Shafting calibration system

Abstract

The utility model provides a shafting calibration system, and belongs to the technical field of position calibration. The shafting calibration system comprises: a motion track extending along a first direction; the first moving part and the second moving part are arranged to be capable of moving in the length direction of the moving track; the first moving part and the second moving part are respectively and independently driven; the standard ruler is parallel to the movement track and is provided with a scale area covering the total stroke range of the first movement component and the second movement component; the movement track is arranged to be capable of moving to the position above the standard ruler so as to obtain the positions of the first movement component and the second movement component on the standard ruler. The shafting calibration system can accurately calibrate the relative position relation between the two moving parts.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of position calibration, and particularly relates to a shaft system calibration system. BACKGROUND

[0002] In some special application scenarios, two moving parts need to move on the same fixed track, and the two moving parts are respectively driven by two sets of driving systems. For example, in order to improve the speed of obtaining mark points on the back surface of a workpiece, two visual assemblies are arranged on a gantry. Specifically, as shown in the figure, the exposure device comprises a first gantry 1' and a second gantry 2' which span a workbench, the first gantry 1' is provided with an exposure assembly 3', and the second gantry 2' is provided with a first visual assembly 4' and a second visual assembly 5'. In order to ensure the register of the front and back surface patterns during the exposure process, an auxiliary lamp 6' is arranged near the edge of the workpiece 7', the first visual assembly 4' is used to obtain the position of the auxiliary lamp 6', and the second visual assembly 5' is used to obtain the mark points 8' on the back surface of the workpiece 7', so as to improve the speed of obtaining the mark points on the back surface of the workpiece 7'. The first visual assembly 4' and the second visual assembly 5' are equivalent to the two moving parts described above. Figure 1

[0003] For this type of two moving parts, since they respectively adopt two sets of driving systems, they have their own coordinate systems and can obtain coordinate values corresponding to their own coordinate systems respectively, but the relative position relationship between the two moving parts cannot be accurately determined, that is, the relative position relationship between the two moving parts described above cannot be accurately determined in the prior art. SUMMARY

[0004] An object of the present application is to provide a shaft system calibration system which can accurately calibrate the relative position relationship between two moving parts.

[0005] In particular, the embodiments of the present application provide a shaft system calibration system, comprising:

[0006] a movement track extending in a first direction;

[0007] a first moving part arranged to be movable along the length direction of the movement track;

[0008] a second moving part arranged to be movable along the length direction of the movement track, the second moving part only moves in the range where the first moving part is close to the second moving part, and the first moving part and the second moving part are respectively independently driven;

[0009] ​a standard ruler, disposed parallel to the movement track, having a scale area covering the total stroke range of the first movement component and the second movement component;

[0010] The movement track is arranged to be movable above the standard ruler to obtain the positions of the first movement component and the second movement component on the standard ruler.

[0011] Further, the first stroke range of the first movement component and the second stroke range of the second movement component have an overlapping area.

[0012] Further, the shaft calibration system is used in an exposure device, the movement track is a gantry movable in a second direction, the second direction is perpendicular to the first direction, the first movement component and the second movement component are respectively a first vision assembly and a second vision assembly, and the standard ruler is fixed at a worktable surface.

[0013] Further, the first vision assembly is used to obtain the position of an auxiliary lamp, and the second vision assembly is used to obtain the position of a mark point after turning over of a workpiece.

[0014] In particular, the present application also provides a shaft calibration system, comprising:

[0015] a movement track extending in a first direction;

[0016] a first vision assembly arranged to be movable along the length direction of the movement track;

[0017] a second vision assembly arranged to be movable along the length direction of the movement track, the second vision assembly being movable only within a range on the side of the first vision assembly close to the second vision assembly, the first vision assembly and the second vision assembly being respectively independently driven, and the first stroke range of the first vision assembly and the second stroke range of the second vision assembly having an overlapping area;

[0018] a point setting mechanism for forming a plurality of reference points in the overlapping area;

[0019] The first vision assembly and the second vision assembly respectively identify the first coordinates and the second coordinates of each of the reference points in the coordinate system of their own movement systems, and determine the relative position relationship of the first vision assembly and the second vision assembly according to the first coordinates and the second coordinates.

[0020] Further, the shaft system calibration system is applied to an exposure device, the movement track is a first gantry movable along a second direction, the second direction is perpendicular to the first direction, the pointing mechanism is an exposure mechanism arranged on a second gantry, the second gantry is movable along the second direction, and the exposure mechanism is movable along the first direction relative to the second gantry and forms the reference point on the workpiece.

[0021] According to the first aspect of the present application, the shaft system calibration system is configured to cover the total stroke range of the first movement component and the second movement component, so that the first movement component and the second movement component can accurately read the scale on the scale when they are located at different positions, thereby accurately calibrating the relative position relationship between the two movement components by using one measuring tool.

