Adjustable probe support applied to vacuum environment

Abstract

The utility model relates to the technical field of vacuum cavity monitoring, and particularly discloses an adjustable probe support applied to a vacuum environment. The utility model provides a probe auxiliary device used in a vacuum container, a probe is installed on the head of a probe support through a connecting conical head, and vacuum isolation is achieved through threaded connection and radial sealing of a rubber ring. An ISO-F100 flange is welded to the middle section of the probe support body and used for being connected with a corrugated pipe, and a shielding copper pipe is embedded into the probe support body to reduce electromagnetic interference. The main flange plate is connected with the corrugated pipe through an ISO-F100 flange, and the vacuum sealing performance is ensured through an insulating sleeve and a polytetrafluoroethylene sealing gasket; and the adapter is fixed with the connecting piece, is provided with a manual elevator and a linear bearing, and is matched with the guide rod to realize the axial stable linear motion of the probe bracket. And the metal shielding structure at the tail part shields electromagnetic interference through the all-copper inner cavity and protects internal electronic equipment.

Description

TECHNICAL FIELD

[0001] The utility model belongs to vacuum cavity monitoring technical field, more specifically, the utility model relates to a kind of adjustable probe support applied to vacuum environment. BACKGROUND

[0002] In vacuum measurement and experimental equipment, probe system is widely used in the monitoring and measurement of internal parameters of vacuum cavity, however, due to the particularity of vacuum environment, the probe system needs to meet the positioning requirements of high precision and the complex vacuum sealing requirements in design. In addition, there is usually a complex electromagnetic environment inside the vacuum cavity, which may interfere with the measurement signal of the probe, so effective electromagnetic shielding measures need to be taken to ensure the accuracy of the measurement results. The traditional probe mounting system has the problems of insufficient sealing performance, which makes it difficult to maintain the vacuum degree in the vacuum cavity, and imperfect electromagnetic shielding measures, and the interference of external electromagnetic field may have negative effects on internal precision electronic equipment and probe system. Especially in the corrugated pipe design, due to the limited stretching and compression range, the movement range of the probe is limited, which is difficult to meet the demand of larger range measurement.

[0003] In order to solve the above problems, a technical scheme is provided. SUMMARY

[0004] In order to overcome the above-mentioned defects of the prior art, the utility model provides an adjustable probe support applied to vacuum environment, which is used to solve the problems of insufficient sealing performance of traditional probe mounting system, which makes it difficult to maintain the vacuum degree in the vacuum cavity, and imperfect electromagnetic shielding measures, and the interference of external electromagnetic field may have negative effects on internal precision electronic equipment and probe system, to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0006] An adjustable probe support applied to vacuum environment, including bellows, hand elevator, nut, linear bearing, guide rod, main flange, metal shielding tail, connecting piece, shielding box tail cover, probe, probe support, adapter, shielding copper pipe, sealing ring, polytetrafluoroethylene sealing gasket, insulating sleeve, probe connecting conical head is fixed on the head of probe support, there is rubber ring and channel in the head of probe connecting conical head, which is connected with the main body of probe support by screw thread, the rubber ring is sealed radially to isolate vacuum; the middle segment of probe support body is connected with bellows by welding ISO-F100 flange, shielding copper pipe is embedded in the inside of probe support body, and probe support body tail is sleeved into main flange; the front end of main flange is movably connected with bellows through ISO-F100 flange, and the tail end of bellows is connected with connecting piece by screw thread.

[0007] As a further scheme of the utility model, the adapter is fixedly connected with the connecting piece; the adapter is provided with a manual elevator and a linear bearing, and realizes stable linear movement of the main body in the axial direction in cooperation with the guide rod; the adapter is embedded with a copper pipe.

[0008] As a further scheme of the utility model, the metal shielding tail is fixedly connected with the adapter through threads, and a shielding box tail cover is covered to form a closed copper inner cavity.

