Clamp for detecting beam spot quality of electron beam

Abstract

The utility model discloses a fixture for detecting beam spot quality of electron beams, which comprises a base, two step plates and a plurality of clamping mechanisms, the two step plates are welded on the base, and the plurality of clamping mechanisms are arranged on the step plates; the clamping mechanism comprises a fixed plate, a movable plate, a jacking screw rod and a first pressing screw rod, the fixed plate is welded to the step plate, the movable plate is arranged above the fixed plate in an up-down sliding mode, the jacking screw rod which is in contact fit with the lower surface of the movable plate is arranged on the fixed plate, and the first pressing screw rod is arranged on the movable plate. A test plate is placed on the upper surface of the movable plate, the upper surface of the test plate is matched with the bottom end of a first pressing screw rod, and the first pressing screw rod is arranged on a fixed plate of the clamping mechanism of the upper step of the step plate. The clamp for detecting the beam spot quality of the electron beam is simple in structure, practical in function and ingenious in design, and effectively solves the problem that an existing test plate clamp can only test the beam spot quality of the electron beam at one height every time.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of defect detection equipment, especially relates to a clamp for detecting electron beam spot quality. BACKGROUND

[0002] The method of the prior art for testing electron beam spot quality and verifying the active area is to verify the electron beam spot of one height by vacuum extraction, to perform vacuum release after verifying one height, to clamp another test board for vacuum extraction again, and to repeat the above steps. Since the welding chamber needs to be vacuumed and the test board needs to be clamped every time, a large amount of time is consumed, the verification progress is affected, and a large amount of resources such as manpower, water, electricity, and gas are wasted. Therefore, how to develop a clamp for detecting electron beam spot quality has become a problem to be solved by technical personnel in the field. SUMMARY

[0003] The utility model discloses a clamp for detecting electron beam spot quality, which solves the problem that the prior art test board clamp can only test the electron beam spot quality at one height each time.

[0004] To solve the above technical problems, the utility model adopts the following technical scheme:

[0005] The utility model discloses a clamp for detecting electron beam spot quality, which solves the problem that the prior art test board clamp can only test the electron beam spot quality at one height each time.

[0006] Further, the fixed plate is threadedly connected with the jacking screw.

[0007] Further, the fixed plate is threadedly connected with the first pressing screw.

[0008] Further, the stepped plate is provided with a weight-reducing hole.

[0009] Further, the bottom surface of the base is provided with four casters.

[0010] Further, the guiding mechanism comprises a first sliding rod and a second sliding rod, top ends of the first sliding rod and the second sliding rod are fixedly arranged on the lower surface of the movable plate, and the fixed plate is provided with through holes matched with the first sliding rod and the second sliding rod.

[0011] Further, the caster adopts a universal wheel with a brake mechanism.

[0012] Compared with the prior art, the beneficial technical effects of the utility model are:

[0013] The utility model discloses a fixture for detecting electron beam spot quality, which is provided with multiple clamping mechanisms of different heights on the stepped plate, and can clamp and fix multiple test plates of different heights at the same time, so that the evacuation of vacuum can verify the electron beam spot of multiple heights in one time, greatly saving the evacuation time of vacuum for verifying the electron beam spot in one time, and saving manpower and material resources at the same time. The base of the fixture for detecting electron beam spot quality is provided with universal wheels with brake mechanisms on the bottom surface, ensuring the flexibility of the tooling. In general, the fixture for detecting electron beam spot quality has simple structure, practical function, and ingenious design, and effectively solves the problem that the existing test plate fixture can only test the electron beam spot quality at one height at a time. BRIEF DESCRIPTION OF DRAWINGS

[0014] The utility model will be further described in connection with the drawings:

[0015] Figure 1 It is right view for the fixture for detecting electron beam spot quality of the utility model;

[0016] Figure 2 It is back view for the fixture for detecting electron beam spot quality of the utility model;

[0017] Figure 3 It is back view (another embodiment) for the fixture for detecting electron beam spot quality of the utility model. Mark for explaining the drawing: 1, base;101, caster;2, stepped plate;201, weight-reducing hole;3, test plate;4, clamping mechanism;401, fixed plate;402, movable plate;403, first sliding rod;404, second sliding rod;405, jacking screw;406, first pressing screw;407, second pressing screw. DETAILED DESCRIPTION

[0018] As Figure 1 And Figure 2As shown, a clamp for detecting electron beam spot quality, including base 1, stepped plate 2 and clamping mechanism 4, two stepped plates 2 are welded on the base 1, the stepped plate 2 is provided with weight reduction hole 201. The stepped plate 2 is provided with a plurality of clamping mechanisms 4 of different heights. The bottom surface of the base 1 is provided with casters 101, and the number of the casters 101 is four. The casters 101 adopt universal wheels with brake mechanisms.

