Microscope film thickness measuring platform

Abstract

The utility model discloses a microscope film thickness measuring platform, which belongs to the technical field of measuring platforms and comprises a machine platform, a machine groove is arranged on the machine platform in a penetrating manner, a threaded rod is rotatably arranged in the machine groove, a long displacement block is arranged outside the threaded rod in a threaded manner, and a circular placing block is rotatably arranged on one side of the long displacement block. A plurality of placing grooves are formed in the circular placing block, and the circular placing block is located above the threaded rod; according to the device, the placement groove is formed, due to the placement groove formed in the circular placement block, an arc-shaped film body can be fixedly placed in the placement groove, and due to the fact that the circular placement block can rotate under the driving of the first motor and the circular placement block moves longitudinally when the threaded rod is driven, the arc-shaped film body can be placed in the placement groove; the arc-shaped film body on the placement groove can be comprehensively covered and detected through rotation and movement to a certain degree, measurement errors caused by shape mismatching are avoided, and therefore film thickness data can be more accurately obtained.

Description

Technical Field

[0001] This utility model belongs to the field of measurement platform technology, specifically relating to a microscope film thickness measurement platform. Background Technology

[0002] A film thickness measurement microscope is a precision instrument used to measure the thickness of thin films. It has important applications in various fields such as materials science, electronics industry, and optical manufacturing. This microscope typically combines optical imaging principles with precise measurement techniques to measure the thickness of thin films at the microscopic scale. It can provide high-precision measurement results, helping researchers and engineers understand the physical properties and quality of thin films.

[0003] Traditional film thickness measurement microscopes typically employ platforms designed for planar films, which often mismatch the shape of curved films. This makes it difficult to achieve complete coverage and accurate measurement of curved films, leading to inaccurate data that fails to accurately reflect the film thickness. Secondly, traditional platforms lack adaptive adjustment mechanisms for curved films. Due to the unique shape of curved films, the equipment needs to be able to flexibly adjust the measurement angle and position, a requirement that traditional platforms often cannot meet, limiting their application in curved film measurement. Finally, traditional platforms are complex and inefficient for measuring curved films. The inability to effectively conform to the curved film may necessitate multiple adjustments and measurements, consuming significant time and manpower, increasing measurement costs. Therefore, a new microscope-based film thickness measurement platform is needed to address these issues. Utility Model Content

[0004] The purpose of this invention is to provide a microscope film thickness measurement platform to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a microscope film thickness measurement platform, including a machine base, on which a groove is formed through, a threaded rod is rotatably arranged in the groove, a displacement block is provided on the external thread of the threaded rod, a circular placement block is rotatably arranged on one side of the displacement block, the circular placement block has multiple placement slots, the circular placement block is located above the threaded rod, and a first motor is arranged at the rotatable part of one side of the circular placement block, the first motor is fixedly mounted on the displacement block by a first fixing block.

[0006] By setting up placement slots, the arc-shaped membrane can be fixedly placed on the circular placement block. Driven by the first motor, the circular placement block can rotate, and the threaded rod moves longitudinally along the block. This allows for comprehensive coverage detection of the arc-shaped membrane within the placement slot through rotation and movement, avoiding measurement errors caused by shape mismatch. This results in more accurate membrane thickness data, truly reflecting the thickness of the arc-shaped membrane. This method of adjusting the detection angle and position effectively overcomes the lack of adaptability of traditional platforms, greatly improving the applicability of the detection equipment to arc-shaped membranes of different shapes. Unlike traditional platforms, it eliminates the need for multiple complex adjustments and measurements. Through its mobile design, the detection process can be completed quickly and efficiently, saving significant time and manpower, reducing detection costs, and significantly improving detection efficiency.

[0007] In a preferred embodiment, a positioning slide rod is fixedly installed inside the machine slot, and the displacement block is slidably mounted on the positioning slide rod.

[0008] In a preferred embodiment, a second motor is provided at the rotating part of one end of the threaded rod, and the second motor is fixedly mounted on the front of the machine base by a second fixing block.

[0009] In a preferred embodiment, the lower surface of the machine tool is fixedly provided with multiple support legs.

