Vision-based wafer cassette rapid measuring machine

Abstract

The utility model discloses a wafer cassette rapid measuring machine based on vision, which comprises a base, an upper vision module is arranged on a fixed plate, an electric rotating table is fixedly arranged at the top of the base and right below the upper vision module, a placing plate for placing a wafer cassette is fixedly arranged at the tops of a plurality of groups of fixed columns, and the upper vision module is arranged on the upper vision module. The top of the placing plate is provided with a plurality of groups of product positioning columns used for positioning wafer cassettes. A three-axis movement mechanism is arranged at the top of the base, and a side vision module is arranged on the three-axis movement mechanism; the rapid measuring machine for the wafer box is rapid measuring equipment integrating motion and vision, can rapidly complete measurement of the boundary dimension of the wafer box, improves the measurement efficiency, can reduce the measurement difficulty, greatly improves the production efficiency, adopts a non-contact measurement technology, does not need to be in direct contact with the wafer box, and reduces the production cost. Therefore, errors and abrasion caused by contact are avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer box measurement technical field, concretely is the wafer box fast measurement machine based on vision. BACKGROUND

[0002] Wafer box is mainly used for placing and conveying wafer, and the wafer box is indispensable equipment in wafer processing process, is used for supporting, protecting and transporting wafer, it can protect wafer in different working environment, avoid its damage, ensure the integrity and cleanliness of wafer, after wafer box production, the precision requirement measurement of wafer box is needed.

[0003] The precision requirement of semiconductor industry to wafer box is higher and higher, and many sizes need to be controlled, and the conventional measurement mode is to measure size one by one by contact three-dimensional, there is the condition of low measurement efficiency and high measurement cost, therefore we need to propose the wafer box fast measurement machine based on vision. UTILITY MODEL CONTENT

[0004] The utility model discloses a wafer box fast measurement machine based on vision can quickly complete the measurement of wafer box external dimension, improves the measurement efficiency, and can reduce the measurement difficulty, greatly improves the production efficiency, and adopts non-contact measurement technology, and the equipment does not need to be directly contacted with wafer box, thereby avoiding the error and abrasion caused by contact, to solve the problem in the background art.

[0005] To achieve the above object, the utility model provides the following technical scheme:

[0006] Wafer box fast measurement machine based on vision, including base, the top of base is fixedly installed with two groups of support columns in symmetry, the top of two groups of support columns is fixedly installed with fixed plate, is provided with upper visual module on the fixed plate;

[0007] The top of base is fixedly installed with electric rotating table below the upper visual module, the top of electric rotating table is fixedly installed with bottom plate, the top of bottom plate is fixedly installed with multiple fixed columns, the top of multiple fixed columns is fixedly installed with the placing plate for wafer box placement, the top of placing plate is provided with multiple product positioning columns for wafer box positioning;

[0008] The top of base is equipped with three-axis motion mechanism, and the side visual module is arranged on the three-axis motion mechanism.

[0009] Preferably, the upper visual module includes a first camera and a first lens fixedly installed on the first camera, the top of the fixed plate is fixedly installed with multiple first camera seats, the first camera and the first lens are provided with multiple groups, and the first camera is fixedly installed on the first camera seat.

[0010] Preferably, the bottom of the fixing plate is fixedly provided with a plurality of groups of first mounting supports corresponding to the first camera, and each of the plurality of groups of first mounting supports is fixedly provided with a first light source.

[0011] Preferably, the center of the placing plate is provided with a avoiding hole, the top of the bottom plate is fixedly provided with a mounting seat, and the top of the mounting seat is fixedly provided with a surface light source, which is arranged below the avoiding hole.

[0012] Preferably, the top of the placing plate is fixedly provided with a product auxiliary positioning block for wafer box positioning.

[0013] Preferably, the top of the base is fixedly provided with a plurality of groups of second light sources for providing light for the upper visual module.

