Furnace door lifting sealing structure of vacuum equipment

Abstract

The utility model belongs to the technical field of furnace door sealing, and particularly relates to a vacuum equipment furnace door lifting sealing structure which comprises a motor, a lifting machine is fixedly installed at the output end of the motor, a supporting frame is arranged on the surface of the output end of the lifting machine, and a sealing device is arranged on the supporting frame. An anti-falling mechanism and an auxiliary supporting frame are fixedly installed on the surface of the outer side of the supporting frame, and a guide rail is arranged on the surface of the other side of the supporting frame. The lifting machines on the two sides of the supporting frame are controlled in a linkage mode through a motor, synchronous lifting motion is achieved, a push plate is pushed and pulled to drive the furnace door to achieve opening and closing sealing actions of the vacuum furnace door, when the furnace door is closed, the motor drives the lifting machines to move downwards and then drives the push plate to move downwards, and when the furnace door is lowered to the Z-axis height of closing of the furnace door, a guide wheel just falls on a furnace door guide rod. And then the furnace door is driven to be pushed forwards and pressed tightly through the four push rods, and the sealing effect between the furnace door and the furnace body flange is achieved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of furnace door sealing, and particularly relates to a vacuum equipment furnace door lifting sealing structure. BACKGROUND

[0002] The ion implanter often needs to vacuum the cavity inside the vacuum cavity to complete the process, but it is not always in a vacuum state. After the process is completed, the sealing door of the vacuum cavity needs to be opened to take out the process sample, thereby exposing the internal space of the vacuum cavity. The sealing door is mostly of a conventional hinge structure, and the corresponding movement track during opening and closing is an arc, which is not conducive to automatic control. The opening and closing mode is usually manual opening after the vacuum cavity is filled with air and returns to atmospheric pressure, and then the process sample inside the cavity is taken out.

[0003] A patent with publication number CN 111042691 A discloses a door plate, a door plate lifting mechanism and a door plate pressing mechanism. The door plate lifting mechanism includes two lifting rails and two lifting drives. The two lifting rails are located on both sides of the door of the vacuum cavity. A sliding assembly is provided on the lifting rail. The fixed end of each lifting drive is fixed to one side of each lifting rail. The driving end of each lifting drive is connected to each sliding assembly and drives the sliding assembly to move on the lifting rail. The door plate pressing mechanism includes two horizontal extension drives. Each horizontal extension drive is fixed to each sliding assembly. The driving end of the door plate is fixed to the two horizontal extension drives. The present application has the advantages of simple structure, small space occupation and high automation degree.

[0004] In the prior art, the existing sealing door is closed to the surface of the furnace body by extrusion when sealing. In order to ensure that the inside of the furnace body is in a vacuum environment, a sealing strip is provided between the furnace doors to increase the sealing performance. However, when the furnace body and the furnace door are closed, the high temperature inside will cause slight deformation of the furnace door, resulting in gaps in the sealing strip and insufficient sealing performance of the aluminum door.

[0005] Therefore, a vacuum equipment furnace door lifting sealing structure is proposed to solve the above problems. UTILITY MODEL CONTENTS

[0006] In order to make up for the shortcomings of the prior art and solve the above problems, a vacuum equipment furnace door lifting sealing structure is proposed.

[0007] The utility model solves its technical problem adopts the technical scheme that the utility model discloses a kind of vacuum equipment furnace door lifting sealing structure, including motor, fixed mounting is equipped with lift on the output end of motor, support frame is set on the output end surface of lift, fixed mounting is equipped with anti-falling mechanism and auxiliary support frame on the outside surface of support frame, the other side surface of support frame is provided with guide rail, fixed mounting is equipped with push rod on the outside surface of support frame, guide wheel assembly is set on the output end of push rod, push plate is set on the outside surface of guide rail, vacuum furnace door is fixedly connected on the outside surface of push plate, fitting surface door is set on the outside surface of vacuum furnace door, furnace body is set on the outside surface of support frame, guide wheel shaft that is movably overlapped at the bottom surface of vacuum furnace door is fixedly installed on the outside surface of furnace body.