[0019] The utility model discloses a clamp for detecting electron beam spot quality's base 1 bottom surface is provided with the universal wheel with brake mechanism, has guaranteed the flexibility of tooling.

[0020] The clamping mechanism 4 includes fixed plate 401, movable plate 402, jacking screw 405 and first pressing screw 406, the fixed plate 401 is welded on the current stepped plate 2, the movable plate 402 is slidably arranged above the fixed plate 401 through the guide mechanism, the guide mechanism includes first slide 403 and second slide 404, the top of first slide 403 and second slide 404 is fixedly arranged on the lower surface of movable plate 402, and the fixed plate 401 is provided with through hole matched with first slide 403 and second slide 404.

[0021] The fixed plate 401 is provided with jacking screw 405 in contact with the lower surface of movable plate 402, and the fixed plate 401 is threadedly matched with the jacking screw 405.

[0022] The upper surface of movable plate 402 is placed test plate 3, and the upper surface of test plate 3 is matched with the bottom end of first pressing screw 406, and the first pressing screw 406 is arranged on the fixed plate 401 of the clamping mechanism 4 of one step of the stepped plate 2. The fixed plate 401 is threadedly matched with the first pressing screw 406. The height of test plate 3 can be finely adjusted by adjusting the height of jacking screw 405 and first pressing screw 406.

[0023] The utility model discloses a clamp for detecting electron beam spot quality, through setting up a plurality of clamping mechanisms 4 of different heights on the stepped plate 2, realizes the clamping of a plurality of test plates 3 of different heights for verification simultaneously, thereby making a plurality of heights of electron beam spot can be verified in a vacuum pumping and exhausting time, and the manpower and material resources are saved.

[0024] As Figure 3As shown, in another embodiment, the clamping mechanism 4 is not provided on the stepped plate 2. The test plate 3 is directly placed on the current fixing plate 401, the upper surface of the fixing plate 401 is matched with the second pressing screw 407, the second pressing screw 407 is provided on the fixing plate 401 of the upper layer, and the second pressing screw 407 is matched with the fixing plate 401 in a threaded manner.

[0025] The above-described embodiments are only used to describe the preferred modes of the present application, and do not limit the scope of the present application. Without departing from the design spirit of the present application, various modifications and improvements of the technical solutions of the present application made by those skilled in the art shall fall within the protection scope determined by the claims of the present application.

Claims

1. A jig for detecting the quality of an electron beam spot, characterized by: The utility model provides a test board clamping device, including base (1), step board (2) and clamping mechanism (4), two step board (2) are welded on base (1), be provided with a plurality of clamping mechanism (4) on step board (2);The clamping mechanism (4) includes fixed plate (401), movable plate (402), jacking screw (405) and first pressure screw (406), the fixed plate (401) is welded on step board (2), the movable plate (402) is set up on the top of fixed plate (401) by guiding mechanism and can slide up and down, the fixed plate (401) is provided with jacking screw (405) with the lower surface contact cooperation of movable plate (402), the upper surface of movable plate (402) places test board (3), the upper surface of test board (3) cooperates with the bottom end of first pressure screw (406), and first pressure screw (406) is set up in the fixed plate (401) of clamping mechanism (4) of a layer of step of step board (2).

2. A clamp for detecting the quality of an electron beam spot according to claim 1, characterized in that: The fixed plate (401) is in threaded cooperation with the jacking screw (405).

3. The clamp for detecting the quality of an electron beam spot according to claim 1, characterized in that: The fixed plate (401) is in threaded cooperation with the first pressure screw (406).

4. The fixture for detecting electron beam spot quality according to claim 1, wherein: The step board (2) is provided with a weight-reducing hole (201).

5. The fixture for detecting electron beam spot quality according to claim 1, wherein: The bottom surface of the base (1) is provided with four casters (101).

6. The fixture for detecting electron beam spot quality according to claim 1, characterized in that: The guiding mechanism includes a first slide rod (403) and a second slide rod (404), the top ends of the first and second slide rods (403, 404) are fixedly arranged on the lower surface of the movable plate (402), and the fixed plate (401) is provided with through holes matched with the first and second slide rods (403, 404).

7. The clamp for detecting the quality of an electron beam spot according to claim 5, characterized in that: The caster (101) is a universal wheel with a brake mechanism.

Images