Wafer cleaning basket

Abstract

The wafer cleaning basket comprises a lifting rod part and a loading basket arranged on one side of the lower portion of the lifting rod part, the loading basket comprises a base, extending side parts protruding upwards are symmetrically formed on the left side and the right side of the base respectively, the top surface of the base is in a concave arc shape, and a through opening is formed in the middle of the base. A plurality of spaced concave placing clamping grooves are formed in the top surface of the base in an array mode in the extending direction of the base, and a plurality of limiting grooves corresponding to the placing clamping grooves in a one-to-one mode are formed in the inner wall of the extending side in a concave mode. A side opening is formed in the middle of the side wall of the extending side part, and a plurality of hollow holes penetrating up and down are formed in the base. According to the utility model, the more reliable protection effect on the wafer can be realized, the purpose of uniform cleaning can be achieved, the better cleaning quality is realized, and the work of taking out the cleaned wafer is also very convenient.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor, specifically, it demonstrates a wafer cleaning basket. BACKGROUND

[0002] Wafer is the silicon chip used for making silicon semiconductor integrated circuit, because its shape is circular, so it is called wafer. In all processes of semiconductor device production, wafer cleaning problem is faced in almost every process, and the quality of wafer cleaning has important influence on device performance, and the process of wafer cleaning must use cleaning basket.

[0003] The existing technology CN215527692U discloses a kind of wafer cleaning basket, wafer cleaning basket includes cleaning cavity, handle, at least one fixed baffle column and at least one movable baffle column;Cleaning cavity at least has two opposite side walls and forms opposite first opening and second opening between two side walls, at least one column of insertion slot is formed on each side wall, wafer is inserted between two opposite matched insertion slots, to be retained in cleaning cavity;Handle is arranged at the upper end of cleaning cavity;Fixed baffle column is used to block wafer to move out of cleaning cavity to first opening;Movable baffle column is rotationally arranged in cleaning cavity and is used to open and relationship second opening.

[0004] The wafer cleaning basket disclosed in the above document has the following defects: when wafer is placed into the basket, after cleaning, due to the viscosity of the solvent, the wafer is stuck to the surface of the insertion slot and is not easy to take out. UTILITY MODEL CONTENT

[0005] The utility model aims at providing a kind of wafer cleaning basket, simple and practical structure, wafer is easy to take out.

[0006] Technical scheme is as follows:

[0007] A kind of wafer cleaning basket, including lifting rod part and the loading basket of setting in the lower part of lifting rod part one side, the loading basket includes base, the left and right sides of the base are respectively formed to the extension side portion of upward protrusion in symmetry, the top surface of the base is recessed arc shape, and the middle of base is provided with through opening, the top surface of the base is formed with several spaced apart recessed placement card slots along its extension direction, and the inner wall of the extension side portion is recessed and provided with several limit slots corresponding to each placement card slot;Side opening is opened in the middle of the side wall of the extension side portion, and a plurality of upper and lower through holes are opened in the base.

[0008] Further, a side of the loading basket relative to the pull rod is provided with a baffle, the top of the baffle is also concave and arc-shaped, and the top of the baffle is higher than the top of the base. The baffle can provide more reliable protection for the wafers in the loading basket, so that the wafers are prevented from falling out of the loading basket and the wafer breakage rate is reduced.

[0009] Further, the two sides of the baffle are concave inward to form grooves, and the top of the grooves is provided with a gap. The wafers placed on the outermost side of the loading basket can be fully contacted with the liquid, so that the purpose of uniform cleaning of the wafers in the placing slots is achieved.

[0010] Further, the baffle and the loading basket are integrally formed. The number of joints is reduced, so that the stability and durability of the device are improved.

[0011] Further, the base and the two extension sides are integrally formed. The number of joints is reduced, so that the stability and durability of the device are improved.

[0012] Further, the surface of the base below the side opening is also provided with a plurality of upper and lower through holes. The through hole structure enables the wafers to be fully contacted with the liquid, so that the cleaning rate is increased.

