thereby achieving the above-mentioned gravity resistance effect. Further, in other embodiments, the first columns (24) can slide on the seat body (21), that is, the first columns (24) can slide on the seat body (21). Thus, by changing the position of the first columns (24), the distance between the first columns (24) and the adjacent second columns (33) can be adjusted, so as to change the stretching degree of the tension springs (81) and adjust the gravity resistance ability achieved thereby.

[0048] On the basis of the above, further description is made on the technical features of the present application. Please refer to Figure 9A In the present embodiment, first, the straight line measurement direction of the first encoder (52) from the sensing part (521) to the measurement part (522) is defined as a measurement axis (S), and the measurement axes (S) are respectively linearly extended along the virtual straight lines (S') formed by the measurement axes (S) along the geometric center (E') of the moving base (30), which are orthogonal or parallel to each other, and at least one of the virtual straight lines (S') does not pass through the geometric center of the moving base (30). Thus, the tip and tilt rotational ranges of the first encoder (52) can be increased to ±0.065 degrees, which is 30% higher than the angle tolerance of the prior art, and the effect is remarkable.

[0049] In other embodiments, when the measurement direction of the measurement axis (S) is analyzed, the condition that the different virtual straight lines (S') are orthogonal or parallel to each other in the above description can be further illustrated as Figure 9BAs shown, when a straight line is defined as an x-axis, which passes through the geometric center of the motion base (30) and is parallel or orthogonal to any one of the virtual straight lines (S'), the included angles between the measurement axes (S) and the x-axis can each independently be 0 degrees (θ1), 90 degrees (θ2), 180 degrees (θ3), or 270 degrees (θ4), and any one or all of the above angles can be selected and combined arbitrarily, and the effects are the same as those achieved by the embodiments.

[0050] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, but not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A micromotion platform, characterized in that, The micro-motion platform comprises: a motion base; a base; a vertical driving mechanism arranged between the base and the motion base, capable of driving the motion base to move in a vertical direction close to or away from the base, wherein the vertical driving mechanism comprises: three first linear motors arranged in a dispersed manner between the base and the motion base with the geometric center of the motion base as the center, used for providing driving force in the vertical direction; three first encoders arranged adjacent to the first linear motors respectively, used for detecting the displacement of different positions of the motion base after being driven by the first linear motors respectively, each of the first encoders comprises a sensing part and a measurement part parallel to the sensing part, and the directions perpendicular to the sensing part and the measurement part are defined as measurement axes respectively, wherein a virtual straight line formed by the axial direction of the measurement axes extending straight to the geometric center of the motion base, is orthogonal or parallel to each other, and at least one of the virtual straight lines does not pass through the geometric center of the motion base. The first linear motors are voice coil motors respectively.

2. The micromotion platform according to claim 1, wherein, Any straight line passing through the geometric center of the motion base and parallel or orthogonal to the virtual straight lines is defined as an x-axis, and the included angle between the measurement axes and the x-axis is 0 degree, 90 degree, 180 degree or 270 degree respectively and independently.

3. The micromotion platform according to claim 2, wherein, The first encoders are linear optical scales respectively.

4. The micromotion platform according to claim 1, wherein, Further comprising at least one gravity compensation part, wherein the gravity compensation part comprises a tension spring arranged in a bridging manner between the base and the motion base, and the connection position of the tension spring and the base is higher than the connection position of the tension spring and the motion base.

5. The micromotion platform according to claim 1, 2, 3 or 4, wherein, 6. The micro-motion platform according to claim 5, wherein the base comprises a seat body, and at least one first column extending upward from the seat body along the direction of gravity; the motion base comprises a table body, and at least one second column extending downward from the table body along the direction of gravity and adjacent to the first column; the tension spring is arranged in a bridging manner between the extended end of the first column and the extended end of the second column. The first column is slidably positioned on the seat body.

7. The micromotion platform according to claim 6, wherein, Further comprising a guide part arranged between the base and the motion base, wherein the guide part comprises a spring sheet, and the spring sheet comprises:

8. The micro-positioner according to claim 1, 2, 3 or 4, wherein, three first arc segments fixed on the base respectively; three second arc segments fixed on the motion base respectively, and the first arc segments and the second arc segments are interlaced with each other with the geometric center of the motion base as the center of curvature; three pairs of elastic segments located at the two ends of the arc of the second arc segments and connected with the adjacent first arc segments, used for providing displacement allowance of the second arc segments relative to the first arc segments in the vertical direction respectively. The spring sheet further comprises three reinforcing arc segments in the form of sheets, and the reinforcing arc segments are bridged between the elastic segments in pairs.

9. The micromotion platform according to claim 8, wherein, Further comprising a lifting mechanism arranged on the base, wherein the lifting mechanism has a top body used for lifting an object located on the motion base to move away from the motion base, or placing the object back on the motion base.

10. The micro-positioner according to claim 1, 2, 3 or 4, wherein, ​

Images