Scanning electron microscope sample stage suitable for spherical sample and mounting structure of scanning electron microscope sample stage

Abstract

The utility model discloses a scanning electron microscope sample stage suitable for a spherical sample and a mounting structure of the scanning electron microscope sample stage. The scanning electron microscope sample stage comprises a stage base, a sample frame and a driving module, wherein the pedestal and the sample holder are both provided with pipe penetrating holes, the sample holder is detachably connected to the top of the pedestal, and the pipe penetrating holes of the sample holder are communicated with the pipe penetrating holes of the pedestal; and the belt rotating module is arranged in the pedestal and is positioned below the pipe penetrating hole of the sample rack and the pipe penetrating hole of the pedestal. According to the utility model, the spherical sample is placed on the sample holder and is driven to rotate by the driving module, so that when the scanning electron microscope observes the surface of the spherical sample, repeated sampling and sample loading are not needed, and the spherical sample can be continuously observed only by loading the sample once, so that the observation efficiency is greatly improved, and secondary processing and cutting on the spherical sample are not needed.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of spherical sample detection equipment, especially to a scanning electron microscope sample stage suitable for spherical samples and its mounting structure. BACKGROUND

[0002] A scanning electron microscope (SEM, for short scanning electron microscope) is a kind of observation instrument with resolution capacity between optical microscope and transmission electron microscope. Scanning electron microscope utilizes focused high-energy electron beam to scan sample surface, receives and identifies various electron signals excited, and calculates processing and imaging to achieve the purpose of microcosmic topography characterization.

[0003] Sample type, size, conductivity, surface state, sensitivity to electron beam and vacuum, sensitivity to temperature will all limit the observation effect of the sample, so scanning electron microscope needs to carry various sample racks to realize multi-dimensional observation needs of fixed sample and angle of inclination, and also needs to match sample tables with different functions to meet in-situ testing of real-time observation, topography change of high-low temperature state and synchronous analysis of surface topography of super-large arc surface sample.

[0004] The structure of solid sample is various, including bar, wire, plate, powder, block, sphere and ring, etc. When the current scanning electron microscope observes the surface of spherical sample, the spherical sample must be cut twice (which will cause local surface topography damage), and the spherical sample cannot be rotated synchronously when being inclined, and also has high requirements for the weight and height of the spherical sample, which leads to serious discontinuity of surface observation of spherical sample under microcosmic state (which needs to be compensated by artificial operation twice or time-consuming and laborious method such as repeated sample loading), which greatly limits the surface topography observation of various arc surfaces and spherical samples (various bearing rollers, ball valves, spherical indenter, etc.) in scientific research and engineering application.

[0005] In addition, since the sample table of the current scanning electron microscope is installed on the fixed rack of the scanning electron microscope through screws, it needs to be slowly aligned, and the installation efficiency is low. SUMMARY

[0006] The utility model aims at overcoming the defects of prior art, and provides a scanning electron microscope sample stage suitable for spherical sample.

[0007] To achieve the above-mentioned purpose, the technical scheme provided by the utility model is:

[0008] A scanning electron microscope sample stage suitable for spherical sample, comprising a pedestal, a sample holder and a belt transfer module.

[0009] The pedestal and the sample holder are both provided with tube perforations, and the sample holder is detachably connected to the top of the pedestal, and the tube perforations of the sample holder are communicated with the tube perforations of the pedestal.

[0010] The belt rotating module is installed in the pedestal and located below the tube perforations of the sample holder and the tube perforations of the pedestal.

[0011] In the technical solution, the spherical sample is placed on the tube perforations of the sample holder, and the belt rotating module drives rotation, so that the scanning electron microscope can continuously observe the surface of the spherical sample without repeatedly sampling and loading sample, and the observation efficiency is greatly improved, and the spherical sample does not need to be processed and cut again.

[0012] Further, the belt rotating module comprises a first belt rotating unit and a second belt rotating unit.

[0013] The first belt rotating unit and the second belt rotating unit both comprise a rotating drive motor, a lifting drive mechanism, a transmission shaft and a drive wheel.

[0014] The transmission shaft is rotatably connected to the corresponding lifting drive mechanism through a bearing, one end of the transmission shaft is connected to the output end of the corresponding rotating drive motor through a gear belt assembly, and the other end is connected to the corresponding drive wheel.

[0015] The direction of the drive wheel of the first belt rotating unit is perpendicular to the direction of the drive wheel of the second belt rotating unit.

