Electronic-grade packaging barrel cleaning device

By designing an automated electronic-grade packaging barrel cleaning device, employing technologies such as multi-directional high-pressure nozzles, rotating water inlet pipes, and ultrasonic transducers, the problems of long cleaning time and reliance on manual operation have been solved, achieving efficient and environmentally friendly cleaning results and reducing resource waste and environmental pollution.

CN223571586UActive Publication Date: 2025-11-21HUBEI SINOPHORUS ELECTRONIC MATERIALS CO LTD
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Patent Information

Application Number
CN202423085607.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-13
Publication Date
2025-11-21
Estimated Expiration
2034-12-13

AI Technical Summary

Technical Problem

In existing technologies, the cleaning process of electronic-grade packaging barrels is time-consuming, relies on manual operation, poses health and safety hazards, and has inconsistent cleaning results, making it difficult to meet the needs of large-scale production. Furthermore, it results in serious resource waste and environmental pollution.

Method used

An automated cleaning device was designed, comprising a gripping mechanism, a cleaning mechanism, and a roller mechanism. It employs multi-directional high-pressure nozzles, a rotating water inlet and outlet pipe, and an ultrasonic transducer to achieve all-round automatic cleaning, reduce manual intervention, recycle cleaning water, and reduce the amount of chemicals used.

Benefits of technology

It improves cleaning efficiency and consistency, reduces resource waste and environmental pollution, lowers labor intensity, extends the service life of packaging barrels, and ensures cleaning quality and safety.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

An electronic-grade packaging barrel cleaning device is mainly composed of a grabbing mechanism, a cleaning mechanism, a roller mechanism and a conveying mechanism. The grabbing mechanism achieves automatic grabbing and placing of the packaging barrel to be washed through a mechanical arm and a mechanical head on the rotating base. The cleaning mechanism is provided with multidirectional high-pressure nozzles, dead-corner-free strong flushing is ensured, and a water inlet pipe and a water pumping pipe which can rotate freely are arranged to enhance the cleaning effect; the roller mechanism comprises an immersion liquid pool, an immersion liquid roller, a vibration plate and an ultrasonic vibrator, stubborn stains are removed through ultrasonic energy, meanwhile, cleaning water is recycled, and chemical consumption is reduced. The whole cleaning process is closed in the cleaning room body, waste water leakage is prevented, and the environment is protected. In addition, due to the automatic design, the cleaning efficiency is improved, manual intervention is reduced, the operation risk is reduced, the service life of the packaging barrel is prolonged, the stable performance is guaranteed, and the automatic cleaning device is particularly suitable for cleaning the electronic-grade packaging barrel needing high cleanliness and repeated use.
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Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of packing barrel cleaning for electronic grade chemicals, in particular to an electronic grade packing barrel cleaning device. BACKGROUND

[0002] With the rapid development of the global semiconductor industry, the importance of electronic grade chemicals as key materials is increasingly prominent. These chemicals are mainly used in etching, cleaning and other process steps, which are crucial for ensuring the quality and performance of semiconductor devices. Therefore, the market demand for electronic grade chemicals has increased dramatically, which has also driven the growth of demand for their special packaging barrels. Electronic grade chemicals require strict control of impurity introduction due to their high purity requirements during production and use. In order to meet this high standard, the packaging barrel not only needs to have good sealing and corrosion resistance, but also must be strictly cleaned before and after each use to remove any potential contaminants. Traditionally, such packaging barrels are expensive and are often recycled to reduce costs and improve economic efficiency.

[0003] In the early days, the industry generally adopted a semi-automatic machine cleaning method, which involved manually placing the packaging barrel in the cleaning equipment, repeatedly rinsing it with clean water or a specific solvent, and then manually shaking it to help remove residual liquid. However, this method has many shortcomings:

[0004] 1. The entire process takes a long time and cannot meet the needs of large-scale production;

[0005] 2. Highly dependent on manual operation, increasing labor costs;

[0006] 3. The operator directly contacts harmful chemicals, posing a health and safety risk, and due to human factors, it is difficult to achieve consistent cleaning results, resulting in significant fluctuations in product quality. SUMMARY

[0007] To solve the above problems, the utility model provides an electronic grade packaging barrel cleaning device that can significantly improve cleaning quality and effectively reduce resource waste and environmental pollution. In addition, considering the cost of electronic grade packaging barrels and the need for recycling, the new cleaning solution should also support multiple cycles while maintaining stable performance.