[0014] Preferably, the three-axis motion mechanism comprises a motor base, a driving motor, a first moving seat, a guide rail, a sliding block, a lead screw, a mounting plate, a first electric sliding table, a second moving seat, a second electric sliding table and a second camera seat, the motor base is fixedly installed on the top of the base, the driving motor is fixedly installed on the side of the motor base, the output shaft of the driving motor is fixedly connected with the lead screw through a shaft coupling, the first moving seat is threadedly installed on the lead screw, the guide rail is fixedly installed on the top of the base, the sliding block is fixedly installed on the bottom of the first moving seat, and the sliding block is slidably installed on the guide rail.

[0015] Preferably, the mounting plate is fixedly installed on the top of the first moving seat, the first electric sliding table is fixedly installed on the side of the mounting plate, the second moving seat is fixedly installed on the sliding block of the first electric sliding table, the second electric sliding table is fixedly installed on the side of the second moving seat, and the second camera seat is fixedly installed on the sliding block of the second electric sliding table.

[0016] Preferably, the side visual module comprises a third light source, a second camera and a second lens fixedly installed on the second camera, the second camera is fixedly installed on the bottom of the second camera seat, and the third light source is fixedly installed on the second camera seat.

[0017] Compared with the prior art, the wafer box rapid measurement machine has the advantages that:

[0018] The wafer box rapid measurement machine is a rapid measurement equipment integrating motion and vision, can quickly complete the measurement of the wafer box shape size, improves the measurement efficiency, reduces the measurement difficulty, greatly improves the production efficiency, and adopts the non-contact measurement technology, so that the equipment does not need to be directly contacted with the wafer box, thereby avoiding the error and wear caused by contact. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a structural schematic view of the utility model.

[0020] Figure 2 It is one of the local structure schematic view of the utility model;

[0021] Figure 3 It is the second local structure schematic view of the utility model;

[0022] Figure 4 It is the structure schematic view of the fixed plate and the upper visual module of the utility model;

[0023] Figure 5 It is the structure schematic view of the three-axis motion mechanism and the side visual module of the utility model;

[0024] Figure 6 It is the structure schematic view of the bottom plate, the placing plate and the product auxiliary positioning block of the utility model.

[0025] In the drawing: 1, base; 2, support column; 3, fixed plate; 4, first camera; 5, first lens; 6, first mounting bracket; 7, first light source; 8, electric rotating table; 9, bottom plate; 10, fixed column; 11, placing plate; 12, area light source; 13, product positioning column; 14, product auxiliary positioning block; 15, mounting seat; 16, second light source; 17, motor base; 18, drive motor; 19, first moving seat; 20, guide rail; 21, sliding block; 22, mounting plate; 23, first electric sliding table; 24, second moving seat; 25, second electric sliding table; 26, second camera seat; 27, third light source; 28, screw rod; 29, second camera; 30, second lens. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0027] Please refer to Figures 1-6 The utility model provides a technical scheme:

[0028] The wafer box rapid measurement machine based on vision includes the base 1, the top of the base 1 is symmetrically fixedly installed with two groups of support columns 2, the top of two groups of support columns 2 is fixedly installed with the fixed plate 3, and the fixed plate 3 is provided with an upper visual module;

[0029] The top of the base 1 is fixedly installed with an electric rotating table 8 directly below the upper visual module, the top of the electric rotating table 8 is fixedly installed with a bottom plate 9, the top of the bottom plate 9 is fixedly installed with a plurality of fixed columns 10, the top of the plurality of fixed columns 10 is fixedly installed with a placing plate 11 for placing a wafer box, and the top of the placing plate 11 is provided with a plurality of product positioning columns 13 for positioning the wafer box.

[0030] The top of the base 1 is provided with a three-axis motion mechanism, and the three-axis motion mechanism is provided with a side visual module.

[0031] In an optional embodiment, the upper visual module includes a first camera 4 and a first lens 5 fixedly installed on the first camera 4, the top of the fixed plate 3 is fixedly installed with a plurality of first camera seats, the first camera 4 and the first lens 5 are each provided with a plurality of groups, and the first camera 4 is fixedly installed on the first camera seat.

[0032] It should be noted that the first camera 4 and the first lens 5 cooperate to detect the size of the upper end face of the wafer box.

[0033] In an optional embodiment, the bottom of the fixed plate 3 is fixedly installed with a plurality of first installation supports 6 corresponding to the first camera 4, and the plurality of first installation supports 6 are each fixedly installed with a first light source 7.