[0008] Preferably, the outside surface of the support frame and located on the top edge position of push rod is provided with anti-falling plate, and the output end outside surface of the anti-falling plate is provided with door opening limiting block.

[0009] Preferably, the outside surface of the fitting surface door is fixedly connected with high-temperature-resistant layer, and the outside surface of the fitting surface door and located on the peripheral edge position is provided with sealing groove.

[0010] Preferably, the inside wall surface of the sealing groove is fixedly connected with sealing ring

[0011] Preferably, the outside surface of the fitting surface door and located on the peripheral edge position is fixedly connected with fluorine rubber O-shaped ring, and the outside surface of the fluorine rubber O-shaped ring is movably attached to the outside surface of the furnace body.

[0012] The utility model has the advantages of:

[0013] The utility model provides a kind of vacuum equipment furnace door lifting sealing structure, when furnace door is attached to furnace body surface, with furnace door constantly extruding into furnace body interior, further make the gap between furnace body and furnace door seal processing, simultaneously cooperate fluorine rubber O-shaped ring on the inside wall surface of sealing groove when attaching to furnace body surface, will be compressed extrusion deformation, the fluorine rubber O-shaped ring after deformation will diffuse extension to all around, further to the outermost gap of furnace body and furnace door Secondary extrusion sealing treatment, the effect of double-layer sealing treatment of furnace body and furnace door using fluorine rubber O-shaped ring is achieved.

[0014] The utility model provides a vacuum equipment furnace door lifting sealing structure cooperates Z axle lifting control motor, lift and guide rail sliding block, through a set of motor linkage control support frame both sides lift, synchronous lifting movement, push and pull push plate drives furnace door to realize vacuum furnace door opening, closing sealing action, when furnace door closes, motor drives lift downward movement, then drives push plate downward movement, when furnace door falls to furnace door closing Z axle height, guide wheel will just fall on furnace door guide bar, then drives furnace door to push forward, passes through 4 push rod and tight furnace door, realizes the effect between furnace door and furnace body flange sealing,

[0015] The utility model provides a vacuum equipment furnace door lifting sealing structure, when furnace body breaks empty furnace door needs to open the door, motor drives lift upward movement, push plate moves backward through push rod, realizes furnace door and furnace body flange contact, when furnace door limit block restricts furnace door opening before and after position, then drives guide wheel upward movement reaches Z axle opening position, when furnace front cavity needs to maintain and repair, furnace door is in the opening position, and the anti -fall mechanism cylinder stretches out, realizes the effect of safety protection. BRIEF DESCRIPTION OF DRAWINGS

[0016] The drawings described herein are used to provide further understanding of the utility model and constitute a part of this application, the illustrative embodiment of the utility model and its explanation are used to explain the utility model, and do not constitute undue limitation on the utility model. In the drawings:

[0017] Figure 1 It is the three-dimensional structure schematic diagram of the utility model;

[0018] Figure 2 It is the three-dimensional structure schematic diagram of vacuum furnace door closing in the utility model;

[0019] Figure 3 It is the three-dimensional structure schematic diagram of vacuum furnace door opening in the utility model;

[0020] Figure 4 It is the three-dimensional structure schematic diagram of fluorine rubber O type ring in the utility model;

[0021] Figure 5 It is the three-dimensional structure schematic diagram of the adhesion surface door in the utility model.

[0022] Legend: 1, motor, 2, lift, 3, anti -fall mechanism, 4, guide rail, 5, push plate, 6, vacuum furnace door, 7, support frame, 8, auxiliary support frame, 9, opening limit block, 10, push rod, 11, guide wheel assembly, 12, guide wheel shaft, 13, furnace body, 14, anti -fall plate, 15, adhesion surface door, 151, sealing groove, 152, high temperature resistant layer, 153, sealing ring, 155, fluorine rubber O type ring. DETAILED DESCRIPTION

[0023] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described, obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0024] The specific embodiments are given below.