[0010] In a preferred embodiment, a vertical machine block is provided on the back of the machine tool, and a measuring microscope is provided on the front of the vertical machine block.

[0011] In a preferred embodiment, the measuring microscope is positioned above the circular placement block.

[0012] By setting a positioning slide bar, when the displacement block on the threaded rod is driven by the second motor to perform threaded displacement, the sliding of the displacement block on the positioning slide bar helps to make the movement of the displacement block more stable. In addition, by setting multiple placement slots on the circular placement block, it helps to realize the convenient detection of various arc-shaped membranes.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] This invention, by setting a placement groove, allows the arc-shaped membrane to be fixedly placed on the circular placement block. Driven by a first motor, the circular placement block can rotate, and the threaded rod drives the circular placement block longitudinally. This allows for comprehensive coverage detection of the arc-shaped membrane in the placement groove through rotation and movement, avoiding measurement errors caused by shape mismatch. This results in more accurate membrane thickness data, truly reflecting the thickness of the arc-shaped membrane. This method of adjusting the detection angle and position effectively overcomes the lack of adaptability of traditional platforms, greatly improving the applicability of the detection equipment to arc-shaped membranes of different shapes. Unlike traditional platforms, it eliminates the need for multiple complex adjustments and measurements. Through its mobile design, the detection process can be completed quickly and efficiently, saving significant time and manpower, reducing detection costs, and significantly improving detection efficiency.

[0015] This invention, by setting a positioning slide bar, allows the displacement block on the threaded rod to be driven by the second motor to perform threaded displacement. The sliding of the displacement block on the positioning slide bar helps to make the movement of the displacement block more stable. In addition, by setting multiple placement slots on the circular placement block, it helps to realize the convenient detection of various arc-shaped membranes. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the three-dimensional structure of the present invention;

[0017] Figure 2 This is a schematic diagram of the side view of the three-dimensional structure of this utility model;

[0018] Figure 3 This is a schematic diagram of a partial three-dimensional structure of the present invention.

[0019] In the diagram: 1. Machine base; 2. Machine slot; 3. Threaded rod; 4. Displacement block; 5. Circular placement block; 6. Placement slot; 7. First motor; 8. First fixing block; 9. Positioning slide rod; 10. Second motor; 11. Second fixing block; 12. Support leg; 13. Vertical machine block; 14. Measuring microscope. Detailed Implementation

[0020] The present invention will be further described below with reference to the embodiments.

[0021] The following embodiments are used to illustrate the present invention, but should not be used to limit the scope of protection of the present invention. The conditions in the embodiments can be further adjusted according to specific conditions, and simple improvements to the method of the present invention under the premise of the concept of the present invention are all within the scope of protection claimed by the present invention.

[0022] Please see Figure 1-3This utility model provides a microscope film thickness measurement platform, including a machine base 1. An organic groove 2 is formed through the machine base 1. A threaded rod 3 is rotatably mounted within the groove 2. A displacement block 4 is threaded onto the outer side of the threaded rod 3. A circular placement block 5 is rotatably mounted on one side of the displacement block 4. Multiple placement slots 6 are formed on the circular placement block 5, which is located above the threaded rod 3. A first motor 7 is mounted on one side of the circular placement block 5 at a rotatable position. The first motor 7 is fixed to the displacement block 4 by a first fixing block 8. By providing the placement slots 6, the arc-shaped film can be fixedly placed in the placement slots 6 on the circular placement block 5. Furthermore, the circular placement block 5 can rotate under the drive of the first motor 7. When the threaded rod 3 is driven, the longitudinal movement of the circular placement block 5 allows the arc-shaped membrane on the placement groove 6 to be fully covered and detected through a certain degree of rotation and movement. This avoids measurement errors caused by shape mismatch, thereby enabling more accurate acquisition of membrane thickness data and truly reflecting the membrane thickness of the arc-shaped membrane. This method of adjusting the detection angle and position effectively overcomes the lack of adaptability of traditional platforms, greatly improving the applicability of the detection equipment to arc-shaped membranes of different shapes. Unlike traditional platforms, it does not require multiple complex adjustments and measurements. Through its mobile design, the detection process can be completed quickly and efficiently, saving a lot of time and manpower, reducing detection costs, and significantly improving detection efficiency.

