Electrostatic protection ion neutralizer

Abstract

The utility model relates to an electric charge neutralizing device, in particular to an electrostatic protection ion neutralizer, which comprises a flow guide mechanism, an electrostatic protection ion neutralizer and an electrostatic protection ion neutralizer, and is characterized in that the flow guide mechanism comprises a host and an air outlet, and the output end of the host is communicated with the air outlet; the ionization mechanism comprises a high-voltage generator and a discharge device, and the high-voltage generator is electrically connected with the discharge device; wherein the air outlet is arranged to be annular, the discharging device comprises a discharging support and a discharging needle, the discharging support is electrically connected with the high-voltage generator, the discharging needle is installed on the discharging support, and the discharging support is arranged to be annular and matched with the diameter of the air outlet; when the high-voltage generator is started, the discharge support transmits ions generated by the high-voltage generator to the discharge needle, and when the host is started, the air outlet discharges air and blows away the ions on the discharge needle. By means of the structure, the air outlet can be arranged to be annular, the discharging support is also arranged to be annular in a matched mode, cleaning and maintenance are convenient, and wind power is large.

Description

TECHNICAL FIELD

[0001] The utility model relates to a charge neutralization device, especially to a static protection ion neutralizer. BACKGROUND

[0002] The description in this part only provides the background information related to the utility model disclosure, and does not constitute the prior art.

[0003] In the semiconductor production process, generally need to carry out charge neutralization treatment to the workpiece surface, to eliminate the static charge on the surface of component, to avoid the accumulation of static charge to the device and material in the production process causes the adverse effect, leads to possible chip or circuit element damage.

[0004] The existing device for carrying out charge neutralization treatment to the workpiece surface is generally provided with the combination of the fan blade and the high-voltage generator device protected by the shell, the charge on the discharge needle outside the shell is blown away by the rotation of the fan blade, and the special structure of the exposed fan blade brings great inconvenience to the maintenance of the structure itself. When the existing device needs to clean the discharge needle mechanism, it also needs to be completely disassembled and cleaned, which affects the maintenance efficiency, and needs to be frequently disassembled during maintenance and cleaning, which causes the breakage of the plastic buckle and abnormal loss, and has great replacement cost.

[0005] At the same time, the wind power of the existing fan blade type fan is small, and the time length is difficult to meet the requirements, which affects the charge neutralization treatment efficiency.

[0006] It should be noted that the introduction to the technical background above is only to facilitate the clear and complete description of the technical scheme of the utility model, and to facilitate the understanding of the skilled in the art. The above technical scheme cannot be considered as known by the skilled in the art only because it is described in the background technology part of the utility model. CONTENT OF THE UTILITY MODEL

[0007] The utility model aims at providing a static protection ion neutralizer, which can set the air outlet as a ring shape, set the discharge support as a matching ring shape, facilitate cleaning and maintenance, and has large wind power.

[0008] In order to achieve the above purpose, the utility model discloses a static protection ion neutralizer, which comprises:

[0009] A flow guide mechanism, the flow guide mechanism comprises a host computer and an air outlet, and the output end of the host computer is in communication with the air outlet;

[0010] An ionization mechanism, the ionization mechanism comprises a high-voltage generator and a discharge device, and the high-voltage generator is electrically connected with the discharge device;

[0011] Wherein, the air outlet is arranged as a ring shape, the discharge device comprises a discharge support and a discharge needle, the discharge support is electrically connected with the high-voltage generator, the discharge needle is installed on the discharge support, the discharge support is arranged as a ring shape matching the diameter of the air outlet, so that the discharge support is installed on the air outlet;

[0012] When the high-voltage generator is started, the discharge support transmits the ions generated by the high-voltage generator to the discharge needle, when the main machine is started, the air outlet blows air and blows the ions on the discharge needle away.

[0013] As a further description of the above technical solution, the number of the discharge needles is multiple, the multiple discharge needles are arranged in a ring shape at intervals on the discharge support, and the multiple discharge needles have the same orientation.

[0014] As a further description of the above technical solution, the number of the discharge needles is 8.

[0015] As a further description of the above technical solution, the discharge support is arranged at the middle position of the inner ring wall of the air outlet, the multiple discharge needles are arranged close to the air outlet, the extension directions of the multiple discharge needles are parallel, and the orientations of the multiple discharge needles are communicated.

[0016] As a further description of the above technical solution, further comprising a magnetic attraction mechanism, the magnetic attraction mechanism comprises a first magnetic attraction part and a second magnetic attraction part, the first magnetic attraction part is arranged on the air outlet, the second magnetic attraction part is arranged on the discharge support, the positions of the first magnetic attraction part and the second magnetic attraction part are matched, and when the first magnetic attraction part and the second magnetic attraction part are adjacent, the first magnetic attraction part and the second magnetic attraction part attract each other, so that the discharge support can be quickly disassembled and magnetically attached on the air outlet.