[0013] Further, the top of the pull rod is provided with a reserved assembly opening. The pull rod can be connected with other equipment, so that the cleaning basket can be pulled out of the etching liquid, and the wafers after cleaning can be conveniently taken out by the staff.

[0014] Further, the lower part of the pull rod is provided with two upper connection arms in the shape of an outward eight, two lower connection arms in the shape of an outward eight, the two upper connection arms are connected to the outer sides of the two extension sides, and the two lower connection arms are connected to the sides of the base. The connection stability of the pull rod and the loading basket is improved, and the design of the upper connection arms and the lower connection arms does not block the sides of the loading basket, so that the wafers in the loading basket can be fully contacted with the liquid.

[0015] Compared with the prior art, the wafer cleaning basket has the advantages that the wafers can be more reliably protected, the wafers are prevented from falling out of the placing slots, a plurality of equidistant placing slots are arranged, the cleaning speed of each wafer tends to be consistent, the purpose of uniform cleaning is achieved, the liquid flow in each direction of the cleaning basket is smooth, the draining effect is good, the cleaning quality is good, and the wafers after cleaning can be conveniently taken out. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1It is a structure schematic view of a wafer cleaning flower basket of the embodiment of the present application.

[0017] Figure 2 It is a structure schematic view of a loading basket of the embodiment of the present application.

[0018] Figure 3 It is a structure schematic view of a lifting rod part of the embodiment of the present application.

[0019] Relevant marks in the drawing: 1-lifting rod part, 2-loading basket, 3-shutter, 11-reserved assembly opening, 12-upper connecting arm, 13-lower connecting arm, 21-base, 22-extended side part, 211-through opening, 212-placing clamping groove, 213-embossed hole, 221-limiting groove, 222-side opening, 31-groove opening, 311-notch. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application

[0021] The embodiment of the present application provides a wafer cleaning flower basket, which is used for solving the technical problems in the background art.

[0022] Please refer to Figure 1 、 Figure 2 、 Figure 3 . Specifically, it mainly comprises a lifting rod part 1 and a loading basket 2 arranged at one side of the lower part of the lifting rod part 1, and the material of the lifting rod part 1 and the loading basket 2 is Teflon, which is acid and alkali resistant and not easy to be corroded. The loading basket 2 comprises a base 21, upward protruding extended side parts 22 are symmetrically formed on the left and right sides of the base 21, and the base 21 and the two extended side parts 22 are integrally processed and formed, so that the number of joints and connecting points is reduced, thereby improving the stability and durability of the loading basket 2. The top surface of the base 21 is in a concave arc shape, a through opening 211 is formed in the middle of the base 21, a plurality of spaced concave placing clamping grooves 212 are formed on the top surface of the base 21 along the extending direction thereof, and a plurality of limiting grooves 221 corresponding to each of the placing clamping grooves 212 are arranged on the inner wall of the extended side part 22. The placing clamping groove 212 and the limiting groove 221 form a bearing space for bearing wafers, and one wafer is clamped in one bearing space. The side wall of the extended side part 22 is provided with a side opening 222 in the middle, and a plurality of embossed holes 213 are formed in the base 21.

[0023] The placing slots and the limiting slots are equidistantly distributed, so that the cleaning speed of each wafer tends to be consistent, and the cleaning uniformity is achieved; the through opening, the side opening and the perforated hole are arranged, so that the liquid flow in each direction of the cleaning flower basket is smooth and the draining effect is good, and the cleaning quality is good; the loading basket and the extending side part are arranged, so that the wafer can be quickly taken out after cleaning.

[0024] The side of the loading basket 2 relative to the lifting rod part 1 is provided with a baffle 3, the top of the baffle 3 is also concave and arc-shaped, and the top of the baffle 3 is higher than the top of the base 21. The baffle forms a more reliable protection effect on the wafers in the loading basket, that is, transverse protection, so as to prevent the wafers from falling out of the loading basket and reduce the wafer breakage rate.