[0016] In the technical solution, the spherical sample is driven by the first belt rotating unit and the second belt rotating unit, so that the direction of rotation of the spherical sample can be adjusted, and the scanning electron microscope can observe the complete surface of the spherical sample.

[0017] Further, the lifting drive mechanism comprises a lifting drive motor and a gear and rack lifting mechanism.

[0018] The transmission shaft is rotatably connected to the rack in the corresponding gear and rack lifting mechanism through a bearing.

[0019] The lifting drive motor is connected to the gear and rack lifting mechanism, so as to drive the corresponding transmission shaft and drive wheel to lift.

[0020] Further, the drive wheel is a rubber drive wheel, which can not only increase the friction between the drive wheel and the spherical sample, but also can avoid damaging the surface of the spherical sample as much as possible.

[0021] Further, the sample holder is provided with a ball array distributed in a circle along the edge of the through hole, which can not only provide sufficient support force for the spherical sample, but also improve the smoothness of the rotation of the spherical sample.

[0022] Further, the pedestal is provided with a positioning column;

[0023] The sample holder is provided with a positioning hole, and the sample holder is detachably connected with the pedestal through the positioning hole and the positioning column.

[0024] In the technical solution, the sample holder with different diameters of through holes can be replaced according to spherical samples of different sizes, so that the scanning electron microscope sample stage can adapt to spherical samples of different sizes.

[0025] Further, the utility model provides a scanning electron microscope sample stage mounting structure, it includes fixed platform and scanning electron microscope sample stage above-mentioned,

[0026] The top of the fixed platform is provided with a buckle convex part and a limiting column;

[0027] The pedestal includes a base and a support seat mounted on the top of the base.

[0028] The belt rotating module is installed on the base.

[0029] The sample holder is installed on the support seat.

[0030] The base is provided with a buckle groove and a limiting groove, which are limitedly matched through the limiting groove and the limiting column, and are buckled matched through the buckle groove and the buckle convex part, so as to be limitedly buckled connected with the fixed platform.

[0031] In the technical solution, only the scanning electron microscope sample stage above-mentioned is moved transversely, so that the buckle convex part of the fixed platform is inserted into the buckle groove of the base, and the limiting column is inserted into the limiting groove, and the quick installation of the scanning electron microscope sample can be realized.

[0032] Further, the buckle groove and the limiting groove are continuously narrowed from the groove opening to the groove interior, and the groove bottom of the buckle groove is provided with a stepped structure.

[0033] Through the respective widened groove opening, the buckle convex part of the fixed platform can be quickly inserted into the buckle groove of the base, and the limiting column of the fixed platform can be quickly inserted into the limiting groove. The respective grooves are continuously narrowed, which plays a quick insertion guiding role.

[0034] Further, the support seat is provided with supporting legs at the bottom, which are connected with the base through the supporting legs, and the adjacent supporting legs form a hollow structure, and the installation personnel can observe the alignment installation condition of the base and the fixed platform through the hollow structure.

[0035] Further, the support seat is provided with an arrow mark for identifying the installation direction, which can quickly identify the orientation when the scanning electron microscope sample stage is transversely moved and connected with the fixed platform.

[0036] Compared with the prior art, the technical solution has the following principles and advantages:

[0037] 1、The spherical sample is placed on the sample holder, and the rotation is driven by the belt rotation module, so that the scanning electron microscope can continuously observe the surface of the spherical sample without repeatedly sampling and loading, and the observation efficiency is greatly improved, and the spherical sample does not need to be processed and cut again.

[0038] 2、The spherical sample is driven by the first belt rotation unit and the second belt rotation unit, so that the direction of the rotation of the spherical sample can be adjusted, and the scanning electron microscope can observe the complete surface of the spherical sample.

[0039] 3、The driving wheel is a rubber driving wheel, which can increase the friction between the driving wheel and the spherical sample, and can avoid damaging the surface of the spherical sample as much as possible.

[0040] 4、The sample holder is provided with a ball array which is circumferentially distributed along the edge of the through hole, which can provide sufficient support force for the spherical sample and improve the fluency of the rotation of the spherical sample.

[0041] 5、The base is provided with a buckle groove and a limiting groove, which are limited by the limiting groove and the limiting column, and are buckled by the buckle groove and the buckle convex part, so that the scanning electron microscope sample table can be quickly installed by only moving the scanning electron microscope sample table horizontally, inserting the buckle convex part of the fixed rack into the buckle groove of the base, and inserting the limiting column into the limiting groove.

