Loading port vacuum-breaking pressure release valve structure

Abstract

The utility model relates to a loading port vacuum breaking pressure release valve structure which comprises a cavity, a sealing plate, a top plate, a reset piece, a shaft rod and a linear bearing. An air outlet is formed in the side wall of the cavity; the sealing plate is connected with the cavity through a resetting piece and is positioned in the cavity; the top plate is provided with a sealing ring; the cavity is provided with a penetrating opening, the shaft rod is coaxially arranged in the cavity through the linear bearing and extends out of the penetrating opening, and one end of the shaft rod is connected with the sealing plate. Compared with a traditional shaft rod hard contact structure, the linear bearing has the advantages that the linear bearing can guide and smooth the movement of the shaft rod, so that the shaft rod always keeps linear movement, deflection and abrasion of the shaft rod are reduced, and the service life is prolonged; the opening position of the pressure relief air outlet is optimized from the end part of the existing pressure relief valve to the side wall of the pressure relief valve, so that the pressure relief effect is improved; the structure of the pressure release valve is improved, the problem that the service life of the pressure release valve is short is solved at low cost, and the stability of vacuum feeding of a machine table is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor packaging technology, and in particular to a loading port pressure relief valve structure. Background Technology

[0002] Sputtering is a physical vapor deposition technique widely used in the semiconductor industry. It involves bombarding a target with high-energy particles, causing atoms or molecules on the target surface to be sputtered and deposited onto a substrate (such as a wafer) to form a thin film. To minimize the impact of gaseous impurities on film quality, the sputtering process is performed within a vacuum chamber. The load port is a critical component in semiconductor manufacturing equipment, used to safely and efficiently load wafer carriers into the sputter machine, ensuring wafer transport in a clean environment and preventing contamination.

[0003] The loading port requires continuous vacuuming and de-vacuuming. During de-vacuuming, inert gas is continuously introduced into the vacuum chamber. When the pressure inside the vacuum chamber far exceeds atmospheric pressure, the pressure relief valve is opened to release pressure. However, the existing pressure relief valves used in the loading port require frequent evacuation and de-vacuuming, resulting in repeated hard contact between the valve and the internal shaft, which can easily become rough and jammed. This prevents the spring in the pressure relief valve from returning to its original position, affecting the airtightness of the vacuum pipeline and ultimately impacting the vacuum loading process of the machine. Utility Model Content

[0004] The purpose of this invention is to provide a loading port pressure relief valve structure that can improve the pressure relief stability of vacuum pipelines, reduce the damage rate of pressure relief valves, and reduce the maintenance frequency of loading ports.

[0005] To achieve the above-mentioned utility model objectives, this utility model provides a loading port venting and pressure relief valve structure, including a cavity, a sealing plate, a top plate, a reset component, a shaft, and a linear bearing;

[0006] The cavity has an air outlet on its side wall, and the top plate is located at the end of the cavity; the sealing plate is connected to the cavity through the reset member; the top plate has a sealing ring, which is located between the top plate and the sealing plate; the cavity has a through opening, and the shaft is coaxially mounted in the cavity through the linear bearing and extends out of the through opening, with one end of the shaft connected to the sealing plate.

[0007] Preferably, a force-bearing block is provided in the middle of the sealing plate.

[0008] As a further improvement to the utility model, the reset element is a spring.

[0009] As a further improvement of the utility model, the side wall of the cavity is provided with a plurality of air outlets, and the plurality of air outlets are arranged in a ring array on the side wall of the cavity.

[0010] As a further improvement of the utility model, the end of the cavity is provided with a clamp.

[0011] Further, the clamp is provided with a fluororubber ring.

[0012] The loading port breakage and pressure relief valve structure of the utility model, when the loading port is vacuumized, the sealing plate moves to the top plate, the top plate limits the sealing plate, the sealing ring between the sealing plate and the top plate seals and buffers, improves the air tightness of the vacuum pipe and the top plate connection, and also plays an anti-vibration role on the sealing plate, reduces the impact degree of the sealing plate and the top plate; when the loading port is broken, the sealing plate is pushed away from the top plate, and the excess gas in the cavity is discharged from the air outlet, thereby relieving pressure; after the pressure relief is completed, the sealing plate is reset by the action of the reset member.

[0013] Compared with the prior art, the loading port breakage and pressure relief valve structure of the utility model has the following advantages:

[0014] (1) Compared with the traditional shaft rod hard contact structure, the linear bearing can guide and smooth the movement of the shaft rod, so that the shaft rod always maintains linear motion, reduces the deflection and wear of the shaft rod, and improves the service life;

[0015] (2) The opening position of the pressure relief air outlet is optimized from the end of the pressure relief valve to the side wall of the pressure relief valve, improving the pressure relief effect;

[0016] (3) The structure of the pressure relief valve is improved, the problem of poor service life of the pressure relief valve is improved at low cost, and the stability of the vacuum loading of the machine is improved. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a vacuum state schematic view of the loading port breakage and pressure relief valve of the utility model;

[0018] Figure 2 It is a vacuum state schematic view of the loading port breakage and pressure relief valve of the utility model;

[0019] Figure 3 It is a clamp connection structure schematic view. DETAILED DESCRIPTION

[0020] The specific embodiments of the utility model will be further described in detail in combination with the drawings.