[0008] To solve the above technical problems, the utility model adopts the following technical solutions to realize:

[0009] The utility model provides an electronic grade packing barrel cleaning device, including grabbing mechanism, cleaning mechanism, drum mechanism and conveying mechanism, conveying mechanism includes side plate and transmission roller, the side plate parallelly arranged, is provided with transmission roller between the side plate, the outside of side plate is equipped with drive arrangement and drives transmission roller synchronous rotation, and the side of side plate is sequentially provided with grabbing mechanism, cleaning mechanism and drum mechanism, and the device works, and grabbing mechanism is grabbed and is placed in transmission roller to the packing barrel of washing, and transmission roller is transmitted to the packing barrel of washing and sequentially passes through cleaning mechanism and drum mechanism and is completed cleaning.

[0010] In the preferred scheme, the grabbing mechanism includes a rotating base, which is installed on the side of the side plate and the head of the conveying mechanism. A mechanical arm is installed on the upper end face of the rotating base, and the other end of the mechanical arm is equipped with a mechanical head.

[0011] In the preferred scheme, a rotating table is provided on the mechanical head, one side of the rotating table is equipped with a cap rotating assembly, and the other side of the rotating table is equipped with a barrel grabbing assembly.

[0012] In the preferred scheme, the cleaning mechanism includes a cleaning room body, which is arranged on the side of the side plate and the middle part of the conveying mechanism. A side water supply plate is installed on the side wall of the cleaning room body, and a top water supply plate is installed on the wall near the top of the cleaning room body. The side water supply plate and the top water supply plate are connected to an external high-pressure water source. Equidistant high-pressure nozzles are arranged on the side water supply plate and the top water supply plate. Corresponding mounting plates are arranged on the two side walls of the cleaning room body. Clamping rollers are arranged between the mounting plates and slide along the mounting plates.

[0013] In the preferred scheme, a slide rail is installed on the top wall of the cleaning room body, and a sliding block is arranged in the slide rail. A water inlet pipe and a water suction pipe are connected to the lower end face of the sliding block. A control mechanism is installed on the outer wall of the cleaning room body. The control mechanism is connected to the sliding block and controls the sliding block to slide along the slide rail. The control mechanism is also connected to the water inlet pipe and the water suction pipe and controls the water inlet pipe and the water suction pipe to stretch up and down.

[0014] In the preferred scheme, the water inlet pipe and the water suction pipe include an inner pipe and an outer pipe. The outer pipe is sleeved outside the inner pipe, and the outer pipe is coaxially arranged with the inner pipe. The outer pipe can freely rotate around its own axis. A plurality of spray holes are symmetrically arranged in the pipe wall of the outer pipe. The end of the inner pipe is connected to a corrugated pipe.

[0015] In the preferred scheme, the roller mechanism comprises a liquid immersion pool, a support frame, a driving mechanism, a liquid immersion roller, a vibration plate and an ultrasonic vibrator; the support frame is arranged at the side of the side plate and the tail of the conveying mechanism, the lower end of the support frame is provided with a rotating shaft, the support frame rotates around the axis of the rotating shaft, the liquid immersion roller and the vibration plate are arranged between the support frames, the liquid immersion rollers are arranged in parallel, the vibration plate is arranged between the liquid immersion rollers, the driving mechanism is arranged at the upper end surface of the support frame and connected with the liquid immersion rollers, and the ultrasonic vibrator is arranged at the lower end surface of the vibration plate.

[0016] An electronic grade packaging barrel cleaning device has the following advantages:

[0017] 1. By adopting a multi-directional high-pressure spray head design (a side water supply plate and a top water supply plate), the electronic grade packaging barrel can be subjected to omnidirectional and dead angle-free strong washing, so that every corner can be thoroughly cleaned; in combination with a rotating cap assembly and a barrel grabbing assembly on the rotating table, the cap can be automatically removed and reinstalled during the cleaning process, so that secondary pollution caused by manual operation is avoided, and the cleaning efficiency is improved; and the unique design of the water inlet pipe and the water suction pipe, especially the function that the outer pipe rotates freely around the axis thereof, can realize dynamic water flow impact, and further improve the cleaning effect.

[0018] 2. The water inlet pipe and the water suction pipe system in the cleaning device allow the cleaning water to be recycled, so that the consumption of water resources is reduced; the ultrasonic vibrator is applied to the vibration plate, so that stubborn stains can be removed by means of the energy of ultrasonic waves without using chemical solvents, the use amount of chemicals is reduced, the burden on the environment is reduced, the whole cleaning process is carried out in the closed cleaning room, the leakage of cleaning wastewater is prevented, and the surrounding environment is protected.