[0025] Please refer to Figure 1 - Figure 3 And Figure 5 The utility model provides a vacuum equipment furnace door lifting sealing structure, including motor 1, the output of motor 1 is fixedly installed with elevator 2, the output surface of elevator 2 is provided with support frame 7, the outer side surface of support frame 7 is fixedly installed with anti -fall mechanism 3 and auxiliary support frame 8, the other side surface of support frame 7 is provided with guide rail 4, the outer side surface of support frame 7 is fixedly installed with push rod 10, the output of push rod 10 is provided with guide wheel assembly 11, the outer side surface of guide rail 4 is provided with push plate 5, the outer side surface of push plate 5 is fixedly connected with vacuum furnace door 6, the outer side surface of vacuum furnace door 6 is provided with the surface door 15 that sticks, the outer side surface of support frame 7 is provided with furnace body 13, the outer side surface of furnace body 13 is fixedly installed with the guide wheel shaft 12 of movable lap in the bottom surface of vacuum furnace door 6;

[0026] When working, cooperate Z axle lifting control motor 1, elevator 2 and guide rail 4 slider, through a set of motor 1 linkage control support frame 7 both sides elevator 2, synchronous lifting movement, push and pull push plate 5 drive furnace door realizes vacuum furnace door 6 door, door sealing action, when furnace door, motor 1 drives elevator 2 to move downward, then drive push plate 5 to move downward, when furnace door falls to furnace door Z axle height, guide wheel will just fall on furnace door guide rod, then drive furnace door to push forward, through 4 push rod 10 tight furnace door, realize the effect between furnace door and furnace body 13 flange sealing;

[0027] When furnace body 13 breaks the furnace door and needs to open, motor 1 drives elevator 2 to move upward, push plate 5 moves backward through push rod 10, realizes furnace door and furnace body 13 flange to separate contact, then drive guide wheel to move upward to reach Z axle open position, when furnace front cavity needs to maintain and repair, furnace door is in open position, anti -fall mechanism 3 cylinder extends, realizes the effect of safety protection.

[0028] Further, as Figures 1 to 5As shown, the outer side surface of the support frame 7 and located at the top edge position of the push rod 10 is provided with a falling prevention plate 14, the output end outer side surface of the falling prevention plate 14 is provided with an opening door limiting block 9, the outer side surface of the surface fitting door 15 is fixedly connected with a high-temperature resistant layer 152, the outer side surface of the surface fitting door 15 and located at the four peripheral edge positions is provided with a sealing groove 151, the inner side wall surface of the sealing groove 151 is fixedly connected with a sealing ring 153, the outer side surface of the surface fitting door 15 and located at the four peripheral edge positions is fixedly connected with a fluorine rubber O-shaped ring 155, and the outer side surface of the fluorine rubber O-shaped ring 155 is movably fitted on the outer side surface of the furnace body 13.

[0029] When working, when the furnace door is fitted to the surface of the furnace body 13, as the furnace door is continuously pressed into the inside of the furnace body 13, the gap between the furnace body 13 and the furnace door is sealed, and at the same time, the fluorine rubber O-shaped ring 155 on the inner side wall surface of the sealing groove 151 is compressed and deformed when being fitted to the surface of the furnace body 13, the deformed fluorine rubber O-shaped ring 155 is diffused and extended to the periphery, thereby performing secondary extrusion sealing treatment on the outermost gap between the furnace body 13 and the furnace door, and the fluorine rubber O-shaped ring 155 is used to perform double-layer sealing treatment on the furnace body 13 and the furnace door.