[0009] The technical effect and advantages of the adjustable probe support applied to a vacuum environment are as follows: the utility model provides a probe auxiliary device used in a vacuum container, the probe is installed on the head of the probe support through a connecting conical head, and realizes vacuum insulation through thread connection and radial sealing of a rubber ring; an ISO-F100 flange is welded in the middle section of the main body of the probe support and used for connecting a bellows, and a shielding copper pipe is embedded in the inside to reduce electromagnetic interference; the main flange plate is connected with the bellows through the ISO-F100 flange, and the vacuum sealing performance is ensured through an insulating sleeve and a polytetrafluoroethylene sealing gasket; the adapter is fixed with the connecting piece, and is provided with a manual elevator and a linear bearing, and realizes stable linear movement of the probe support in the axial direction in cooperation with the guide rod. The metal shielding structure of the tail part shields electromagnetic interference through the full-copper inner cavity, and protects the internal electronic equipment; the main flange plate is fixed in the vacuum cavity, the axial movement of the main body of the probe support and the connecting piece is adjusted through the elevator, the movement range is determined by the stretching and compression of the bellows, the actual displacement range exceeds 10 cm, and the probe can be positioned at different positions in the vacuum cavity to analyze, diagnose and experiment. BRIEF DESCRIPTION OF DRAWINGS

[0010] Figure 1 It is a structural schematic view of the adjustable probe support applied to a vacuum environment.

[0011] Figure 2 It is a front view of the adjustable probe support applied to a vacuum environment.

[0012] Figure 3 It is a front view of the adjustable probe support applied to a vacuum environment.

[0013] In the drawing: 1, bellows; 2, manual elevator; 3, nut; 4, linear bearing; 5, guide rod; 6, main flange plate; 7, metal shielding tail; 8, connecting piece; 9, shielding box tail cover; 10, probe; 11, probe support; 12, adapter; 13, shielding copper pipe; 14, sealing ring; 15, polytetrafluoroethylene sealing gasket; 16, insulating sleeve. DETAILED DESCRIPTION

[0014] The technical solutions in the utility model will be clearly and completely described below with reference to the drawings in the utility model. Obviously, the described technical solutions are only a part of the utility model, rather than the whole. Based on the technical solutions in the utility model, all other technical solutions obtained by the ordinary skilled in the art without creative work belong to the protection scope of the utility model.

[0015] Figure 1 The flowchart of the adjustable probe support applied to the vacuum environment is shown. Figure 1 As shown in the embodiment, the adjustable probe support applied to the vacuum environment comprises a bellows 1, a manual elevator 2, a nut 3, a linear bearing 4, a guide rod 5, a main flange plate 6, a metal shielding tail 7, a connecting piece 8, a shielding box tail cover 9, a probe 10, a probe support 11, an adapter 12, a shielding copper pipe 13, a sealing ring 14, a polytetrafluoroethylene sealing gasket 15 and an insulating sleeve 16. The probe 10 connecting conical head is fixed to the probe support head, and the probe 10 connecting conical head has a rubber ring and a channel in the head. The probe support 11 main body is threadedly connected with the probe support 11 main body, and the rubber ring is radially sealed to isolate the vacuum. The middle segment of the probe support 11 main body is connected with the bellows 1 through the welded ISO-F100 flange, and the probe support 11 main body is embedded with the shielding copper pipe 13. The main flange plate 6 is movably connected with the bellows 1 through the ISO-F100 flange at the front end, and the tail end of the bellows 1 is threadedly connected with the connecting piece 8.

[0016] The probe 10 connecting conical head is located in the probe support head, and is threadedly connected with the probe support 11 main body. The rubber ring is radially sealed to isolate the vacuum. The probe 10 connecting conical head has a rubber ring and a channel in the head. The probe structure can be covered with a flange to cover the rubber ring. The needle passes through the channel, and the flange is tightly screwed with the rubber ring to be flat and sealed to isolate the vacuum. The middle segment of the probe support 11 main body is welded with an ISO-F100 flange for installing the bellows 1, and the tail end is threaded for fixing the connecting piece 8. The probe support 11 main body is embedded with the shielding copper pipe 13. The metal copper can play the role of electromagnetic shielding to reduce the negative influence of electromagnetic interference on electronic equipment and system. The main flange plate 6 is sleeved into the tail end of the probe support 11 main body. The front end of the main flange plate 6 is an ISO-F100 flange, which is correspondingly connected with the bellows 1. The insulating sleeve 16 (rubber) is clamped and sealed to isolate the vacuum. At this time, the main flange plate 6 and the bellows 1 are in a movable state. Thus, the left side of the main flange plate 6 is sealed to isolate the inside of the probe support from the vacuum environment.

[0017] Specifically, the adapter 12 is fixedly connected with the connecting piece 8. The manual elevator 2 and the linear bearing 4 are installed on the adapter 12 to realize the stable linear motion of the main body in the axial direction in cooperation with the guide rod 5. The copper pipe is embedded in the adapter 12 to play the role of electromagnetic shielding.

[0018] Specifically, the metal shielding tail 7 is fixedly connected with the adapter 12 through threads, and the shielding box tail cover 9 is covered to form a closed all-copper inner cavity, which plays a role of preventing magnetic field interference on the electronic equipment inside the support.