[0042] 6、The base is provided with supporting feet, and the adjacent supporting feet form a hollow structure, and the installation personnel can observe the alignment and installation of the base and the fixed rack through the hollow structure. DETAILED DESCRIPTION

[0043] In order to more clearly illustrate the technical scheme of the embodiments of the present application or the prior art, the following will briefly introduce the services needed in the embodiment or the prior art description, and obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can obtain other drawings according to these drawings without creating labor.

[0044] Figure 1 It is a perspective view of a scanning electron microscope sample table suitable for spherical samples of the present application;

[0045] Figure 2 It is a perspective view of the belt rotation module installed on the base;

[0046] Figure 3 It is a perspective view of the sample holder of a scanning electron microscope sample table suitable for spherical samples of the present application;

[0047] Figure 4 A perspective view of a spherical sample placed on the scanning electron microscope sample stage suitable for spherical samples of the utility model;

[0048] Figure 5 A sectional view of a spherical sample placed on the scanning electron microscope sample stage suitable for spherical samples of the utility model;

[0049] Figure 6 A perspective view of the base of the scanning electron microscope sample stage suitable for spherical samples of the utility model;

[0050] Figure 7 A perspective view of the fixed rack;

[0051] Figure 8 A perspective view of the scanning electron microscope sample stage installed on the fixed rack.

[0052] Reference signs:

[0053] 1- pedestal; 2- sample holder; 3- spherical sample; 4- first belt rotation unit; 5- second belt rotation unit; 6- rotary drive motor; 7- lifting drive motor; 8- rack and pinion lifting mechanism; 9- transmission shaft; 10- drive wheel; 11- ball array; 12- positioning column; 13- positioning hole; 14- fixed rack; 15- buckle convex part; 16- limiting column; 17- base; 18- bracket; 19- buckle groove; 20- limiting groove; 21- support leg; 22- arrow mark. DETAILED DESCRIPTION

[0054] The utility model will be further described in combination with specific embodiments:

[0055] As Figures 1 to 5 shown, the scanning electron microscope sample stage suitable for spherical samples described in the embodiment, including pedestal 1, sample holder 2, belt rotation module.

[0056] Among them, pedestal 1 and sample holder 2 are all equipped with tube perforation, and sample holder 2 is detachably connected to the top of pedestal 1, and the tube perforation of sample holder 2 is communicated with the tube perforation of pedestal 1; Belt rotation module is installed in pedestal 1 and is located below the tube perforation of sample holder 2 and the tube perforation of pedestal 1.

[0057] Specifically, in the embodiment, the belt rotation module includes first belt rotation unit 4 and second belt rotation unit 5; First belt rotation unit 4 and second belt rotation unit 5 all include rotary drive motor 6, lifting drive mechanism, transmission shaft 9, drive wheel 10;

[0058] The lifting driving mechanism comprises a lifting driving motor 7 and a rack and pinion lifting mechanism 8; the rack and pinion lifting mechanism 8 is an existing mechanism, and specifically comprises a mounting seat, a driving gear, two racks, two driven gears, and a rotating shaft, the rotating shaft is installed in the mounting seat through a bearing, the two driven gears are respectively arranged at two ends of the rotating shaft and are respectively engaged with the corresponding racks, and the driving gear is installed at the middle part of the rotating shaft; the lifting driving motor 7 is engaged with the driving gear.

[0059] The transmission shaft 9 is rotatably connected with the racks in the corresponding rack and pinion lifting mechanism 8 through a bearing, one end of the transmission shaft 9 is connected with the output end of the corresponding rotary driving motor 6 through a gear belt assembly (including a gear assembly and a rubber transmission belt), and the other end is connected with the corresponding driving wheel 10; the driving wheel 10 of the first belt rotating unit 4 is perpendicular to the driving wheel 10 of the second belt rotating unit 5 in terms of orientation, that is, the rotation center axis of the driving wheel 10 of the first belt rotating unit 4 is perpendicular to the rotation center axis of the driving wheel 10 of the second belt rotating unit 5.

[0060] Specifically, in the embodiment, the driving wheel 10 is a rubber driving wheel 10; the sample holder 2 is provided with a ball array 11 which is circumferentially distributed along the edge of the through hole; the pedestal 1 is provided with a positioning column 12; the sample holder 2 is provided with a positioning hole 13, and the sample holder 2 is detachably connected with the pedestal 1 through cooperation of the positioning hole 13 and the positioning column 12.