[0034] It should be noted that the first light source 7 is provided to provide a light source for the upper visual module and assist optical imaging.

[0035] In an optional embodiment, the center of the placing plate 11 is provided with a relief hole, the top of the bottom plate 9 is fixedly installed with a mounting seat 15, the top of the mounting seat 15 is fixedly installed with a surface light source 12, and the surface light source 12 is arranged below the relief hole.

[0036] It should be noted that the surface light source 12 is provided to provide a light source for the upper visual module and assist optical imaging.

[0037] In an optional embodiment, the top of the placing plate 11 is fixedly installed with a product auxiliary positioning block 14 for positioning the wafer box.

[0038] It should be noted that the product auxiliary positioning block 14 is provided to position the wafer box position and prevent the wafer box position from deviating.

[0039] In an optional embodiment, the top of the base 1 is fixedly installed with a plurality of second light sources 16 for providing illumination for the upper visual module.

[0040] It should be noted that the second light source 16 can be used to provide light source for the upper visual module to assist its optical imaging.

[0041] In an optional embodiment: the three-axis movement mechanism includes motor seat 17, drive motor 18, first moving seat 19, guide rail 20, sliding block 21, screw rod 28, mounting plate 22, first electric sliding table 23, second moving seat 24, second electric sliding table 25 and second camera seat 26, the motor seat 17 is fixedly installed on the top of the base 1, the drive motor 18 is fixedly installed on the side of the motor seat 17, the output shaft of the drive motor 18 is fixedly connected with the screw rod 28 through the shaft coupling, the first moving seat 19 is screwed on the screw rod 28, the guide rail 20 is fixedly installed on the top of the base 1, the sliding block 21 is fixedly installed on the bottom of the first moving seat 19, and the sliding block 21 is slidably installed on the guide rail 20.

[0042] It should be noted that the guide rail 20 and the sliding block 21 can guide and position the first moving seat 19, so that the first moving seat 19 can stably drive the side visual module to move.

[0043] In an optional embodiment: the mounting plate 22 is fixedly installed on the top of the first moving seat 19, the first electric sliding table 23 is fixedly installed on the side of the mounting plate 22, the second moving seat 24 is fixedly installed on the sliding block of the first electric sliding table 23, the second electric sliding table 25 is fixedly installed on the side of the second moving seat 24, and the second camera seat 26 is fixedly installed on the sliding block of the second electric sliding table 25.

[0044] It should be noted that the motor seat 17, the drive motor 18, the first moving seat 19, the screw rod 28 and the mounting plate 22 can be used for left and right movement of the side visual module, the first electric sliding table 23 and the second moving seat 24 can be used for up and down movement of the side visual module, and the second electric sliding table 25 and the second camera seat 26 can be used for front and back movement of the side visual module, so as to facilitate visual imaging of the side visual module to detect product features.

[0045] In an optional embodiment: the side visual module includes third light source 27, second camera 29 and second lens 30 fixedly installed on the second camera 29, the second camera 29 is fixedly installed on the bottom of the second camera seat 26, and the third light source 27 is fixedly installed on the second camera seat 26.

[0046] It should be noted that the second camera 29 and the second lens 30 can cooperate to complete the detection of the side dimension of the wafer box, and the third light source 27 can provide light source for the side visual module.

[0047] In specific use, firstly, the wafer box is placed on the top of the placing plate 11, the product positioning column 13 is contacted with the side edge of the wafer box, and the product auxiliary positioning block 14 can be used for accurately positioning the position of the product;

[0048] The upper visual module is started, the size detection of the upper end surface of the wafer box can be completed through the upper visual module, the first light source 7, the area light source 12 and the second light source 16 provide light sources for the upper visual module on the top, and optical imaging is assisted, after the size detection of the upper end surface of the wafer box, the electric rotating table 8 is started, the bottom plate 9 can be adjusted through the electric rotating table 8, when the bottom plate 9 is adjusted, the wafer box can be rotated through the fixed column 10 and the placing plate 11, so that the side surface of the wafer box facing the side edge visual module can be switched and adjusted, the third light source 27 can provide light sources for the side edge visual module, and the size detection of the side surface of the wafer box can be completed through the side edge visual module one by one.