[0019] 3. The automatic design of the mechanical arm and the mechanical head makes the process of grabbing and placing the packaging barrel more accurate and stable, reduces the risk of damage to the packaging barrel caused by improper operation, and prolongs the service life of the packaging barrel; the design of the liquid immersion roller in the roller mechanism, in cooperation with the high-frequency vibration generated by the ultrasonic vibrator, not only ensures the consistency and thoroughness of cleaning, but also helps to maintain the long-term stable operation of the cleaning device itself.

[0020] 4. The automatic cleaning process greatly shortens the cleaning time of a single packaging barrel, improves the overall work efficiency, reduces the need for manual intervention, reduces the labor intensity of workers, and reduces the possibility of human errors. BRIEF DESCRIPTION OF DRAWINGS

[0021] The utility model will be further described in connection with the drawings and embodiments:

[0022] Figure 1 It is a schematic diagram of the whole structure of the utility model;

[0023] Figure 2 It is the enlarged schematic view of the grabbing mechanism structure of the utility model;

[0024] Figure 3 It is the enlarged schematic view of the grabbing mechanism structure of the utility model Figure 2 ;

[0025] Figure 4 It is the enlarged schematic view of the cleaning mechanism structure of the utility model;

[0026] Figure 5 It is the enlarged schematic view of the cleaning mechanism structure of the utility model Figure 2 ;

[0027] Figure 6 It is the schematic view of the roller mechanism structure of the cleaning mechanism structure of the utility model;

[0028] Figure 7 It is the sectional view of the water inlet pipe and the water pump structure of the utility model;

[0029] Figure 8 It is the schematic view of the water inlet pipe and the water pump structure of the utility model.

[0030] In the drawing: grabbing mechanism 1, rotating base 101, mechanical arm 102, mechanical head 103, rotating table 104, rotating cap assembly 105, grab bucket assembly 106, cleaning mechanism 2, cleaning room body 201, side water supply plate 202, top water supply plate 203, high-pressure spray head 204, water inlet pipe 205, water pump 206, clamping roller 207, mounting plate 208, sliding rail 209, sliding block 210, control mechanism 211, outer pipe 2051, inner pipe 2052, spray hole 2053, corrugated pipe 2054, roller mechanism 3, immersion liquid pool 301, support frame 302, driving mechanism 303, immersion liquid roller 304, vibration plate 305, ultrasonic vibrator 306, rotating shaft 307, conveying mechanism 4, side plate 401, transmission roller 402, to-be-washed packaging barrel 5. DETAILED DESCRIPTION

[0031] As Figure 1 and Figure 2 shown, an electronic-grade packaging barrel cleaning device includes grabbing mechanism 1, cleaning mechanism 2, roller mechanism 3 and conveying mechanism 4, conveying mechanism 4 includes side plate 401 and transmission roller 402, the side plates 401 are arranged in parallel, transmission rollers 402 are arranged between the side plates 401, driving devices are arranged on the outer sides of the side plates 401 and drive the transmission rollers 402 to rotate synchronously, the side plates 401 are sequentially provided with the grabbing mechanism 1, the cleaning mechanism 2 and the roller mechanism 3, the device works, the grabbing mechanism 1 grabs and places the to-be-washed packaging barrel 5 on the transmission roller 402, the transmission roller 402 transmits the to-be-washed packaging barrel 5 and sequentially passes through the cleaning mechanism 2 and the roller mechanism 3 to complete cleaning.

[0032] The preferred scheme is shown in Figure 2 and Figure 3 The grabbing mechanism 1 includes a rotating base 101 arranged at the side of the side plate 401 and the head of the conveying mechanism 4, the upper end surface of the rotating base 101 is arranged with a mechanical arm 102, the other end of the mechanical arm 102 is arranged with a mechanical head 103; the mechanical head 103 is provided with a rotating table 104, one side of the rotating table 104 is arranged with a cap rotating assembly 105, the other side of the rotating table 104 is arranged with a bucket grabbing assembly 106.

[0033] During operation, the rotating base 101 can drive the mechanical arm 102 to rotate and change the angle of the mechanical arm 102, the end of the mechanical arm 102 is provided with the mechanical head 103, the mechanical head 103 can switch the working mode by controlling the rotating table 104, open the top end cover of the to-be-washed packaging barrel 5 by controlling the cap rotating assembly 105, and smoothly grab the to-be-washed packaging barrel 5 and place it on the conveying mechanism 4 by controlling the bucket grabbing assembly 106.