[0021] As Figures 1-2As shown in the utility model discloses a kind of loading port broken empty pressure relief valve structures, including cavity 1, sealing plate 2, top plate 3, reset piece 5, shaft 7, and linear bearing 8;

[0022] The side wall of the cavity 1 is provided with a gas outlet 11, and the top plate 3 is located at the end of the cavity 1; the sealing plate 2 is connected in the cavity 1 through the reset piece 5; the top plate 3 is provided with a sealing ring 4, and the sealing ring 4 is located between the top plate 3 and the sealing plate 2; the cavity 1 is provided with a through port 12, and the shaft 7 is coaxially arranged in the cavity 1 through the linear bearing 8 and extends out of the through port 12, and one end of the shaft 7 is connected with the sealing plate 2.

[0023] The utility model discloses a kind of loading port broken empty pressure relief valve structures, when loading port is carried out vacuumizing, sealing plate 2 moves towards top plate 3, top plate 3 plays the limiting action to sealing plate 2, sealing ring 4 between sealing plate 2 and top plate 3 plays the sealing and buffering effect, both improve the air tightness of vacuum tube and top plate 3 junction, also play the anti-shock effect to sealing plate 2, reduce the impact degree of sealing plate 2 and top plate 3; when loading port is carried out broken vacuum, sealing plate 2 is pushed open and far away from top plate 3, and the excess gas in the cavity 1 is discharged from the gas outlet 11, to carry out pressure relief; after pressure relief, sealing plate 2 resets by the action of reset piece 5.

[0024] Sealing plate 2 drives shaft 7 to move back and forth, and the shaft 7 plays a guiding role in the back-and-forth movement of the sealing plate 2, reducing the jumping and deflection of the sealing plate 2 and improving the air tightness of the cavity 1. The middle part of the sealing plate 2 is provided with a stress block 6, which concentrates the stress area of the sealing plate 2 in the middle part, especially when broken vacuum, the stability of the movement of the sealing plate 2 is enhanced, avoiding the small-range deflection of the sealing plate 2, which affects the air tightness.

[0025] The reset piece 5 is preferably a spring, which has good elasticity and durability, and is suitable for the high-frequency and short-stroke resetting requirements of the sealing plate 2.

[0026] The side wall of the cavity 1 is provided with a plurality of gas outlets 11, and the plurality of gas outlets 11 are arranged in an annular array on the side wall of the cavity 1, which enhances the air release effect, and the annular array arrangement of the gas outlets 11 can enhance the structural stability of the cavity 1.

[0027] The existing pressure relief valve is fastened on the vacuum tube through threads, and after long-term use, the threads structure at the connection between the pressure relief valve and the pipeline is easy to wear and slip due to shaking friction, causing the overall loosening of the pressure relief valve, affecting the air tightness and pressure relief effect. Figure 3 As shown, the end of the cavity 1 is provided with a clamp 9, which is used for the connection between the vacuum tube and the cavity 1, and is convenient to disassemble and assemble and not easy to loosen. The clamp 9 can be a KF25 clamp, which is easy to install and corrosion-resistant. The clamp 9 is provided with a fluorine rubber ring 91, which can further improve the air tightness of the connection between the vacuum tube and the cavity 1.

[0028] The preferred embodiments of the present application have been specifically described above, but the present application is not limited to the embodiments described above, and those skilled in the art can make various equivalent modifications or replacements without departing from the spirit of the present application. These equivalent modifications or replacements are all included in the scope defined by the claims of the present application.

Claims

1. A load port venting valve structure, comprising: The cavity, the sealing plate, the top plate, the reset piece, the shaft rod and the linear bearing are included. The side wall of the cavity is provided with an air outlet, and the top plate is located at the end of the cavity; the sealing plate is connected in the cavity through the reset piece; the top plate is provided with a sealing ring between the top plate and the sealing plate; the cavity is provided with a through hole, the shaft rod is coaxially arranged in the cavity through the linear bearing and extends out of the through hole, and one end of the shaft rod is connected with the sealing plate.

2. A load port venting relief valve structure as claimed in claim 1, wherein, The middle part of the sealing plate is provided with a stress block.

3. A load port venting relief valve structure as claimed in claim 1, wherein, The reset piece is a spring.

4. A load port venting relief valve structure as described in claim 1, wherein, The side wall of the cavity is provided with a plurality of air outlets, and the plurality of air outlets are arranged in an annular array on the side wall of the cavity.

5. A load port venting relief valve structure as described in claim 1, wherein, The end of the cavity is provided with a clamp.

6. A load port venting relief valve structure as claimed in claim 5, wherein, The clamp is provided with a fluorine rubber ring.

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