[0017] As a further description of the above technical solution, the number of the first magnetic attraction parts is multiple, the multiple first magnetic attraction parts are arranged on the air outlet at equal angles and at intervals in a ring shape; the number of the second magnetic attraction parts is multiple, the multiple second magnetic attraction parts are arranged on the discharge support at equal angles and at intervals in a ring shape, and the number and position of the multiple first magnetic attraction parts and the multiple second magnetic attraction parts are one-to-one corresponding.

[0018] As a further description of the above technical solution, the main machine is arranged as a vacuum pump machine, the vacuum pump machine is arranged at the bottom position of the air outlet, and the high-voltage generator is arranged at the bottom position of the vacuum pump machine.

[0019] Through the above technical solution, the beneficial effects of the present application are as follows:

[0020] The electrostatic protection ion neutralizer of the utility model can set the air outlet as a ring shape, set the discharge support as a matching ring shape, form an exposed ring-shaped wall surface area directly contacted on the surface of the air outlet, set the discharge support on the ring-shaped wall surface, and directly expose the discharge needle connected with the discharge support, so that when cleaning and maintaining the device, especially cleaning the discharge support and the discharge needle, the whole flow guide mechanism does not need to be removed, and the problems of cleaning difficulty and bayonet fracture caused by the complex structure of the existing fan blade fan are avoided.

[0021] To further understand the features and technical contents of the utility model, please refer to the following detailed description and drawings of the utility model, however, the provided drawings are only used for providing reference and description, and are not used to limit the utility model. BRIEF DESCRIPTION OF DRAWINGS

[0022] To more clearly illustrate the technical solutions in the embodiments of the present specification or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description, and obviously, the drawings in the following description are only some embodiments in the present specification, and for those skilled in the art, other drawings can also be obtained without creative labor.

[0023] Fig. 1 is a cross-sectional schematic view of an electrostatic protection ion neutralizer provided by the embodiment of the present specification;

[0024] Fig. 2 is a three-dimensional schematic view of an electrostatic protection ion neutralizer provided by the embodiment of the present specification;

[0025] In the figure: 1, flow guide mechanism; 11, main machine; 12, air outlet; 2, ionization mechanism; 21, high-voltage generator; 22, discharge device; 221, discharge support; 222, discharge needle; 3, magnetic attraction mechanism; 31, first magnetic attraction part; 32, second magnetic attraction part. DETAILED DESCRIPTION

[0026] To make the personnel in the technical field better understand the technical solutions in the present specification, the technical solutions in the embodiments of the present specification will be clearly and completely described below in combination with the drawings in the embodiments of the present specification, obviously, the described embodiments are only some embodiments of the present specification, not all the embodiments. Based on the embodiments in the present specification, all other embodiments obtained by those skilled in the art without creative labor should belong to the protection scope of the present specification.

[0027] The following is to illustrate the embodiments of the present application through specific examples, and those skilled in the art can understand the advantages and effects of the present application from the disclosure of the present application. The present application can be implemented or applied by other different specific embodiments, and each detail in the present application can be modified and changed based on different viewpoints and applications without departing from the concept of the present application. In addition, the drawings of the present application are only simple schematic illustrations, and are not the depiction of actual size. The following embodiments will further illustrate the related technical content of the present application in detail, but the disclosed content is not used to limit the protection scope of the present application.

[0028] It should be understood that although the terms "first", "second", "third" and the like can be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one signal from another signal. In addition, the term "or" used herein can include any one or more combinations of the associated listed items.

[0029] Please refer to Figs. 1-2 , an electrostatic protection ion neutralizer of the embodiment; wherein the electrostatic protection ion neutralizer comprises:

[0030] The flow guide mechanism 1 comprises a main machine 111 and an air outlet 12, and the output end of the main machine 11 is in communication with the air outlet 12;

[0031] The ionization mechanism 2 comprises a high-voltage generator 21 and a discharge device 22, and the high-voltage generator 21 is electrically connected with the discharge device 22;

[0032] The air outlet 12 is arranged in a ring shape, the discharge device 22 comprises a discharge bracket 221 and a discharge needle 222, the discharge bracket 221 is electrically connected with the high-voltage generator 21, the discharge needle 222 is installed on the discharge bracket 221, and the discharge bracket 221 is arranged in a ring shape matching the diameter of the air outlet 12, so that the discharge bracket 222 is installed on the air outlet 12;

[0033] When the high-voltage generator 21 is started, the discharge bracket 221 transmits the ions generated by the high-voltage generator 21 to the discharge needle 222, and when the main machine 11 is started, the air outlet 12 blows air and blows the ions on the discharge needle 222 away.