[0019] The specific use method of the adjustable probe support is as follows: the DN200 flange in the middle of the main flange plate 6 is used to be fixed to the measured vacuum cavity, and is sealed by a polytetrafluoroethylene sealing gasket 15, and the main flange plate 6 remains stationary. The probe is installed in the conical head inside the probe support 11, the entire probe support is inserted into the vacuum cavity on the left side, and the right side is in the atmosphere. The probe support 11 main body and its connecting parts are driven to perform axial linear motion by shaking the elevator hand wheel outside, and the range of linear motion depends on the stretching and compression distance of the bellows. The actual measurement reaches more than 10 cm, so that the probe can be tested at different positions.

[0020] The specific implementation steps of controlling the connecting parts to perform axial linear motion are as follows: by monitoring the stretching length of the bellows in real time, the relationship between the linear motion range of the probe and the deformation of the bellows 1 is established, the initial length L0 of the bellows, the maximum allowable stretching length L max of the bellows 1, and the maximum allowable compression length L min of the bellows 1 are extracted, the real-time stretching deformation amount ΔL of the bellows is measured by a sensor in real time, the stretching length L cur of the bellows is obtained based on the initial length L0 of the bellows 1 and the real-time stretching deformation amount ΔL of the bellows 1: L cur =L0+ΔL; and it is ensured that the stretching length range of the bellows 1 satisfies L min ≤L cur ≤L max , if the stretching length L cur of the bellows 1 exceeds the stretching length range, an alarm will be issued to remind and stop the motion.

[0021] The linear motion displacement S of the probe is calculated according to the stretching length L cur of the bellows 1 and the initial length L0 of the bellows 1: S=L cur -L0.

[0022] The mounting steps of the adjustable probe support are: checking whether all components are complete, including the bellows 1, the manual elevator 2, the nut 3, the linear bearing 4, the guide rod 5, the main flange plate 6, the metal shielding tail 7, the connecting piece 8, the shielding box tail cover 9, the probe 10, the probe support 11, the adapter 12, the shielding copper pipe 13, the sealing ring 14, the polytetrafluoroethylene sealing gasket 15, the insulating sleeve 16, and confirming that the needle of the probe 10 is not damaged and matches the connecting conical head of the probe support 11. One end of the bellows 1 is connected with the ISO-F100 flange of the middle segment of the main body of the probe support 11 through the ISO-F100 flange, the sealing gasket is ensured to be complete, the screw is tightened, the air tightness is ensured, the other end of the bellows 1 is fixed to the connecting piece 8 through the thread; the probe 10 is fixed inside the connecting conical head of the probe support 11, the needle passes through the channel in the connecting conical head, the flange is pressed against the rubber ring to ensure that the needle is isolated from the vacuum environment, the movement state of the probe 10 is checked to ensure that its position can be accurately positioned through subsequent adjustment; the DN200 flange of the main flange plate 6 is connected with the measured vacuum cavity through the polytetrafluoroethylene sealing gasket 15, the bolts are uniformly tightened to ensure sealing, the main flange plate 6 remains stationary, the left side of the support is inserted into the vacuum cavity, and the right side is in the atmospheric environment; the shielding copper pipe 13 is embedded inside the main body of the probe support 11 and the adapter 12 to form effective electromagnetic shielding, the metal shielding tail 7 is installed, and the shielding box tail cover 9 is covered to form a closed all-copper inner cavity.

[0023] The testing steps of the adjustable probe support are: manually operating the hand wheel of the elevator 2, rotating the elevator screw rod, driving the adapter 12 and the probe support 11 body connected thereto to realize axial linear motion along the guide rod 5; the linear motion range is determined by the stretching and compression of the bellows 1, and the maximum range can reach 10 cm through actual measurement, and the probe 10 is ensured to reach the required position through multiple adjustments; the probe signal test is performed on the target area in the vacuum cavity to ensure that the probe 10 can stably work at different positions, the all-copper shielding structure formed by the internal shielding copper pipe 13 and the external shielding box tail cover 9 effectively isolates external electromagnetic interference to ensure the reliability of the test signal, the probe support is tested for full stroke, the stretching and compression limits of the bellows 1 are checked, and the sealing is ensured within the 10 cm motion range.