[0023] A positioning slide rod 9 is fixedly installed inside the machine slot 2, and the displacement block 4 is slidably mounted on the positioning slide rod 9.

[0024] A second motor 10 is installed at the rotating part of one end of the threaded rod 3. The second motor 10 is fixedly installed on the front of the machine base 1 by a second fixing block 11.

[0025] Multiple support legs 12 are fixedly installed on the lower surface of the machine base 1.

[0026] A vertical machine block 13 is provided on the back of the machine base 1, and a measuring microscope 14 is provided on the front of the vertical machine block 13.

[0027] The measuring microscope 14 is located above the circular placement block 5. By setting a positioning slide bar 9, when the displacement block 4 on the threaded rod 3 is driven by the second motor 10 to perform threaded displacement, the sliding of the displacement block 4 on the positioning slide bar 9 helps to make the movement of the displacement block 4 more stable. In addition, by setting multiple placement slots 6 on the circular placement block 5, it helps to realize the convenient detection of various arc-shaped membranes.

[0028] The working principle and usage process of this utility model are as follows: First, by setting a placement groove 6, the arc-shaped membrane can be fixedly placed on the circular placement block 5. Driven by the first motor 7, the circular placement block 5 can rotate, and the threaded rod 3 moves longitudinally when the circular placement block 5 is driven. This allows the arc-shaped membrane on the placement groove 6 to achieve full coverage detection through rotation and movement, avoiding measurement errors caused by shape mismatch. This results in more accurate acquisition of membrane thickness data, truly reflecting the membrane thickness of the arc-shaped membrane. Furthermore, this method of adjusting the detection angle and position effectively overcomes the lack of adaptability of traditional platforms. The design addresses the issue of flexibility, significantly improving the applicability of the testing equipment to arc-shaped membranes of various shapes. Unlike traditional platforms, it eliminates the need for multiple complex adjustments and measurements. Through its flexible design, the testing process can be completed quickly and efficiently, saving considerable time and manpower, reducing testing costs, and significantly improving testing efficiency. Furthermore, by setting a positioning slide bar 9, when the displacement block 4 on the threaded rod 3 is driven by the second motor 10 to perform threaded displacement, the sliding of the displacement block 4 on the positioning slide bar 9 helps to make the movement of the displacement block 4 more stable. In addition, by setting multiple placement slots 6 on the circular placement block 5, it is possible to achieve convenient testing of various arc-shaped membranes.

[0029] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A microscope film thickness measurement platform, comprising a machine base (1), characterized in that: A machine slot (2) is opened through the machine base (1). A threaded rod (3) is rotatably arranged in the machine slot (2). A displacement block (4) is arranged on the external thread of the threaded rod (3). A circular placement block (5) is rotatably arranged on one side of the displacement block (4). Multiple placement slots (6) are opened on the circular placement block (5). The circular placement block (5) is located above the threaded rod (3). A first motor (7) is arranged at the rotatable part of one side of the circular placement block (5). The first motor (7) is fixedly arranged on the displacement block (4) by a first fixing block (8).

2. The microscope film thickness measurement platform according to claim 1, characterized in that: The machine slot (2) is fixedly provided with a positioning slide rod (9), and the displacement block (4) is slidably disposed on the positioning slide rod (9).

3. The microscope film thickness measurement platform according to claim 1, characterized in that: A second motor (10) is provided at the rotating part of one end of the threaded rod (3), and the second motor (10) is fixedly mounted on the front of the machine base (1) by a second fixing block (11).

4. The microscope film thickness measurement platform according to claim 1, characterized in that: Multiple support legs (12) are fixedly installed on the lower surface of the machine base (1).

5. The microscope film thickness measurement platform according to claim 1, characterized in that: A vertical machine block (13) is provided on the back of the machine base (1), and a measuring microscope (14) is provided on the front of the vertical machine block (13).

6. The microscope film thickness measurement platform according to claim 5, characterized in that: The measuring microscope (14) is located above the circular placement block (5).

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