[0025] Further, the two sides of the baffle 3 are concave to form a groove 31, and the top of the groove 31 has a gap 311. The gap ensures that the wafer placed at the outermost side of the loading basket can be fully contacted with the liquid, so as to achieve the purpose of cleaning uniformity of the wafer in the placing slot.

[0026] The baffle 3 is integrally formed with the loading basket 2. This can reduce the joints and connecting points between the loading basket and the baffle, thereby improving the stability and durability of the whole device.

[0027] The surface below the side opening 222 of the base 21 is also provided with a plurality of perforated holes 213. The perforated hole structure arranged in all directions enables the wafer to be fully contacted with the liquid, thereby increasing the cleaning rate.

[0028] The top of the lifting rod part 1 is provided with a reserved assembly opening 11. The reserved assembly opening can conveniently connect the lifting rod part with other equipment such as a mechanical hand, so as to pull out the cleaning flower basket from the etching liquid, and facilitate the worker to take out the wafer product after cleaning, thereby bringing convenience to the worker.

[0029] The lower part of the lifting rod part 1 is provided with two upper connecting arms 12 in the shape of an external eight character and two lower connecting arms 13 in the shape of an external eight character. The two upper connecting arms 12 are respectively connected to the outer sides of the two extending side parts 22, and the two lower connecting arms 13 are respectively connected to one side of the base 21. The pair of upper connecting arms and the pair of lower connecting arms improve the connection stability of the lifting rod part and the loading basket, and the design of the upper connecting arms and the lower connecting arms will not block the side part of the loading basket, so as to ensure that the wafer in the loading basket can be fully contacted with the liquid.

[0030] The above only describes some embodiments of the present application. For ordinary skilled persons in the art, without departing from the creative concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application.

Claims

1. A wafer cleaning basket, characterized in that, The application relates to a lifting rod part (1) and a loading basket (2) arranged on one side of the lower part of the lifting rod part (1), wherein the loading basket (2) comprises a base (21), the left and right sides of the base (21) are symmetrically formed with upwardly-protruding extension side parts (22), the top surface of the base (21) is in a concave arc shape, a through opening (211) is formed in the middle of the base (21), a plurality of spaced-apart concave placing clamping grooves (212) are formed on the top surface of the base (21) along the extension direction of the base (21), and a plurality of limiting grooves (221) corresponding to the placing clamping grooves (212) are concavely arranged on the inner wall of the extension side parts (22); a side opening (222) is formed in the middle of the side wall of the extension side part (22), and a plurality of upper-lower-through hollow holes (213) are formed in the base (21).

2. The wafer cleaning basket of claim 1, wherein, A shielding plate (3) is arranged on one side of the loading basket (2) relative to the lifting rod part (1), the top of the shielding plate (3) is also in a concave arc shape, and the top of the shielding plate (3) is higher than the top of the base (21).

3. The wafer cleaning basket of claim 2, wherein, The two sides of the shielding plate (3) are concavely formed with recessed grooves (31), and the top of the recessed grooves (31) is provided with a gap (311).

4. The wafer cleaning basket of claim 3, wherein, The shielding plate (3) and the loading basket (2) are integrally processed and formed.

5. The wafer cleaning basket of claim 1, wherein, The base (21) and the two extension side parts (22) are integrally processed and formed.

6. The wafer cleaning basket of claim 1, wherein, The surface of the base (21) below the side opening (222) is also provided with a plurality of upper-lower-through hollow holes (213).

7. The wafer cleaning basket of claim 1, wherein, The top of the lifting rod part (1) is provided with a reserved assembly opening (11).

8. The wafer cleaning basket of claim 1, wherein, The lower part of the lifting rod part (1) is provided with two outwardly-splayed upper connecting arms (12), two outwardly-splayed lower connecting arms (13), the two upper connecting arms (12) are connected to the outer sides of the two extension side parts (22) respectively, and the two lower connecting arms (13) are connected to the sides of the base (21) respectively.

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