[0034] Through the above structure, in use, the operator only needs to direct the air outlet 12 of the flow guide mechanism 1 to the direction of the semiconductor workpiece to be processed, and then synchronously start the main machine 11 and the high-voltage generator 21 to run. The high-voltage generator 21 first conducts the generated ions to the position of the discharge needle 222 through the discharge support 221 of the discharge device 22, and gathers at the discharge needle 222; at the same time, the main machine 11 of the flow guide mechanism 1 causes the airflow to flow from the output end of the main machine 11 into the air outlet 12, so that the air outlet 12 blows to the direction of the semiconductor workpiece to be processed, and at the same time, the electric charge gathered on the discharge needle 222 at the air outlet 12 is taken away and synchronously flows to the direction of the semiconductor workpiece to be processed, so that it is neutralized with the charge on the surface of the workpiece, and the effect of removing static electricity is achieved.

[0035] In the above use process, since the air outlet 12 is arranged in a ring structure, and the discharge support 221 is also arranged in a ring shape matched with the air outlet 12, so that the surface of the air outlet 12 forms an exposed ring-shaped wall surface area that can be directly contacted, and the discharge needle 222 connected with the discharge support 221 is directly exposed, when the operator needs to clean the discharge device 22, only needs to directly clean the discharge support 221 and the discharge needle 222 placed on the shell of the air outlet 12, compared with the existing traditional fan blade device, without the need to disassemble the shell outside the fan blade, avoiding the situation of plastic bayonet fracture, only needs to directly clean the smooth ring-shaped wall surface.

[0036] Specifically, the air duct design of the ring-shaped air outlet 12 in the embodiment adopts Bernoulli's principle, and the main machine 11 is arranged as a vacuum pump, so that a large pressure difference is formed at the air outlet 12, so that the air volume and air speed at the air outlet 12 are significantly larger, providing stable and continuous high-flow-rate gas, which is more helpful to the efficiency of ion neutralization.

[0037] Further, the number of the discharge needles 222 is multiple, the multiple discharge needles 222 are arranged in a spaced and surrounding manner on the discharge support 221, and the multiple discharge needles 222 have the same orientation, specifically, the number of the discharge needles 222 is eight, the discharge support 221 is arranged at the middle position of the inner ring wall of the air outlet 12, the multiple discharge needles 222 are arranged close to the air outlet 12, the extending directions of the multiple discharge needles 222 are parallel, and the orientations of the multiple discharge needles 222 are communicated. That is to say, in the embodiment, the discharge needles 222 are arranged in an equiangular and surrounding manner on the ionization mechanism 2, and cover the air outlet 12 in a whole circle. Under the action of the high-voltage generator 21, each discharge needle 222 accumulates the same amount of electric charge, so that the airflow blown to the workpiece in the direction of the air outlet 12 has a relatively stable and balanced electric charge, and under the strong wind force of the Bernoulli principle, the imbalance of the electric charge on the surface of the workpiece is avoided, that is, in some places, the electric charge is more, and in some places, the electric charge is less, thereby indirectly improving the efficiency of ion neutralization, and eliminating static electricity with the maximum efficiency.

[0038] Further, the magnetic attraction mechanism 3 is further included, the magnetic attraction mechanism 3 includes the first magnetic attraction part 31 and the second magnetic attraction part 32, the first magnetic attraction part 31 is arranged on the air outlet 12, the second magnetic attraction part 32 is arranged on the discharge support 221, the positions of the first magnetic attraction part 31 and the second magnetic attraction part 32 are matched, and when the first magnetic attraction part 31 and the second magnetic attraction part 32 are adjacent, the first magnetic attraction part 31 and the second magnetic attraction part 32 are attracted to each other, so that the discharge support 221 can be quickly disassembled and magnetically attached to the air outlet 12. With the above structure, when the operator needs to install the discharge device 22, only needs to adjust the angle of the discharge device 22, so that the second magnetic attraction part 32 on the discharge support 221 is initially corresponded to the multiple first magnetic attraction parts 31 on the air outlet 12 of the flow guide mechanism 1 from the angle, and then directly attached to each other by magnetic attraction after being close, and the installation can be completed after positioning. Conversely, the same is true. With the above structure, the risk of breakage of the bayonet mount type plastic part can be further avoided, and the convenience of later maintenance is further improved, and quick disassembly and quick installation are realized.