[0061] The working principle of the embodiment is as follows:

[0062] According to the diameter of the spherical sample 3, a suitable sample holder 2 is selected and installed on the pedestal 1.

[0063] When it is necessary to observe the surface of the spherical sample 3 from top to bottom by using a lens located above the sample stage, the spherical sample 3 is placed on the sample holder 2 and supported by the ball array 11.

[0064] When it is necessary to observe the surface of the spherical sample 3 from top to bottom by using a lens located above the sample stage, the lifting driving motor 7 in the first belt rotating unit 4 and the second belt rotating unit 5 drives the corresponding driving gear, rotating shaft, and driven gear to rotate, thereby driving the rack to lift (the lifting amplitude is not large), so that the surface of the driving wheel 10 in the first belt rotating unit 4 is in contact with the surface of the spherical sample 3, and the surface of the driving wheel 10 in the second belt rotating unit 5 is separated from the surface of the spherical sample 3 (it is necessary to ensure that only the surface of one driving wheel 10 is in contact with the surface of the spherical sample 3, and the surface of the other driving wheel 10 is not in contact with the surface of the spherical sample 3), after the surface of the driving wheel 10 in the first belt rotating unit 4 is in contact with the surface of the spherical sample 3 and the surface of the driving wheel 10 in the second belt rotating unit 5 is separated from the surface of the spherical sample 3, the lifting driving motor 7 in the first belt rotating unit 4 and the second belt rotating unit 5 stops working.

[0065] Then, the rotating drive motor 6 in the first rotating unit 4 drives the corresponding transmission shaft 9 and the driving wheel 10 to rotate through the corresponding gear belt assembly, thereby driving the spherical sample 3 to rotate. When the spherical sample 3 needs to adjust the rotation angle, the rotating drive motor 6 in the first rotating unit 4 stops working, and the lifting drive motor 7 in the first rotating unit 4 starts working, so that the surface of the driving wheel 10 in the first rotating unit 4 is separated from the surface of the spherical sample 3. At the same time, the lifting drive motor 7 in the second rotating unit 5 starts working, and after the surface of the driving wheel 10 in the second rotating unit 5 is in contact with the surface of the spherical sample 3, the rotating drive motor 6 in the second rotating unit 5 starts working again, thereby driving the spherical sample 3 to rotate by another angle.

[0066] In the embodiment, the spherical sample 3 is placed on the sample holder 2 and driven to rotate by the rotating module, so that the scanning electron microscope can continuously observe the surface of the spherical sample 3 without repeatedly sampling and loading, and the observation efficiency is greatly improved. Moreover, the spherical sample 3 does not need to be processed and cut again.

[0067] The spherical sample 3 is driven by the first rotating unit 4 and the second rotating unit 5, so that the direction of the rotation of the spherical sample 3 can be adjusted, and the scanning electron microscope can observe the complete surface of the spherical sample 3.

[0068] The driving wheel 10 is a rubber driving wheel 10, which can increase the friction between the driving wheel 10 and the spherical sample 3 and can avoid damaging the surface of the spherical sample 3 as much as possible.

[0069] The ball array 11 is arranged on the sample holder 2 along the edge of the through hole, which can provide sufficient support for the spherical sample 3 and improve the fluency of the rotation of the spherical sample 3.

[0070] As shown in Figures 6 to 8 The embodiment further includes a scanning electron microscope sample stage mounting structure, which includes a fixed stand 14 and the above-mentioned scanning electron microscope sample stage. The top of the fixed stand 14 is provided with a buckle protrusion 15 and a limiting column 16. The pedestal 1 includes a base 17 and a support 18 mounted on the top of the base 17. The rotating module is mounted on the base 17. The sample holder 2 is mounted on the support 18. The base 17 is provided with a buckle groove 19 and a limiting groove 20. The base 17 is limited and matched through the limiting groove 20 and the limiting column 16, and is buckled and matched through the buckle groove 19 and the buckle protrusion 15, thereby being limited and buckled connected with the fixed stand 14.

[0071] In the embodiment, the scanning electron microscope sample can be quickly mounted by only laterally moving the above-mentioned scanning electron microscope sample stage, so that the buckle protrusion 15 of the fixed stand 14 is inserted into the buckle groove 19 of the base 17, and the limiting column 16 is inserted into the limiting groove 20.