[0034] The preferred scheme is shown in Figure 4 and Figure 5 The cleaning mechanism 2 includes a cleaning room body 201 arranged at the side of the side plate 401 and the middle of the conveying mechanism 4, the side wall of the cleaning room body 201 is arranged with a side water supply plate 202, the wall near the top of the cleaning room body 201 is arranged with a top water supply plate 203, the side water supply plate 202 and the top water supply plate 203 are communicated with an external high-pressure water source, the side water supply plate 202 and the top water supply plate 203 are equidistantly provided with high-pressure nozzles 204, the walls on both sides of the cleaning room body 201 are also correspondingly provided with mounting plates 208, the mounting plates 208 are provided with a clamping roller 207 therebetween, the clamping roller 207 slides along the mounting plates 208;

[0035] The top wall surface of the cleaning room body 201 is arranged with a sliding rail 209, the sliding rail 209 is provided with a sliding block 210, the lower end surface of the sliding block 210 is connected with a water inlet pipe 205 and a water suction pipe 206, the outer wall surface of the cleaning room body 201 is arranged with a control mechanism 211 connected with the sliding block 210 and controlling the sliding block 210 to slide along the sliding rail 209, the control mechanism 211 is also connected with the water inlet pipe 205 and the water suction pipe 206 and controls the water inlet pipe 205 and the water suction pipe 206 to stretch up and down;

[0036] In the working process of the device, when the packaging barrel 5 to be washed is moved into the cleaning room body 201, the clamping roller 207 can move transversely along the mounting plate 208 and clamp the packaging barrel 5 to be washed. Then, the side water supply plate 202 and the top water supply plate 203 spray high-pressure cleaning water through the high-pressure nozzles 204 to flush the packaging barrel 5 to be washed. At the same time, the control mechanism 211 controls the sliding block 210 to move and extend the water inlet pipe 205 and the water suction pipe 206 into the packaging barrel 5 to be washed to flush the barrel. The cleaning room body 201 is also provided with a visual positioning camera, a power source pump, a particle counter, a resistivity meter, a control cabinet, and a gas-liquid control valve. The resistivity tester and the particle counter detect the information in real time and transmit it to the control panel to set the cleaning time. Since the above device is prior art, it is not described in detail in this case.

[0037] As shown in the preferred scheme Figure 7 and Figure 8 The water inlet pipe 205 and the water suction pipe 206 include an inner pipe 2052 and an outer pipe 2051. The outer pipe 2051 is sleeved outside the inner pipe 2052, and the outer pipe 2051 is coaxially arranged with the inner pipe 2052. The outer pipe 2051 can freely rotate around its own axis. The outer pipe 2051 and the inner pipe 2052 of the water inlet pipe 205 are annularly and symmetrically provided with spray holes 2053. The inner pipe 2052 of the water suction pipe 206 is not provided with spray holes 2053, and the end of the inner pipe 2052 is connected with a corrugated pipe 2054.

[0038] Since there are chemicals remaining in the packaging barrel 5 to be washed, when the water suction pipe 206 is deeply inserted into the packaging barrel 5 to be washed, the chemicals inside the packaging barrel 5 to be washed are sucked out. Then, the water inlet pipe 205 sprays water flow to drive the outer pipe 2051 to rotate, so as to form a rotating spray, thereby fully flushing the inside of the packaging barrel 5 to be washed. During the cleaning process, the water suction pipe 206 continuously sucks the cleaning liquid to form a circulating cleaning.

[0039] As shown in the preferred scheme Figure 6 The roller mechanism 3 includes a liquid immersion pool 301, a support frame 302, a driving mechanism 303, a liquid immersion roller 304, a vibration plate 305, and an ultrasonic vibrator 306. The support frame 302 is arranged at the side of the side plate 401 and the tail of the conveying mechanism 4. The lower end of the support frame 302 is provided with a rotating shaft 307. The support frame 302 rotates around the axis of the rotating shaft 307. The liquid immersion roller 304 and the vibration plate 305 are arranged between the support frames 302. The liquid immersion roller 304 is arranged in parallel. The vibration plate 305 is arranged between the liquid immersion rollers 304. The driving mechanism 303 is arranged at the upper end surface of the support frame 302 and connected with the liquid immersion roller 304. The ultrasonic vibrator 306 is arranged at the lower end surface of the vibration plate 305.

[0040] When the to-be-cleaned packaging barrel 5 moves to the roller mechanism 3, an external pushing force is applied to make the to-be-cleaned packaging barrel 5 and the support frame 302 overturn around the axis of the rotating shaft 307 until the half barrel is immersed into the immersion liquid pool 301 filled with cleaning liquid, the immersion liquid roller 304 rotates to drive the to-be-cleaned packaging barrel 5 to rotate, so that the chemical cleaning liquid fully infiltrates the barrel surface, then the ultrasonic vibrator 306 is started to drive the vibrating plate 305 and the to-be-cleaned packaging barrel 5 to vibrate at high speed, so as to clean and remove the dirt into the cleaning liquid. Through intermittent rolling and intermittent ultrasonic vibration, it is ensured that the inner and outer walls of the barrel are thoroughly cleaned, and after cleaning is completed, the pouring device returns to the original position.