[0024] The implementation steps of using the adjustable probe support to insert the probe into the vacuum chamber for analyzing the potential distribution or local conductivity of the material surface are: fixing the sample to be measured on the sample table in the vacuum chamber, adjusting the hand wheel of the manual elevator 2, moving the probe 10 to the surface of the sample, and keeping a small gap between the probe head 10 and the sample; measuring the potential distribution or local conductivity of the material surface by connecting external electronic equipment, recording test data; adjusting the position of the probe 10, repeatedly measuring the parameters of different points, and constructing the conductivity distribution map of the sample surface.

[0025] The step of monitoring the thickness and deposition uniformity of the thin film in real time by the probe in the vacuum chamber is: starting the thin film deposition device in the vacuum chamber, keeping the vacuum environment stable, inserting the probe into the thin film growth area through the adjustable probe support, and recording the growth of the thin film thickness in real time by measuring the change of current or capacitance, moving the probe 10 position, monitoring the thickness of the thin film in different areas, and evaluating the deposition uniformity.

[0026] The probe 10 is used to diagnose possible leakage points in the vacuum system, the vacuum pump is started, the vacuum chamber is vacuumized, and the pressure value is maintained, the probe is inserted into the vacuum chamber, the conductivity or pressure sensor of the probe is moved along each area in the vacuum chamber, if local pressure anomaly is detected, the possible leakage point is located, the data is recorded and the leakage point is repaired, and then the probe 10 is used again to confirm the repair effect.

[0027] The utility model provides a kind of probe auxiliary device used in vacuum container, probe is installed in probe support head by connecting conical head, realizes vacuum insulation using thread connection and radial sealing of rubber ring;ISO-F100 flange is welded in the middle segment of probe support main body for connecting bellow, shielding copper pipe is embedded in the inside to reduce electromagnetic interference;Main flange disc is connected with bellow by ISO-F100 flange, and vacuum sealing performance is ensured using insulating sleeve and polytetrafluoroethylene sealing pad;Adapter and connecting piece are fixed, and install hand elevator and linear bearing, realize the axial stable linear motion of probe support with cooperation guide rod.The electromagnetic interference of tail metal shielding structure is shielded by full copper inner cavity, and internal electronic equipment is protected;Main flange disc is fixed in vacuum cavity, and the axial motion of probe support main body and its connecting piece is adjusted by elevator, and the motion range is determined by the stretching and compression of bellow, and the actual measurement displacement range exceeds 10cm, and probe can be flexibly positioned in different positions in vacuum cavity for analysis, diagnosis and experiment.

[0028] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

[0029] Finally: the above is only the preferred scheme of the utility model, and is not used to limit the utility model, any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. An adjustable probe holder for use in a vacuum environment, comprising a bellows (1), a manual lift (2), a nut (3), a linear bearing (4), a guide rod (5), a main flange (6), a metal shielding tail (7), a connector (8), a shielding box tail cover (9), a probe (10), a probe holder (11), an adapter (12), a shielding copper tube (13), a sealing ring (14), a polytetrafluoroethylene sealing gasket (15), and an insulating sleeve (16), characterized in that, The probe (10) is connected to the cone head and fixed to the head of the probe bracket. The cone head of the probe (10) has a rubber ring and a channel inside, which is threaded to the main body of the probe bracket (11). The rubber ring is radially sealed to isolate the vacuum. The middle section of the main body of the probe bracket (11) is connected to the bellows (1) by welding an ISO-F100 flange. The shielded copper tube (13) is embedded inside the main body of the probe bracket (11). The tail of the main body of the probe bracket (11) is fitted with the main flange (6).

2. The adjustable probe holder for use in a vacuum environment according to claim 1, characterized in that, The adapter (12) is fixedly connected to the connector (8).

3. The adjustable probe holder for use in a vacuum environment according to claim 2, characterized in that, The adapter (12) is equipped with a manual lift (2) and a linear bearing (4), which, together with the guide rod (5), enable the main body to move in a stable linear direction.

4. The adjustable probe holder for use in a vacuum environment according to claim 3, characterized in that, The adapter (12) has a copper tube embedded inside.

5. The adjustable probe holder for use in a vacuum environment according to claim 1, characterized in that, The metal shielding tail (7) is fixedly connected to the adapter (12) by threads, and the shielding box tail cover (9) is covered to form a closed all-copper inner cavity.

6. The adjustable probe holder for use in a vacuum environment according to claim 1, characterized in that, The front end of the main flange (6) is movably connected to the bellows (1) via an ISO-F100 flange.

7. The adjustable probe holder for use in a vacuum environment according to claim 1, characterized in that, The bellows (1) is threaded to the connector (8) at its tail end.

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