[0039] Further, the number of the first magnetic attraction part 31 is multiple, the multiple first magnetic attraction parts 31 are arranged in an equiangular and spaced surrounding manner on the air outlet 12; the number of the second magnetic attraction part 32 is multiple, the multiple second magnetic attraction parts 32 are arranged in an equiangular and spaced surrounding manner on the discharge support 221, and the number and position of the multiple first magnetic attraction parts 31 and the multiple second magnetic attraction parts 32 are one-to-one corresponding. Specifically, four first magnetic attraction parts 31 and four second magnetic attraction parts 32 are arranged at an interval of 90 degrees in the embodiment, so that after magnetic attraction, the fixing of the discharge support 221 is more stable, and the problem of deviation under strong wind pressure is avoided.

[0040] Further, in the embodiment, the host 11 is arranged as a vacuum pump machine, the vacuum pump machine is arranged at the bottom position of the air outlet 12, and the high-voltage generator 21 is arranged at the bottom position of the vacuum pump machine. Specifically, one side of the bottom of the high-voltage generator 21 is further provided with a circuit control module, the circuit control module is electrically connected with the vacuum pump machine and the high-voltage generator 21, so that the entire electrostatic protection ion neutralizer is integrated, the gravity center is low, and remote wireless monitoring is introduced by means of the circuit control module, so that many functions such as electrostatic protection and electrostatic real-time monitoring can be expanded, and the bottom position is far away from the air duct and directly outward, so that the modification and maintenance are relatively easy.

[0041] The above disclosed content is only the preferred feasible embodiment of the utility model, and does not limit the patent application range of the utility model, so that equivalent technical changes made by applying the utility model specification and drawing content are contained in the patent application range of the utility model.

[0042] Each embodiment in the specification is described in a progressive manner, and the same or similar parts between each embodiment can be referred to each other, and each embodiment mainly describes the difference from other embodiments.

[0043] Although the present application is described through embodiments, those skilled in the art know that the present application has many modifications and changes without departing from the spirit of the present application, and it is hoped that the attached embodiments include these modifications and changes without departing from the present application.

Claims

1. An electrostatic discharge ion neutralizer characterized by, The electrostatic protection ion neutralizer comprises: A flow guide mechanism comprising a main machine and an air outlet, the output end of the main machine being in communication with the air outlet; An ionization mechanism comprising a high-voltage generator and a discharge device, the high-voltage generator being electrically connected to the discharge device; Wherein, the air outlet is arranged in a ring shape, the discharge device comprises a discharge support and a discharge needle, the discharge support is electrically connected to the high-voltage generator, the discharge needle is installed on the discharge support, the discharge support is arranged in a ring shape matching the diameter of the air outlet, so that the discharge support is installed on the air outlet; When the high-voltage generator is started, the discharge support transmits the ions generated by the high-voltage generator to the discharge needle, and when the main machine is started, the air outlet blows air and blows the ions on the discharge needle away.

2. The electrostatic discharge ion neutralizer of claim 1, wherein: The number of discharge needles is multiple, multiple discharge needles are arranged on the discharge support in a ring shape, and the orientations of multiple discharge needles are the same.

3. The electrostatic discharge ion neutralizer of claim 2, wherein: The number of discharge needles is 8.

4. The electrostatic discharge ion neutralizer of claim 2, wherein: The discharge support is arranged at the middle position of the inner ring wall of the air outlet, multiple discharge needles are arranged close to the air outlet, the extension directions of multiple discharge needles are parallel, and the orientations of multiple discharge needles are communicated.

5. The electrostatic discharge ion neutralizer of claim 1, wherein: Further comprising a magnetic attraction mechanism comprising a first magnetic attraction part and a second magnetic attraction part, the first magnetic attraction part is arranged on the air outlet, the second magnetic attraction part is arranged on the discharge support, the positions of the first magnetic attraction part and the second magnetic attraction part are matched, and when the first magnetic attraction part and the second magnetic attraction part are adjacent, the first magnetic attraction part and the second magnetic attraction part attract each other, so that the discharge support can be quickly disassembled and magnetically attached to the air outlet.

6. The electrostatic discharge ion neutralizer of claim 5, wherein: The number of first magnetic attraction parts is multiple, multiple first magnetic attraction parts are arranged on the air outlet at equal angles; the number of second magnetic attraction parts is multiple, multiple second magnetic attraction parts are arranged on the discharge support at equal angles, and the number and position of multiple first magnetic attraction parts and multiple second magnetic attraction parts correspond one by one.

7. The electrostatic discharge ion neutralizer of claim 1, wherein: The main machine is arranged as a vacuum pump machine, the vacuum pump machine is arranged at the bottom position of the air outlet, and the high-voltage generator is arranged at the bottom position of the vacuum pump machine.

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