[0022] Further, when multiple sets of data are obtained (i.e., the stop positions of the first movement component and the second movement component include multiple sets), a more accurate relative position relationship can be obtained according to these data, for example, by processing the data, such as using statistical methods such as least squares method to reduce the noise of the data.

[0023] Further, when the data of the overlapping region is obtained, since the same coordinate scale range is covered, the data of the overlapping part can be directly used to calibrate the relative coordinate system of the two movement components, reducing the deviation of the calculation results in the entire stroke range. In particular, when the data points in the overlapping region are more dense, it is helpful to reduce the noise influence by statistical methods, thereby obtaining a more reliable relative coordinate relationship.

[0024] According to the second aspect of the present application, the shaft system calibration system forms multiple reference points in the overlapping region by the pointing mechanism, and then identifies the coordinates of each reference point in the coordinate system of the first visual component and the second visual component, and uses these coordinate data to accurately calibrate the relative position relationship between the first visual component and the second visual component.

[0025] Further, when this shaft system calibration system is applied to an exposure device, it can effectively utilize the components of the exposure device itself, without the need to add special calibration components, thereby saving costs and achieving a simple implementation. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 A structural schematic diagram of an exposure device in the prior art (the workpiece is in a front-up state);

[0027] Figure 2 A structural schematic diagram of a shaft system calibration system according to an embodiment of the present application;

[0028] Figure 3Flow chart of the shafting calibration method according to an embodiment of the present application;

[0029] Figure 4 Structural schematic diagram of the shafting calibration system according to another embodiment of the present application;

[0030] Figure 5 Flow chart of the shafting calibration method according to another embodiment of the present application;

[0031] Reference signs:

[0032] First gantry 1', second gantry 2', exposure assembly 3', first vision assembly 4', second vision assembly 5', auxiliary lamp 6', workpiece 7', mark point 8';

[0033] Motion track 10, first motion component 20, second motion component 30, standard ruler 40, first vision assembly 21, second vision assembly 31, pointing mechanism 5, first gantry 11, second gantry 60, exposure mechanism 51, workpiece 70. DETAILED DESCRIPTION

[0034] In order to make the above objectives, features and advantages of the present application more apparent, clear and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings. It should be understood that the specific embodiments described herein are only used to explain the present application, but not to limit the present application. In addition, it should be noted that only the parts related to the present application are shown in the drawings for the convenience of description, rather than all the structures. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0035] The terms "comprising" and "having" and any variations thereof in the present application are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device including a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to the process, method, product or device.

[0036] Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application. The appearance of the phrase in various places in the specification does not necessarily all refer to the same embodiment, nor is it necessarily mutually exclusive of other embodiments. It will be explicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0037] Figure 2 Structural schematic diagram of the shafting calibration system according to an embodiment of the present application. As shown in FIG. 1, the shafting calibration system according to an embodiment of the present application comprises a first motion component 20 and a second motion component 30.Figure 2 As shown, in one embodiment, the shaft calibration system comprises a motion track 10, a first motion component 20, a second motion component 30 and a standard ruler 40. The motion track 10 extends along a first direction a, and the first motion component 20 and the second motion component 30 are both arranged to be movable along the length direction of the motion track 10. The second motion component 30 only moves within the range where the first motion component 20 is close to the second motion component 30, as shown in the figure. Figure 2 In the embodiment shown, the first motion component 20 is always located at the left side of the second motion component 30, and the first motion component 20 and the second motion component 30 can or can not have overlapping parts. Assuming that the first motion component 20 is movable within a first stroke range L1, and the second motion component 30 is movable within a second stroke range L2, the first stroke range L1 and the second stroke range L2 can or can not have overlapping parts, for example, the right end point of the first stroke range L1 coincides with the left end point of the second stroke range L2 or has a spacing therebetween, which is not limited herein. The first motion component 20 and the second motion component 30 are independently driven respectively. The standard ruler 40 is arranged in parallel with the motion track 10, and has a scale area covering the total stroke range of the first motion component 20 and the second motion component 30, that is, within the range from the left end point to the right end point of the first stroke range L1, the scale ruler has scales for measurement. The motion track 10 is arranged to be movable above the standard ruler 40, so as to obtain the positions of the first motion component 20 and the second motion component 30 on the standard ruler 40.

[0038] The shaft calibration system provided by the embodiment makes the scales of the first motion component 20 and the second motion component 30 accurately readable when the two components are located at different positions, so that the relative position relationship between the two motion components is accurately calibrated by using one measurement tool.