[0072] In addition, the buckle groove 19 and the limiting groove 20 are continuously narrowed from the groove opening to the groove interior, and the groove bottom of the buckle groove 19 is provided with a stepped structure, through the respective widened groove openings, the buckle convex part 15 of the fixed stand 14 can be quickly inserted into the buckle groove 19 of the base 17, and the limiting column 16 of the fixed stand 14 can be quickly inserted into the limiting groove 20; the respective grooves are continuously narrowed, and play a quick insertion guiding role.

[0073] The bottom of the supporting seat 18 is provided with supporting feet 21, which are connected with the base 17 through the supporting feet 21, and the adjacent supporting feet 21 form a hollow structure, and the installation personnel can observe the alignment installation condition of the base 17 and the fixed stand 14 through the hollow structure.

[0074] The supporting seat 18 is provided with an arrow mark 22 for identifying the installation direction, and the orientation of the transverse movement of the scanning electron microscope sample table and the installation connection of the fixed stand 14 can be quickly identified.

[0075] The above-mentioned embodiments are only the preferred embodiments of the utility model, and are not intended to limit the scope of the utility model, so any changes made according to the shape and principle of the utility model should be covered in the protection scope of the utility model.

Claims

1. A scanning electron microscope sample stage suitable for a spherical sample, characterized in that, The scanning electron microscope sample stage comprises a pedestal, a sample holder and a belt transfer module. The pedestal and the sample holder are both provided with tube through holes, and the sample holder is detachably connected to the top of the pedestal, and the tube through holes of the sample holder are communicated with the tube through holes of the pedestal. The belt transfer module is installed in the pedestal and located below the tube through holes of the sample holder and the tube through holes of the pedestal.

2. A scanning electron microscope sample stage suitable for use with a spherical sample according to claim 1, wherein, The belt transfer module comprises a first belt transfer unit and a second belt transfer unit. The first belt transfer unit and the second belt transfer unit both comprise a rotating drive motor, a lifting drive mechanism, a transmission shaft and a drive wheel. The transmission shaft is rotatably connected to the corresponding lifting drive mechanism through a bearing, and one end of the transmission shaft is connected to the output end of the corresponding rotating drive motor through a gear belt assembly, and the other end is connected to the corresponding drive wheel. The direction of the drive wheel of the first belt transfer unit is perpendicular to the direction of the drive wheel of the second belt transfer unit.

3. A scanning electron microscope sample stage suitable for use with a spherical sample according to claim 2, wherein, The lifting drive mechanism comprises a lifting drive motor and a gear rack lifting mechanism. The transmission shaft is rotatably connected to the rack of the corresponding gear rack lifting mechanism through a bearing. The lifting drive motor is connected to the gear rack lifting mechanism, thereby driving the corresponding transmission shaft and drive wheel to lift.

4. A scanning electron microscope sample stage suitable for spherical samples according to claim 2, wherein, The drive wheel is a rubber drive wheel.

5. A scanning electron microscope sample stage suitable for spherical samples according to claim 1, wherein, The sample holder is provided with a ball array distributed in a circle along the edge of the through hole.

6. A scanning electron microscope sample stage suitable for use with spherical samples according to claim 1, wherein, The pedestal is provided with a positioning column. The sample holder is provided with a positioning hole, and the sample holder is detachably connected to the pedestal through the cooperation of the positioning hole and the positioning column.

7. A scanning electron microscope sample stage mounting structure, characterized by, The scanning electron microscope sample stage comprises a fixed stand and any one of the scanning electron microscope sample stages according to claims 1-6. The top of the fixed stand is provided with a buckle protrusion and a limiting column. The pedestal comprises a base and a support seat installed on the top of the base. The belt transfer module is installed on the base. The sample holder is installed on the support seat. The base is provided with a buckle groove and a limiting groove, and the base is limitedly connected to the fixed stand through the limiting groove and the limiting column, and the buckle groove and the buckle protrusion.

8. A scanning electron microscope sample stage mounting structure according to claim 7, wherein, The buckle groove and the limiting groove are both continuously narrowed from the groove opening to the groove interior, and the groove bottom of the buckle groove is provided with a stepped structure.

9. A scanning electron microscope sample stage mounting structure according to claim 7, wherein, The bottom of the support seat is provided with a supporting leg, and the support seat is connected to the base through the supporting leg, and a hollow structure is formed between adjacent supporting legs.

10. A scanning electron microscope sample stage mounting structure according to claim 7, wherein, The support seat is provided with an arrow mark for identifying the installation direction.

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