[0030] Working principle: cooperate with the Z-axis lifting control motor 1, the elevator 2 and the guide rail 4 slider, through a set of motor 1 linkage control support frame 7 both sides of the elevator 2, synchronous lifting movement, push-pull push plate 5 drive furnace door to realize the vacuum furnace door 6 opening, closing sealing action, when the furnace door is closed, the motor 1 drives the elevator 2 to move downward, and then drives the push plate 5 to move downward, when the furnace door is lowered to the Z-axis height of the closed furnace door, the guide wheel will just fall on the furnace door guide rod, and then drive the furnace door to push forward, through the 4 push rods 10 to press the furnace door, realize the sealing effect between the furnace door and the furnace body 13 flange;

[0031] When the furnace body 13 breaks the furnace door and needs to be opened, the motor 1 drives the elevator 2 to move upward, the push plate 5 moves backward through the push rod 10, realizes the furnace door and the furnace body 13 flange to be separated from contact, at this time, the furnace door limiting block limits the front and rear positions of the furnace door, and then drives the guide wheel to move upward to the Z-axis opening position; when the furnace front cavity needs to be maintained and repaired, the furnace door is in the opening position, the falling prevention mechanism 3 cylinder is extended, and the safety protection effect is realized;

[0032] When the door is attached to the surface of the furnace body 13, as the door is continuously pressed into the interior of the furnace body 13, the gap between the furnace body 13 and the door is sealed, and the fluorine rubber O-ring 155 on the inner side wall of the sealing groove 151 is compressed and deformed when attached to the surface of the furnace body 13, and the deformed fluorine rubber O-ring 155 is diffused and extended in all directions, thereby performing secondary extrusion sealing on the outermost gap between the furnace body 13 and the door, and the fluorine rubber O-ring 155 performs double sealing on the furnace body 13 and the door.

[0033] The basic principle, main features and advantages of the present application are shown and described above. Those skilled in the art should understand that the present application is not limited by the above examples, and the above examples and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application.

Claims

1. A vacuum equipment furnace door lifting seal structure comprising a motor (1), characterized in that: The output end of the motor (1) is fixedly installed with an elevator (2), the output end surface of the elevator (2) is provided with a support frame (7), the outer side surface of the support frame (7) is fixedly installed with an anti-falling mechanism (3) and an auxiliary support frame (8), the other side surface of the support frame (7) is provided with a guide rail (4), the outer side surface of the support frame (7) is fixedly installed with a push rod (10), the output end of the push rod (10) is provided with a guide wheel assembly (11), the outer side surface of the guide rail (4) is provided with a push plate (5), the outer side surface of the push plate (5) is fixedly connected with a vacuum furnace door (6), the outer side surface of the vacuum furnace door (6) is provided with a matching surface door (15), the outer side surface of the support frame (7) is provided with a furnace body (13), the outer side surface of the furnace body (13) is fixedly installed with a guide wheel shaft (12) movably lapped on the bottom surface of the vacuum furnace door (6).

2. The vacuum equipment door lifting seal structure according to claim 1, characterized in that: The outer side surface of the support frame (7) and located at the top edge position of the push rod (10) is provided with an anti-falling plate (14), the output end outer side surface of the anti-falling plate (14) is provided with an opening door limiting block (9).

3. A vacuum equipment door lift seal structure according to claim 2, characterized in that: The outer side surface of the matching surface door (15) is fixedly connected with a high-temperature-resistant layer (152), the outer side surface of the matching surface door (15) and located at the four peripheral edge positions is provided with a sealing groove (151).

4. The vacuum equipment door lift seal structure according to claim 3, wherein: The inner side wall surface of the sealing groove (151) is fixedly connected with a sealing ring (153).

5. The vacuum equipment door lift seal structure of claim 1, wherein: The outer side surface of the matching surface door (15) and located at the four peripheral edge positions is fixedly connected with a fluorine rubber O-shaped ring (155), the outer side surface of the fluorine rubber O-shaped ring (155) is movably lapped on the outer side surface of the furnace body (13).

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