[0039] When the shaft calibration system of the above embodiment is used in an exposure device, the motion track 10 is a gantry movable along a second direction b, the second direction b is perpendicular to the first direction a, the first motion component 20 and the second motion component 30 are respectively a first vision assembly 21 and a second vision assembly 31, and the standard ruler 40 is fixed at a worktable surface. The first vision assembly 21 is used to obtain the position of an auxiliary lamp, and the second vision assembly 31 is used to obtain the position of a mark point after the workpiece 70 is flipped.

[0040] Figure 3 A flowchart of a shaft calibration method according to one embodiment of the present application is shown. As shown, Figure 3 The present application also provides a shaft calibration method for the above shaft calibration system, comprising:

[0041] Step S100, control the motion track 10 to move above the standard ruler 40;

[0042] Step S200, control the first motion component 20 and the second motion component 30 to move along the motion track 10;

[0043] Step S300, record the first standard coordinate value and the second standard coordinate value of the first motion component 20 and the second motion component 30 respectively on the standard ruler 40, the first coordinate value of the first motion component 20 itself in the motion system, and the second coordinate value of the second motion component 30 itself in the motion system;

[0044] Step S400, calibrate the relative position relationship between the first motion component 20 and the second motion component 30 according to the first standard coordinate value, the second standard coordinate value, the first coordinate value and the second coordinate value.

[0045] In one embodiment, in step S200, the stopping positions of the first motion component 20 and the second motion component 30 include multiple groups. Further, the stopping positions of the first motion component 20 and the second motion component 30 include the overlapping area of the respective stroke ranges.

[0046] When calibrating, assuming that the coordinate of the first motion component 20 in its own coordinate system is A1, the reading of the standard ruler 40 is S1, the coordinate of the second motion component 30 in its own coordinate system is B2, and the reading of the standard ruler 40 is S2, S2-S1=(Rb*B2+tb)-(Ra*A1+ta), wherein Ra and ta are respectively the rotation matrix and the translation matrix of the coordinate system of the first motion component 20 relative to the standard ruler 40, and Rb and tb are respectively the rotation matrix and the translation matrix of the coordinate system of the second motion component 30 relative to the standard ruler 40. Through multiple groups of data, each matrix can be solved, that is, the relative relationship between the coordinate systems of the two motion components is obtained.

[0047] The calibration method of the embodiment can conveniently calibrate the relative position relationship between the first motion component 20 and the second motion component 30, that is, the difference between the coordinate systems of the first motion component 20 and the second motion component 30, by recording the coordinate values of the first motion component 20 and the second motion component 30 on the standard ruler 40.

[0048] Further, when multiple groups of data are obtained (that is, the stopping positions of the first motion component 20 and the second motion component 30 include multiple groups), a more accurate relative position relationship can be obtained according to these data, for example, by data processing, for example, using statistical methods such as least squares method to reduce the noise of the data.

[0049] Furthermore, when data from overlapping regions is acquired, since they cover the same coordinate scale range, the data from the overlapping areas can be directly used to calibrate the relative coordinate systems of the two moving parts, reducing the bias that relies on the solution results across the entire stroke range. In particular, when the data points in the overlapping regions are denser, it helps to reduce the impact of noise through statistical methods, thereby obtaining a more reliable relative coordinate relationship.

[0050] Figure 4 This is a schematic diagram of a shaft calibration system according to another embodiment of the present invention. Figure 4 As shown, one embodiment of this application also provides another axis calibration system, including a motion track 10, a first vision component 21, a second vision component 31, and a positioning mechanism 50. The motion track 10 extends along a first direction a, and both the first vision component 21 and the second vision component 31 are configured to move along the length direction of the motion track 10. The second vision component 31 moves only within the range of the side of the first vision component 21 closest to the second vision component 31. The first vision component 21 and the second vision component 31 are driven independently, and the first travel range L1 of the first vision component 21 and the second travel range L2 of the second vision component 31 have an overlapping area. The positioning mechanism 50 is used to form multiple reference points in the overlapping area. The first vision component 21 and the second vision component 31 respectively identify the first coordinate and the second coordinate of each reference point in its own motion system coordinate system, and determine the relative positional relationship between the first vision component 21 and the second vision component 31 based on the first coordinate and the second coordinate.

[0051] In one embodiment, when the shaft calibration system is used in an exposure apparatus, the motion track 10 is a first gantry 11 that can move along a second direction b, the second direction b being perpendicular to the first direction a. The positioning mechanism 50 is an exposure mechanism 51 disposed on a second gantry 60. The second gantry 60 can move along the second direction b, and the exposure mechanism 51 can move relative to the second gantry 60 along the first direction a and form a reference point on the workpiece 70, i.e., a point formed by exposure.