Claims

1. An electronic-grade packaging barrel cleaning device, comprising a gripping mechanism (1), a cleaning mechanism (2), a roller mechanism (3), and a conveying mechanism (4), characterized in that: The conveying mechanism (4) includes a side plate (401) and a transmission roller (402). The side plates (401) are arranged in parallel, and the transmission roller (402) is arranged between the side plates (401). A driving device is installed on the outside of the side plate (401) and drives the transmission roller (402) to rotate synchronously. The side of the side plate (401) is sequentially provided with a gripping mechanism (1), a cleaning mechanism (2) and a roller mechanism (3). When the device is working, the gripping mechanism (1) grips the packaging barrel (5) to be washed and places it on the transmission roller (402). The transmission roller (402) transmits the packaging barrel (5) to be washed and completes the washing by sequentially passing through the cleaning mechanism (2) and the roller mechanism (3).

2. The electronic-grade packaging drum cleaning device according to claim 1, characterized in that: The gripping mechanism (1) includes a rotating base (101), which is mounted on the side of the side plate (401) and the head of the conveying mechanism (4). A mechanical arm (102) is mounted on the upper end of the rotating base (101), and a mechanical head (103) is mounted on the other end of the mechanical arm (102).

3. The electronic-grade packaging drum cleaning device according to claim 2, characterized in that: A rotating platform (104) is provided on the mechanical head (103). A capping assembly (105) is installed on one side of the rotating platform (104), and a bucket gripping assembly (106) is installed on the other side of the rotating platform (104).

4. The electronic-grade packaging drum cleaning device according to claim 1, characterized in that: The cleaning mechanism (2) includes a cleaning chamber (201), which is located on the side of the side plate (401) and in the middle of the conveying mechanism (4). A side water supply plate (202) is installed on the side wall of the cleaning chamber (201), and a top water supply plate (203) is installed on the wall of the cleaning chamber (201) near the top. The side water supply plate (202) and the top water supply plate (203) are connected to an external high-pressure water source. High-pressure nozzles (204) are equidistantly arranged on the side water supply plate (202) and the top water supply plate (203). Mounting plates (208) are also correspondingly arranged on the two side walls of the cleaning chamber (201). A clamping roller (207) is arranged between the mounting plates (208), and the clamping roller (207) slides along the mounting plate (208) for a limited position.

5. The electronic-grade packaging drum cleaning device according to claim 4, characterized in that: A slide rail (209) is installed on the top wall of the cleaning room (201). A slider (210) is installed inside the slide rail (209). A water inlet pipe (205) and a water outlet pipe (206) are connected to the lower end of the slider (210). A control mechanism (211) is installed on the outer wall of the cleaning room (201). The control mechanism (211) is connected to the slider (210) and controls the slider (210) to slide along the slide rail (209). The control mechanism (211) is also connected to the water inlet pipe (205) and the water outlet pipe (206) and controls the water inlet pipe (205) and the water outlet pipe (206) to extend and retract vertically.

6. The electronic-grade packaging drum cleaning device according to claim 5, characterized in that: The inlet pipe (205) and the outlet pipe (206) include an inner pipe (2052) and an outer pipe (2051). The outer pipe (2051) is sleeved on the outside of the inner pipe (2052). The outer pipe (2051) and the inner pipe (2052) are coaxially arranged. The outer pipe (2051) can rotate freely around its own axis. The pipe wall of the outer pipe (2051) is symmetrically provided with spray holes (2053). The end of the inner pipe (2052) is connected to a corrugated pipe (2054).

7. The electronic-grade packaging drum cleaning device according to claim 1, characterized in that: The roller mechanism (3) includes an immersion tank (301), a support frame (302), a drive mechanism (303), an immersion roller (304), a vibrating plate (305), and an ultrasonic transducer (306). The support frame (302) is installed on the side of the side plate (401) and the tail of the conveying mechanism (4). A rotating shaft (307) is provided at the lower end of the support frame (302). The support frame (302) rotates around the axis of the rotating shaft (307). An immersion roller (304) and a vibrating plate (305) are installed between the support frames (302). The immersion rollers (304) are arranged in parallel. The vibrating plate (305) is arranged between the immersion rollers (304). A drive mechanism (303) is provided at the upper end of the support frame (302) and connected to the immersion roller (304). An ultrasonic transducer (306) is installed at the lower end of the vibrating plate (305).