[0049] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, the scope of the utility model is defined by the appended claims and its equivalents.

Claims

1. A vision-based wafer cassette rapid measurement machine, comprising a base (1), characterized in that: The top of the base (1) is symmetrically fixed with two sets of support columns (2), and the top of the two sets of support columns (2) is fixed with a fixing plate (3), and the fixing plate (3) is provided with an upper vision module. An electric rotating stage (8) is fixedly installed on the top of the base (1) directly below the upper visual module. A base plate (9) is fixedly installed on the top of the electric rotating stage (8). Multiple sets of fixing columns (10) are fixedly installed on the top of the base plate (9). A placement plate (11) for placing wafer cassettes is fixedly installed on the top of the multiple sets of fixing columns (10). Multiple sets of product positioning columns (13) for positioning wafer cassettes are opened on the top of the placement plate (11). The base (1) is provided with a three-axis motion mechanism on its top, and a side vision module is provided on the three-axis motion mechanism.

2. The vision-based wafer cassette rapid measurement machine according to claim 1, characterized in that: The upper vision module includes a first camera (4) and a first lens (5) fixedly mounted on the first camera (4). Multiple sets of first camera mounts are fixedly mounted on the top of the fixing plate (3). Multiple sets of the first camera (4) and the first lens (5) are provided. The first camera (4) is fixedly mounted on the first camera mount.

3. The vision-based wafer cassette rapid measurement machine according to claim 2, characterized in that: The bottom of the fixed plate (3) is fixedly installed with multiple sets of first mounting brackets (6) corresponding to the first camera (4), and a first light source (7) is fixedly installed on each of the multiple sets of first mounting brackets (6).

4. The vision-based wafer cassette rapid measurement machine according to claim 1, characterized in that: The placement plate (11) has a clearance hole in the center, and a mounting base (15) is fixedly installed on the top of the base plate (9). A surface light source (12) is fixedly installed on the top of the mounting base (15), and the surface light source (12) is located below the clearance hole.

5. The vision-based wafer cassette rapid measurement machine according to claim 1, characterized in that: The top of the placement plate (11) is fixedly equipped with a product auxiliary positioning block (14) for positioning the wafer cassette.

6. The vision-based wafer cassette rapid measurement machine according to claim 1, characterized in that: Multiple sets of second light sources (16) for providing illumination to the upper visual module are fixedly installed on the top of the base (1).

7. The vision-based wafer cassette rapid measurement machine according to claim 1, characterized in that: The three-axis motion mechanism includes a motor base (17), a drive motor (18), a first movable base (19), a guide rail (20), a slider (21), a lead screw (28), a mounting plate (22), a first electric slide (23), a second movable base (24), a second electric slide (25), and a second camera base (26). The motor base (17) is fixedly installed on the top of the base (1), the drive motor (18) is fixedly installed on the side of the motor base (17), and the output shaft of the drive motor (18) is fixedly connected to the lead screw (28) through a coupling. The first movable base (19) is threaded onto the lead screw (28), the guide rail (20) is fixedly installed on the top of the base (1), and the slider (21) is fixedly installed on the bottom of the first movable base (19). The slider (21) is slidably installed on the guide rail (20).

8. The vision-based wafer cassette rapid measurement machine according to claim 7, characterized in that: The mounting plate (22) is fixedly mounted on the top of the first movable seat (19), the first electric slide (23) is fixedly mounted on the side of the mounting plate (22), the second movable seat (24) is fixedly mounted on the slider of the first electric slide (23), the second electric slide (25) is fixedly mounted on the side of the second movable seat (24), and the second camera mount (26) is fixedly mounted on the slider of the second electric slide (25).

9. The vision-based wafer cassette rapid measurement machine according to claim 8, characterized in that: The side vision module includes a third light source (27), a second camera (29), and a second lens (30) fixedly mounted on the second camera (29). The second camera (29) is fixedly mounted on the bottom of the second camera mount (26), and the third light source (27) is fixedly mounted on the second camera mount (26).

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