[0052] Figure 5 This is a flowchart of a shaft system calibration method according to another embodiment of the present invention. Figure 5 As shown, one embodiment of this application also provides Figure 4 The shaft calibration method of the shaft calibration system in the embodiment of the present invention includes:

[0053] Step S10: Control the positioning mechanism 50 to move to the overlapping area and form multiple reference points;

[0054] Step S20: Control the first vision component 21 to move to the reference point, and record the first coordinate of the reference point in the coordinate system of the first vision component 21's own motion system;

[0055] Step S30, control the second vision assembly 31 to move to the reference point, and record the second coordinate of the reference point under the second vision assembly 31 own motion system coordinate system;

[0056] Step S40, according to the first coordinate and the second coordinate of each group of the same reference point, calibrate the relative position relationship of the first vision assembly 21 and the second vision assembly 31.

[0057] Step S10 can include the following steps:

[0058] Control the first gantry 11 to move to the first target position S1 along the second direction b;

[0059] Control the exposure mechanism 51 to move to a plurality of second target positions within the target area P along the first direction a, and form reference points at each second target position, the target area P corresponds to the overlapping area of the first stroke range L1 of the first vision assembly 21 and the second stroke range L2 of the second vision assembly 31 when the second gantry 60 is located at the first target position S1;

[0060] Control the first gantry 11 to move out of the first target position S1.

[0061] The process of controlling the first vision assembly 21 to move to the reference point in step S20 includes:

[0062] Control the second gantry 60 to move to the first target position S1 along the second direction b;

[0063] Control the first vision assembly 21 to move to each reference point along the first direction a;

[0064] Control the first vision assembly 21 to move out of the target area P.

[0065] The process of controlling the second vision assembly 31 to move to the reference point in step S30 includes:

[0066] Control the second vision assembly 31 to move to each reference point along the first direction a.

[0067] The shaft calibration system and the shaft calibration method of the embodiment, through the point mechanism 50 forming a plurality of reference points in the overlapping area, and then identifying the coordinates of each reference point under the coordinate system of the first vision assembly 21 and the second vision assembly 31 respectively, using these coordinate data can accurately calibrate the relative position relationship of the first vision assembly 21 and the second vision assembly 31.

[0068] When the shaft calibration system and the shaft calibration method are applied to the exposure device, the components of the exposure device can be effectively utilized, and special calibration components do not need to be added, thereby saving costs and realizing a simple implementation.

[0069] The above embodiments only express several implementation manners of the present application, which are described in a more specific and detailed manner, but cannot be understood as a limitation on the patent scope of the present application. It should be noted that, for ordinary skilled persons in the art, several modifications and improvements can be made without departing from the concept of the present application, which all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A shafting calibration system, characterized by, The system comprises: a motion track extending along a first direction; a first motion component configured to move along a length direction of the motion track; a second motion component configured to move along the length direction of the motion track, the second motion component only moves within a range where the first motion component is close to the second motion component, and the first motion component and the second motion component are independently driven; a standard ruler parallel to the motion track and having a scale area covering a total travel range of the first motion component and the second motion component; the motion track is configured to be movable above the standard ruler so as to obtain positions of the first motion component and the second motion component on the standard ruler.

2. The shafting calibration system of claim 1, wherein, The first travel range of the first motion component and the second travel range of the second motion component have an overlapping area.

3. The shafting calibration system of claim 1 or 2, wherein, The shaft calibration system is used in an exposure device, the motion track is a gantry movable along a second direction, the second direction is perpendicular to the first direction, the first motion component and the second motion component are respectively a first vision assembly and a second vision assembly, and the standard ruler is fixed at a worktable surface.

4. The shafting calibration system of claim 3, wherein, The first vision assembly is used to obtain a position of an auxiliary lamp, and the second vision assembly is used to obtain a position of a mark point after a workpiece is flipped.

5. A shafting calibration system characterized by, The system comprises: a motion track extending along a first direction; a first vision assembly configured to move along a length direction of the motion track; a second vision assembly configured to move along the length direction of the motion track, the second vision assembly only moves within a range where the first vision assembly is close to the second vision assembly, the first vision assembly and the second vision assembly are independently driven, and a first travel range of the first vision assembly and a second travel range of the second vision assembly have an overlapping area; a point setting mechanism configured to form a plurality of reference points in the overlapping area; the first vision assembly and the second vision assembly respectively identify first coordinates and second coordinates of each of the reference points in a coordinate system of their own motion systems, and determine a relative position relationship between the first vision assembly and the second vision assembly according to the first coordinates and the second coordinates.

6. The shafting calibration system of claim 5, wherein, The shaft calibration system is used in an exposure device, the motion track is a first gantry movable along a second direction, the second direction is perpendicular to the first direction, the point setting mechanism is an exposure mechanism arranged on a second gantry, the second gantry is movable along the second direction, and the exposure mechanism is movable along the first direction relative to the second gantry and forms the reference points on a workpiece.

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